| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/19/2007 | CN101039993A Process for plasma coating |
| 09/19/2007 | CN101039801A Gas barrier laminated film and laminated material using it |
| 09/19/2007 | CN101039544A Plasma processor with electrode simultaneously responsive to plural frequencies |
| 09/19/2007 | CN101038943A Method for preparation of a-b orientated ZnO nanometer linear array |
| 09/19/2007 | CN101038859A Plasma processing apparatus and electrode used therein |
| 09/19/2007 | CN101037768A Method and device for plating diamond like film on inner-outer wall of quartz round tube |
| 09/19/2007 | CN101037767A Diamond film formation method and film formation jig thereof |
| 09/19/2007 | CN101037566A Wear resistant low friction coating composition, coated components, and method for coating thereof |
| 09/19/2007 | CN100338977C Gel and powder making |
| 09/19/2007 | CN100338734C Susceptor, vapor phase growth device, device and method of manufacturing epitaxial wafer, and epitaxial wafer |
| 09/19/2007 | CN100338733C Group III nitride semiconductor crystal, production method thereof and group III nitride semiconductor epitaxial wafer |
| 09/19/2007 | CN100337881C DLC film coated plastic container, and device and method for manufacturing the plastic container |
| 09/18/2007 | US7271111 Shadow mask deposition of materials using reconfigurable shadow masks |
| 09/18/2007 | US7271096 Method for improved deposition of dielectric material |
| 09/18/2007 | US7271082 Method of manufacturing a semiconductor device |
| 09/18/2007 | US7271077 Deposition methods with time spaced and time abutting precursor pulses |
| 09/18/2007 | US7271071 Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms |
| 09/18/2007 | US7271038 Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby |
| 09/18/2007 | US7270851 depositing monomer from the vapor phase onto the surface of the aerogel substrate under deposition conditions effective to produce a vapor pressure sufficient to cause the vapor phase monomer to penetrate into the bubble matrix and deposit onto the surface of the aerogel substrate, polymerizing |
| 09/18/2007 | US7270850 Mesoporous permeation layers for use on active electronic matrix devices |
| 09/18/2007 | US7270849 Organic siloxane copolymer film, method and deposition apparatus for producing same, and semiconductor device using such copolymer film |
| 09/18/2007 | US7270848 depositing a Ru metal layer on a patterned substrate; thermal chemical vapor deposition using process gas containing Ru3(CO)12 precursor vapor and a CO gas |
| 09/18/2007 | US7270724 Scanning plasma reactor |
| 09/18/2007 | US7270715 Chemical vapor deposition apparatus |
| 09/18/2007 | US7270713 Tunable gas distribution plate assembly |
| 09/18/2007 | US7270709 Method and apparatus of generating PDMAT precursor |
| 09/18/2007 | US7270708 Susceptor, vapor phase growth apparatus, epitaxial wafer manufacturing apparatus, epitaxial wafer manufacturing method, and epitaxial wafer |
| 09/13/2007 | WO2007103812A1 Method for low temperature production of nano-structured iron oxide coatings |
| 09/13/2007 | WO2007103598A2 Silicon photovoltaic cell junction formed from thin film doping source |
| 09/13/2007 | WO2007102923A2 Methods and arrangement for implementing highly efficient plasma traps |
| 09/13/2007 | WO2007102444A1 Method for production of diamond electrodes |
| 09/13/2007 | WO2007102333A1 Methods of depositing ruthenium film and memory medium readable by computer |
| 09/13/2007 | WO2007102288A1 Method of making hcd gas harmless and apparatus therefor |
| 09/13/2007 | WO2007101465A1 Method for coating a blade and blade of a gas turbine |
| 09/13/2007 | WO2006092550A8 Trap device |
| 09/13/2007 | WO2005108641A3 Multi-workpiece processing chamber |
| 09/13/2007 | US20070212811 Low temperature CVD process with selected stress of the CVD layer on CMOS devices |
| 09/13/2007 | US20070212543 Coloured diamond |
| 09/13/2007 | US20070212497 Making a hard disk drive platter of glassy metal layer (zirconium, titanium, nickel, copper, beryllium) onaluminum-alloy substrate and adding a strengthing layer (siicon nitride) and a magnetic layer; injection molding; central aperture; faster rotation by a spindle motor; cost/energy efficiecency |
| 09/13/2007 | US20070212487 Effect pigments based on coated glass flakes |
| 09/13/2007 | US20070212486 Plasma Enhanced Chemical Vapor Deposition of Metal Oxide |
| 09/13/2007 | US20070212485 Gasification monitor, method for detecting mist, film forming method and film forming apparatus |
| 09/13/2007 | US20070212484 Exhaust apparatus configured to reduce particle contamination in a deposition system |
| 09/13/2007 | US20070212288 Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
| 09/13/2007 | US20070210431 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 09/13/2007 | US20070209686 Apparatus for cleaning chamber using gas separation type showerhead |
| 09/13/2007 | US20070209677 Self-Cleaning Catalytic Chemical Vapor Deposition Apparatus And Cleaning Method Thereof |
| 09/13/2007 | US20070209593 Semiconductor wafer cooling device |
| 09/13/2007 | US20070209592 Low-pressure process apparatus |
| 09/13/2007 | US20070209591 Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method |
| 09/13/2007 | US20070209590 Sealing device and method for a processing system |
| 09/13/2007 | US20070209589 Slab cross flow cvd reactor |
| 09/13/2007 | US20070209588 Exhaust system for a vacuum processing system |
| 09/13/2007 | US20070209533 Metallic Thin Film Chip Producing Method and Metallic Thin Film Chip Producing Apparatus |
| 09/13/2007 | DE102006010929A1 Coating process for gas turbine components involves closing up openings in components through plastics closures which are then removed after coating the component with the coating material |
| 09/13/2007 | DE102005050374B4 Gleitschicht mit verschleißmindernden Ausscheidungen und Verfahren zur Herstellung einer solchen Gleitschicht Sliding layer with wear-reducing secretions and method for producing such a sliding layer |
| 09/13/2007 | DE102005013532B4 EUV-Lithographiesystem und Retikelhalter zum Lösen von Retikeln in einer vakuumisolierten Umgebung EUV lithography system and reticle for solving reticles in a vacuum-insulated environment |
| 09/13/2007 | CA2633206A1 Method for coating a blade and blade of a gas turbine |
| 09/12/2007 | EP1832364A1 Surface coating cutter |
| 09/12/2007 | EP1832351A2 Low dielectric materials and methods for making same |
| 09/12/2007 | EP1832340A1 Process and device for partial surface treatment of a component by low pressure plasma generated in a vacuum chamber |
| 09/12/2007 | EP1831437A1 Cvd reactor comprising an rf-heated treatment chamber |
| 09/12/2007 | EP1831429A2 Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate |
| 09/12/2007 | EP1831425A2 Method and apparatus for processing metal bearing gases |
| 09/12/2007 | EP1831424A1 Ultra hydrophilic ti-o-c based nano film and fabrication method thereof |
| 09/12/2007 | EP1831422A2 Device for the tempered storage of a container |
| 09/12/2007 | EP1831408A2 Composition and process for enhanced properties of ferrous components |
| 09/12/2007 | EP0996765B1 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer |
| 09/12/2007 | EP0953064B1 Reagent supply vessel for chemical vapor deposition |
| 09/12/2007 | CN101036420A Microwave plasma processing apparatus |
| 09/12/2007 | CN101036219A 等离子体成膜方法和等离子体成膜装置 The plasma film forming method and a plasma film forming apparatus |
| 09/12/2007 | CN101036215A Chemical vapor deposition reactor |
| 09/12/2007 | CN101035933A Nitride semiconductor single crystal including ga, method for manufacturing the same, and substrate and device using the crystal |
| 09/12/2007 | CN101035923A Method of making vapour deposited oxygen-scavenging particles |
| 09/12/2007 | CN101033544A Continuous synthesis method for rare earth ion nitriding-rare earth ion plating composite coating |
| 09/12/2007 | CN101033541A Method of forming siliceous film and of reducing particle number |
| 09/12/2007 | CN101033540A Apparatus for cleaning chamber using gas separation type showerhead |
| 09/12/2007 | CN101033537A Vaporizer delivery ampoule |
| 09/12/2007 | CN100337348C Method for preparing negative pole of lithium secondary cell |
| 09/12/2007 | CN100337313C Plasma processing device and baffle plate thereof |
| 09/12/2007 | CN100337310C Low-resistance n type semiconductor diamond and process for producing the same |
| 09/12/2007 | CN100336936C Process for reducing particles in low pressure chemical vapor deposition equipment |
| 09/12/2007 | CN100336586C Submerged plasma generator, method of generating plasma in liquid and method of decomposing toxic substance with plasma in liquid |
| 09/11/2007 | US7269343 Heating configuration for use in thermal processing chambers |
| 09/11/2007 | US7268365 Porous solid of copper, silicon wafers, or silicon dioxide coated with a barrier layer with a complex of a substituted diimine or diamine propyl group |
| 09/11/2007 | US7268322 Semiconductor heating apparatus |
| 09/11/2007 | US7268321 Wafer holder and semiconductor manufacturing apparatus |
| 09/11/2007 | US7268089 Method for forming PE-TEOS layer of semiconductor integrated circuit device |
| 09/11/2007 | US7268047 Semiconductor device and method for manufacturing the same |
| 09/11/2007 | US7268035 Methods of forming semiconductor constructions comprising cerium oxide and titanium oxide |
| 09/11/2007 | US7267848 Method of fabricating a protective film by use of vacuum ultraviolet rays |
| 09/11/2007 | US7267843 Textile fabric and yarn composed of synthetic fibers, preparation thereof and use thereof |
| 09/11/2007 | US7267842 Method for removing titanium dioxide deposits from a reactor |
| 09/11/2007 | US7267741 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
| 09/11/2007 | US7267731 close to the designed shape using a focused charged-particle beam by reducing the effects of etching and deposition which vary according to various conditions when a processing work is performed |
| 09/11/2007 | US7267725 Thin-film deposition apparatus |
| 09/11/2007 | US7267724 Thin-film disposition apparatus |
| 09/11/2007 | US7267701 TiBN coating |
| 09/11/2007 | US7267132 Methods for removing silicon and silicon-nitride contamination layers from deposition tubes |
| 09/11/2007 | CA2206679C Plasma processor for large workpieces |