| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/04/2009 | US7569284 Incorporation of nitrogen into high k dielectric film |
| 08/04/2009 | US7569256 Plasma CVD apparatus and dry cleaning method of the same |
| 08/04/2009 | US7569251 Method of forming a thermal protective coating on a super alloy metal substrate |
| 08/04/2009 | US7569191 Pentakis(dimethylamino) tantalum; vapor deposition; sublimation to produce the gas |
| 08/04/2009 | CA2486594C Connector for expandable downhole tubulars |
| 07/30/2009 | WO2009094263A1 Organometallic compounds, processes and methods of use |
| 07/30/2009 | WO2009094262A1 Organometallic compounds, processes and methods of use |
| 07/30/2009 | WO2009094259A1 Organometallic compounds processes and methods of use |
| 07/30/2009 | WO2009093994A1 Metal catalyzed selective deposition of materials including germanium and antimony |
| 07/30/2009 | WO2009093581A1 Insulating film material, film forming method using the insulating film material, and insulating film |
| 07/30/2009 | WO2009093527A1 Alloy to be surface-coated and sliding members |
| 07/30/2009 | WO2009093459A1 Atomic layer growing apparatus and thin film forming method |
| 07/30/2009 | WO2009093417A1 Susceptor and vapor phase growth system and vapor phase growth method |
| 07/30/2009 | WO2009093366A1 Metal compound, chemical vapor deposition material containing the same, and method for producing metal-containing thin film |
| 07/30/2009 | WO2009093171A1 Improved phase control in hf- or zr-based high-k oxides |
| 07/30/2009 | WO2009092459A1 Vacuum coating apparatus and method |
| 07/30/2009 | WO2009061668A8 Solution based lanthanum precursors for atomic layer deposition |
| 07/30/2009 | US20090192652 Substrate processing apparatus and substrate processing method |
| 07/30/2009 | US20090191717 Atomic layer deposition apparatus |
| 07/30/2009 | US20090191352 Combustion-Assisted Substrate Deposition Method For Producing Carbon Nanosubstances |
| 07/30/2009 | US20090191349 Aerosol generator, method for generating aerosol, film forming apparatus, and method for manufacturing film forming body |
| 07/30/2009 | US20090191340 Substrate processing method and system |
| 07/30/2009 | US20090191339 electrodeposition; chemical vapor deposition; atomic layer deposition |
| 07/30/2009 | US20090191338 Film-Deposition Apparatus and Film-Deposition Method |
| 07/30/2009 | US20090191337 Gas supply system, substrate processing apparatus and gas supply method |
| 07/30/2009 | US20090191336 Method and apparatus for simpified startup of chemical vapor deposition of polysilicon |
| 07/30/2009 | US20090191109 Exhaust structure of film-forming apparatus, film-forming apparatus, and method for processing exhaust gas |
| 07/30/2009 | US20090191042 Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof |
| 07/30/2009 | US20090188643 Creping blade |
| 07/30/2009 | US20090188626 Plasma jet device |
| 07/30/2009 | US20090188526 Process of cleaning a semiconductor manufacturing system and method of manufacturing a semiconductor device |
| 07/30/2009 | US20090188431 Substrate processing apparatus and method for manufacturing a semiconductor device |
| 07/30/2009 | DE112007001521T5 Organometallische Verbindungen Organometallic compounds |
| 07/30/2009 | DE102005051685B4 Werkstück aus einem Siliciumnitridsubstrat sowie Verfahren zu seiner Herstellung Workpiece made of a silicon nitride substrate, and methods for its preparation |
| 07/29/2009 | EP2083096A1 Antimony precursors for GST Films In ALD/CVD processes |
| 07/29/2009 | EP2083095A2 Diamond-like carbon film for sliding parts and method for production thereof |
| 07/29/2009 | EP2082996A1 Improved method for depositing a metal-containing coating on a substrate |
| 07/29/2009 | EP2082856A2 Mold for extrusion forming of ceramic articles |
| 07/29/2009 | EP2082814A1 Reactor cleaning apparatus |
| 07/29/2009 | EP2082078A2 Formation of high quality dielectric films of silicon dioxide for sti: usage of different siloxane-based precursors for harp ii - remote plasma enhanced deposition processes |
| 07/29/2009 | EP2082077A2 System and method including a particle trap/filter for recirculating a dilution gas |
| 07/29/2009 | EP2007917B1 Method for depositing silicon nitride films and/or silicon oxynitride films by chemical vapor deposition |
| 07/29/2009 | EP1937867A4 Deposition apparatus for the formation of polycrystalline materials on mobile substrates |
| 07/29/2009 | EP1834008B1 Al2o3 multilayer plate |
| 07/29/2009 | EP1815041A4 Wafer fab |
| 07/29/2009 | EP1592822B1 Disk coating system |
| 07/29/2009 | EP1390174A4 Apparatus and method for controlling temperature uniformity of substrates |
| 07/29/2009 | EP1312695B1 Sputtering target producing few particles, backing plate provided with the target, and a method of producing the target |
| 07/29/2009 | CN101495675A Chemical vapor deposition reactor having multiple inlets |
| 07/29/2009 | CN101495674A Method for forming porous insulating film |
| 07/29/2009 | CN101495673A CVD film forming method and CVD film forming apparatus |
| 07/29/2009 | CN101495672A Antimony and germanium complexes useful for CVD/ALD of metal thin films |
| 07/29/2009 | CN101495671A System architecture and method for solar panel formation |
| 07/29/2009 | CN101495670A Plasma confinement ring assemblies having reduced polymer deposition characteristics |
| 07/29/2009 | CN101495669A Bonded multi-layer RF window |
| 07/29/2009 | CN101495668A Wafer support pin assembly |
| 07/29/2009 | CN101492812A Nozzle system capable of continuously evening chemical vapour deposition of large area |
| 07/29/2009 | CN100521103C Plasma processing apparatus and method |
| 07/29/2009 | CN100521086C Methods of forming metal-comprising materials and capacitor electrodes, and capacitor constructions |
| 07/29/2009 | CN100521083C Processing method, compress control method, transmitting method and transmitting device |
| 07/29/2009 | CN100521013C Foil for negative electrode of capacitor and process for producing the same |
| 07/29/2009 | CN100520503C Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate by using the system |
| 07/29/2009 | CN100520382C Plasma monitoring method, plasma monitor and plasma treatment appts. |
| 07/29/2009 | CN100519837C Thin films and a method for producing the same |
| 07/29/2009 | CN100519836C Large area VHF-PECVD reaction chamber special-shaped electrode capable of obtaining even electric field |
| 07/29/2009 | CN100519835C Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell |
| 07/29/2009 | CN100519834C Device and method for manufacturing thin films |
| 07/29/2009 | CN100519833C Shower head, thin films manufacturing device and manufacturing method |
| 07/29/2009 | CN100519832C Method for forming film |
| 07/29/2009 | CN100519831C Annealing single crystal chemical vapor depositon diamonds |
| 07/29/2009 | CN100519830C Machine for the treatment of bottles that are equipped with an interchangeable connection cartridge |
| 07/28/2009 | US7566957 Support device with discrete getter material microelectronic devices |
| 07/28/2009 | US7566938 Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures |
| 07/28/2009 | US7566665 Semiconductor device manufacturing method and manufacturing line thereof |
| 07/28/2009 | US7566481 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) |
| 07/28/2009 | US7566478 Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| 07/28/2009 | US7566477 Thermal chemical vapor deposition |
| 07/28/2009 | US7566438 Method for manufacturing nanostructured manganese oxide having dendritic structure, and oxygen reduction electrode comprising nanostructured transition metal oxide having dendritic structure |
| 07/28/2009 | US7566379 Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
| 07/28/2009 | US7566378 Arrangement of electronic semiconductor components on a carrier system for treating said semiconductor components with a liquid medium |
| 07/28/2009 | US7566368 Method and apparatus for an improved upper electrode plate in a plasma processing system |
| 07/28/2009 | US7565880 Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same |
| 07/28/2009 | US7565879 Plasma processing apparatus |
| 07/23/2009 | WO2009091724A1 Low thermal conductivity, cmas-resistant thermal barrier coatings |
| 07/23/2009 | WO2009091721A2 Cmas-resistant thermal barrier coatings |
| 07/23/2009 | WO2009091384A1 Nanofilm protective and release matrices |
| 07/23/2009 | WO2009091376A2 Method and apparatus for high-pressure atomic-beam laser induced deposition/etching |
| 07/23/2009 | WO2009091311A1 A biocompatible filter member for body fluid dialysis and fabrication and use thereof |
| 07/23/2009 | WO2009090987A1 Atmospheric plasma discharge treating apparatus, and atmospheric plasma discharge treating method |
| 07/23/2009 | WO2009090904A1 Method for growing group iii nitride crystal |
| 07/23/2009 | WO2009090899A1 Placing table apparatus, processing apparatus and temperature control method |
| 07/23/2009 | WO2009090839A1 Film-forming apparatus |
| 07/23/2009 | WO2009090504A1 Apparatus for providing material on a deposition surface |
| 07/23/2009 | WO2009070855A3 Enhancing catalytic activity of nanoporous materials |
| 07/23/2009 | US20090186980 Manufacturing method of low-k thin films and low-k thin films manufactured therefrom |
| 07/23/2009 | US20090186479 Semiconductor processing system including vaporizer and method for using same |
| 07/23/2009 | US20090186467 Substrate Processing Apparatus and Producing Method of Semiconductor Device |
| 07/23/2009 | US20090186214 Method of growing carbon nanomaterials on various substrates |
| 07/23/2009 | US20090186206 Diamond-like carbon film for sliding parts and method for production thereof |
| 07/23/2009 | US20090186194 Batch Process for Coating Nanoscale Features and Devices Manufactured From Same |