| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 05/06/2009 | CN100485083C Preparation of Si-C-N nano-composite superhard thin film |
| 05/06/2009 | CN100484752C Multilayered optical structures |
| 05/06/2009 | CN100484672C Coated cutting tool blade |
| 05/05/2009 | US7527706 Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
| 05/05/2009 | US7527694 Substrate gripping apparatus |
| 05/05/2009 | US7527693 Apparatus for improved delivery of metastable species |
| 05/05/2009 | US7527016 Plasma processing apparatus |
| 04/30/2009 | WO2009055162A1 Anti-pooling vest for patients undergoing hemodialysis and in critical care |
| 04/30/2009 | WO2009054232A1 Semiconductor manufacturing apparatus, semiconductor manufacturing method, and electronic device |
| 04/30/2009 | WO2009053289A1 Hover cushion transport for webs in a web coating process |
| 04/30/2009 | WO2009053134A1 Large container for handling and transporting high-purity and ultra high purity chemicals |
| 04/30/2009 | WO2009029939A3 Aerosol jet® printing system for photovoltaic applications |
| 04/30/2009 | WO2009009206A3 Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries |
| 04/30/2009 | WO2008102320A3 Methods for forming a ruthenium-based film on a substrate |
| 04/30/2009 | WO2007016218A3 Integrated electroless deposition system |
| 04/30/2009 | WO2006135375A3 Catalytically grown nano-bent nanostructure and method for making the same |
| 04/30/2009 | WO2006002315A3 Electron beam enhanced nitriding system (ebens) |
| 04/30/2009 | US20090111280 Method for removing oxides |
| 04/30/2009 | US20090111278 Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device |
| 04/30/2009 | US20090111276 Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body |
| 04/30/2009 | US20090111264 Plasma-enhanced cyclic layer deposition process for barrier layers |
| 04/30/2009 | US20090111246 Inhibitors for selective deposition of silicon containing films |
| 04/30/2009 | US20090111212 Method and apparatus for chalcogenide device formation |
| 04/30/2009 | US20090110918 Microbicidal Substrate |
| 04/30/2009 | US20090110892 System and method for making a graded barrier coating |
| 04/30/2009 | US20090110891 Transparent thin film, optical device and method for manufacturing the same |
| 04/30/2009 | US20090110877 Method and substrate for making composite material parts by chemical vapour infiltration densification and resulting parts |
| 04/30/2009 | US20090110854 Housing and surface treating method for making the same |
| 04/30/2009 | US20090110853 Housing and surface treating method for making the same |
| 04/30/2009 | US20090110852 Housing and surface treating method for making the same |
| 04/30/2009 | US20090110848 Method and apparatus for high-pressure atomic-beam laser induced deposition/etching |
| 04/30/2009 | US20090110847 Apparatus and Method for Producing Light-Emitting Elements With Organic Compounds |
| 04/30/2009 | US20090110842 Boron-based wood preservatives and treatment of wood with boron-based preservatives |
| 04/30/2009 | US20090110826 Reaction apparatus having multiple adjustable exhaust ports |
| 04/30/2009 | US20090110825 Process and apparatus for producing a ceramic material |
| 04/30/2009 | US20090110824 Substrate processing apparatus and method of controlling substrate processing apparatus |
| 04/30/2009 | US20090110823 Film-forming material and method for predicting film-forming material |
| 04/30/2009 | US20090110809 Hover cushion transport for webs in a web coating process |
| 04/30/2009 | US20090110807 Method for coating and apparatus |
| 04/30/2009 | US20090110805 Apparatus and Method for Controlling the Surface Temperature of a Substrate in a Process Chamber |
| 04/30/2009 | US20090110804 Indented sheet manufacturing method and manufacturing apparatus |
| 04/30/2009 | US20090109731 Dielectric layers and memory cells including metal-doped alumina |
| 04/30/2009 | US20090108264 Laminated conductive film, electro-optical display device and production method of same |
| 04/30/2009 | US20090107955 Offset liner for chamber evacuation |
| 04/30/2009 | US20090107846 Method and apparatus to prewet wafer surface for metallization from electrolyte solutions |
| 04/30/2009 | US20090107404 Epitaxial reactor with susceptor controlled positioning |
| 04/30/2009 | US20090107403 Brazed cvd shower head |
| 04/30/2009 | US20090107402 Deposition apparatus and cleaning method thereof |
| 04/30/2009 | US20090107401 Device for vaporizing condensed substances |
| 04/30/2009 | US20090107400 Substrate processing apparatus and a substrate processing method |
| 04/30/2009 | US20090107394 Device for manufacturing sic single crystal and method for the same |
| 04/30/2009 | DE102008052571A1 Diffusion oven useful in semiconductor manufacture and for doping solar cells, comprises reactor enclosed by reaction pipe, outer casing, heating elements, means for locking the pipe, means for locking the casing and vacuum producing means |
| 04/30/2009 | DE102007051447A1 Diffusion oven for manufacturing semiconductors, comprises a reaction chamber, which is surrounded by reaction tubes, an outer sheath, which surrounds the reaction chamber, heating elements, and means for producing vacuum |
| 04/30/2009 | DE102007051023A1 Method for coating a surface of tooth flanks of pinion, comprises producing static loaded particles from coating material and then moving towards the tooth flanks to be coated |
| 04/30/2009 | CA2702622A1 Large container for handling and transporting high-purity and ultra high purity chemicals |
| 04/29/2009 | EP2053663A1 Hover cushion transport for webs in a web coating process |
| 04/29/2009 | EP2053649A2 Vacuum continuous line to process substrates |
| 04/29/2009 | EP2053642A1 Film-forming method and film-forming apparatus |
| 04/29/2009 | EP2053641A2 Methods for forming a dielectric layer within trenches |
| 04/29/2009 | EP2053640A2 Method and system for improving dielectric film quality for void free gap fill |
| 04/29/2009 | EP2053144A1 Method for quenching of steel member, quenched steel member, and agent for protecting quenched surface |
| 04/29/2009 | EP2053143A2 High quality silicon oxide films by remote plasma cvd from disilane precursors |
| 04/29/2009 | EP2053107A1 Film-forming material, silicon-containing insulating film and method for forming the same |
| 04/29/2009 | EP2053070A1 Apparatus for chemical vapor deposition and method of chemical vapor deposition |
| 04/29/2009 | EP2053036A1 Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex |
| 04/29/2009 | EP2052987A2 DLC film coated plastic container |
| 04/29/2009 | EP2052101A1 Method and apparatus for preparation of granular polysilicon |
| 04/29/2009 | EP2052100A2 Process for producing components in a medium-containing circuit, in particular a heat exchanger, and component of this type |
| 04/29/2009 | EP2052099A1 Thermochromic coatings ii |
| 04/29/2009 | EP2052098A1 Method of cleaning film forming apparatus and film forming apparatus |
| 04/29/2009 | EP1383160B1 Gaseous phase growing device |
| 04/29/2009 | CN201228282Y Composite material surface modification apparatus assisted by pulse high energy density plasma |
| 04/29/2009 | CN101421579A Porous layer |
| 04/29/2009 | CN101421433A Method and apparatus for combinatorially varying materials, unit process and process sequence |
| 04/29/2009 | CN101421432A Protective layer for optical coatings with enhanced corrosion and scratch resistance |
| 04/29/2009 | CN101419915A Methods to obtain low k dielectric barrier with superior etch resistivity |
| 04/29/2009 | CN101419904A Plasma confinement device and plasma treatment device |
| 04/29/2009 | CN101419902A Vacuum chamber for vacuum processing apparatus |
| 04/29/2009 | CN101418439A Laser processing device and laser processing method |
| 04/29/2009 | CN101418438A High quality silicon oxide films by remote plasma CVD from disilane precursors |
| 04/29/2009 | CN101418437A Method for preparing carbon doped titanium oxide film |
| 04/29/2009 | CN101418436A Ceramic cover wafers of aluminum nitride or beryllium oxide |
| 04/29/2009 | CN101418435A Method for forming protective layer on contour of work piece |
| 04/29/2009 | CN100483680C Method for fabricating capacitor in semiconductor device |
| 04/29/2009 | CN100483646C High-throughput HDP-CVD processes for advanced gapfill applications |
| 04/29/2009 | CN100483645C Plasma treatment to improve adhesion of low k dielectrics |
| 04/29/2009 | CN100483644C Semiconductor device and manufacturing method thereof |
| 04/29/2009 | CN100483637C Method of forming a metal layer using an intermittent precursor gas flow process |
| 04/29/2009 | CN100483636C Atomic layer deposition methods |
| 04/29/2009 | CN100483628C Fabrication of crystalline materials over substrates |
| 04/29/2009 | CN100483620C Plasma processing device |
| 04/29/2009 | CN100483614C Apparatus for manufacturing substrate |
| 04/29/2009 | CN100482858C Liquid-conveying metallorganics chemical vapour deposition apparatus |
| 04/29/2009 | CN100482857C Systems and methods for epitaxially depositing films on semiconductor substrates |
| 04/29/2009 | CN100482849C Multilayer film-coated substrate and process for its production |
| 04/28/2009 | US7525071 Power-supplying member and heating apparatus using the same |
| 04/28/2009 | US7524791 directly striking a combustion flame of a gas consisting essentially of a hydrocarbon, against a surface of a substrate having at least a surface layer comprising titanium, a titanium alloy, a titanium alloy oxide, or titanium oxide; high hardness, scratch resistance, wear resistance, chemical resistance |
| 04/28/2009 | US7524766 Method for manufacturing semiconductor device and substrate processing apparatus |
| 04/28/2009 | US7524723 Semiconductor device and method for manufacturing same |
| 04/28/2009 | US7524533 Diffusion barrier layers and processes for depositing metal films thereupon by CVD or ALD processes |