| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/30/2009 | CN101545101A Substrate cassette with electrode array |
| 09/30/2009 | CN101545100A Conveyor for baseplate carrier |
| 09/30/2009 | CN101545099A Heating system |
| 09/30/2009 | CN101544476A Super-hydrophobic transparent coating and preparation method thereof |
| 09/30/2009 | CN100546005C Plasma generation device, plasma control method, and substrate manufacturing method |
| 09/30/2009 | CN100545304C Ceramics for semiconductor processing equipment |
| 09/30/2009 | CN100545303C Alkyl push flow for vertical flow rotating disk reactors |
| 09/29/2009 | US7596305 Method and apparatus for preparing vaporized reactants for chemical vapor deposition |
| 09/29/2009 | US7595414 complex capable of being used for chemical vapor deposition of thin metal , or metal oxide films |
| 09/29/2009 | US7595263 Atomic layer deposition of barrier materials |
| 09/29/2009 | US7595098 Method and apparatus for depositing material on a substrate |
| 09/29/2009 | US7595097 Expanding thermal plasma deposition system |
| 09/29/2009 | US7595096 Method of manufacturing vacuum plasma treated workpieces |
| 09/29/2009 | US7595089 supporting bars |
| 09/29/2009 | US7595088 Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology |
| 09/29/2009 | US7595083 Table with adjustment mark; adjustment plate; syringe; supplying material through nozzle; imaging camera; detection |
| 09/29/2009 | US7595010 one non-silicon precursor (such as a germanium precursor, a carbon precursor, etc.) during formation of a silicon nitride, silicon oxide, silicon oxynitride or silicon carbide film improves the deposition rate and/or makes possible tuning of properties of the film |
| 09/29/2009 | US7594970 Web coating apparatus with a vacuum chamber and a coating cylinder |
| 09/29/2009 | US7594479 Plasma CVD device and discharge electrode |
| 09/29/2009 | CA2388375C Color shifting carbon-containing interference pigments |
| 09/24/2009 | WO2009117745A2 Surface preheating treatment of plastics substrate |
| 09/24/2009 | WO2009117229A2 Coaxial microwave assisted deposition and etch systems |
| 09/24/2009 | WO2009116588A1 Surface treatment method, showerhead, treatment container, and treatment apparatus using same |
| 09/24/2009 | WO2009116579A1 Plasma processing method and plasma processing apparatus |
| 09/24/2009 | WO2009116576A1 Atomic layer film-forming device |
| 09/24/2009 | WO2009116472A1 Placing table structure and heat treatment apparatus |
| 09/24/2009 | WO2009116191A1 Diruthenium complex and material and method for chemical vapor deposition |
| 09/24/2009 | WO2009116004A2 Alkali earth metal precursors for depositing calcium and strontium containing films |
| 09/24/2009 | WO2009115359A1 Exhaust gas treatment device for a cvd device, cvd device and exhaust gas treatment method |
| 09/24/2009 | WO2009085974A3 Low wet etch rate silicon nitride film |
| 09/24/2009 | WO2009083778A3 Silicon nitride sealing rings with diamond coating |
| 09/24/2009 | WO2007089712A3 Composite diamond assembly |
| 09/24/2009 | US20090239387 Producing method of semiconductor device and substrate processing apparatus |
| 09/24/2009 | US20090239386 Producing method of semiconductor device and substrate processing apparatus |
| 09/24/2009 | US20090239385 Substrate-supporting device having continuous concavity |
| 09/24/2009 | US20090239364 Method for forming insulating film and method for manufacturing semiconductor device |
| 09/24/2009 | US20090239356 Device manufacturing method |
| 09/24/2009 | US20090239085 SiC SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING THE SAME, AND MANUFACTURING APPARATUS THEREOF |
| 09/24/2009 | US20090239078 Process and apparatus for diamond synthesis |
| 09/24/2009 | US20090239042 Material Assisted Laser Ablation |
| 09/24/2009 | US20090239022 Information recording medium and method for production thereof |
| 09/24/2009 | US20090238999 Organic electroluminescent display device and method of preparing the same |
| 09/24/2009 | US20090238998 Coaxial microwave assisted deposition and etch systems |
| 09/24/2009 | US20090238997 Method and apparatus for deposition using pulsed atmospheric pressure glow discharge |
| 09/24/2009 | US20090238996 Substrate For Growth of Carbon Nanotube, Method for Growth of Carbon Nanotube, Method for Control of Particle Diameter of Catalyst for Growth of Carbon Nanotube and Method for Control of Carbon Nanotube Diameter |
| 09/24/2009 | US20090238995 Sheet-like plasma generator and film deposition method and equipment employing such sheet-like plasma generator |
| 09/24/2009 | US20090238990 SAM oxidative removal for controlled nanofabrication |
| 09/24/2009 | US20090238985 Systems and methods for deposition |
| 09/24/2009 | US20090238972 Methods and apparatus for using reduced purity silane to deposit silicon |
| 09/24/2009 | US20090238971 Epitaxial wafer manufacturing apparatus and manufacturing method |
| 09/24/2009 | US20090238970 Organic ruthenium compound for chemical vapor deposition, and chemical vapor deposition method using the organic ruthenium compound |
| 09/24/2009 | US20090238968 Method for Producing Component for Vacuum Apparatus, Resin Coating Forming Apparatus and Vacuum Film Forming System |
| 09/24/2009 | US20090238966 Densification of c-c composites with pitches followed by cvi/cvd |
| 09/24/2009 | US20090238951 Vacuum deposition apparatus and control method thereof |
| 09/24/2009 | US20090237837 Magnetic recording head |
| 09/24/2009 | US20090236642 Transistor and cvd apparatus used to deposit gate insulating film thereof |
| 09/24/2009 | US20090236568 Alkali earth metal precursors for depositing calcium and strontium containing films |
| 09/24/2009 | US20090236447 Method and apparatus for controlling gas injection in process chamber |
| 09/24/2009 | US20090236315 Shielded lid heater assembly |
| 09/24/2009 | US20090236214 Tunable ground planes in plasma chambers |
| 09/24/2009 | US20090236043 Plasma processing apparatus |
| 09/24/2009 | US20090236042 Silent discharge plasma apparatus |
| 09/24/2009 | US20090236041 Shower head and substrate processing apparatus |
| 09/24/2009 | US20090236040 Electrode assembly and plasma processing chamber utilizing thermally conductive gasket |
| 09/24/2009 | US20090236014 Treatment of metal components |
| 09/24/2009 | US20090235867 Susceptor for vapor phase epitaxial growth device |
| 09/24/2009 | US20090235866 Ceramic heater |
| 09/24/2009 | US20090235591 Fixed abrasive articles utilizing coated abrasive particles |
| 09/24/2009 | DE102009013854A1 Schauerkopf und Substratbearbeitungsvorrichtung Shower head and substrate processing apparatus |
| 09/24/2009 | DE102008027984A1 Substratkassette mit Elektrodenarray Substrate cassette with electrode array |
| 09/24/2009 | DE102008019023B4 Vakuum-Durchlaufanlage zur Prozessierung von Substraten Continuous vacuum system for processing of substrates |
| 09/24/2009 | DE102008015013A1 Highly-bonding hard material coating system on cubic boron nitride substrates, comprises multi-layer laminated composite introduced on the substrate |
| 09/24/2009 | DE102008000719A1 Modifying functional layers containing at least two materials, e.g. functional layers of catalysts for car exhaust treatment, involves concentrating materials in the active surface by applying a voltage across the layer |
| 09/23/2009 | EP2104134A2 Semiconductor device manufacturing method |
| 09/23/2009 | EP2103720A1 Susceptor for vapor phase epitaxial growth device |
| 09/23/2009 | EP2103711A1 Highly corrosion-resistant members and processes for production thereof |
| 09/23/2009 | EP2102383A2 Delivery device for thin film deposition |
| 09/23/2009 | EP2102382A1 Delivery device for deposition |
| 09/23/2009 | EP2102381A1 Antimicrobial material, and a method for the production of an antimicrobial material |
| 09/23/2009 | EP1771258B1 Plasma coating system for coating of substrates, and related method |
| 09/23/2009 | CN201313936Y Normal pressure plasma generator |
| 09/23/2009 | CN201313935Y Chemical gas deposition reactor and reaction chamber thereof |
| 09/23/2009 | CN201313934Y Gas charger for chemical gas deposition |
| 09/23/2009 | CN101542016A Method of forming film and film forming apparatus |
| 09/23/2009 | CN101542015A Solid precursor-based delivery of fluid utilizing controlled solids morphology |
| 09/23/2009 | CN101542014A Silicon shelf towers |
| 09/23/2009 | CN101541111A U-shaped heating element of silicon tetrachloride hydrogenation furnace and manufacturing process thereof |
| 09/23/2009 | CN101540345A Nanometer silica film three-layer stacked solar cell and preparation method thereof |
| 09/23/2009 | CN101540276A Plasma processing apparatus and method for manufacturing semiconductor device |
| 09/23/2009 | CN101538703A Glass substrate carrying device |
| 09/23/2009 | CN101538702A Equipment with gas connection mechanism |
| 09/23/2009 | CN101538277A Novel tin amino-alkoxide complexes and process for preparing thereof |
| 09/23/2009 | CN101538062A Nano ZnO semiconductor junction array and preparation method thereof |
| 09/23/2009 | CN100543947C Low electric inductivity organic silicate film mixture for deposition |
| 09/23/2009 | CN100543179C Process kit design for deposition chamber |
| 09/23/2009 | CN100543178C Deposition processes using group 8 (VIII) metallocene precursors |
| 09/23/2009 | CN100543177C Gradient method preprocessing technique for depositing CVD diamond film on hard metal surface |
| 09/22/2009 | US7592569 Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein |
| 09/22/2009 | US7592471 Tantalum compound, method for producing same, tantalum-containing thin film and method for forming same |
| 09/22/2009 | US7592275 Method and apparatus for manufacturing active matrix device including top gate type TFT |