| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/04/2009 | WO2009069695A1 Transparent electroconductive film and process for producing the transparent electroconductive film |
| 06/04/2009 | WO2009069286A1 Iii nitride structure and method for manufacturing iii nitride structure |
| 06/04/2009 | WO2009069211A1 Plasma process electrode and plasma process device |
| 06/04/2009 | WO2009069204A1 Dielectric barrier discharging device |
| 06/04/2009 | WO2009068769A1 Process for depositing boron compounds by cvd or pvd |
| 06/04/2009 | WO2009068454A1 Metal-organic compounds containing an amidinate ligand and their use of vapour phase deposition of metal containing thin films |
| 06/04/2009 | WO2009068150A1 Frame-based vacuum chamber for coating systems |
| 06/04/2009 | WO2009042054A3 Organosiloxane materials for selective area deposition of inorganic materials |
| 06/04/2009 | WO2009031886A3 Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma |
| 06/04/2009 | WO2009001220A3 Functionalization of microscopy probe tips |
| 06/04/2009 | WO2007047542A3 Method of preventing analyte alteration in diagnostic apparatuses involving contact of liquid and electrode |
| 06/04/2009 | WO2006118774A3 Silicon shelf towers |
| 06/04/2009 | US20090142524 Fine laminar barrier protective layer |
| 06/04/2009 | US20090142513 Film formation method, cleaning method and film formation apparatus |
| 06/04/2009 | US20090142491 Method of Film Deposition and Film Deposition System |
| 06/04/2009 | US20090142490 Film forming method and film forming apparatus |
| 06/04/2009 | US20090142489 Linear deposition sources for deposition processes |
| 06/04/2009 | US20090142475 Apparatus and method for depositing film, and method of manufacturing luminescent device |
| 06/04/2009 | US20090142227 Parylene Coating and Method for the Production Thereof |
| 06/04/2009 | US20090140717 Structures and methods for measuring beam angle in an ion implanter |
| 06/04/2009 | US20090140628 Inner coating of lamp vessels, such as discharge vessels of gas discharge lamps |
| 06/04/2009 | US20090140390 GaAs SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME, AND GROUP III-V COMPOUND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
| 06/04/2009 | US20090140353 Method of Film Deposition and Film Deposition System |
| 06/04/2009 | US20090139960 Method of fabricating an apparatus of fabricating an flat panel display device and method for fabricating flat panel display device |
| 06/04/2009 | US20090139808 Method of fabricating carbon fiber reinforced composite material parts |
| 06/04/2009 | US20090139658 Plasma processing apparatus |
| 06/04/2009 | US20090139453 Multi-station plasma reactor with multiple plasma regions |
| 06/04/2009 | US20090139451 Process of monitoring dispensing of process fluids in precision processing operations |
| 06/04/2009 | DE102007058052A1 Transferkammer für eine Vakuumbeschichtungsanlage und Vakuumbeschichtungsanlage Transfer chamber for vacuum coating machine and vacuum coating machine |
| 06/04/2009 | DE102007057644A1 Vakuumkammer auf Rahmenbasis für Beschichtungsanlagen Vacuum chamber on a frame basis for coating systems |
| 06/03/2009 | EP2065489A1 PROCESS FOR PRODUCING GaN SINGLE-CRYSTAL, GaN THIN-FILM TEMPLATE SUBSTRATE AND GaN SINGLE-CRYSTAL GROWING APPARATUS |
| 06/03/2009 | EP2065390A1 Metal organic compounds containing an amidinate ligand and their use for vapour phase deposition of metal containing thin films |
| 06/03/2009 | EP2065364A1 Metal complexes of tridentate beta-ketoiminates |
| 06/03/2009 | CN101448972A Hot source |
| 06/03/2009 | CN101448971A Film forming method and film forming apparatus |
| 06/03/2009 | CN101445919A Semiconductor manufacturing apparatus and manufacturing method of semiconductor device |
| 06/03/2009 | CN101445918A Apparatus for depositting atomic layer |
| 06/03/2009 | CN101445917A Gas piping structure of PECVD device |
| 06/03/2009 | CN100495739C Stacked photovoltaic device |
| 06/03/2009 | CN100495655C Gas treatment device and heat readiting method |
| 06/03/2009 | CN100495588C Method for producing transparent base with transparent conductive fil |
| 06/03/2009 | CN100495413C A method for adjoining adjacent coatings on a processing element |
| 06/03/2009 | CN100495181C Thin film transistor substrate using low dielectric constant and method for manufacturing the same |
| 06/03/2009 | CN100494821C Heating medium circulating device and thermal treatment equipment usint the device |
| 06/03/2009 | CN100494488C Dielectric barrier discharge plasma hot wire chemical gaseous phase deposition method and its device |
| 06/03/2009 | CN100494487C Film-forming apparatus and film-forming method |
| 06/03/2009 | CN100494486C Method for developing m-face or a-face ZnO film by metal organic chemical vapour deposition |
| 06/03/2009 | CN100494485C Method for preparing superconducting band of oxides |
| 06/03/2009 | CN100494484C Chemical vapour deposition device |
| 06/02/2009 | US7541102 Protective layer for a body, and process and arrangement for producing protective layers |
| 06/02/2009 | US7541069 Method and system for coating internal surfaces using reverse-flow cycling |
| 06/02/2009 | US7541061 Vacuum chamber load lock structure and article transport mechanism |
| 06/02/2009 | US7540923 Shower head structure for processing semiconductor |
| 06/02/2009 | US7540920 Silicon-containing layer deposition with silicon compounds |
| 06/02/2009 | US7540305 Chemical processing system and method |
| 06/02/2009 | US7540257 Plasma processing apparatus and semiconductor device manufactured by the same apparatus |
| 05/28/2009 | WO2009067284A1 Quick-change precursor manifold for large-area cvd and pecvd |
| 05/28/2009 | WO2009066630A1 Water-repellent or antifouling article and window glass for building, window glass for vehicle, display member, and optical part all employing the same |
| 05/28/2009 | WO2009066464A1 Nitride semiconductor and nitride semiconductor crystal growth method |
| 05/28/2009 | WO2009065545A1 The use of a binary coating comprising first and second different metallic elements |
| 05/28/2009 | WO2009065410A1 Object having a ductile and corrosion resistant surface layer |
| 05/28/2009 | WO2009041774A3 Electrospray vaporizer |
| 05/28/2009 | WO2009036722A3 Device for the plasma treatment of workpieces |
| 05/28/2009 | US20090137108 Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer |
| 05/28/2009 | US20090137099 Mbe device and method for the operation thereof |
| 05/28/2009 | US20090137087 Method of manufacturing semiconductor device, film deposition method, and film deposition apparatus |
| 05/28/2009 | US20090137043 Methods for modification of polymers, fibers and textile media |
| 05/28/2009 | US20090136686 Methods for Controllably Induction Heating an Article |
| 05/28/2009 | US20090136685 Metal Complexes of Tridentate Beta-Ketoiminates |
| 05/28/2009 | US20090136684 Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| 05/28/2009 | US20090136682 Carbon nanotube synthesis for nanopore devices |
| 05/28/2009 | US20090136677 vapor deposition; atomic layer deposition; heat resistance |
| 05/28/2009 | US20090136668 Method and apparatus to help promote contact of gas with vaporized material |
| 05/28/2009 | US20090136667 Novel pore-forming precursors composition and porous dielectric layers obtained therefrom |
| 05/28/2009 | US20090136666 Method for manufacturing polycrystalline silicon |
| 05/28/2009 | US20090136665 Atomic layer deposition apparatus |
| 05/28/2009 | US20090136664 Method for forming aluminide diffusion coatings |
| 05/28/2009 | US20090136663 Vacuum vapor deposition apparatus and method, and vapor deposited article formed therewith |
| 05/28/2009 | US20090136652 Showerhead design with precursor source |
| 05/28/2009 | US20090136408 Polycrystalline silicon manufacturing apparatus and manufacturing method |
| 05/28/2009 | US20090134121 Plasma processing apparatus and method |
| 05/28/2009 | US20090134120 Plasma Processing Method and Plasma Processing Apparatus |
| 05/28/2009 | US20090134010 Sputtering apparatus and sputtering method |
| 05/28/2009 | US20090133838 Plasma Processor Apparatus |
| 05/28/2009 | US20090133836 Adjustable height pif probe |
| 05/28/2009 | US20090133835 Processing apparatus |
| 05/28/2009 | US20090133755 Gas supply system and proessing system |
| 05/28/2009 | US20090133742 Solar cell and method of manufacturing the same |
| 05/28/2009 | US20090133715 Cleaning method |
| 05/28/2009 | US20090133632 Safe liquid source containers |
| 05/28/2009 | US20090133631 Coating device and method of producing an electrode assembly |
| 05/28/2009 | US20090133630 Batch-Type Remote Plasma Processing Apparatus |
| 05/28/2009 | US20090133629 In-line film-formation apparatus |
| 05/28/2009 | US20090133628 Vacuum device for continuous processing of substrates |
| 05/28/2009 | US20090133627 Substrate processing apparatus and method, and gas nozzle for improving purge efficiency |
| 05/28/2009 | US20090133626 Apparatus for pecvd deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device |
| 05/28/2009 | US20090133623 Metal film production apparatus and metal film production method |
| 05/28/2009 | US20090133622 Plasma assisted apparatus for organic film deposition |
| 05/28/2009 | US20090133515 Devices and Methods For Performing Inspections, Repairs, and/or Other Operations Within Vessels |
| 05/28/2009 | CA2706255A1 Quick-change precursor manifold for large-area cvd and pecvd |