| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/06/2007 | WO2007140426A2 Process chamber for dielectric gapfill |
| 12/06/2007 | WO2007140421A2 Process chamber for dielectric gapfill |
| 12/06/2007 | WO2007140377A2 A novel deposition-plasma cure cycle process to enhance film quality of silicon dioxide |
| 12/06/2007 | WO2007139379A1 Method and apparatus for deposition using pulsed atmospheric pressure glow discharge |
| 12/06/2007 | WO2007139159A1 Device for supplying organic metal compound |
| 12/06/2007 | WO2007139142A1 Plasma cvd method, method for forming silicon nitride film, method for manufacturing semiconductor device and plasma cvd method |
| 12/06/2007 | WO2007139140A1 Plasma cvd method, method for forming silicon nitride film and method for manufacturing semiconductor device |
| 12/06/2007 | WO2007139041A1 Method for forming metal compound layer, method for manufacturing semiconductor device, and apparatus for forming metal compound layer |
| 12/06/2007 | WO2007139015A1 Method for film formation, mold, and method for manufacturing mold |
| 12/06/2007 | WO2007138837A1 Production method of gas barrier resin substrate and production system of gas barrier resin substrate |
| 12/06/2007 | WO2007138439A1 System and method for delivery of precursor material |
| 12/06/2007 | WO2007137890A1 Method and device for treating the surfaces of containers and objects |
| 12/06/2007 | WO2007103598A3 Silicon photovoltaic cell junction formed from thin film doping source |
| 12/06/2007 | WO2007037955A3 Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof |
| 12/06/2007 | WO2007016013A3 Unique passivation technique for a cvd blocker plate to prevent particle formation |
| 12/06/2007 | WO2006137852A3 Apparatus and methods for synthesis of large size batches of carbon nanostructures |
| 12/06/2007 | US20070281481 Controlled growth of gallium nitride nanostructures |
| 12/06/2007 | US20070281478 Plasma processing method and apparatus |
| 12/06/2007 | US20070281448 Novel deposition-plasma cure cycle process to enhance film quality of silicon dioxide |
| 12/06/2007 | US20070281447 Method of loading and/or unloading wafer in semiconductor manufacturing apparatus |
| 12/06/2007 | US20070281183 Film formation method, die, and method of manufacturing the same |
| 12/06/2007 | US20070281109 Multilayer system with protecting layer system and production method |
| 12/06/2007 | US20070281108 Process for Plasma Coating |
| 12/06/2007 | US20070281090 System architecture and method for solar panel formation |
| 12/06/2007 | US20070281089 Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
| 12/06/2007 | US20070281088 Low plasticity burnishing of coated titanium parts |
| 12/06/2007 | US20070281087 Catalyst for the Growth of Carbon Single-Walled Nanotubes |
| 12/06/2007 | US20070281086 Apparatus and method for producing carbon nanotubes |
| 12/06/2007 | US20070281085 Multi-Workpiece Processing Chamber |
| 12/06/2007 | US20070281084 Apparatus and method for depositing layer on substrate |
| 12/06/2007 | US20070281083 Elimination of first wafer effect for pecvd films |
| 12/06/2007 | US20070281082 Flash Heating in Atomic Layer Deposition |
| 12/06/2007 | US20070281075 Optical method to monitor nano thin-film surface structure and thickness thereof |
| 12/06/2007 | US20070281074 Methods for controlling plasma spray coating porosity on an article and articles manufactured therefrom |
| 12/06/2007 | US20070280848 Methods Of Forming Alpha And Beta Tantalum Films With Controlled And New Microstructures |
| 12/06/2007 | US20070277736 Method for manufacturing substrate, and vapor deposition apparatus used for the same |
| 12/06/2007 | US20070277735 Systems for Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas |
| 12/06/2007 | US20070277734 Process chamber for dielectric gapfill |
| 12/06/2007 | DE112005003322T5 Zusammensetzung, die eine Siloxanverbindung und eine Phenolverbindung enthält Composition containing a siloxane compound and a phenol compound |
| 12/06/2007 | DE102006026253A1 Beschichteter Körper und Verfahren zu seiner Herstellung Coated body and process for its preparation |
| 12/06/2007 | DE102006025751A1 Verfahren zur Abdichtung einer Vakuumkammer und Schleuseneinrichtung für eine Vakuumkammer A method of sealing a vacuum chamber and lock device for a vacuum chamber |
| 12/06/2007 | DE102006024050A1 Device for applying coating on surface of workpiece, comprises plasma generator for producing plasma in a plasma chamber, arrangement for producing gas flow through plasma chamber, and device for supplying and inserting coating material |
| 12/06/2007 | DE102005049266B4 Vorrichtung und Verfahren zur Plasmabehandlung von Objekten Apparatus and method for plasma treatment of objects |
| 12/05/2007 | EP1862788A1 Evaporator for organic material, coating installation, and method for use thereof |
| 12/05/2007 | EP1862567A2 Method of sealing a vacuum chamber and sluice device for a vacuum chamber |
| 12/05/2007 | EP1862566A1 Diethylsilane as a silicone source in the deposition of metal silicate films |
| 12/05/2007 | EP1861869A1 Vapor phase treatment of dielectric materials |
| 12/05/2007 | EP1861520A2 Gas inlet element for a cvd reactor |
| 12/05/2007 | EP1861519A2 Method of forming silicon oxide containing films |
| 12/05/2007 | EP1861518A2 Coils utilized in vapor deposition applications and methods of production |
| 12/05/2007 | EP1581667B1 Support system for a treatment apparatus |
| 12/05/2007 | EP1204490A4 Coating method on the inner walls of the reaction tubes in a hydrocarbon pyrolysis reactor |
| 12/05/2007 | CN101084571A Magnetic fluid sealing unit for semiconductor wafer vertical heat treating apparatus |
| 12/05/2007 | CN101084327A Film-forming method and recording medium |
| 12/05/2007 | CN101084326A Substrate-to-mask alignment and securing system |
| 12/05/2007 | CN101084229A Copper (i) compounds useful as deposition precursors of copper thin films |
| 12/05/2007 | CN101083289A Method for processing surface oxidation film of mercury cadmium telluride film material |
| 12/05/2007 | CN101082131A Method for plating diamond film on surface of stainless steel metal |
| 12/05/2007 | CN101082125A Apparatus for thermal and plasma enhanced vapor deposition and method of operating |
| 12/05/2007 | CN101082124A Method for developing m-face or a-face ZnO film by metal organic chemical vapour deposition |
| 12/05/2007 | CN101081586A Method for making gold photo |
| 12/05/2007 | CN100353517C 基片支撑件 Substrate support member |
| 12/05/2007 | CN100353493C Heater module for semiconductor manufacturing device |
| 12/05/2007 | CN100353186C Optical and optoelectronic articles |
| 12/05/2007 | CN100352968C Engine piston-pin sliding structure |
| 12/04/2007 | US7305275 Material supply system in semiconductor device manufacturing plant |
| 12/04/2007 | US7304435 Device for confinement of a plasma within a volume |
| 12/04/2007 | US7304004 System and method for forming a gate dielectric |
| 12/04/2007 | US7304003 Oxidizing method and oxidizing unit for object to be processed |
| 12/04/2007 | US7303998 Plasma processing method |
| 12/04/2007 | US7303991 Atomic layer deposition methods |
| 12/04/2007 | US7303940 Semiconductor component having at least one organic semiconductor layer and method for fabricating the same |
| 12/04/2007 | US7303790 Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained |
| 12/04/2007 | US7303789 Methods for producing thin films on substrates by plasma CVD |
| 12/04/2007 | US7303782 Extrusion die coating method |
| 12/04/2007 | US7303635 Deposition mask, method for manufacturing display unit using it, and display unit |
| 12/04/2007 | US7303141 Gas supplying apparatus |
| 12/04/2007 | US7302910 Plasma apparatus and production method thereof |
| 12/04/2007 | CA2372033C Method for producing an anhydrite iii or .alpha. based hydraulic bonding agent |
| 12/04/2007 | CA2175041C Chemical vapour infiltration process of a pyrocarbon matrix within a porous substrate with creation of a temperature gradient in the substrate |
| 11/29/2007 | WO2007136777A2 Wear resistant coating |
| 11/29/2007 | WO2007136209A1 Methods for preparation of high-purity polysilicon rods using a metallic core means |
| 11/29/2007 | WO2007136131A1 Amorphous carbon film, method for forming amorphous carbon film, electroconductive member comprising amorphous carbon film, and separator for fuel battery |
| 11/29/2007 | WO2007136023A1 Wafer holder, method for producing the same and semiconductor production apparatus |
| 11/29/2007 | WO2007135832A1 Superconducting thin film material and method for producing the same |
| 11/29/2007 | WO2007115029A3 Method of forming mixed rare earth oxide and mixed rare earth aluminate films by atomic layer deposition |
| 11/29/2007 | WO2007092611A3 Disposable liners for etch chambers and etch chamber components |
| 11/29/2007 | WO2006132878A3 Substrate support |
| 11/29/2007 | WO2006053218A3 Pressure control system in a photovoltaic substrate deposition |
| 11/29/2007 | WO2006042074A3 Multi-zone atomic layer deposition apparatus and method |
| 11/29/2007 | WO2006039133A3 Cluster tool process chamber having integrated high pressure and vacuum chambers |
| 11/29/2007 | US20070275569 Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices |
| 11/29/2007 | US20070275568 UV stabilizer, Beige pigment, anti-block, low density polyethylene, polypropylene, and anti-slip butylene-ethylene-styrene block terpolymer; KRATON.RTM. MD6649; low in cost and helps prevent water from penetrating the primary roofing material; anti-skid surface upon which an individual may safely walk |
| 11/29/2007 | US20070275181 Barrier films for plastic substrates fabricated by atomic layer deposition |
| 11/29/2007 | US20070275177 Ceramic foam-filled sandwich panels and method |
| 11/29/2007 | US20070275166 Process for producing silicon oxide films from organoaminosilane precursors |
| 11/29/2007 | US20070275164 Vapour Deposition Method |
| 11/29/2007 | US20070275157 Apparatus and method for measuring widthwise ejection uniformity of slit nozzle |
| 11/29/2007 | US20070272156 Linear evaporator for manufacturing organic light emitting device using numerous crucibles |
| 11/29/2007 | US20070272154 Shower Head and Film-Forming Device Using the Same |