| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/07/2010 | US20100003538 Steel sheet provided with a corrosion protection system and method for coating steel sheet with such a corrosion protection system |
| 01/07/2010 | US20100003532 Beta-diketiminate precursors for metal containing film deposition |
| 01/07/2010 | US20100003509 Coating method for optical plastic substrates |
| 01/07/2010 | US20100003504 Composite material part with a silicon-containing ceramic matrix protected against corrosion |
| 01/07/2010 | US20100003500 Carbon nanotube device and process for manufacturing same |
| 01/07/2010 | US20100003483 Transparent gas barrier film |
| 01/07/2010 | US20100003482 Transparent gas barrier film and method for producing transparent gas barrier film |
| 01/07/2010 | US20100003480 Barrier laminate, gas barrier film, device and optical member |
| 01/07/2010 | US20100003456 Coated body and method for its production |
| 01/07/2010 | US20100003423 Plasma generating apparatus and film forming apparatus using plasma generating apparatus |
| 01/07/2010 | US20100003422 Deposition apparatus, film manufacturing method, and magnetic recording medium manufacturing method |
| 01/07/2010 | US20100003406 Apparatuses and methods for atomic layer deposition |
| 01/07/2010 | US20100003405 Method for depositing layers in a cvd reactor and gas inlet element for a cvd reactor |
| 01/07/2010 | US20100003404 Ald method and apparatus |
| 01/07/2010 | US20100001269 Methods of Combinatorial Processing for Screening Multiple Samples on a Semiconductor Substrate |
| 01/07/2010 | US20100000831 Brake and clutch discs |
| 01/07/2010 | US20100000673 Film forming method and film forming apparatus |
| 01/07/2010 | US20100000470 Wafer-positioning mechanism |
| 01/07/2010 | US20100000469 Deposition apparatus for organic el and evaporating apparatus |
| 01/06/2010 | EP2141259A1 Deposition method for passivation of silicon wafers |
| 01/06/2010 | EP2141120A1 High throughput discovery of materials through vapor phase synthesis |
| 01/06/2010 | EP2140039A1 Method for applying a wear-resistant coating |
| 01/06/2010 | EP1442860B1 Honeycomb structural body forming die and method of manufacturing the die |
| 01/06/2010 | EP1356501B1 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
| 01/06/2010 | CN101622376A Composition and methods for forming metal films on semiconductor substrates using supercritical solvents |
| 01/06/2010 | CN101622375A Pecvd process chamber backing plate reinforcement |
| 01/06/2010 | CN101621001A Mechanical enhancement of dense and porous organosilicate materials by uv exposure |
| 01/06/2010 | CN101619447A Substrate temperature control method and dielectric layer forming method |
| 01/06/2010 | CN100578737C Method for preparing silicon carbide epitaxial layer without step appearance |
| 01/06/2010 | CN100578734C Process and system for heating semiconductor substrates in a processing chamber containing susceptor |
| 01/06/2010 | CN100578732C Vacuum processing apparatus |
| 01/06/2010 | CN100578730C Device and method for increasing tool utilization/reduction in MWBC for UV curing chamber |
| 01/06/2010 | CN100577867C Apparatus for weighing out the remaining quantity of a substance in a storage vessel |
| 01/06/2010 | CN100577866C Gas sprayer assembly applied in plasma reaction chamber, manufacture method and renewing reutilization method thereof |
| 01/06/2010 | CN100577865C High-power dielectric drying for realizing wafer-to-wafer thickness uniformity of dielectric CVD films |
| 01/06/2010 | CN100577864C Atomic layer deposition methods of forming silicon dioxide comprising layers |
| 01/06/2010 | CN100577863C Cavity device of energy wave reflection apparatus |
| 01/06/2010 | CN100577862C Playing field obstacle device |
| 01/06/2010 | CN100577861C Chamber for vacuum treatment |
| 01/05/2010 | US7642490 Single ply paper product, method for manufacturing, and article |
| 01/05/2010 | US7642204 Methods of forming fluorine doped insulating materials |
| 01/05/2010 | US7641941 Oxidation inhibition of carbon-carbon composites |
| 01/05/2010 | US7641939 Chemical vapor deposition reactor having multiple inlets |
| 01/05/2010 | US7641938 Filling with matrix and removing protective layers (pressure senstive adhesives); injection molding |
| 01/05/2010 | US7641937 Copper-indium-selenium-containing thin films; Metal Organic Chemical Vapor Deposition |
| 01/05/2010 | US7641763 Apparatus and method for removing coating film |
| 01/05/2010 | US7641761 Apparatus and method for forming thin film using surface-treated shower plate |
| 01/05/2010 | US7641737 Evaporation source for evaporating an organic |
| 01/05/2010 | US7641434 Dual substrate loadlock process equipment |
| 01/05/2010 | US7641382 Leak judgment method, and computer-readable recording medium with recorded leak-judgment-executable program |
| 01/05/2010 | US7640946 Vacuum treating device with lidded treatment container |
| 01/05/2010 | US7640887 Surface wave excitation plasma generator and surface wave excitation plasma processing apparatus |
| 01/05/2010 | CA2273598C Ceramic thermal barrier coating with low thermal conductivity, deposition process for said ceramic coating, and metal piece protected by this coating |
| 12/31/2009 | US20090325828 Energy conversion device and method of reducing friction therein |
| 12/31/2009 | US20090325386 Process and System For Varying the Exposure to a Chemical Ambient in a Process Chamber |
| 12/31/2009 | US20090325367 Methods and apparatus for a chemical vapor deposition reactor |
| 12/31/2009 | US20090325366 Substrate processing method and substrate processing apparatus |
| 12/31/2009 | US20090324989 Multilayer thermal barrier coating |
| 12/31/2009 | US20090324971 Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma |
| 12/31/2009 | US20090324970 Barrier laminate, gas barrier film, device and method for producing barrier laminate |
| 12/31/2009 | US20090324930 Protective coatings for silicon based substrates with improved adhesion |
| 12/31/2009 | US20090324851 Method for fabricating a metal-insulator-metal capacitor |
| 12/31/2009 | US20090324848 Metal film production apparatus |
| 12/31/2009 | US20090324847 Method of avoiding a parasitic plasma in a plasma source gas supply conduit |
| 12/31/2009 | US20090324844 Protective coat and method for manufacturing thereof |
| 12/31/2009 | US20090324830 oxidation resistance; hermetic sealing; for thin-film sensors, optoelectronic devices, photovoltaic devices, food containers, and/or medicine containers |
| 12/31/2009 | US20090324829 Method and apparatus for providing uniform gas delivery to a reactor |
| 12/31/2009 | US20090324828 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 12/31/2009 | US20090324827 Cvd film forming method and cvd film forming apparatus |
| 12/31/2009 | US20090324826 Film Deposition Apparatus, Film Deposition Method, and Computer Readable Storage Medium |
| 12/31/2009 | US20090324825 Method for Depositing an Aluminum Nitride Coating onto Solid Substrates |
| 12/31/2009 | US20090324824 Method for growing thin film |
| 12/31/2009 | US20090324823 Roll-to-roll vacuum deposition method and roll-to-roll vacuum deposition apparatus |
| 12/31/2009 | US20090324822 Method for depositing hard metallic coatings |
| 12/31/2009 | US20090324821 Methods for forming thin films comprising tellurium |
| 12/31/2009 | US20090324816 Low Permeability Gas Recycling in Consolidation |
| 12/31/2009 | US20090324475 Superhard dielectric compounds and methods of preparation |
| 12/31/2009 | US20090324401 Article having a protective coating and methods |
| 12/31/2009 | US20090321321 Desulfurizing adsorbent, preparation method and use thereof |
| 12/31/2009 | US20090321146 Earth Boring Bit with DLC Coated Bearing and Seal |
| 12/31/2009 | US20090320757 Device for film coating |
| 12/31/2009 | US20090320756 Microwave plasma processing apparatus |
| 12/31/2009 | US20090320755 Arrangement for coating a crystalline silicon solar cell with an antireflection/passivation layer |
| 12/31/2009 | US20090320746 Method for producing group iii-v compound semiconductor |
| 12/31/2009 | DE102009021330A1 Verfahren zum Verringern der Oberflächenrauhigkeit einer porösen Oberfläche A method for reducing the surface roughness of a porous surface |
| 12/31/2009 | DE102008030900A1 Silver carboxylate amine complex used in the production of semiconductors, solar cells and optical components comprises a thermally stable silver carboxylate and a polyamine having one nitrogen atom with higher order reactivity |
| 12/31/2009 | DE102008029691A1 Mischungen von Precursoren zur Herstellung von keramischen Schichten mittels MOCVD Mixtures of precursors for the production of ceramic layers by MOCVD |
| 12/31/2009 | DE102008028410A1 Selektive Parylene-Beschichtung für Herzschrittmacherelektroden Selective parylene coating for pacemaker electrodes |
| 12/30/2009 | WO2009157514A1 Film deposition method |
| 12/30/2009 | WO2009157447A1 Substrate provided with transparent conductive film, thin film photoelectric conversion device and method for manufacturing the substrate |
| 12/30/2009 | WO2009157326A1 Titanium complex, method for production of the complex, titanium-containing thin film, and method for production of the thin film |
| 12/30/2009 | WO2009157084A1 Vacuum processing apparatus and method for operating vacuum processing apparatus |
| 12/30/2009 | WO2009156121A1 Arrangement for coating tape-shaped film substrates |
| 12/30/2009 | WO2009136019A3 Device and process for chemical vapor phase treatment |
| 12/30/2009 | WO2009114130A3 Process and apparatus for diamond synthesis |
| 12/30/2009 | EP2139303A1 Plasma generating apparatus and plasma film forming apparatus |
| 12/30/2009 | EP2138604A2 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 12/30/2009 | EP2138458A1 High throughput discovery of materials through vapor phase synthesis |
| 12/30/2009 | EP2137338A2 Roll-to-roll plasma enhanced chemical vapor deposition method of barrier layers comprising silicon and carbon |
| 12/30/2009 | EP2137337A2 Plasma-deposited electrically insulating, diffusion-resistant and elastic layer system |