| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/10/2009 | WO2009148075A1 Method for manufacturing iii nitride semiconductor light emitting element, iii nitride semiconductor light emitting element and lamp |
| 12/10/2009 | WO2009147993A1 Plasma processing apparatus, and film forming method and etching method using plasma processing apparatus |
| 12/10/2009 | WO2009147005A1 Method for depositing a thin-film polymer in a low-pressure gas phase |
| 12/10/2009 | WO2009114112A3 Method and apparatus for precursor delivery system for irradiation beam instruments |
| 12/10/2009 | WO2009106079A4 Corrosion resistant object with alloying zone |
| 12/10/2009 | US20090305517 Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus |
| 12/10/2009 | US20090305516 Method for purifying acetylene gas for use in semiconductor processes |
| 12/10/2009 | US20090305515 Method and apparatus for uv curing with water vapor |
| 12/10/2009 | US20090305514 Method of modifying interlayer adhesion |
| 12/10/2009 | US20090305512 Substrate Processing Apparatus and Substrate Processing Method |
| 12/10/2009 | US20090305509 Showerhead electrode assemblies for plasma processing apparatuses |
| 12/10/2009 | US20090305487 Non-volatile resistance switching memory |
| 12/10/2009 | US20090305484 Method and reactor for growing crystals |
| 12/10/2009 | US20090305057 Deposition process |
| 12/10/2009 | US20090304992 Micro and Nano-Structure Metrology |
| 12/10/2009 | US20090304951 Ultralow dielectric constant layer with controlled biaxial stress |
| 12/10/2009 | US20090304950 Method for Cold Plasma Treatment of Plastic Bottles and Device for Implementing Same |
| 12/10/2009 | US20090304949 Short pulse atmospheric pressure glow discharge method and apparatus |
| 12/10/2009 | US20090304931 Mask, deposition apparatus using mask, deposition method using mask, and device manufacturing method using deposition apparatus |
| 12/10/2009 | US20090304924 Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin films |
| 12/10/2009 | US20090304918 Method and apparatus for coating objects |
| 12/10/2009 | US20090304907 Coating system and method for coating a substrate |
| 12/10/2009 | US20090304321 Cage for a roller bearing and method of producing the same |
| 12/10/2009 | US20090303570 Tunable cavity resonator and method for fabricating same |
| 12/10/2009 | US20090301867 Integrated system for semiconductor substrate processing using liquid phase metal deposition |
| 12/10/2009 | US20090301657 Plasma processing systems with mechanisms for controlling temperatures of components |
| 12/10/2009 | US20090301656 Microwave plasma processing apparatus |
| 12/10/2009 | US20090301631 Coated papers having improved labelling properties |
| 12/10/2009 | US20090301525 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus |
| 12/10/2009 | US20090301390 Apparatus for evaporation, a crucible for evaporation and a method of growing a film on a substrate |
| 12/10/2009 | US20090301328 Manufacture of printing cylinders |
| 12/10/2009 | DE10361829B4 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device |
| 12/10/2009 | DE102009003781A1 Verfahren zum Abscheiden eines dünnschichtigen Polymers in einer Niederdruckgasphase A method of depositing a thin-film polymer in a low pressure gas phase |
| 12/10/2009 | DE102008026974A1 Verfahren und Vorrichtung zum Abscheiden dünner Schichten aus polymeren Para-Xylylene oder substituiertem Para-Xylylene Method and device for depositing thin layers of polymeric para-xylylene or substituted para-xylylene |
| 12/09/2009 | EP2130942A2 Binary and ternary metal chalcogenide materials and method of making the same |
| 12/09/2009 | EP2130214A1 Selective growth of polycrystalline silicon-containing semiconductor material on a silicon-containing semiconductor surface |
| 12/09/2009 | EP1686595B1 Method for producing a transparent base with transparent conductive film, |
| 12/09/2009 | EP1491255B1 Method for carrying out homogeneous and heterogeneous chemical reactions using plasma |
| 12/09/2009 | EP1325509B1 Method and device for treating surfaces using a glow discharge plasma |
| 12/09/2009 | CN101600646A Nanotube and carbon layer nanostructured composites |
| 12/09/2009 | CN101599542A Board material for fuel cell metallic separator, method of making same, and fuel cell metallic separator |
| 12/09/2009 | CN101599422A Method and system for reducing energy consumption of device for processing substrate |
| 12/09/2009 | CN101598834A Single mode fiber and preparation method thereof |
| 12/09/2009 | CN101597755A Method for preparing high-silicon coating on silicon iron surface by adopting laser |
| 12/09/2009 | CN101597754A A method and apparatus for forming a high quality low temperature silicon nitride layer |
| 12/09/2009 | CN100568454C Method for preparing semiconductor conductive film by doping hydrogen on the surface of diamond |
| 12/09/2009 | CN100568453C Plasma processing apparatus, gas dispensing device and gas delivery method |
| 12/09/2009 | CN100568451C Island-projection-decorated component, its manufacturing method, and apparatus using it |
| 12/09/2009 | CN100567592C Diamond composite substrate and process for producing the same |
| 12/09/2009 | CN100567567C Large area VHF-PECVD reaction chamber back feed-in type parallel plate power electrode capable of obtaining even electric field |
| 12/09/2009 | CN100567566C Vacuum plasma reactor used for large area film growth |
| 12/09/2009 | CN100567565C Method of forming siliceous film and of reducing particle number |
| 12/09/2009 | CN100567564C Method and apparatus for forming a high quality low temperature silicon nitride layer |
| 12/09/2009 | CN100567563C Chemical vaporization-coating device |
| 12/09/2009 | CN100567562C Thin film forming apparatus |
| 12/09/2009 | CN100566905C Thermal processing device and thermal processing method for semiconductor lining |
| 12/09/2009 | CN100566847C Air-intake nozzle |
| 12/08/2009 | US7629557 Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer |
| 12/08/2009 | US7629200 Fingerprint detection device and method of its manufacture, and apparatus for forming a protective film |
| 12/08/2009 | US7629183 Method for manufacturing semiconductor device and computer storage medium |
| 12/08/2009 | US7629033 Plasma processing method for forming a silicon nitride film on a silicon oxide film |
| 12/08/2009 | US7629025 Film formation apparatus and film formation method |
| 12/08/2009 | US7628974 Control of carbon nanotube diameter using CVD or PECVD growth |
| 12/08/2009 | US7628931 Processing method for conservation of processing gases |
| 12/08/2009 | US7628897 Reactive ion etching for semiconductor device feature topography modification |
| 12/08/2009 | US7628863 Heated gas box for PECVD applications |
| 12/08/2009 | US7628861 Pulsed mass flow delivery system and method |
| 12/08/2009 | US7628860 Pulsed mass flow delivery system and method |
| 12/08/2009 | US7628855 Atomic layer deposition using electron bombardment |
| 12/08/2009 | CA2202255C Platinum aluminide cvd coating method |
| 12/03/2009 | WO2009146432A1 Plasma-based chemical source device and method of use thereof |
| 12/03/2009 | WO2009146423A1 Methods of forming ruthenium-containing films by atomic layer deposition |
| 12/03/2009 | WO2009145959A1 High throughput carbon nanotube growth system, and carbon nanotubes and carbon nanofibers formed thereby |
| 12/03/2009 | WO2009145068A1 Thin film formation device and semiconductor film manufacturing method |
| 12/03/2009 | WO2009144814A1 Deposition apparatus |
| 12/03/2009 | WO2009144456A1 Thermal gradient enhanced chemical vapour deposition (tge-cvd) |
| 12/03/2009 | WO2009144371A1 Methods and apparatus for deposition reactors |
| 12/03/2009 | WO2009144163A1 Method to control deposition of organic molecules and organic electronic device |
| 12/03/2009 | WO2009144076A1 Piston pin for an internal combustion engine |
| 12/03/2009 | WO2009143618A1 Silicon carbide-based antireflective coating |
| 12/03/2009 | WO2009083778A4 Silicon nitride sealing rings with diamond coating |
| 12/03/2009 | WO2009083245A3 A method of giving an article a coloured appearance and an article having a coloured appearance |
| 12/03/2009 | US20090299652 Method of presuming interior situation of process chamber and storage medium |
| 12/03/2009 | US20090299467 Medical implant comprising a biological substrate and a diamond-like carbon coating |
| 12/03/2009 | US20090298683 Production of a material comprising a mixture of noble metal nanoparticles and rare-earth oxide nanoparticles |
| 12/03/2009 | US20090298287 Method of plasma load impedance tuning for engineered transients by synchronized modulation of an unmatched low power rf generator |
| 12/03/2009 | US20090298268 Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same |
| 12/03/2009 | US20090298267 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
| 12/03/2009 | US20090298225 Doped Metal Oxide Films and Systems for Fabricating the Same |
| 12/03/2009 | US20090297863 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating |
| 12/03/2009 | US20090297846 Double-Walled Carbon Nanotube, Aligned Double-Walled Carbon Nanotube Bulk Structure and Process for Producing the Same |
| 12/03/2009 | US20090297732 Method for making carbon nanotube films |
| 12/03/2009 | US20090297731 Apparatus and method for improving production throughput in cvd chamber |
| 12/03/2009 | US20090297730 RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma |
| 12/03/2009 | US20090297725 Duplex Surface Treatment of Metal Objects |
| 12/03/2009 | US20090297711 Process Stability of NBDE Using Substituted Phenol Stabilizers |
| 12/03/2009 | US20090297710 Methods and apparatus for deposition reactors |
| 12/03/2009 | US20090297709 Carbon encapsulated metal particles and method of manufacturing the same |
| 12/03/2009 | US20090297708 Apparatus for producing trichlorosilane, and method for producing trichlorosilane |
| 12/03/2009 | US20090297707 Carbon-carbon composites with improved properties and friction and wear performance |