| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/03/2009 | US20090297706 Film forming system and method for forming film |
| 12/03/2009 | US20090297092 Thermo-optic phase shifter and method for manufacturing same |
| 12/03/2009 | US20090294088 Forming foam structures with carbon foam substrates |
| 12/03/2009 | US20090294062 Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of a source power or bias power rf generator |
| 12/03/2009 | US20090294061 Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of an unmatched low power rf generator |
| 12/03/2009 | US20090293810 Arrangement for coating a substrate |
| 12/03/2009 | US20090293809 Stage unit for supporting a substrate and apparatus for processing a substrate including the same |
| 12/03/2009 | US20090293808 Light-Emitting Device, Film-Forming Method and Manufacturing Apparatus Thereof, and Cleaning Method of the Manufacturing Apparatus |
| 12/03/2009 | US20090293807 Apparatus for filtration and gas-vapor mixing in thin film deposition |
| 12/03/2009 | DE102008024372A1 Method for transporting substrates into the vacuum coating devices, comprises moving past the substrates in a vacuum chamber in a transport direction at a treatment device |
| 12/02/2009 | EP2128717A1 Intermediate transfer member and image formation apparatus |
| 12/02/2009 | EP2128304A1 Metal film production apparatus and method |
| 12/02/2009 | EP2126161A1 Device and method for selectively depositing crystalline layers using mocvd or hvpe |
| 12/02/2009 | EP2126154A1 Coating for gas turbine components, and method and device for providing a coating |
| 12/02/2009 | CN101595768A Induction coil, plasma generating apparatus and plasma generating method |
| 12/02/2009 | CN101595250A Method for producing group 3-5 compound semiconductor |
| 12/02/2009 | CN101595245A Method and apparatus for stabilizing a coating |
| 12/02/2009 | CN101595244A Vapor deposition methods for forming a metal- containing layer on a substrate |
| 12/02/2009 | CN101595243A Compositions and methods for forming and depositing metal films on semiconductor substrates using supercritical solvents |
| 12/02/2009 | CN101595242A Anti-pooling vest for patients undergoing hemodialysis and in critical care |
| 12/02/2009 | CN101593724A Method for forming via |
| 12/02/2009 | CN101593667A Method for improving consistency of thickness of dielectric layers deposited on different substrates |
| 12/02/2009 | CN101591796A Production process for preparing high-performance diamond wire saw |
| 12/02/2009 | CN101591780A Method for preparing abrasion resistant coating layer of cutter |
| 12/02/2009 | CN101591776A Method for operating chemical vapor deposition chamber |
| 12/02/2009 | CN101591775A Thin film deposition system device suitable for diamond heat-sink membrane |
| 12/02/2009 | CN101591774A Chemical vapor deposition apparatus |
| 12/02/2009 | CN101591773A Vapor deposition system |
| 12/02/2009 | CN101591772A Process stability of nbde using substituted phenol stabilizers |
| 12/02/2009 | CN101591771A Device for positioning and supporting base of vacuum equipment |
| 12/02/2009 | CN101591763A Insulating type multifunctional ion chemical heat treatment device |
| 12/02/2009 | CN100565790C Plasma processing method and plasma processing apparatus |
| 12/02/2009 | CN100565787C Substrate support having temperature control surface |
| 12/02/2009 | CN100564590C Inductive plasma system with sidewall magnet |
| 12/02/2009 | CN100564589C Apparatus for processing substrate and method for processing thin film on the substrate |
| 12/02/2009 | CN100564588C Plasma processing method and apparatus thereof |
| 12/02/2009 | CN100564587C Film formation method for Ti film |
| 12/02/2009 | CN100564586C Apparatus for forming carbon film on internal surface of plastic container and method of manufacturing plastic container |
| 12/02/2009 | CN100564585C Method and device for coating non-metallic material with ferromagnetic and magnetic metal plating coat |
| 12/02/2009 | CN100563884C Coated cutting blade and manufacture method and uses |
| 12/02/2009 | CN100563791C Method and system for characterizing porous materials |
| 12/02/2009 | CN100563440C Antimicrobial composite material |
| 12/01/2009 | US7625840 Catalytic nanoporous membranes |
| 12/01/2009 | US7625794 Dielectrics; atomic layer deposition, pulsing |
| 12/01/2009 | US7625604 Conveying plurality of substrates in holder into reaction container; heating a plurality of zones of thermal process atmosphere in the reaction container by means of a plurality of heating units; forming uniform thin films; oxidation, chemical vapor deposition; semiconductors |
| 12/01/2009 | US7625603 oxidation of a silicon precursor gas in an oxygen-rich environment followed by annealing; use in microelectromechanical systems (MEMS) |
| 12/01/2009 | US7625602 Heating to vaporize, providing thermally conductive path from perforated member at feeding location to heat sink, providing auger enclosure and rotatable auger for receiving powder; uniformity; OLED surfaces |
| 12/01/2009 | US7625601 Controllably feeding organic material in making OLEDs |
| 12/01/2009 | US7625600 For use in explosives, pyrotechnics, gas generators, and semiconductor interconnects |
| 12/01/2009 | US7625472 Plasma-assisted sputter deposition system |
| 12/01/2009 | US7625460 Multifrequency plasma reactor |
| 12/01/2009 | US7625450 Film forming apparatus |
| 12/01/2009 | US7625448 Inlet system for an MOCVD reactor |
| 11/26/2009 | WO2009143460A1 HIGH-K DIELECTRIC FILMS AND METHODS OF PRODUCING USING TITANIUM-BASED β-DIKETONATE PRECURSORS |
| 11/26/2009 | WO2009143458A1 High-k dielectric films and methods of producing using titanium-based precursors |
| 11/26/2009 | WO2009143456A1 HIGH-K DIELECTRIC FILMS AND METHODS OF PRODUCING USING CERIUM-BASED β-DIKETONATE PRECURSORS |
| 11/26/2009 | WO2009143452A1 High-k dielectric films and methods of producing using cerium-based precursors |
| 11/26/2009 | WO2009142905A1 Deposition method and apparatus |
| 11/26/2009 | WO2009142488A1 Apparatus and method for high-throughput atomic layer deposition |
| 11/26/2009 | WO2009142487A1 Apparatus and method for high-throughput atomic layer deposition |
| 11/26/2009 | WO2009142138A1 Plasma processing apparatus |
| 11/26/2009 | WO2009142016A1 Plasma generating apparatus and plasma processing apparatus |
| 11/26/2009 | WO2009141839A1 Valve assembly for an injection valve and injection valve |
| 11/26/2009 | WO2009141804A1 Deposition method |
| 11/26/2009 | WO2009141304A1 Vapour deposition process and device |
| 11/26/2009 | WO2009141234A1 Process for the phase transformation of substances |
| 11/26/2009 | WO2009140961A1 Method for producing nanoscalar electrically conductive multilayer systems |
| 11/26/2009 | WO2009062877A3 Corrosion-resistant coating and method for producing same |
| 11/26/2009 | US20090291566 Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method |
| 11/26/2009 | US20090291563 Plasma processing apparatus and plasma processing method |
| 11/26/2009 | US20090291557 Microreactor for solution deposition and method of use |
| 11/26/2009 | US20090291323 Dispersion strengthened ceramic thermal barrier coating |
| 11/26/2009 | US20090291233 Process for producing gas barrier films |
| 11/26/2009 | US20090291232 Method and apparatus for growing plasma atomic layer |
| 11/26/2009 | US20090291231 Method and apparatus for producing a solar cell module with integrated laser patterning |
| 11/26/2009 | US20090291226 Apparatus and Method for Double-Plasma Graft Polymerization at Atmospheric Pressure |
| 11/26/2009 | US20090291212 VOLATILE METAL COMPLEXES OF PERFLUORO-tert-BUTANOL |
| 11/26/2009 | US20090291211 Apparatus for atomic layer deposition and method of atomic layer deposition using the same |
| 11/26/2009 | US20090291210 Additives to Prevent Degradation of Cyclic Alkene Derivatives |
| 11/26/2009 | US20090291209 Apparatus and method for high-throughput atomic layer deposition |
| 11/26/2009 | US20090291208 Atomic layer deposition using metal amidinates |
| 11/26/2009 | US20090291207 Gas-purged vacuum valve |
| 11/26/2009 | US20090290614 Nano-composites for thermal barrier coatings and thermo-electric energy generators |
| 11/26/2009 | US20090289390 Direct silicon or reactive metal casting |
| 11/26/2009 | US20090289222 Process for preparing composites comprising carbon and magnesium for hydrogen storage |
| 11/26/2009 | US20090289035 Plasma Processing Apparatus And Plasma Processing Method |
| 11/26/2009 | US20090289029 Mold having nanometric features, method for realizing such a mold and corresponding use of it in a method for realizing an array of carbon nanotubes |
| 11/26/2009 | US20090288772 Method and Apparatus for Processing Metal Bearing Gases |
| 11/26/2009 | US20090288684 Vacuum processing apparatus and vacuum processing method |
| 11/26/2009 | US20090288604 Chemical vapor deposition apparatus |
| 11/26/2009 | US20090288603 Plasma and electron beam etching device and method |
| 11/26/2009 | US20090288602 Electrode and Vacuum Processing Apparatus |
| 11/26/2009 | US20090288601 Coating formation by reactive deposition |
| 11/26/2009 | US20090288600 Apparatus for supplying source and apparatus for deposition thin film having the same |
| 11/26/2009 | US20090288599 Self-welded metal-catalyzed carbon nanotube bridges and solid electrolytic non-volatile memories |
| 11/26/2009 | DE112007003196T5 Ringplasmastrahlverfahren und Vorrichtung zum Herstellen einer Vorform für eine optische Faser Ring plasma jet method and apparatus for producing a preform for an optical fiber |
| 11/26/2009 | DE102008025108A1 Verfahren zur Herstellung von nanoskaligen elektrisch leitfähigen Mehrschichtsystemen A process for preparing nanoscale electrically conductive multi-layer systems |
| 11/25/2009 | EP2123802A1 N-type conductive aluminum nitride semiconductor crystal and method for producing the same |
| 11/25/2009 | EP2123801A1 Method and equipment for producing group-iii nitride |
| 11/25/2009 | EP2123793A1 Vapour deposition process |