| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/09/2007 | US20070184179 Methods and apparatus to monitor a process of depositing a constituent of a multi-constituent gas during production of a composite brake disc |
| 08/09/2007 | US20070181255 Gas supply system, substrate processing apparatus and gas supply method |
| 08/09/2007 | US20070181254 Plasma processing apparatus with resonance countermeasure function |
| 08/09/2007 | US20070181146 Plasma cvd apparatus and dry cleaning method of the same |
| 08/09/2007 | US20070181066 Baffled liner cover |
| 08/09/2007 | US20070181065 Etch resistant heater and assembly thereof |
| 08/09/2007 | US20070181064 Plasma source assembly and method of manufacture |
| 08/09/2007 | US20070181063 Method for plasma ignition |
| 08/09/2007 | US20070181062 Semiconductor device manufacturing apparatus including temperature measuring unit |
| 08/09/2007 | US20070181057 Epitaxial deposition process and apparatus |
| 08/09/2007 | DE102006005765A1 Verbesserung der Reinigung von Lackapplikationsgeräten Improving the cleaning of paint application equipment |
| 08/09/2007 | DE102006005401A1 Shaft milling tool, is formed by producing a blank from a hard metal, and applying a hard material layer |
| 08/09/2007 | DE102005032860B4 Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung A coated hard material body, and methods for their preparation |
| 08/08/2007 | EP1816489A2 Optical article and manufacturing method of the same |
| 08/08/2007 | EP1816233A2 Method for manufacturing a layer with a predefined layer thickness profile |
| 08/08/2007 | EP1815505A2 Tensile and compressive stressed materials for semiconductors |
| 08/08/2007 | EP1815493A1 Vacuum processing chamber for very large area substrates |
| 08/08/2007 | EP1815043A2 Method for deposition of metal layers from metal carbonyl precursors |
| 08/08/2007 | EP1815042A2 Diamond coated surfaces |
| 08/08/2007 | EP1815041A2 Wafer fab |
| 08/08/2007 | EP1814892A2 Organometallic compounds and processes for preparation thereof |
| 08/08/2007 | EP1643001A4 High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and device for carrying out said method |
| 08/08/2007 | EP1366647A4 Apparatus for generating low temperature plasma at atmospheric pressure |
| 08/08/2007 | EP1044074B8 Photoresist coating process control with solvent vapor sensor |
| 08/08/2007 | EP1028457B1 Method of plasma processing |
| 08/08/2007 | CN2932338Y Plasma chemical vapor phase deposition diamond coating temperature gauge |
| 08/08/2007 | CN2931495Y PECVD device for manufacturing amorphous silicon solar cell |
| 08/08/2007 | CN1331376C Conductive sheet, product using the same, and manufacturing method thereof |
| 08/08/2007 | CN1331214C Manufacturing method of semiconductor device |
| 08/08/2007 | CN1331200C Semiconductor device and its conductive structure forming process |
| 08/08/2007 | CN1331199C UV prtreatment process for ultra-thin oxynitride for formation of silicon nitridefilms |
| 08/08/2007 | CN1331192C 处理系统 Processing System |
| 08/08/2007 | CN1330800C Acicular silicon crystal and process for producing the same |
| 08/08/2007 | CN101015003A Magnetic recording medium and production process thereof |
| 08/08/2007 | CN101015002A Magnetic recording media and production method therefor |
| 08/08/2007 | CN101014903A Metallic mold for nano-imprint, forming method of nano-pattern, and resin molding |
| 08/08/2007 | CN101014730A System and method for forming multi-component dielectric films |
| 08/08/2007 | CN101014547A Process for the deposition of aluminium oxide coatings |
| 08/08/2007 | CN101013669A Fabrication method of thin film |
| 08/08/2007 | CN101013660A Gas supply device, substrate processing apparatus and gas supply method |
| 08/08/2007 | CN101012551A Chip bench of plasma reinforced thin film deposition device |
| 08/08/2007 | CN101012550A Method for preparing semiconductor material on diamond surface by using arc discharge plasma chemical gas phase precipitation method |
| 08/08/2007 | CN101012549A Chip carrier in silicon chip production and pothook on the carrier |
| 08/08/2007 | CN101012548A Chemical vapor deposition apparatus for flat display |
| 08/08/2007 | CN101012547A Method and equipment for plating wolfram, chromium and molybdenum on diamond and cubic boron nitride particle surface |
| 08/07/2007 | US7253122 Systems and methods for forming metal oxides using metal diketonates and/or ketoimines |
| 08/07/2007 | US7253107 Pressure control system |
| 08/07/2007 | US7252860 Chemical vapor infiltration (CVI) with a silicon carbide precursor in carrier gas on carbon fiber preforms or silicon carbide fiber preforms, adjusting pressure and temperature |
| 08/07/2007 | US7252859 Organic materials for an evaporation source |
| 08/07/2007 | US7252858 Flowing exhaust gas into enclosure; forming film on removable substrate by chemical vapor deposition |
| 08/07/2007 | US7252745 Filtered cathodic arc deposition method and apparatus |
| 08/07/2007 | US7252738 Apparatus for reducing polymer deposition on a substrate and substrate support |
| 08/07/2007 | US7252737 Pedestal with integral shield |
| 08/07/2007 | US7252716 Gas injection apparatus for semiconductor processing system |
| 08/07/2007 | US7252684 Ceramic in replacement components |
| 08/07/2007 | CA2306568C Deposition of coatings using an atmospheric pressure plasma jet |
| 08/02/2007 | WO2007087196A2 Advanced ceramic heater for substrate processing |
| 08/02/2007 | WO2007086393A1 Substrate processing system |
| 08/02/2007 | WO2007085928A2 Multiple precursor dispensing apparatus |
| 08/02/2007 | WO2007085494A1 Thin-film multilayer structure, component comprising said structure and its method of deposition |
| 08/02/2007 | WO2007085328A2 Nanocomposite materials in a layer of a sliding bearing |
| 08/02/2007 | WO2007085322A1 Process for producing a silicon film on a substrate surface by vapor deposition |
| 08/02/2007 | WO2006062660A3 High purity granular silicon and method of manufacturing the same |
| 08/02/2007 | US20070178669 Method of manufacturing semiconductor device and apparatus for processing substrate |
| 08/02/2007 | US20070178305 Methods for use of fluorescent nanoparticles to determine free volume and to detect and deliver materials to repair cracks in polymers and polymer composites |
| 08/02/2007 | US20070178301 Antisoiling dlc layer |
| 08/02/2007 | US20070178265 Synthetic resin containers with high gas-barrier property |
| 08/02/2007 | US20070178235 Thin film-forming material and method for producing thin film |
| 08/02/2007 | US20070178234 Method of cleaning surface of semiconductor substrate, method of manufacturing thin film, method of manufacturing semiconductor device, and semiconductor device |
| 08/02/2007 | US20070178233 Coating method |
| 08/02/2007 | US20070178230 Gas distributor for coating a lens, and corresponding method, lens and coating device |
| 08/02/2007 | US20070178229 Systems and methods for forming magnetic nanocomposite materials |
| 08/02/2007 | US20070178225 Vapor deposition crucible, thin-film forming apparatus comprising the same, and method of producing display device |
| 08/02/2007 | US20070176534 Film formation source, vacuum film formation apparatus, method of manufacturing organic EL device, and organic EL device |
| 08/02/2007 | US20070175856 Notch-Free Etching of High Aspect SOI Structures Using A Time Division Multiplex Process and RF Bias Modulation |
| 08/02/2007 | US20070175588 High throughput plasma treatment system |
| 08/02/2007 | US20070175586 Plasma Processing Apparatus And Plasma Processing Method |
| 08/02/2007 | US20070175495 Apparatus for Treating Plasma and Method for Cleaning the Same |
| 08/02/2007 | US20070175397 Method for packing solid organometallic compound and packed container |
| 08/02/2007 | US20070175396 Film-forming apparatus |
| 08/02/2007 | US20070175395 Semiconductor device manufacturing equipment including a vacuum apparatus and a method of operating the same |
| 08/02/2007 | US20070175394 Film forming apparatus |
| 08/02/2007 | US20070175393 Substrate processing apparatus, substrate processing method, and storage medium storing program for implementing the method |
| 08/02/2007 | US20070175392 Multiple precursor dispensing apparatus |
| 08/02/2007 | US20070175391 Gas supply system, substrate processing apparatus and gas supply method |
| 08/02/2007 | US20070175188 Exhaust gas collection device |
| 08/02/2007 | DE102004057234B4 Substrathalter sowie Substrathalteeinrichtung Substrate holder and substrate holder |
| 08/01/2007 | EP1812965A2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
| 08/01/2007 | EP1812959A2 Thermal management of dielectric components in a plasma discharge device |
| 08/01/2007 | EP1812618A2 Cvd doped structures |
| 08/01/2007 | EP1123423B1 High rate silicon deposition method at low pressures |
| 08/01/2007 | CN2929957Y Improved structure of semiconductor machine |
| 08/01/2007 | CN1330219C RF plasma reactor and method for manufacturing the substrate |
| 08/01/2007 | CN1329962C Flat panel display manufacturing apparatus |
| 08/01/2007 | CN1329553C Process for preparing large area high quality anti-crack on diamant film |
| 08/01/2007 | CN101010783A Elimination of flow and pressure gradients in low species utilization processes |
| 08/01/2007 | CN101010782A Method of vapor-phase growing and vapor-phase growing apparatus for AlGaN |
| 08/01/2007 | CN101010448A Constitutional member for semiconductor processing apparatus and method for producing same |
| 08/01/2007 | CN101010447A Substrate processing apparatus and semiconductor device manufacturing method |
| 08/01/2007 | CN101010446A Closed loop clean gas methods and systems |