| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 03/12/2009 | DE102007042833A1 Strahlbehandelter Schneideinsatz und Verfahren Beam-treated cutting insert and methods |
| 03/12/2009 | DE102007040655A1 Functional layer transfer assembly, useful in the manufacture and transfer of the functional layer, comprises a carrier, a functional layer and a separating layer, which is between the carrier and functional layer |
| 03/12/2009 | DE10064067B4 Verfahren zur Herstellung eines Kondensators einer Halbleitereinrichtung A method for manufacturing a capacitor of a semiconductor device |
| 03/11/2009 | EP2034048A1 Heating apparatus |
| 03/11/2009 | EP2034047A1 Vaporizer/supplier of material and automatic pressure regulator for use therein |
| 03/11/2009 | EP2034046A2 Improved cleaning of plasma chamber walls by adding of noble gas cleaning step |
| 03/11/2009 | EP2034045A2 Reduction of etch-rate drift in HDP processes |
| 03/11/2009 | EP2034044A2 Impurity control in HDP-CVD DEP/ETCH/DEP processes |
| 03/11/2009 | EP2033214A2 A method for depositing and curing low-k films for gapfill and conformal film applications |
| 03/11/2009 | EP2033213A2 Compressive nitride film and method of manufacturing thereof |
| 03/11/2009 | EP2032738A1 Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma |
| 03/11/2009 | EP2032737A2 Batch processing chamber with diffuser plate and injector assembly |
| 03/11/2009 | EP2032529A1 Metal(iv) tetra-amidinate compounds and their use in vapor deposition |
| 03/11/2009 | EP2032390A1 A method of depositing an abrasion-resistant layer onto an electroluminescent plastic window |
| 03/11/2009 | EP2032244A1 System and method for delivery of precursor material |
| 03/11/2009 | EP1649520A4 Method for manufacturing absorber layers for solar cell |
| 03/11/2009 | EP1397830A4 Copper vias in low-k technology |
| 03/11/2009 | EP1325170A4 Fabrication of high current coated high temperature superconducting tapes |
| 03/11/2009 | EP1320879A4 System and method for cleaning semiconductor fabrication equipment parts |
| 03/11/2009 | EP1090159B1 Deposition of coatings using an atmospheric pressure plasma jet |
| 03/11/2009 | CN101385129A Microwave plasma source and plasma processing apparatus |
| 03/11/2009 | CN101384749A Film precursor evaporation system and method of using |
| 03/11/2009 | CN101384748A Deposition process |
| 03/11/2009 | CN101384747A Dual mode ion source for ion implantation |
| 03/11/2009 | CN101384336A Method of making hcd gas harmless and apparatus therefor |
| 03/11/2009 | CN101383314A Substrate table substrate processing apparatus and temperature control method |
| 03/11/2009 | CN101381864A Method for improving stability of chemical vapour deposition technique |
| 03/11/2009 | CN101381863A Source gas supply device |
| 03/11/2009 | CN101381862A Device for controlling treatment of gas flow in treatment chamber |
| 03/11/2009 | CN101381861A Film formation method |
| 03/11/2009 | CN100468965C LiNbO3/ZnO/diamond multi-layered film structure surface acoustic wave device and its preparing method |
| 03/11/2009 | CN100468809C Method and apparatus for manufacturing luminant device |
| 03/11/2009 | CN100468654C Light irradiation heat treatment method and light irradiation heat treatment apparatus |
| 03/11/2009 | CN100468648C Atomic layer deposition of high k metal oxide |
| 03/11/2009 | CN100468631C Susceptor |
| 03/11/2009 | CN100467988C System and method for controlling movement of a workpiece in a thermal processing system |
| 03/11/2009 | CN100467665C Container internal surface chemical vapor depositon coating method |
| 03/11/2009 | CN100467664C Method for manufacturing diamond-like film and part with coating manufactured thereby |
| 03/11/2009 | CN100467663C Device and method for surface treatment of hollow cathode plasma in inner surface of slimline |
| 03/10/2009 | USRE40647 Method of producing plasma display panel with protective layer of an alkaline earth oxide |
| 03/10/2009 | US7501370 Producing devices for semiconductor wafer fabrication; molding powder material, sintering, strong acid washing and oxidation treatment; reducing or eliminating iron, copper, nickel and chromium content |
| 03/10/2009 | US7501344 Formation of boride barrier layers using chemisorption techniques |
| 03/10/2009 | US7501343 Formation of boride barrier layers using chemisorption techniques |
| 03/10/2009 | US7501293 Semiconductor device in which zinc oxide is used as a semiconductor material and method for manufacturing the semiconductor device |
| 03/10/2009 | US7501191 Atomic layer deposition; for use in semiconductors, dynamic random access memory (DRAM) |
| 03/10/2009 | US7501187 Thermal barrier coating method and article |
| 03/10/2009 | US7501161 Placing a substrate on a substrate holder of a plasma chamber; positioning a cover frame adjacent and below a perimeter of the substrate; employing the cover frame to reduce arcing during plasma processing within the plasma chamber; display and/or semiconductor device manufacturing |
| 03/10/2009 | US7501155 producing phosphor or scintillator plates or panels, the layer thickness is constant over large surface areas, panels produced on very large flexible substrates which are cut into size and protected against physical, chemical or mechanical damage, high energy radiation detection and imaging, radiography |
| 03/10/2009 | US7501154 Surface modification of CVD polymer films |
| 03/10/2009 | US7501153 Iron tertiaryaminoalkyl alcohol; iron bismuth oxide chemical vapor deposition; easily adjusted decomposition behavior |
| 03/10/2009 | US7501152 Delivering particulate material to a vaporization zone |
| 03/10/2009 | US7501151 Delivering particulate material to a vaporization zone |
| 03/10/2009 | US7500445 Method and apparatus for cleaning a CVD chamber |
| 03/10/2009 | CA2294658C Lamp reflector with a barrier coating of a plasma polymer |
| 03/05/2009 | WO2009029942A2 Mechanically integrated and closely coupled print head and mist source |
| 03/05/2009 | WO2009029939A2 Aerosol jet® printing system for photovoltaic applications |
| 03/05/2009 | WO2009029938A2 Apparatus for anisotropic focusing |
| 03/05/2009 | WO2009028974A1 Method for the production of semiconductor ribbons from a gaseous feedstock |
| 03/05/2009 | WO2009028619A1 Treating-gas supply system and treating apparatus |
| 03/05/2009 | WO2009028376A1 Top panel and plasma processing apparatus |
| 03/05/2009 | WO2009028314A1 Semiconductor device manufacturing method |
| 03/05/2009 | WO2009028308A1 Diamond thin-film laminate |
| 03/05/2009 | WO2009028084A1 Apparatus for generating dielectric barrier discharge gas |
| 03/05/2009 | WO2009009272A3 Conformal doping using high neutral plasma implant |
| 03/05/2009 | WO2009006072A3 Methods and arrangements for plasma processing system with tunable capacitance |
| 03/05/2009 | WO2008017880A9 Apparatus for conveying a waste stream |
| 03/05/2009 | WO2007120776A8 Plasma deposition apparatus and method for making solar cells |
| 03/05/2009 | US20090061651 Substrate processing apparatus and method for manufacturing semiconductor device |
| 03/05/2009 | US20090061536 Si/Si3N4 SYSTEM NANOSIZED PARTICLES, BIOSUBSTANCE LABELING AGENT EMPLOYING THE NANOSIZED PARTICLES, AND METHOD OF MANUFACTURING THE NANOSIZED PARTICLES |
| 03/05/2009 | US20090061254 Polycrystalline monolithic magnesium aluminate spinels |
| 03/05/2009 | US20090061217 Nanostructure production methods and apparatus |
| 03/05/2009 | US20090061208 Carbon nanotube composite preform and method for making the same |
| 03/05/2009 | US20090061184 Processes for Applying a Conversion Coating with Conductive Additive(S) and the Resultant Coated Articles |
| 03/05/2009 | US20090061156 Multifunctional hard material coating |
| 03/05/2009 | US20090061111 Apparatus for manufacturing gas barrier plastic container, method for manufacturing the container, and the container |
| 03/05/2009 | US20090061110 Process for treating a surface |
| 03/05/2009 | US20090061092 Film forming method and film forming apparatus |
| 03/05/2009 | US20090061091 Alumina layer with enhanced texture |
| 03/05/2009 | US20090061090 Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film |
| 03/05/2009 | US20090061089 Mechanically Integrated and Closely Coupled Print Head and Mist Source |
| 03/05/2009 | US20090061088 Method and device for producing and processing layers of substrates under a defined processing atmosphere |
| 03/05/2009 | US20090061087 Combinatorial process system |
| 03/05/2009 | US20090061086 Coating systems containing rhodium aluminide-based layers |
| 03/05/2009 | US20090061085 Expedited manufacture of carbon-carbon composite brake discs |
| 03/05/2009 | US20090061084 Vapor deposition system and vapor deposition method |
| 03/05/2009 | US20090061083 Vapor based combinatorial processing |
| 03/05/2009 | US20090061074 Technology of detecting abnormal operation of plasma process |
| 03/05/2009 | US20090060820 Method for producing trichlorosilane and method for producing polycrystalline silicon |
| 03/05/2009 | US20090056991 Methods of Treating a Surface to Promote Binding of Molecule(s) of Interest, Coatings and Devices Formed Therefrom |
| 03/05/2009 | US20090056877 Plasma processing apparatus |
| 03/05/2009 | US20090056876 Work Processing System and Plasma Generating Apparatus |
| 03/05/2009 | US20090056631 Apparatus for manufacturing semiconductor layer |
| 03/05/2009 | US20090056630 Workpiece support system and method |
| 03/05/2009 | US20090056629 Cathode liner with wafer edge gas injection in a plasma reactor chamber |
| 03/05/2009 | US20090056628 Process and apparatus for forming nanoparticles using radiofrequency plasmas |
| 03/05/2009 | US20090056626 Apparatus for cyclical depositing of thin films |
| 03/05/2009 | DE102004013626B4 Verfahren und Vorrichtung zur Abscheidung dünner Schichten Method and device for depositing thin layers |
| 03/04/2009 | EP2031606A1 Superconducting thin film material and method for producing the same |
| 03/04/2009 | EP2031091A1 Protective coating applied to metallic reactor components to reduce corrosion products released into a nuclear reactor environment |
| 03/04/2009 | EP2031088A2 Wet clean process for recovery of chamber parts |