| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/17/2008 | US20080169279 Heating device, coating and developing system, heating method and storage medium |
| 07/17/2008 | US20080168947 Gas-purged vacuum valve |
| 07/17/2008 | US20080168946 Liquid supplying unit and method, facility for treating substrates with the unit, and method for treating substrates |
| 07/17/2008 | US20080168945 Plasma generating apparatus |
| 07/17/2008 | DE112006002384T5 Präkursor-Gas-Zuführung mit Träger-Gasmischung Precursor gas supply with carrier-gas mixture |
| 07/16/2008 | EP1943371A1 Method and device for coating a polymer film with an oxide layer |
| 07/16/2008 | EP1943094A2 Apparatus and method for making fullerene nanotube forests, films, threads and composite structures |
| 07/16/2008 | EP1943008A2 Method of preventing analyte alteration in diagnostic apparatuses involving contact of liquid and electrode |
| 07/16/2008 | EP1358363B1 Diamond coatings on reactor wall and method of manufacturing thereof |
| 07/16/2008 | CN101223631A Gas treatment apparatus |
| 07/16/2008 | CN101223299A Tectorial membrane forming device for forming tectorial membrane on internal surface of container, production method for internal surface tectorial membrane container |
| 07/16/2008 | CN101223298A Deposition method containing ruthenium membrane |
| 07/16/2008 | CN101223297A Apparatus for the PECVD deposition of an inner barrier layer on a container, comprising an optical plasma analysis device |
| 07/16/2008 | CN101223000A Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system |
| 07/16/2008 | CN101222041A Nano combination electrode material Li3N/Si used for lithium ion battery and its preparation method |
| 07/16/2008 | CN101222021A Formulation and method for depositing a material on a substrate |
| 07/16/2008 | CN101221896A Substrate support bushing |
| 07/16/2008 | CN101220485A Method for manufacturing fluorine carbon anode chemical vapor deposition pyrolytic carbon polarization resistant coating |
| 07/16/2008 | CN101220470A Method for improving film stress and method for forming high stress layer |
| 07/16/2008 | CN101220469A Method and apparatus for plasma enhanced chemical vapor deposition |
| 07/16/2008 | CN101220468A Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell |
| 07/16/2008 | CN101220467A Method for producing alta-mud load TiO2 catalyst with metal organic chemical vapor deposition |
| 07/16/2008 | CN101220466A Method for manufacturing gallium nitride nano-wire with tungsten auxiliary heat anneal |
| 07/16/2008 | CN101220465A Cyclic chemical vapor deposition of metal-silicon containing films |
| 07/16/2008 | CN101220464A High heat-resistance hollow out substrate working platform capable of multiple-surface depositing CVD diamond film |
| 07/16/2008 | CN101220463A Process for chemical vapor deposition of materials with via filling capability and structure formed thereby |
| 07/16/2008 | CN101220462A Gradient method preprocessing technique for depositing CVD diamond film on hard metal surface |
| 07/16/2008 | CN101220461A Method for cleaning reaction chamber of semiconductor manufacturing device |
| 07/16/2008 | CN101219861A Photocatalytically active coated substrates |
| 07/16/2008 | CN101219777A Method of forming oxide based nano structures |
| 07/16/2008 | CN100403198C Method and apparatus for controlling the ratio of process fluids |
| 07/16/2008 | CN100402826C Method and system for avoiding anomaly stop of production device |
| 07/16/2008 | CN100402697C Device for carrying out a plasma-assisted process |
| 07/16/2008 | CN100402696C Semiconductor processing method for processing substrate to be processed and its apparatus |
| 07/15/2008 | US7399716 Precursor for hafnium oxide layer and method for forming hafnium oxide film using the precursor |
| 07/15/2008 | US7399707 In situ application of etch back for improved deposition into high-aspect-ratio features |
| 07/15/2008 | US7399697 Producing high adhesion nanoporous layers with low capacitance loss; utilizing organosiloxane, carbon dioxide and organic nonsilicon compound having multiple unsaturated bonds and thermally labile group |
| 07/15/2008 | US7399501 Gas sensor manufacturing process |
| 07/15/2008 | US7399500 Rapid process for the production of multilayer barrier layers |
| 07/15/2008 | US7399499 controlling the charging of gases in coaters used for atomic layer deposition and chemical vapor deposition, using activators comprising pistons or diaphragms |
| 07/15/2008 | US7399497 Method for forming film, method of manufacturing electronic device, film forming system, electronic device, and electronic apparatus |
| 07/15/2008 | US7399388 Plasma enhanced chemical vapor deposition of a silica glass dielectric film; repetitious exposure of a substrate to a reaction mixture of silane and oxygen gases, purging and evacuation of the reaction chamber |
| 07/15/2008 | US7399364 Hermetic cap layers formed on low-κ films by plasma enhanced chemical vapor deposition |
| 07/10/2008 | WO2008083310A1 Method of curing metal alkoxide-containing films |
| 07/10/2008 | WO2008083026A1 Active particle trapping for process control |
| 07/10/2008 | WO2008082921A1 Plasma-enhanced substrate processing method and apparatus |
| 07/10/2008 | WO2008082897A1 Plasma deposited microporous carbon material |
| 07/10/2008 | WO2008082883A1 Method and apparatus for stabilizing a coating |
| 07/10/2008 | WO2008082834A1 Functional layers for polycarbonate glazing |
| 07/10/2008 | WO2008082609A2 Transparent conductive nano-composites |
| 07/10/2008 | WO2008082020A1 Surface treating method for cutting tools |
| 07/10/2008 | WO2008081650A1 Highly corrosion-resistant members and processes for production thereof |
| 07/10/2008 | WO2008059070A3 Method for regulating nanoscale electron beam induced depositions |
| 07/10/2008 | WO2007108952A3 High throughput deposition apparatus with magnetic support |
| 07/10/2008 | WO2007106611A3 Rf plasma-enhanced deposition of fluorinated films |
| 07/10/2008 | US20080166886 Substrate processing apparatus |
| 07/10/2008 | US20080166884 Delivery device comprising gas diffuser for thin film deposition |
| 07/10/2008 | US20080166881 Semiconductor Device Manufacturing Apparatus and Manufacturing Method of Semiconductor Device |
| 07/10/2008 | US20080166880 Delivery device for deposition |
| 07/10/2008 | US20080166605 Two-Dimensional Composite Particle Adapted For Use As A Catalyst And Method Of Making Same |
| 07/10/2008 | US20080166588 Multilayered coated cutting tool |
| 07/10/2008 | US20080166586 Chemical vapor deposition in which a metal that can forming an eutectic alloy with germanium is used to catalyze the growth of the GeSb materials; selectivity, relatively low temperature; semiconductors |
| 07/10/2008 | US20080166561 Multilayered erosion resistant coating for gas turbines |
| 07/10/2008 | US20080166531 Preparation and properties of CR-C-P hard coatings annealed at high temperature for high temperature applications |
| 07/10/2008 | US20080166527 CVD-coated cemented carbide insert for toughness demanding short hole drilling operations |
| 07/10/2008 | US20080166499 Low thermal conductivity thermal barrier coating system and method therefor |
| 07/10/2008 | US20080166479 Preparing matrix with geometrical shape, synthesizing diamond film on matrix by CVD to form diamond/matrix composite, composite being partially uncoated with diamond film to have an opening site, etching matrix of partially covered composite through opening site to obtain hollow diamond shell; biochips |
| 07/10/2008 | US20080166472 Mixing mass of material in solid state with plurality of packing units, each unit comprising an inert material, and where structure of packing units or aggregate of packing units comprises a plurality of non-smooth features, evaporating; phosphorescent OLED devices; high yields, minimizing decomposition |
| 07/10/2008 | US20080166287 Layered Structure |
| 07/10/2008 | US20080164429 Bolometric Device with Receiving Cavity for Measuring the Power of a Beam of High Frequency Microwaves and Process for Coating the Internal Surface of Said Cavity |
| 07/10/2008 | US20080164244 Delivery of solid chemical precursors |
| 07/10/2008 | US20080163818 Substrate heating apparatus and purging method thereof |
| 07/10/2008 | US20080163817 Apparatus for gas handling in vacuum processes |
| 07/10/2008 | US20080163816 Apparatus For Forming Thin Film |
| 07/10/2008 | DE202007018382U1 Vorrichtung zur Erzeugung eines Plasma-Jets und für eine solche Vorrichtung bestimmtes Werkzeug An apparatus for generating a plasma jet, and for such a device specific tool |
| 07/10/2008 | DE10260860B4 Schicht aus Si1-xGex, Verfahren zu deren Herstellung und mikromechanisches Bauelement damit Layer of Si1-xGex, to processes for their preparation and micromechanical component thus |
| 07/09/2008 | EP1942206A1 Treating device using raw material gas and reactive gas |
| 07/09/2008 | EP1941539A1 Ultraviolet curing process for low k dielectric films |
| 07/09/2008 | EP1941074A1 Cooled device for plasma depositing a barrier layer onto a container |
| 07/09/2008 | EP1941073A1 Method of treating gas |
| 07/09/2008 | EP1941072A2 Process for plasma coating a nanocomposite object |
| 07/09/2008 | EP1940584A1 Rotating machines for treating containers |
| 07/09/2008 | EP1940576A2 Production of nano-scale metal particles |
| 07/09/2008 | EP1507887B1 Multistation coating device and method for plasma coating |
| 07/09/2008 | EP1456871B1 Susceptor for epitaxial growth |
| 07/09/2008 | EP0844431B1 System and method for controlled delivery of liquefied gases |
| 07/09/2008 | CN201082900Y Multifunctional film forming system for packaging organic electroluminescence component |
| 07/09/2008 | CN101218860A Plasma treatment apparatus |
| 07/09/2008 | CN101218375A Multilayer structure and method for cleaning same |
| 07/09/2008 | CN101218372A Plasma arc coating system |
| 07/09/2008 | CN101218371A Coated cutting tool insert |
| 07/09/2008 | CN101218370A Hard-coated body and method for production thereof |
| 07/09/2008 | CN101217195A A lithium ion battery anode material of lithium iron phosphate and the corresponding vapor deposition and cladding method of conductive network |
| 07/09/2008 | CN101217110A Group III nitride semiconductor substrate and its manufacturing method |
| 07/09/2008 | CN101215692A Multiple reaction cavity atom layer deposition device and method |
| 07/09/2008 | CN101215691A Method for in situ synthesizing metal nickel nano particle coating carbon nano-tube composite material |
| 07/09/2008 | CN100401852C Method and apparatus for controlling spatial temperature distribution across surface of workpiece support |
| 07/09/2008 | CN100401481C Plasma processing method and apparatus |
| 07/09/2008 | CN100401474C High density electro thick fluid chemical gaseous phase sedimentation process and method of improving film thickness unifomity |
| 07/09/2008 | CN100401471C Plasma processing chamber, potential controlling apparatus, method, program and storage medium |