| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/19/2009 | CN100530756C Diffusion barrier coatings having graded compositions and devices incorporating the same |
| 08/19/2009 | CN100530563C Process capable of improving film uniformity before chemical mechanical grinding |
| 08/19/2009 | CN100530562C Atomic layer deposited dielectric layers |
| 08/19/2009 | CN100530554C HDP-CVD multistep gapfill process |
| 08/19/2009 | CN100530546C Self-cleaning catalyst chemical vapor deposition device and cleaning method therefor |
| 08/19/2009 | CN100530543C 外延生长方法 Epitaxial growth |
| 08/19/2009 | CN100530537C Semiconductor treating device |
| 08/19/2009 | CN100530532C Plasma processing apparatus and plasma processing method |
| 08/19/2009 | CN100530530C Plasma processing apparatus and plasma processing method |
| 08/19/2009 | CN100530444C Material for forming insulation film and film-forming method with the use of the material |
| 08/19/2009 | CN100529815C Optical systems |
| 08/19/2009 | CN100529374C Piston ring, piston, cylinder and piston pin having amorphous and hard carbon film |
| 08/19/2009 | CN100529212C Silicon nitride coat ring and preparation method thereof |
| 08/19/2009 | CN100529198C Support system for treating device |
| 08/19/2009 | CN100529176C Plasma reinforced chemical vapour deposition apparatus |
| 08/19/2009 | CN100529175C Double heater and chemical vapor deposition process for preparing super conductive film therein |
| 08/19/2009 | CN100529174C Method and apparatus for forming a high quality low temperature silicon nitride layer |
| 08/19/2009 | CN100529173C Lock chamber device for vacuum treatment unit and procedures for its operation |
| 08/19/2009 | CN100529172C Laser drilled surfaces for substrate processing chambers |
| 08/19/2009 | CN100529155C Hydrogen sulfide injection method for phosphor deposition |
| 08/19/2009 | CN100528431C Surface-coated cermet cutting tool |
| 08/18/2009 | USRE40873 cutting tool having a WC Co based cemented carbide body and a multi-layer coating; applying a first innermost bonding layer TiN to the body, second layer of multiple sublayers of Ti-Al nitride, third layer of Ti Al nitride, and fourth layer of TiN; thickness of 2nd layer is 75-95% of total thickness |
| 08/18/2009 | USRE40871 Method of producing plasma display panel with protective layer of an alkaline earth oxide |
| 08/18/2009 | US7576378 Systems and methods for forming metal oxides using metal diketonates and/or ketoimines |
| 08/18/2009 | US7576303 Wafer holder, and wafer prober provided therewith |
| 08/18/2009 | US7576017 Method and apparatus for forming a thin-film solar cell using a continuous process |
| 08/18/2009 | US7576012 Atomic layer deposition methods |
| 08/18/2009 | US7575784 Coating formation by reactive deposition |
| 08/18/2009 | US7575781 Method for depositing a polymeric coating on a substrate |
| 08/18/2009 | US7575775 Polysulfide thermal vapour source for thin sulfide film deposition |
| 08/18/2009 | US7575638 Apparatus for defining regions of process exclusion and process performance in a process chamber |
| 08/18/2009 | US7575370 Heat treatment apparatus and method of calibrating the apparatus |
| 08/18/2009 | US7574974 Device for production of a plasma sheet |
| 08/13/2009 | WO2009099461A1 Method of making ceramic reactor components and ceramic reactor component made therefrom |
| 08/13/2009 | WO2009099254A1 Method for insulating film formation, storage medium from which information is readable with computer, and treatment system |
| 08/13/2009 | WO2009099233A1 Diamond uv sensor element and manufacturing method thereof, uv sensor device, diamond single crystal processing method |
| 08/13/2009 | WO2009098979A1 Iii nitride semiconductor epitaxial substrate and method for manufacturing the same |
| 08/13/2009 | WO2009098815A1 Liquid material carburetor, and filming device using the carburetor |
| 08/13/2009 | WO2009098784A1 Plasma cvd apparatus, plasma cvd method, and agitating device |
| 08/13/2009 | WO2009097888A1 Lock device for adding and removing containers to and from a vacuum treatment chamber |
| 08/13/2009 | WO2008104013A3 Method for the production of a coating |
| 08/13/2009 | US20090203227 Film Formation method and apparatus for forming silicon-containing insulating film |
| 08/13/2009 | US20090203226 Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the same |
| 08/13/2009 | US20090203223 Substrate mounting table for plasma processing apparatus, plasma processing apparatus and insulating film forming method |
| 08/13/2009 | US20090203198 Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same |
| 08/13/2009 | US20090203194 Transparent conductive film deposition apparatus, film deposition apparatus for continuous formation of multilayered transparent conductive film, and method of forming the film |
| 08/13/2009 | US20090202863 Methods of bonding pure rhenium to a substrate |
| 08/13/2009 | US20090202790 Article Having a Relatively Soft Support Material and a Relatively Hard Decorative Layer and Also a Method For Its Manufacture |
| 08/13/2009 | US20090202787 Method for manufacturing a nanostructure in-situ, and in-situ manufactured nanostructure devices |
| 08/13/2009 | US20090202763 Multidirectionally Reinforced Shape Woven Preforms for Composite Structures |
| 08/13/2009 | US20090202762 Plastic formed article having a vapor-deposited film by a plasma cvd method |
| 08/13/2009 | US20090202742 Organometallic precursor compounds |
| 08/13/2009 | US20090202721 Method for Thin Film Formation |
| 08/13/2009 | US20090202720 Film Forming and Cleaning Method |
| 08/13/2009 | US20090202718 Passivation of porous ceramic articles |
| 08/13/2009 | US20090202710 Atomic layer deposition of tantalum-containing materials using the tantalum precursor taimata |
| 08/13/2009 | US20090202708 Apparatus for Manufacturing Light Emitting Elements and Method of Manufacturing Light Emitting Elements |
| 08/13/2009 | US20090202411 treating gas stream containing silicon-containing gas by conveying gas stream to pump, supplying to pump an oxidant for oxidizing silicon-containing gas within pump and a liquid, and exhausting from pump the liquid containing a by-product of oxidation of the silicon-containing gas |
| 08/13/2009 | US20090200269 Protective coating for a plasma processing chamber part and a method of use |
| 08/13/2009 | US20090200251 Clamping mechanism for semiconductor device |
| 08/13/2009 | US20090199968 Method and Apparatus for Electronic Device Manufacture Using Shadow Masks |
| 08/13/2009 | US20090199768 Magnetic domain patterning using plasma ion implantation |
| 08/13/2009 | US20090199767 Device for clamping and positioning an evaporator boat |
| 08/13/2009 | US20090199766 Electrode orientation and parallelism adjustment mechanism for plasma processing systems |
| 08/13/2009 | US20090199763 Process for the production of gan or aigan crystals |
| 08/13/2009 | DE102008029379A1 Arrangement for coating band-shaped film substrates e.g. ferromagnetic metal film, comprises wind-off and take-up rollers guided between the substrates under strip tensile stress and coating station comprising two coating sources |
| 08/12/2009 | EP2088221A1 Non-aqueous electrolyte secondary battery negative electrode material, making method, lithium ion secondary battery, and electrochemical capacitor |
| 08/12/2009 | EP2088132A2 Method for manufacturing a glass disc for a photovoltaic module coated with a transparent metal oxide |
| 08/12/2009 | EP2087146A1 Multilayered coatings for use on electronic devices or other articles |
| 08/12/2009 | EP2087143A2 Vapour-deposited coating and thermally stressable component having such a coating, and also a process and apparatus for producing such a coating |
| 08/12/2009 | EP1861520B1 Gas inlet element for a cvd reactor |
| 08/12/2009 | CN201288217Y Plasma chemical vapor deposition vacuum apparatus for photovoltaic assembly scale manufacture |
| 08/12/2009 | CN201288216Y Security improved plumbago disk grasper |
| 08/12/2009 | CN101506952A Oxide film forming method and apparatus therefor |
| 08/12/2009 | CN101506950A Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof |
| 08/12/2009 | CN101506561A Integrated gas panel apparatus |
| 08/12/2009 | CN101506095A Apparatus and method for manufacturing carbon structure |
| 08/12/2009 | CN101504983A Corrosion resistant metal composite for electrochemical devices and methods of producing the same |
| 08/12/2009 | CN101504980A Non-aqueous electrolyte secondary battery negative electrode material, making method, lithium ion secondary battery, and electrochemical capacitor |
| 08/12/2009 | CN101504915A Plasma etching method and plasma etching apparatus |
| 08/12/2009 | CN101503796A Apparatus for preparing CVD diamond film for linear sample |
| 08/12/2009 | CN101503795A Twin-type coating device with improved separating plate |
| 08/12/2009 | CN101503429A Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| 08/12/2009 | CN101502835A Method for cleaning graphite base in MOCVD equipment |
| 08/12/2009 | CN100526915C Multilayer material and method of preparing same |
| 08/12/2009 | CN100526639C Method and equipment for handling and mounting wind turbine blades |
| 08/12/2009 | CN100526501C Vaporizing device and treatment apparatus |
| 08/12/2009 | CN100526318C Precursors for deposition of metal oxide layers or films |
| 08/11/2009 | US7573192 Organic EL panel manufacturing method |
| 08/11/2009 | US7572715 Selective epitaxy process with alternating gas supply |
| 08/11/2009 | US7572481 Pattern forming method and pattern forming apparatus |
| 08/11/2009 | US7572339 Surface treatment system and method thereof |
| 08/11/2009 | US7572338 Mask for depositing thin film of flat panel display and method of fabricating the mask |
| 08/11/2009 | US7572337 Blocker plate bypass to distribute gases in a chemical vapor deposition system |
| 08/11/2009 | US7571698 Low-frequency bias power in HDP-CVD processes |
| 08/11/2009 | US7571697 Plasma processor coil |
| 08/06/2009 | WO2009097206A1 Electrode assemblies, plasma apparatuses and systems including electrode assemblies, and methods for generating plasma |
| 08/06/2009 | WO2009096961A1 Nanostructures and methods of making the same |
| 08/06/2009 | WO2009096952A1 System and method for containment shielding of pecvd deposition sources |
| 08/06/2009 | WO2009096578A1 Method for producing group iii nitride-based compound semiconductor, wafer including group iii nitride-based compound semiconductor, and group iii nitride-based compound semiconductor device |