| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/22/2009 | US7592256 Method of forming tungsten film |
| 09/22/2009 | US7592190 Method of evaluating characteristics of and forming of an insulating film for a semiconductor device |
| 09/22/2009 | US7592066 Roofing articles with reflective thin films and the process of producing the same |
| 09/22/2009 | US7592043 Method and apparatus for coating a patterned thin film on a substrate from a fluid source with continuous feed capability |
| 09/22/2009 | US7592032 Picturing a nozzle hole of a ink jet print ejection head where the hole is pictured synchronously by applying a driving waveform to the head causing single-period micromotion of a meniscus surface of the nozzle hole after a liquid droplet ejection head is attached; accurate replacement |
| 09/22/2009 | US7591957 Method for atmospheric pressure reactive atom plasma processing for surface modification |
| 09/22/2009 | US7591922 Substrate processing apparatus and substrate processing method |
| 09/22/2009 | US7591908 Vapor deposition apparatus and vapor deposition method |
| 09/22/2009 | US7591907 Apparatus for hybrid chemical processing |
| 09/22/2009 | US7591232 Internal coil with segmented shield and inductively-coupled plasma source and processing system therewith |
| 09/22/2009 | CA2346457C Method for manufacturing a preform of an active fiber |
| 09/17/2009 | WO2009114851A2 Method for preparing electrically conducting materials and devices including same |
| 09/17/2009 | WO2009114130A2 Process and apparatus for diamond synthesis |
| 09/17/2009 | WO2009114112A2 Method and apparatus for precursor delivery system for irradiation beam instruments |
| 09/17/2009 | WO2009114060A1 In situ nano-particle matrix loading of metal oxide coatings via combustion deposition |
| 09/17/2009 | WO2009113472A1 Graphene or graphite thin film, manufacturing method thereof, thin film structure and electronic device |
| 09/17/2009 | WO2009113458A1 Group iii nitride semiconductor device and method for manufacturing the same, group iii nitride semiconductor light-emitting device and method for manufacturing the same, and lamp |
| 09/17/2009 | WO2009113400A1 Raw material supplying device |
| 09/17/2009 | WO2009112738A1 Method and system for depositing a metal or metalloid on carbon nanotubes |
| 09/17/2009 | WO2009112255A1 Packaging laminate, method for manufacturing of the packaging laminate and packaging container produced therefrom |
| 09/17/2009 | WO2009112117A1 Body coated with hard material |
| 09/17/2009 | WO2009112116A1 Body coated with hard material |
| 09/17/2009 | WO2009112115A1 Body coated with hard material |
| 09/17/2009 | WO2009112053A1 Plasma system |
| 09/17/2009 | WO2009086494A3 Multi-pass vacuum coating systems |
| 09/17/2009 | WO2009079184A3 Coated article with nanolayered coating scheme |
| 09/17/2009 | US20090234450 Lens surface enhancement |
| 09/17/2009 | US20090233442 Method and apparatus for production of metal film or the like |
| 09/17/2009 | US20090233441 Interconnections for integrated circuits |
| 09/17/2009 | US20090233429 Semiconductor device manufacturing method and substrate processing apparatus |
| 09/17/2009 | US20090233423 Method of manufacturing nitride semiconductor substrate |
| 09/17/2009 | US20090233387 Linear plasma source for dynamic (moving substrate) plasma processing |
| 09/17/2009 | US20090233385 Plasma Doping Method and Plasma Doping Apparatus |
| 09/17/2009 | US20090233108 Vacuum film formation method for inorganic layer, barrier laminate, device, and optical component |
| 09/17/2009 | US20090233105 Composite coatings comprising hollow and/or shell like metal oxide particles deposited via combustion deposition |
| 09/17/2009 | US20090233082 Glass or glass-ceramic articles with decorative coating |
| 09/17/2009 | US20090233058 Carbon nanotube structure and method for producing the same |
| 09/17/2009 | US20090233007 Chemical vapor deposition reactor and method |
| 09/17/2009 | US20090233003 Methods and systems relating to light sources for use in industrial processes |
| 09/17/2009 | US20090232987 Composition for Chemical Vapor Deposition Film-Formation and Method for Production of Low Dielectric Constant Film |
| 09/17/2009 | US20090232986 Heated valve manifold for ampoule |
| 09/17/2009 | US20090232985 Method of forming silicon oxide containing films |
| 09/17/2009 | US20090232984 Apparatus and Method of Film Formation |
| 09/17/2009 | US20090232983 Substrate temperature control for combustion chemical vapor deposition |
| 09/17/2009 | US20090232982 Porous film production method and apparatus |
| 09/17/2009 | US20090232976 Evaporating method for forming thin film |
| 09/17/2009 | US20090232967 Thermal processing apparatus, method for regulating temperature of thermal processing apparatus, and program |
| 09/17/2009 | US20090232965 Method and apparatus for producing aligned carbon nanotube aggregate |
| 09/17/2009 | US20090232721 Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film |
| 09/17/2009 | US20090230821 Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element |
| 09/17/2009 | US20090229971 Thin-Film Deposition System |
| 09/17/2009 | US20090229857 Electrode and method of forming the electrode |
| 09/17/2009 | US20090229856 Master Electrode and Method of Forming the Master Electrode |
| 09/17/2009 | US20090229855 electrode and method of forming the master electrode |
| 09/17/2009 | US20090229755 Plasma processing apparatus |
| 09/17/2009 | US20090229754 Shower head and substrate processing apparatus |
| 09/17/2009 | US20090229753 Method for manufacturing shower plate, shower plate manufactured using the method, and plasma processing apparatus including the shower plate |
| 09/17/2009 | US20090229525 Vaporizer and film forming apparatus |
| 09/17/2009 | US20090229524 Multiple Nozzle Evaporator for Vacuum Thermal Evaporation |
| 09/17/2009 | US20090229523 Film depositing apparatus |
| 09/17/2009 | US20090229522 Plasma processing apparatus |
| 09/17/2009 | US20090229521 Method and device for microwave plasma deposition of a coating on a thermoplastic container surface |
| 09/17/2009 | US20090229520 Film depositing apparatus |
| 09/17/2009 | US20090229519 Apparatus for manufacturing semiconductor thin film |
| 09/17/2009 | DE10250564B4 Verfahren zur Beschichtung einer Oberfläche, Erzeugnis und Verwendung des Erzeugnisses A method for coating a surface, product and use of the product |
| 09/17/2009 | DE102009012878A1 Schauerkopf und Substratbearbeitungsvorrichtung Shower head and substrate processing apparatus |
| 09/17/2009 | DE102008013966A1 Hartstoffbeschichteter Körper Hard coated body |
| 09/17/2009 | DE102008013965A1 Hartstoffbeschichteter Körper Hard coated body |
| 09/17/2009 | DE102008013964A1 Hartstoffbeschichteter Körper Hard coated body |
| 09/17/2009 | DE102008012931A1 Method for cooling of substrates in a treatment chamber, comprises subjecting the substrate to a heat treatment, where the substrates are arranged as substrate arrangement on a substrate carrier rotatable around an axis |
| 09/17/2009 | CA2718253A1 Plasma system |
| 09/17/2009 | CA2717188A1 Body coated with hard material |
| 09/17/2009 | CA2717187A1 Body coated with hard material |
| 09/16/2009 | EP2101348A1 Method for removing moisture from substrate coated with transparent electrode |
| 09/16/2009 | EP2101347A1 Annealing method of zinc oxide thin film |
| 09/16/2009 | EP2101345A1 Film deposition apparatus and film deposition method |
| 09/16/2009 | EP2099951A2 Substrate support structure with rapid temperature change |
| 09/16/2009 | EP1979965B1 Cathode for electrochemical reactor, electrochemical reactor incorporating such cathodes and method for making said cathode |
| 09/16/2009 | EP1608794B1 Apparatus for depositing compounds on a substrate by means of metalorganic chemical vapor deposition |
| 09/16/2009 | CN201309965Y Full-automatic large plate PECVD crystal silicon photovoltaic anti-reflection film preparation device |
| 09/16/2009 | CN201309964Y Improved structure of heater |
| 09/16/2009 | CN201309963Y Water-cooling base bracket device for preparing DC arc-discharge PCVD diamond films |
| 09/16/2009 | CN101535525A In situ cleaning of CVD system exhaust |
| 09/16/2009 | CN101535524A Method and system for performing plasma enhanced atomic layer deposition |
| 09/16/2009 | CN101535523A Density-matching alkyl push flow for vertical flow rotating disk reactors |
| 09/16/2009 | CN101533846A Photoluminescent dosimeter element used for radiant metering and method for preparing same |
| 09/16/2009 | CN101533763A Method for manufacturing shower plate, shower plate manufactured, and plasma processing apparatus |
| 09/16/2009 | CN101532127A Hanging tool for silicon wafer carriers |
| 09/16/2009 | CN101532126A Film formation apparatus for semiconductor process and method for using same |
| 09/16/2009 | CN100541735C Stress reduction of SIOC low K films |
| 09/16/2009 | CN100540734C Chemical vapor deposition equipment |
| 09/16/2009 | CN100540733C Method and apparatus for depositing materials with tunable characteristics |
| 09/16/2009 | CN100540732C Manufacturing apparatus for planar displaying device |
| 09/16/2009 | CN100540731C Vaporizer |
| 09/16/2009 | CN100540730C Method for manufacturing carbon silicon nitride film |
| 09/15/2009 | US7589345 Nitride-based compound semiconductor substrate and method for fabricating the same |
| 09/15/2009 | US7589336 Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors |
| 09/15/2009 | US7589029 Atomic layer deposition and conversion |
| 09/15/2009 | US7589002 Oxidizing or nitriding the crystal/amorphous silicon film by plasma gas treating the substrate by applying a high frequency electric field to the oxidizing or nitriding gas atmosphere; controlling particle sizes to accuracy of 1-2 nm. high density; efficiency; cost efficiency; light-emitting elements |
| 09/15/2009 | US7588804 Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |