| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/23/2009 | US20090186191 Method of making a transparent metal oxide coated glass panel for photovoltaic module |
| 07/23/2009 | US20090186154 Method of forming a diffusion bonding enhanced layer on al2o3 ceramic tools |
| 07/23/2009 | US20090183834 Plasma generation apparatus |
| 07/23/2009 | US20090183833 Plasma processing apparatus |
| 07/23/2009 | US20090183771 Plasma processing apparatus, plasma processing method and photoelectric conversion element |
| 07/23/2009 | US20090183684 Plasma Treatment Device |
| 07/23/2009 | US20090183683 Plasma Processing Apparatus and Method for Venting the Same to Atmosphere |
| 07/23/2009 | US20090183682 Source container of a vpe reactor |
| 07/23/2009 | US20090183681 Slotted Electrode and Plasma Apparatus Using the Same |
| 07/23/2009 | US20090183680 Electrode with Improved Plasma Uniformity |
| 07/23/2009 | US20090183679 Ion source gas reactor |
| 07/23/2009 | DE102008036642A1 Sprühkopf und CVD-Vorrichtung, welche diesen aufweist Spray head and CVD apparatus having this |
| 07/23/2009 | DE102008005283A1 Verfahren zur Herstellung einer mit einem transparenten Metalloxid beschichteten Glasscheibe für ein photovoltaisches Modul A process for preparing a coated glass sheet with a transparent metal oxide for a photovoltaic module |
| 07/23/2009 | CA2712249A1 Low thermal conductivity, cmas-resistant thermal barrier coatings |
| 07/22/2009 | EP2080821A1 Article having cobalt-phosphorous coating and method for heat treating |
| 07/22/2009 | EP2080817A1 Method and apparatus for chamber cleaning by in-situ plasma excitation |
| 07/22/2009 | EP2080613A1 Gas barrier film laminate |
| 07/22/2009 | EP2080216A1 Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
| 07/22/2009 | EP2079783A1 Picvd coating for plastic containers |
| 07/22/2009 | EP2079751A1 New group v metal containing precursors and their use for metal containing film deposition |
| 07/22/2009 | EP2006414A9 Atomic layer growing apparatus |
| 07/22/2009 | EP1423551B1 Method for producing a nanostructured functional coating and a coating that can be produced according to said method |
| 07/22/2009 | CN101490307A Film formation method, cleaning method, and film formation device |
| 07/22/2009 | CN101490306A Apparatus and method for controlling plasma potential |
| 07/22/2009 | CN101487114A Low temperature polysilicon thin-film device and method of manufacturing the same |
| 07/22/2009 | CN100517729C Thin film transistor array substrate and method of fabricating the same |
| 07/22/2009 | CN100517608C Amorphous dielectric thin film and manufacturing method thereof |
| 07/22/2009 | CN100517598C Shower head and film-forming device using the same |
| 07/22/2009 | CN100517589C Teater |
| 07/22/2009 | CN100517553C System and method for inductive coupling of an expanding thermal plasma |
| 07/22/2009 | CN100516576C Counter track joint having track inflection point, and transmission shaft and motor vehicle comprising the same |
| 07/22/2009 | CN100516292C Method for detecting exception condition of tungsten chemical vapor deposition equipment |
| 07/22/2009 | CN100516291C Plasma treatment device |
| 07/22/2009 | CN100516290C High heat-resistance hollow out substrate working platform capable of multiple-surface depositing CVD diamond film |
| 07/22/2009 | CN100516289C Organometallic compounds |
| 07/22/2009 | CN100516288C Ultrasonic-atomizing heat-decomposing compound semiconductor film preparing system |
| 07/22/2009 | CN100516287C Apparatus for cleaning chamber using gas separation type showerhead |
| 07/21/2009 | US7564008 Alumina member and manufacturing method thereof |
| 07/21/2009 | US7563729 Method of forming a dielectric film |
| 07/21/2009 | US7563728 Methods of modifying interlayer adhesion |
| 07/21/2009 | US7563696 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
| 07/21/2009 | US7563659 Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same |
| 07/21/2009 | US7563488 Construction of a sputtering target by spraying |
| 07/21/2009 | US7563481 Method and apparatus for processing polysilazane film |
| 07/21/2009 | US7563328 Method and apparatus for gas injection system with minimum particulate contamination |
| 07/21/2009 | US7563042 Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus |
| 07/21/2009 | US7562638 Methods and arrangement for implementing highly efficient plasma traps |
| 07/16/2009 | WO2009088867A2 Method for printing high quality images on curved substrates |
| 07/16/2009 | WO2009088522A2 Cobalt nitride layers for copper interconnects and methods for forming them |
| 07/16/2009 | WO2009088471A1 Low thermal conductivity low density pyrolytic boron nitride material, method of making, and articles made therefrom |
| 07/16/2009 | WO2009088444A1 Vaporization apparatus with precise powder metering |
| 07/16/2009 | WO2009087906A1 Film forming method and film forming apparatus |
| 07/16/2009 | WO2009087887A1 Plasma processing apparatus |
| 07/16/2009 | WO2009087708A1 Photoelectromotive element, and its manufacturing method |
| 07/16/2009 | WO2009087104A1 Dosimeter based on monocrystalline synthetic diamond |
| 07/16/2009 | WO2009086772A1 Gas distribution system and semiconductor processing device using the gas distribution system |
| 07/16/2009 | WO2009049020A3 Chemical vapor deposition reactor |
| 07/16/2009 | US20090181526 Plasma Doping Method and Apparatus |
| 07/16/2009 | US20090181524 Method of manufacturing semiconductor device and apparatus for processing substrate |
| 07/16/2009 | US20090181523 Method of manufacturing semiconductor device and apparatus for processing substrate |
| 07/16/2009 | US20090181441 Porous silicon-polymer composites for biosensor applications |
| 07/16/2009 | US20090181283 Regeneration method of separator for fuel cell, regenerated separator for fuel cell and fuel cell |
| 07/16/2009 | US20090181249 Paper substrate comprising vapour deposited triazine, and process for making a laminate comprising said substrate |
| 07/16/2009 | US20090181212 Process for fabricating amorphous hydrogenated silicon carbide films provided with through-pores and films thus obtained |
| 07/16/2009 | US20090181186 Plasma arc coating system |
| 07/16/2009 | US20090181185 Method and apparatus for surface treatment of containers or objects |
| 07/16/2009 | US20090181178 SiCOH DIELECTRIC MATERIAL WITH IMPROVED TOUGHNESS AND IMPROVED Si-C BONDING, SEMICONDUCTOR DEVICE CONTAINING THE SAME, AND METHOD TO MAKE THE SAME |
| 07/16/2009 | US20090181169 Method for growing thin films |
| 07/16/2009 | US20090181168 Solid precursor sublimator |
| 07/16/2009 | US20090178762 Substrate processing apparatus |
| 07/16/2009 | US20090178694 Substrate processing apparatus |
| 07/16/2009 | US20090178621 Substrate treating system for depositing a metal gate on a high-k dielectric film and improving high-k dielectric film and metal gate interface |
| 07/16/2009 | US20090178620 Process for Depositing Thin Layers on a Substrate in a Process Chamber of Adjustable Height |
| 07/16/2009 | US20090178619 Substrate processing apparatus |
| 07/16/2009 | US20090178618 Multilayered boron nitride/silicon nitride fiber coatings |
| 07/16/2009 | US20090178617 Rf grounding of cathode in process chamber |
| 07/16/2009 | US20090178616 Apparatus for chemical vapor deposition (cvd) with showerhead |
| 07/16/2009 | US20090178615 Showerhead and chemical vapor deposition apparatus having the same |
| 07/16/2009 | US20090178614 Film-forming apparatus |
| 07/16/2009 | US20090178611 Gallium trichloride injection scheme |
| 07/16/2009 | DE102008004308A1 Durchführung für eine Batterie, Verfahren zur Herstellung derselben und Batterie Implementation for a battery, method of preparing the same and battery |
| 07/16/2009 | DE10155712B4 Zinkoxid-Schicht und Verfahren zu dessen Herstellung Zinc oxide layer, and process for its preparation |
| 07/15/2009 | EP2078103A1 Method for easy-to-clean substrates and articles therefrom |
| 07/15/2009 | EP2078102A2 Antimony and germanium complexes useful for cvd/ald of metal thin films |
| 07/15/2009 | EP1472195B1 Method for coating the quartz burner of an hid lamp |
| 07/15/2009 | CN101484609A Film deposition method, film deposition apparatus, and storage medium |
| 07/15/2009 | CN101481798A Film forming method and film forming device using plasma CVD |
| 07/15/2009 | CN101481797A Gas injection unit and thin film deposition apparatus having the same |
| 07/15/2009 | CN101481796A Gas injector and film deposition apparatus having the same |
| 07/15/2009 | CN101481795A Continuous plasma reinforced chemical vapor deposition reaction chamber for preparing amorphous silicon film |
| 07/15/2009 | CN101481794A Film formation method and apparatus for semiconductor process |
| 07/15/2009 | CN101481793A Large area microwave plasma CVD device |
| 07/15/2009 | CN101481792A Preparation of boron doped diamond superconduction material |
| 07/15/2009 | CN100514574C Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system |
| 07/15/2009 | CN100513637C Method for producing semi-conducting devices and devices obtained with this method |
| 07/15/2009 | CN100513636C Organometallic compounds |
| 07/15/2009 | CN100513635C Driving mechanism for vacuum process equipment |
| 07/15/2009 | CN100513632C Thin film forming device and thin film forming method |
| 07/14/2009 | US7560793 Atomic layer deposition and conversion |
| 07/14/2009 | US7560668 Substrate processing device |