Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
08/2009
08/27/2009US20090214757 Gluing unit for an end edge of a log
08/27/2009US20090212015 Plasma-Assisted Processing in a Manufacturing Line
08/27/2009US20090211707 Apparatus for gas distribution and its applications
08/27/2009US20090211690 Rapid Prototyping of Microstructures Using a Cutting Plotter
08/27/2009US20090211526 Processing apparatus using source gas and reactive gas
08/27/2009US20090211525 Multiple ampoule delivery systems
08/27/2009US20090211414 Cutting Tool
08/27/2009US20090211213 Exhaust trap device
08/27/2009US20090211210 Trap Device
08/27/2009DE20122901U1 RF Plasma Reaktor RF plasma reactor
08/27/2009DE112007002523T5 Entfernung einer Oxidationsschicht von einem Metallsubstrat und Aufbringung einer Titanhaftschicht auf das Metallsubstrat Removal of an oxidation film of a metal substrate and applying a titanium adhesion layer onto the metal substrate
08/27/2009DE10348639B4 Schleusensystem für eine Vakuumanlage Lock system for a vacuum system
08/27/2009DE102008010674A1 Applying light protection coatings to plastic substrates or plastic coated substrates comprises treating them with plasma in presence of alkane
08/27/2009DE102008009640A1 Prozessierungssystem Processing system
08/27/2009DE102008009487A1 Strahlbehandelter Schneideinsatz und Verfahren Beam-treated cutting insert and methods
08/26/2009CN201296780Y Cavity-clearing brush head
08/26/2009CN201296779Y Novel electrode box
08/26/2009CN101517759A Method for manufacturing group iii nitride compound semiconductor light-emitting device, group iii nitride compound semiconductor light-emitting device, and lamp
08/26/2009CN101517706A Planar heater and semiconductor heat treatment apparatus provided with the heater
08/26/2009CN101517704A Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof
08/26/2009CN101517134A Process for producing gan single-crystal, gan thin-film template substrate and gan single-crystal growing apparatus
08/26/2009CN101517127A Coated cutting tool
08/26/2009CN101516900A Organometallic precursor compounds
08/26/2009CN101516818A Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex
08/26/2009CN101515538A Sealing structure for processing reaction chamber by semiconductor
08/26/2009CN101515081A Colorized film substrate and method for manufacturing same
08/26/2009CN101514448A Device and method for manufacturing process gases for steam phase separation
08/26/2009CN101514447A Process and device for coating steel strip through ECR microwave plasma chemical vapor deposition
08/26/2009CN101514446A Multiple ampoule delivery systems
08/26/2009CN101514445A Device for preparing double-sided diamond coating based on heat wire method
08/26/2009CN101514444A Preparation method for double-walled carbon nano tube electromagnetic shielding film
08/26/2009CN101514209A Copper precursors for thin film deposition
08/26/2009CN100533677C A method of fault detection in manufacturing equipment
08/26/2009CN100533673C Method for cleaning plasma processing device
08/26/2009CN100533659C Vaccuum processing apparatus
08/26/2009CN100533658C Plasma apparatus with device for reducing polymer deposition on a substrate and method for reducing polymer deposition
08/26/2009CN100533656C Film formation apparatus and method of using the same
08/26/2009CN100532639C Exhaust pipe with reactive by-product adhesion preventing means and method of preventing the adhesion
08/26/2009CN100532638C Method for growing nonpolar face GaN thin-film material and uses thereof
08/26/2009CN100532637C Capacitively coupled plasma reactor with plasma of uniform radial distribution
08/25/2009US7579042 Methods for the fabrication of thermally stable magnetic tunnel junctions
08/25/2009US7578953 Method of sulfonating an article and related apparatus
08/25/2009US7578883 Arrangement and method for abating effluent from a process
08/25/2009US7578258 Methods and apparatus for selective pre-coating of a plasma processing chamber
08/25/2009CA2412853C Single crystal diamond prepared by cvd
08/20/2009WO2009102070A1 Diamond-like carbon film forming apparatus and method for forming diamond-like carbon film
08/20/2009WO2009102033A1 Substrate for epitaxial growth, process for producing gan-base semiconductor film, gan-base semiconductor film, process for producing gan-base semiconductor luminescent element, and gan-base semiconductor luminescent element
08/20/2009WO2009101425A2 Vapour delivery system
08/20/2009WO2009101025A1 Radiation-treated cutting insert and method
08/20/2009WO2009042145A3 Delivery device for deposition
08/20/2009US20090209113 Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part
08/20/2009US20090208761 Radiation-selective absorber coating, absober tube and process for production thereof
08/20/2009US20090208725 Layer transfer for large area inorganic foils
08/20/2009US20090208669 Apparatus and method for application of a thin barrier layer onto inner surfaces of wafer containers
08/20/2009US20090208668 Formation of clean interfacial thin film solar cells
08/20/2009US20090208664 Apparatus and method for producing a reflector
08/20/2009US20090208650 Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM
08/20/2009US20090208649 Vacuum Pumping System
08/20/2009US20090208648 Forcing the fluidized starting material containing inorganic or organic compounds toward the article, article having a certain temperature; passing fluidized starting material through a high energy zone, thus making finished article with nano-scaled structures distributed in a surface of glass substrate
08/20/2009US20090208644 Organosiloxane inclusive precursors having ring and/or cage-like structures for use in combustion deposition
08/20/2009US20090208637 Cobalt precursors useful for forming cobalt-containing films on substrates
08/20/2009US20090206266 Radiation transducer and method to produce a radiation transducer
08/20/2009US20090206056 Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer Chambers
08/20/2009US20090206025 Separation membrane-porous material composite and method for manufacturing the same
08/20/2009US20090205968 Organometallic compounds, processes for the preparation thereof and methods of use thereof
08/20/2009US20090205783 Substrate processing apparatus
08/20/2009US20090205782 Plasma processing apparatus
08/20/2009US20090205570 Gas supply unit and chemical vapor deposition apparatus
08/20/2009US20090205567 Method of manufacturing semiconductor device and apparatus for processing substrate
08/20/2009DE102008032978A1 Gaszufuhreinheit und Anlage für die chemische Gasphasenabscheidung Gas supply unit and equipment for the chemical vapor deposition
08/20/2009DE102008009504A1 Multi-layer coated substrate such as household appliances comprises a transparent first layer applied on the substrate surface, which comprises a substrate contour, and a second layer adjacent to the first layer
08/20/2009DE102008008320A1 Transport device for horizontal vacuum coating plant, comprises rotatably arranged transport rollers sequentially arranged in a horizontal plane and directed diagonally to transport direction, and a gas barrier element
08/20/2009DE102006024050B4 Vorrichtung zum Aufbringen einer Beschichtung auf eine Oberfläche eines Werkstückes An apparatus for applying a coating to a surface of a workpiece
08/19/2009EP2091053A2 Transparent substrate with transparent conductive film, method of manufacturing the same, and photoelectric conversion element including the substrate
08/19/2009EP2090674A1 Vacuum coating installation and method of producing a coating layer on a substrate
08/19/2009EP2089644A2 Piston ring for internal combustion engines
08/19/2009EP2089643A2 Piston ring for internal combustion engines
08/19/2009EP2089560A2 Sliding mating part in lubricated regime, coated by a thin film
08/19/2009EP2089232A2 Non-wetting coating on a fluid ejector
08/19/2009EP1604389B1 Processing system and method for thermally treating a substrate
08/19/2009EP1509633A4 Apparatus and method for high rate uniform coating, including non-line of sight
08/19/2009EP1269526B1 Method for depositing polycrystalline sige suitable for micromachining
08/19/2009EP1043762B1 Polycrystalline silicon thin film forming method and thin film forming apparatus
08/19/2009CN201292404Y Spray head
08/19/2009CN101512043A Low temperature method of making a zinc oxide coated article
08/19/2009CN101512042A Plasma deposition apparatus and method for making polycrystalline silicon
08/19/2009CN101512041A High-throughput deposition system for oxide thin film growth by reactive coevaportation
08/19/2009CN101512040A Confinement ring drive
08/19/2009CN101511903A Chemical vapor deposition device and method
08/19/2009CN101511773A Organometallic compounds having sterically hindered amides
08/19/2009CN101511772A Imide complex, method for producing the same, metal-containing thin film and method for producing the same
08/19/2009CN101511713A Load port module
08/19/2009CN101511583A Plastic molded article comprising vapor deposition film formed by plasma cvd method
08/19/2009CN101511460A Direct liquid injector device
08/19/2009CN101510566A Wide bandgap N type nanometer silicon material for silicon film solar battery and preparation method
08/19/2009CN101510504A Transversal epitaxial growth method for nano area of semiconductor film
08/19/2009CN101509129A Integral structure body of film forming groove upper cap and show head
08/19/2009CN101508706A Organometallic compounds, processes for the preparation thereof and methods of use thereof
08/19/2009CN100530781C A lithium ion battery anode material of lithium iron phosphate and the corresponding vapor deposition and cladding method of conductive network
08/19/2009CN100530757C Vapor deposition mask and organic el display device manufacturing method