| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/15/2009 | US7588799 Metal film production apparatus |
| 09/15/2009 | US7588736 Apparatus and method for generating a chemical precursor |
| 09/15/2009 | US7588036 Chamber clean method using remote and in situ plasma cleaning systems |
| 09/15/2009 | US7587989 Plasma processing method and apparatus |
| 09/15/2009 | CA2469150C Boron doped diamond |
| 09/11/2009 | WO2009110625A1 Submerged plasma coating apparatus, electrode for submerged plasma, and coating method using submerged plasma |
| 09/11/2009 | WO2009110436A1 Nitride semiconductor crystal and manufacturing method thereof |
| 09/11/2009 | WO2009110330A1 Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium |
| 09/11/2009 | WO2009109896A1 Apparatus for the heat treatment of disc shaped substrates |
| 09/11/2009 | WO2009109464A1 Coating apparatus with rotation module |
| 09/11/2009 | WO2009109350A1 Method for manufacturing an interference-colour-free protective layer |
| 09/11/2009 | WO2009091721A3 Cmas-resistant thermal barrier coatings |
| 09/10/2009 | US20090226758 Metal Carbonitride Layer and Method for the Production of a Metal Carbonitride Layer |
| 09/10/2009 | US20090226718 Carbon film |
| 09/10/2009 | US20090226715 Coated article and method of making the same |
| 09/10/2009 | US20090226645 Acrylate-modified aspartates and gel coat compositions made therefrom |
| 09/10/2009 | US20090226644 Gel coat compositions from acrylate-modified aspartates |
| 09/10/2009 | US20090226638 Method and Apparatus for Producing Ultra-Thin Graphitic Layers |
| 09/10/2009 | US20090226614 Porous gas heating device for a vapor deposition system |
| 09/10/2009 | US20090226613 Methods for making high-temperature coatings having pt metal modified gamma-ni + gamma'-ni3al alloy compositions and a reactive element |
| 09/10/2009 | US20090226612 Alkaline earth metal containing precursor solutions |
| 09/10/2009 | US20090226611 Void-free copper filling of recessed features using a smooth non-agglomerated copper seed layer |
| 09/10/2009 | US20090226610 Coating apparatus with rotation module |
| 09/10/2009 | US20090226293 Method and Apparatus for Manufacturing Semiconductor Wafer |
| 09/10/2009 | US20090223928 Inductively coupled plasma processing apparatus |
| 09/10/2009 | US20090223594 Passivating internal metal surfaces of pipes, piping manifold, tubes to increase shelf-life of gas compositions, especially low concentration gas products; passivation coatings made from reacting a silane compound with oxygen to improve storage stability |
| 09/10/2009 | US20090223551 Process for making solar cells |
| 09/10/2009 | US20090223453 Equipment for high volume manufacture of group iii-v semiconductor materials |
| 09/10/2009 | US20090223452 Gas heating device for a vapor deposition system |
| 09/10/2009 | US20090223451 Method and apparatus for precursor delivery system for irradiation beam instruments |
| 09/10/2009 | US20090223449 Cover part, process gas diffusing and supplying unit, and substrate processing apparatus |
| 09/10/2009 | US20090223447 Apparatus for producing silicon carbide single crystal |
| 09/10/2009 | US20090223441 High volume delivery system for gallium trichloride |
| 09/10/2009 | US20090223411 Organosilane-nonionic-water stable quaternary ammonium compositions and methods |
| 09/10/2009 | DE4447977B4 Vorrichtung und Verfahren zur Plasmabehandlung von flachen Werkstücken, insbesondere flachen, aktiven Bildschirmen, sowie Verwendung der Vorrichtung Apparatus and method for plasma treatment of flat workpieces, in particular flat active screens, as well as using the apparatus |
| 09/10/2009 | DE4428992B4 CVD-Beschichtungsvorrichtung und deren Verwendung CVD coating apparatus and the use thereof |
| 09/10/2009 | DE102008013166A1 Verfahren zur Herstellung einer interferenzfarbenfreien Schutzschicht A method for producing a protective layer free of interference colors |
| 09/10/2009 | DE102008011921A1 Beschichtung von Bauteilen einer Brennkraftmaschine zur Verminderung von Reibung, Verschleiß und Adhäsionsneigung Coating of components of an internal combustion engine to reduce friction, wear and adhesion tendency |
| 09/10/2009 | DE102008011444A1 Thermochrom beschichtete Substrate und Verfahren zu deren Herstellung Thermochromic coated substrates and processes for their preparation |
| 09/10/2009 | DE10064041B4 Verfahren zur Herstellung einer Kupferverdrahtung in einem Halbleiterbauelement A process for producing a copper wiring in a semiconductor device |
| 09/09/2009 | EP2099063A1 Film forming apparatus and method of forming film |
| 09/09/2009 | EP2099062A1 Film deposition apparatus and film deposition method |
| 09/09/2009 | EP2098609A1 Coating apparatus with rotation module |
| 09/09/2009 | EP2098608A1 Coating apparatus with rotation module |
| 09/09/2009 | EP2097555A1 Hybrid layers for use in coatings on electronic devices or other articles |
| 09/09/2009 | EP1597406B1 Foodware with multilayer stick resistant ceramic coating and method of making |
| 09/09/2009 | EP1533833B1 Vapor phase epitaxy device |
| 09/09/2009 | EP1397528B8 Cvd reactor with exhaust ring made of graphite |
| 09/09/2009 | CN101528978A Method for forming thin film |
| 09/09/2009 | CN101528977A Film deposition apparatus |
| 09/09/2009 | CN101528976A Ethylene-tetrafluoroethylene copolymer molded product and method for producing the same |
| 09/09/2009 | CN101528975A Method for easy-to-clean substrates and articles therefrom |
| 09/09/2009 | CN101528974A Formation of high quality dielectric films of silicon dioxide for sti: usage of different siloxane-based precursors for harp II-remote plasma enhanced deposition processes |
| 09/09/2009 | CN101528973A Vortex chamber lids for atomic layer deposition |
| 09/09/2009 | CN101527263A Production method for semiconductor device and substrate processing apparatus |
| 09/09/2009 | CN101527258A Cover part, process gas diffusing and supplying unit, and substrate processing apparatus |
| 09/09/2009 | CN101525743A Method for depositing semi-conductor film on substrate by using close-space sublimation technology and device thereof |
| 09/09/2009 | CN101525742A Method for sample loading, sampling and sample transferring of chemical vapor deposition material growing equipment |
| 09/09/2009 | CN101525741A Precipitation equipment for manufacturing thin film type solar battery |
| 09/09/2009 | CN101525740A Method for growing high-quality indium nitride single crystal epitaxial film |
| 09/09/2009 | CN100539027C Epitaxially growing equipment |
| 09/09/2009 | CN100537844C Method and apparatus for maintaining by-product volatility in deposition process |
| 09/09/2009 | CN100537843C Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
| 09/09/2009 | CN100537842C Preparation of metal silicon nitride films via cyclic deposition |
| 09/09/2009 | CN100537841C Forced pulse chemical gas phase permeating process |
| 09/09/2009 | CN100537840C Method for forming CVD film |
| 09/09/2009 | CN100537839C Methods of forming a phosphorus doped silicon dioxide comprising layer, and methods of forming trench isolation in the fabrication of integrated circuitry |
| 09/09/2009 | CN100537838C Low temp polysilicon film device and its manufacturing method and equipment |
| 09/09/2009 | CN100537837C Process for formation of copper-containing film |
| 09/09/2009 | CN100537836C Method for cleaning chemical vapour deposition chamber |
| 09/09/2009 | CN100537824C Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |
| 09/08/2009 | US7585752 Process for deposition of semiconductor films |
| 09/08/2009 | US7585584 Carbon nanotubes for fuel cells, method for manufacturing the same, and fuel cell using the same |
| 09/08/2009 | US7585547 Positioning precursor layers of Group 1B metal and at least one of Group 3A and Group 6a on a base facing one another with spacing inbetween; controlled localized heating when applying an electrical current to alloy; uniformity; high throughput; cost efficiency; solar cells; transisters; semiconductors |
| 09/08/2009 | US7585546 Surface passivation and sealing of micro-optics devices for improved performance in harsh environments |
| 09/08/2009 | US7585545 such that the hydrogen sulfur gas or vapour is provided at a high concentration, suitable flow rate, high temperature and energy to cause decomposition of the gas or vapour during the volatization of the source material(s) and deposition of the phosphor; full color displays |
| 09/08/2009 | US7585480 Highly pure ultra-fine SiOx powder and method for production thereof |
| 09/08/2009 | US7585386 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 09/08/2009 | US7585385 Plasma processing apparatus, control method thereof and program for performing same |
| 09/08/2009 | US7585384 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 09/08/2009 | US7585383 Vacuum processing apparatus |
| 09/08/2009 | US7585371 Substrate susceptors for receiving semiconductor substrates to be deposited upon |
| 09/08/2009 | US7585370 Gas-purged vacuum valve |
| 09/08/2009 | US7584942 Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers |
| 09/08/2009 | US7584714 Method and system for improving coupling between a surface wave plasma source and a plasma space |
| 09/08/2009 | CA2475966C Crystal production method |
| 09/08/2009 | CA2281788C Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display, and infrared irradiating device |
| 09/03/2009 | WO2009108323A2 Real time imprint process diagnostics for defects |
| 09/03/2009 | WO2009108221A2 Thermalization of gaseous precursors in cvd reactors |
| 09/03/2009 | WO2009107669A1 Thin film of metal silicon compound and process for producing the thin film of metal silicon compound |
| 09/03/2009 | WO2009107664A1 Load lock apparatus and substrate cooling method |
| 09/03/2009 | WO2009107648A1 Surface coated member and cutting tool |
| 09/03/2009 | WO2009107501A1 Thin-film deposition system |
| 09/03/2009 | WO2009107239A1 Semiconductor producing apparatus and method of pipe purging therefor |
| 09/03/2009 | WO2009107196A1 Method for plasma deposition and plasma cvd system |
| 09/03/2009 | WO2009106942A1 Semiconductor growth system which includes a boron carbide reactor component |
| 09/03/2009 | WO2009106433A1 Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ald) process |
| 09/03/2009 | WO2009106201A1 Coating components of an internal combustion engine for reducing friction, wear, and adhesion tendency |
| 09/03/2009 | WO2009106023A1 Method of making nucleation layer for diamond growth |
| 09/03/2009 | WO2008039916A8 Organometallic precursor compounds |