| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/27/2009 | US7481889 Film forming apparatus and film forming method |
| 01/27/2009 | US7481888 Heat treatment jig and heat treatment method for silicon wafer |
| 01/27/2009 | US7481887 Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces |
| 01/27/2009 | US7481886 Plasma process system and plasma process method |
| 01/27/2009 | US7481882 Method for forming a thin film |
| 01/22/2009 | WO2009012341A2 Group iv complexes as cvd and ald precursors for forming metal-containing thin films |
| 01/22/2009 | WO2009012180A1 Ultrananocrystalline diamond film deposition for spm probes |
| 01/22/2009 | WO2009012159A1 Clean rate improvement by pressure controlled remote plasma source |
| 01/22/2009 | WO2009011801A1 Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques |
| 01/22/2009 | WO2009011745A1 Plasma enhanced bonding for improving adhesion and corrosion resistance of deposited films |
| 01/22/2009 | WO2009011648A1 Textured alpha- alumina coated cutting tool insert for turning of steel |
| 01/22/2009 | WO2009011425A1 Organic platinum complex and method for producing platinum-containing thin film by chemical vapor deposition using the platinum complex |
| 01/22/2009 | WO2009011166A1 Vacuum processing device and vacuum processing method |
| 01/22/2009 | WO2009011015A1 High-frequency induction heating apparatus and plasma cvd apparatus |
| 01/22/2009 | US20090023301 Film deposition apparatus, method of manufacturing a semiconductor device, and method of coating the film deposition apparatus |
| 01/22/2009 | US20090023274 Hybrid Chemical Vapor Deposition Process Combining Hot-Wire CVD and Plasma-Enhanced CVD |
| 01/22/2009 | US20090022997 Transparent Conductive Oxide Films Having Enhanced Electron Concentration/Mobility, and Method of Making Same |
| 01/22/2009 | US20090022905 Rf choke for gas delivery to an rf driven electrode in a plasma processing apparatus |
| 01/22/2009 | US20090022891 Method of forming metal film |
| 01/22/2009 | US20090022879 Method for applying paints to surfaces in a controlled, position-dependent manner |
| 01/22/2009 | US20090020790 Method for fabricating polysilicon film, a gas phase deposition apparatus and an electronic device formed thereby |
| 01/22/2009 | US20090020210 Fluorescent dye to improve primer coverage accuracy for bonding applications |
| 01/22/2009 | US20090020072 Chemical solution vaporizing tank and chemical solution treating system |
| 01/22/2009 | DE112007000541T5 Selektive Trennverfahren Selective separation process |
| 01/22/2009 | DE102007033665A1 Method for producing a layer system on a dielectric substrate having a first reflecting metal layer and a layer structure, comprises applying the first metal layer on the substrate by a vacuum coating process |
| 01/21/2009 | EP2017368A2 Precursor Compositions And Methods |
| 01/21/2009 | EP2016206A1 Device for introducing, injecting or spraying a mixture of a carrier gas and liquid compounds and method for implementing said device |
| 01/21/2009 | EP2016205A2 Semiconductor buffer structures |
| 01/21/2009 | EP2016204A2 Controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement |
| 01/21/2009 | EP1470264B1 Methods for silicon oxide and oxynitride deposition using single wafer low pressure cvd |
| 01/21/2009 | EP1394844B1 Method of fabricating semiconductor device |
| 01/21/2009 | CN201183823Y Graphitic rack guide rail for solar cell production line PECVD link |
| 01/21/2009 | CN201183822Y Thin film deposition apparatus |
| 01/21/2009 | CN101352108A Stage apparatus and plasma processing apparatus |
| 01/21/2009 | CN101351572A Rotatable aperture mask assembly and deposition system |
| 01/21/2009 | CN101350294A System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 01/21/2009 | CN101348936A Orientational alignment carbon nano-tube and carbon coating cobalt nano-particle complex and preparation thereof |
| 01/21/2009 | CN101348904A Semiconductor manufacturing device |
| 01/21/2009 | CN101348903A Multifunctional small film deposition equipment |
| 01/21/2009 | CN101348902A Diffuser plate with slit valve compensation |
| 01/21/2009 | CN101348901A Preparation and apparatus of high quality and high yield carbon nano-tube array |
| 01/21/2009 | CN101348900A Organometallic compounds |
| 01/21/2009 | CN101348899A Plasma generation apparatus having cleaning function |
| 01/21/2009 | CN101348249A Method for preparing carbon nano-tube array on particle interior surface |
| 01/21/2009 | CN100455158C Plasma process apparatus and its processor |
| 01/21/2009 | CN100454597C Nitride semiconductor element and process for producing the same |
| 01/21/2009 | CN100454526C Thermo-interface material producing method |
| 01/21/2009 | CN100454515C Method for forming aluminium lead wire |
| 01/21/2009 | CN100454514C Film tray for fabricating flexible display |
| 01/21/2009 | CN100454498C Plasma processing apparatus and controlling method for plasma processing apparatus |
| 01/21/2009 | CN100454497C Method of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition |
| 01/21/2009 | CN100454495C Semiconductor manufacturing equipment |
| 01/21/2009 | CN100453788C Member for internal combustion engine and production method thereof |
| 01/21/2009 | CN100453696C CVD diamond film continuous preparation system |
| 01/21/2009 | CN100453695C Microwave plasma processing device and plasma processing gas supply member |
| 01/21/2009 | CN100453694C Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof |
| 01/21/2009 | CN100453693C New type diamondlike film sedimentation technology |
| 01/21/2009 | CN100453692C Aluminium material surface modifying diamond-like film coating process and apparatus |
| 01/20/2009 | US7479619 Thermal processing unit |
| 01/20/2009 | US7479325 Isotope-doped carbon nanotube |
| 01/20/2009 | US7479306 SiCOH dielectric material with improved toughness and improved Si-C bonding, semiconductor device containing the same, and method to make the same |
| 01/20/2009 | US7479304 Fluoridating the surface of a substrate of yttrium oxide including 0-10% by volume aluminum oxide; and creating openings through the substrate, especially using ultrasonic frequency drilling; semiconductors |
| 01/20/2009 | US7479303 Method for chemical vapor deposition (CVD) with showerhead and method thereof |
| 01/20/2009 | US7479302 Actively-cooled fiber-reinforced ceramic matrix composite rocket propulsion thrust chamber and method of producing the same |
| 01/20/2009 | US7479301 Method for modifying a metallic surface |
| 01/20/2009 | US7479187 Method for manufacturing silicon epitaxial wafer |
| 01/20/2009 | US7479052 Method of growing carbon nanotubes and method of manufacturing field emission device using the same |
| 01/20/2009 | US7478844 Pre-expanded connector for expandable downhole tubulars |
| 01/20/2009 | US7478609 Plasma process apparatus and its processor |
| 01/15/2009 | WO2009009604A2 Diamond film deposition |
| 01/15/2009 | WO2009009306A2 Multilayer barrier stacks and methods for making them |
| 01/15/2009 | WO2009009272A2 Conformal doping using high neutral plasma implant |
| 01/15/2009 | WO2009009206A2 Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries |
| 01/15/2009 | WO2009009121A1 Movable injectors in rotating disc gas reactors |
| 01/15/2009 | WO2009008442A1 Method and apparatus for manufacturing magnetic recording medium |
| 01/15/2009 | WO2009008376A1 Process for producing semiconductor device, semiconductor device, semiconductor production apparatus, and storage medium |
| 01/15/2009 | WO2009008324A1 Method and apparatus for manufacturing magnetic recording medium |
| 01/15/2009 | WO2009007745A1 Deposition process |
| 01/15/2009 | WO2009007654A1 Plasma-deposited barrier coating including at least three layers, method for obtaining one such coating and container coated with same |
| 01/15/2009 | WO2009007524A2 Method for plasma-assisted vapour-phase chemical deposition of a carbon/metal film |
| 01/15/2009 | WO2009007448A2 Magnetron co-sputtering device |
| 01/15/2009 | WO2008142653A3 New cobalt precursors for semiconductor applications |
| 01/15/2009 | WO2008098963A3 Method of forming an oxide thin film |
| 01/15/2009 | US20090017638 Substrate processing apparatus and method for manufacturing semiconductor device |
| 01/15/2009 | US20090017637 Method and apparatus for batch processing in a vertical reactor |
| 01/15/2009 | US20090017326 Method for forming an acoustic mirror with reduced metal layer roughness and related structure |
| 01/15/2009 | US20090017292 Reactive flow deposition and synthesis of inorganic foils |
| 01/15/2009 | US20090017258 Diamond film deposition |
| 01/15/2009 | US20090017230 Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques |
| 01/15/2009 | US20090017229 Processing System Platen having a Variable Thermal Conductivity Profile |
| 01/15/2009 | US20090017228 Apparatus and method for centering a substrate in a process chamber |
| 01/15/2009 | US20090017227 Remote Plasma Source for Pre-Treatment of Substrates Prior to Deposition |
| 01/15/2009 | US20090017218 Manufacturing Method for Producing Wick Structures of a Vapor Chamber by Using a Powder Thermal Spray Gun |
| 01/15/2009 | US20090017217 Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom |
| 01/15/2009 | US20090017208 Precursor compositions and methods |
| 01/15/2009 | US20090017207 Formation of Selenide, Sulfide or Mixed Selenide-Sulfide Films on Metal or Metal Coated Substrates |
| 01/15/2009 | US20090017206 Methods and apparatus for reducing the consumption of reagents in electronic device manufacturing processes |
| 01/15/2009 | US20090017192 Vapor deposition method and apparatus |
| 01/15/2009 | US20090017190 Movable injectors in rotating disc gas reactors |
| 01/15/2009 | US20090017189 Method and apparatus for forming protective layer |