| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/30/2008 | US20080268288 Spinodally Patterned Nanostructures |
| 10/30/2008 | US20080268280 Method of preparing low resistance metal line, patterned metal line structure, and display device using the same |
| 10/30/2008 | US20080268178 Method of producing encapsulated nanopowders and installation for its realization |
| 10/30/2008 | US20080268177 Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films with Low Dielectric Constants |
| 10/30/2008 | US20080268176 Method of improving the uniformity of PECVD-deposited thin films |
| 10/30/2008 | US20080268175 Method of controlling film uniformity of a cvd-deposited silicon nitride film during deposition over a large substrate surface |
| 10/30/2008 | US20080268174 Using novel insert tube that is strategically positioned within quartz substrate tube during internal vapor deposition; high quality quartz reduces undesirable side effects such as deposition defects, contamination, formation of bubbles |
| 10/30/2008 | US20080268172 Layer forming method using plasma discharge |
| 10/30/2008 | US20080268171 Plasma baffle assembly for receiving process gas within plasma-enhanced vapor deposition chamber |
| 10/30/2008 | US20080268164 Apparatuses and Methods for Cryogenic Cooling in Thermal Surface Treatment Processes |
| 10/30/2008 | US20080268154 suitable for flash memory fabrication; supplying a gas mixture containing an oxygen containing gas and aluminum containing compound into the chamber, heating the substrate, and depositing an aluminum oxide layer having a dielectric constant greater than 8 on the heated substrate |
| 10/30/2008 | US20080268153 suctioning a flow of a film-forming gas from both sides of a conveyance path while conveying a wafer along the conveyance path |
| 10/30/2008 | US20080268151 Organometallic compounds and their use as precursors for forming films and powders of metal or metal derivatives |
| 10/30/2008 | US20080268150 Method of Coating for Diamond Electrode |
| 10/30/2008 | US20080268143 Device For Providing Vapors Of A Solid Precursor To A Processing Device |
| 10/30/2008 | US20080267675 Intermediate Transfer Member, Method of Manufacturing Intermediate Transfer Member, and Image Forming Apparatus |
| 10/30/2008 | US20080265341 Manufacture of semiconductor device having insulation film of high dielectric constant |
| 10/30/2008 | US20080264903 Method of producing an article having patterned decorative coating |
| 10/30/2008 | US20080264565 Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas |
| 10/30/2008 | US20080264343 Vertical heat treatment apparatus and method of transferring substrates to be processed |
| 10/30/2008 | US20080264342 Deposition apparatus |
| 10/30/2008 | US20080264341 Apparatus for cathodic vacuum-arc coating deposition |
| 10/30/2008 | US20080264340 Moving interleaved sputter chamber shields |
| 10/30/2008 | US20080264337 Substrate processing apparatus and method for manufacturing semiconductor device |
| 10/30/2008 | US20080264336 Mechanical and acoustical suspension coating of medical implants |
| 10/30/2008 | DE102006041515B4 Verfahren zur Herstellung von ein- oder mehrwandigen, mit einem oder mehreren Übergangsmetallen beschichteten Kohlenstoff-Nanoröhren Process for the preparation of single- or multi-walled coated with one or more transition metals, carbon nanotubes |
| 10/30/2008 | CA2630122A1 Method of deposition onto a sic-covered substrate |
| 10/29/2008 | EP1986242A2 Method of manufacturing a semiconductor film using hot wire CVD and method of manufacturing a photovoltaic element |
| 10/29/2008 | EP1986225A1 Plasma etching method |
| 10/29/2008 | EP1985584A1 Method for producing a carbon-containing material by carbon electron-beam vaporisation in a vacuum and a subsequent condensation thereof on a substrate and a device for carrying out said method |
| 10/29/2008 | EP1292726B8 Single crystal diamond prepared by cvd |
| 10/29/2008 | CN201142322Y Improved structure of carrier disk |
| 10/29/2008 | CN201141389Y Planetary gear shaft of vehicle differential gear |
| 10/29/2008 | CN201140291Y Mirror polishing solid carbide for diamond coating |
| 10/29/2008 | CN101297066A Copper based composite base material for electronic part, electronic part and process for producing copper based composite base material for electronic part |
| 10/29/2008 | CN101297065A Cooled device for plasma depositing a barrier layer onto a container |
| 10/29/2008 | CN101297064A Method of and apparatus for treating particulate materials for improving the surface characteristics thereof |
| 10/29/2008 | CN101297063A Method of treating gas |
| 10/29/2008 | CN101297062A Plasma reactor |
| 10/29/2008 | CN101297061A Surface-coated member, method for manufacture thereof, and cutting tool |
| 10/29/2008 | CN101296745A Plasma abatement device |
| 10/29/2008 | CN101296554A Plasma processing device and electric pole plate thereof |
| 10/29/2008 | CN101295639A Method of manufacturing a semiconductor film using hot wire cvd and method of manufacturing a photovoltaic element |
| 10/29/2008 | CN101294279A Plasma film coating apparatus for particle surface modification |
| 10/29/2008 | CN101294278A Source air supplying device |
| 10/29/2008 | CN101294277A Thin film deposition method |
| 10/29/2008 | CN101294276A Process for producing mix laminated shield membrane with high-selection ratio |
| 10/29/2008 | CN101294275A Coaxial spray type showerhead and uses thereof |
| 10/29/2008 | CN101294274A Method for growing high quality nano-diamond membrane with low cost |
| 10/29/2008 | CN101294273A Preparation of strontium-barium titanate film material |
| 10/29/2008 | CN100429756C Composite material and chip holding component and making method thereof |
| 10/28/2008 | US7443032 Memory device with chemical vapor deposition of titanium for titanium silicide contacts |
| 10/28/2008 | US7442900 Chamber for uniform heating of large area substrates |
| 10/28/2008 | US7442665 Forming intermetallics, alloy, ceramic or composite |
| 10/28/2008 | US7442656 Method and apparatus for forming silicon oxide film |
| 10/28/2008 | US7442627 Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer |
| 10/28/2008 | US7442432 Alumina layer with controlled texture |
| 10/28/2008 | US7442431 enhanced wear resistance and toughness; utilizing short pulses of precursors followed by purging steps with an inert gas such as Ar |
| 10/28/2008 | US7442417 Method for reaction control coating |
| 10/28/2008 | US7442415 very uniform deposition of dense metal oxide films at low temperatures; efficiently removing excess ligands before the ligand buildup is so great that the ligands cannot all be removed by a post deposition anneal |
| 10/28/2008 | US7442414 Methods for producing reinforced carbon nanotubes |
| 10/28/2008 | US7442413 treating a photovoltaic precursor with a vaporous element, for example, selenium or sulfur, to produce thin film CIGS or CIGSS solar cells |
| 10/28/2008 | US7442412 Hydrophobic coating for oxide surfaces |
| 10/28/2008 | US7442285 Common rack for electroplating and PVD coating operations |
| 10/28/2008 | US7442275 Lateral temperature equalizing system for large area surfaces during processing |
| 10/28/2008 | US7442273 Apparatus using hybrid coupled plasma |
| 10/28/2008 | US7442272 Apparatus for manufacturing semiconductor device |
| 10/28/2008 | US7442271 Miniature microwave plasma torch application and method of use thereof |
| 10/28/2008 | US7442258 Organic electroluminescent device for fabricating shadow mask |
| 10/28/2008 | US7442254 Nitride semiconductor device having a nitride semiconductor substrate and an indium containing active layer |
| 10/28/2008 | US7441513 apparatus for plasma polymerize coating of medical devices, such as stents, is disclosed. A method for forming plasma-polymerized coating for implantable medical devices is also disclosed such as stents |
| 10/23/2008 | WO2008128141A2 Zirconium, hafnuim, titanium, and silicon precursors for ald/cvd |
| 10/23/2008 | WO2008126776A1 Fabrication method of a semiconductor device and a semiconductor device |
| 10/23/2008 | WO2008126622A1 Method for film formation, apparatus for film formation, and recording medium |
| 10/23/2008 | WO2008126595A1 Plasma treatment apparatus and method of plasma treatment |
| 10/23/2008 | WO2008126532A1 Substrate for epitaxial growth and method for producing nitride compound semiconductor single crystal |
| 10/23/2008 | WO2008125607A2 Method for the application of a high-strength coating to workpieces and/or materials |
| 10/23/2008 | WO2008125606A1 Method for the application of a multi-layer coating to workpieces and/or materials |
| 10/23/2008 | WO2008106545A3 Pecvd process chamber backing plate reinforcement |
| 10/23/2008 | WO2008106520A3 Single wafer anneal processor |
| 10/23/2008 | WO2008028170A3 Solid precursor-based delivery of fluid utilizing controlled solids morphology |
| 10/23/2008 | WO2008005754A3 Modular chemical vapor deposition (cvd) reactor |
| 10/23/2008 | WO2007140426A9 Process chamber for dielectric gapfill |
| 10/23/2008 | WO2007126469A3 Method for conditioning a process chamber |
| 10/23/2008 | WO2007100528A3 Integrated capacitive and inductive power sources for a plasma etching chamber |
| 10/23/2008 | US20080261412 Apparatus and method for atomic layer deposition |
| 10/23/2008 | US20080261410 Thermally growing an interfacial oxide layer of silicon dioxide over silicon substrate; treating surface with an aqueous ammonium hydroxide (NH4OH) containing solution; and, depositing a high-K (dielectric) material such as hafnium oxide over interfacial oxide layer; atomic layer or vapor deposition |
| 10/23/2008 | US20080261112 Electrode material for electrochemcial device, method for producing the same, electrode using the electrode material, and electrochemical device using the electrode material |
| 10/23/2008 | US20080261070 Sputtering an oxide of Indium, Zinc, Gallium, Cadmium, and tin using vapor deposition; liquid crystal displays, touch panel devices, personal digital assistants, electronic controllers |
| 10/23/2008 | US20080261058 Coated cutting tool, cutting member or wear part |
| 10/23/2008 | US20080261056 Coating; a photocatalytic compound in intimate association with Gallium Phosphide, Cadmium Sulfide, oxide of potassium, tantallum and Niobium, Cadmium Selenide, oxide of Strontium Titanium, TiO2, ZnO, Fe2O3, WO3, Nb2O5, V2O5 and Eu2O3. |
| 10/23/2008 | US20080260991 Catalyst supporting honeycomb and method of manufacturing the same |
| 10/23/2008 | US20080260969 Method for Producing Silicon Nitride Films |
| 10/23/2008 | US20080260967 Apparatus and method for integrated surface treatment and film deposition |
| 10/23/2008 | US20080260965 Coating of a Polymer Layer Using Low Powder Pulsed Plasma in a Plasma Chamber of a Large Volume |
| 10/23/2008 | US20080260947 Method of making a cvd coating scheme including alumina and/or titanium-containing materials |
| 10/23/2008 | US20080260946 Cleaning a pedestal separated from the carrier ring, and an area lay between the pedestal and the carrier ring with a gas; andperforming a full flush |
| 10/23/2008 | US20080259976 Organic Columnar Thin Films |
| 10/23/2008 | US20080257864 Methods and devices to reduce defects in dielectric stack structures |
| 10/23/2008 | US20080257498 Plasma processing apparatus |