| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/22/2009 | US7635395 Comprises solution preparation step wherein first solid material is dissolved in solvent to prepare gasification solution, solvent removal step wherein second solid material is separated by removing solvent, and solid sublimation step wherein second solid material is gasified by sublimation; for CVD |
| 12/22/2009 | CA2388016C Method for fabricating electrode for rechargeable lithium battery |
| 12/22/2009 | CA2356039C A tool of a surface-coated boron nitride sintered compact |
| 12/17/2009 | WO2009152242A1 Ionic liquid mediums for holding solid phase process gas precursors |
| 12/17/2009 | WO2009151519A1 Combustion deposition burner and/or related methods |
| 12/17/2009 | WO2009151492A2 Metal and electronic device coating process for marine use and other environments |
| 12/17/2009 | WO2009151402A1 A process for producing an image on a substrate |
| 12/17/2009 | WO2009151070A1 Method for producing polycrystalline body and apparatus for producing polysilicon |
| 12/17/2009 | WO2009150992A1 Weather-resistant resin base material and optical member |
| 12/17/2009 | WO2009150979A1 Plasma processing device and plasma processing method |
| 12/17/2009 | WO2009150971A1 Plasma processing apparatus and plasma processing method |
| 12/17/2009 | WO2009150896A1 Silicon epitaxial wafer and method for production thereof |
| 12/17/2009 | WO2009150297A1 Arrangement in connection with ald reactor |
| 12/17/2009 | WO2009150239A1 Plant for forming electronic circuits on substrates |
| 12/17/2009 | WO2009149563A1 A system and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith |
| 12/17/2009 | WO2009118353A3 Metallic nanocrystal encapsulation |
| 12/17/2009 | WO2009085561A4 Methods for in-situ chamber cleaning process for high volume manufacture of semiconductor materials |
| 12/17/2009 | WO2009050110A3 Bodies coated with a hard material and method for the production thereof |
| 12/17/2009 | US20090311876 Manufacturing method of semiconductor device and substrate processing apparatus |
| 12/17/2009 | US20090311872 Gas ring, apparatus for processing semiconductor substrate, the apparatus including the gas ring, and method of processing semiconductor substrate by using the apparatus |
| 12/17/2009 | US20090311869 Shower plate and manufacturing method thereof, and plasma processing apparatus, plasma processing method and electronic device manufacturing method using the shower plate |
| 12/17/2009 | US20090311866 Method and apparatus for production of metal film or the like |
| 12/17/2009 | US20090311857 Method to form ultra high quality silicon-containing compound layers |
| 12/17/2009 | US20090311521 Thin film and optical interference filter incorporating high-index titanium dioxide and method for making them |
| 12/17/2009 | US20090311500 Deposition of Ruthenium Oxide Coatings on a Substrate |
| 12/17/2009 | US20090311498 Transparent conductive film |
| 12/17/2009 | US20090311445 Synthesis of Carbon Nanotubes by Selectively Heating Catalyst |
| 12/17/2009 | US20090311444 Plasma mediated processing of non-conductive substrates |
| 12/17/2009 | US20090311443 Method of coating inner and outer surfaces of pipes for thermal solar and other applications |
| 12/17/2009 | US20090311417 Film forming method and film forming apparatus |
| 12/17/2009 | US20090311297 Biocompatible Transparent Sheet, Method for Producing the Same, and Cultured Cell Sheet Used the Same Sheet |
| 12/17/2009 | US20090310648 Method and device for determining the temperature of a substrate |
| 12/17/2009 | US20090308538 Substrate temperature regulation fixed apparatus |
| 12/17/2009 | US20090308537 Substrate support device and plasma processing apparatus |
| 12/17/2009 | US20090308319 Wafer carrier and epitaxy machine using the same |
| 12/17/2009 | US20090308318 Apparatus and method for hybrid chemical processing |
| 12/17/2009 | US20090308316 Transfer apparatus and organic deposition device with the same |
| 12/17/2009 | US20090308315 Semiconductor processing apparatus with improved thermal characteristics and method for providing the same |
| 12/17/2009 | US20090308314 Vapor deposition device |
| 12/17/2009 | US20090308313 Non-volatile resistance switching memory |
| 12/17/2009 | DE102008028542A1 Verfahren und Vorrichtung zum Abscheiden einer Schicht auf einem Substrat mittels einer plasmagestützten chemischen Reaktion Method and apparatus for depositing a layer on a substrate by a plasma enhanced chemical reaction |
| 12/17/2009 | DE102008028540A1 Depositing gradient layer on plastics substrate, e.g. scratch-resistant layer on lens, uses magnetron plasma enhanced chemical vapor deposition to give increasing organic compound content |
| 12/17/2009 | DE102008028537A1 Verfahren zum Abscheiden einer Kratzschutzbeschichtung auf einem Kunststoffsubstrat A method for depositing a scratch-resistant coating on a plastic substrate |
| 12/17/2009 | CA2765337A1 A system and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith |
| 12/17/2009 | CA2724602A1 Metal and electronic device coating process for marine use and other environments |
| 12/16/2009 | EP2133922A2 Insulating coating, methods of manufacture thereof and articles comprising the same |
| 12/16/2009 | EP2133450A1 Substrate for epitaxial growth and method for producing nitride compound semiconductor single crystal |
| 12/16/2009 | EP2132359A2 Method and devices for the application of transparent silicon dioxide layers from the gas phase |
| 12/16/2009 | EP2132358A1 Multilayer cvd coating |
| 12/16/2009 | EP2132357A2 Methods for forming a ruthenium-based film on a substrate |
| 12/16/2009 | EP2132356A2 Pecvd process chamber backing plate reinforcement |
| 12/16/2009 | EP2132355A2 System and method for glass sheet semiconductor coating and resultant product |
| 12/16/2009 | EP2132354A1 Method and apparatus for the treatment of strip-shaped substrate in a vacuum coating system |
| 12/16/2009 | EP1557872B1 Plasma chemical vapor deposition method |
| 12/16/2009 | EP1306893B1 Plasma processing apparatus |
| 12/16/2009 | EP1293588B1 Plasma cvd apparatus and method |
| 12/16/2009 | CN101606227A Placing bed structure, treating apparatus using the structure, and method for using the apparatus |
| 12/16/2009 | CN101605930A N-type conductive aluminum nitride semiconductor crystal and method for producing the same |
| 12/16/2009 | CN101605923A Surface treating method for cutting tools |
| 12/16/2009 | CN101604707A Insulating coating, methods of manufacture thereof and articles comprising the same |
| 12/16/2009 | CN101604624A Gas ring, apparatus for processing semiconductor substrate, and method of processing semiconductor substrate by using the apparatus |
| 12/16/2009 | CN101603172A Method for growing AIN or AlGaN film |
| 12/16/2009 | CN100570770C Ceramics film and production method therefor, and ferroelectric capacitor, semiconductor device, other elements |
| 12/16/2009 | CN100569998C A method for depositing thin film on substrate using impulse ALD |
| 12/16/2009 | CN100569997C Chemical gas phase infiltration method for densification of porous substrates with pyrolytic carbon |
| 12/16/2009 | CN100569996C Methods and apparatuses for transferring articles through a load lock chamber under vacuum |
| 12/16/2009 | CN100569509C Carbon nano-pipe array/laminated composite and its production |
| 12/16/2009 | CN100569472C Die for extrusion forming of ceramics |
| 12/15/2009 | US7633163 Very low dielectric constant plasma-enhanced CVD films |
| 12/15/2009 | US7632958 Titanium complexes, their production methods, titanium-containing thin films, and their formation methods |
| 12/15/2009 | US7632757 Method for forming silicon oxynitride film |
| 12/15/2009 | US7632704 Manufacturing method for organic electronic element and manufacturing apparatus therefor |
| 12/15/2009 | US7632697 Nitride semiconductor thin film and method for growing the same |
| 12/15/2009 | US7632550 Film forming method employing reactive and reducing gases and substrate formed by the method |
| 12/15/2009 | US7632549 chemical vapor deposition; plasma polymerization |
| 12/15/2009 | US7632543 Method of making IG window unit and forming silicon oxide based hydrophilic coating using chlorosilane vapor deposition |
| 12/15/2009 | US7632542 Method for controlling uniformity of thin films fabricated in processing systems |
| 12/15/2009 | US7632541 Method and device to prevent coating a dovetail of a turbine airfoil |
| 12/15/2009 | US7632538 Diamond-like carbon; heat treatment; for window units |
| 12/15/2009 | US7632534 Dividing shape data of object to be immersed in coating material tank and data of periphery of object into regions, dividing shape data into elements; software |
| 12/15/2009 | US7632379 Plasma source and plasma processing apparatus |
| 12/15/2009 | US7632356 Gas providing member and processing device |
| 12/15/2009 | US7632355 Apparatus and method of treating fine powders |
| 12/15/2009 | US7632354 Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing system |
| 12/15/2009 | US7632351 Atomic layer deposition processes for the formation of ruthenium films, and ruthenium precursors useful in such processes |
| 12/15/2009 | US7632164 Process for producing an organic EL display device using different processing units for each of the manufacturing stages |
| 12/15/2009 | CA2518023C One piece shim |
| 12/15/2009 | CA2338538C Surface coatings |
| 12/10/2009 | WO2009149372A1 Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films |
| 12/10/2009 | WO2009148930A1 Method of reducing memory effects in semiconductor epitaxy |
| 12/10/2009 | WO2009148913A2 Process and system for varying the exposure to a chemical ambient in a process chamber |
| 12/10/2009 | WO2009148799A1 Method for making oriented tantalum pentoxide films |
| 12/10/2009 | WO2009148284A2 Gaseous self-assembled monolayer coating apparatus |
| 12/10/2009 | WO2009148165A1 Film formation apparatus |
| 12/10/2009 | WO2009148155A1 Apparatus for manufacturing thin film solar cell |
| 12/10/2009 | WO2009148120A1 Apparatus for manufacturing thin film solar cell |
| 12/10/2009 | WO2009148117A1 Apparatus for manufacturing thin film solar cell |
| 12/10/2009 | WO2009148087A1 Apparatus for manufacturing thin film solar cell |
| 12/10/2009 | WO2009148081A1 Thin film solar cell manufacturing equipment |
| 12/10/2009 | WO2009148077A1 Apparatus for manufacturing thin film solar cell |