| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/04/2010 | US20100028663 Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |
| 02/04/2010 | US20100028573 Aa' stacked graphite and fabrication method thereof |
| 02/04/2010 | US20100028561 Method for producing a coating by atmospheric pressure plasma technology |
| 02/04/2010 | US20100028556 Chemical vapor deposition colored diamond |
| 02/04/2010 | US20100028536 Metal compound, material for thin film formation, and process of forming thin film |
| 02/04/2010 | US20100028534 Evaporation unit, evaporation method, controller for evaporation unit and the film forming apparatus |
| 02/04/2010 | US20100028533 Methods and Devices for Processing a Precursor Layer in a Group VIA Environment |
| 02/04/2010 | US20100028529 Substrate processing apparatus, and magnetic recording medium manufacturing method |
| 02/04/2010 | US20100028238 Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| 02/04/2010 | US20100028122 Atomic layer deposition apparatus and loading methods |
| 02/04/2010 | US20100025939 Sealing Device and Method of Producing the Same |
| 02/04/2010 | US20100025821 Ion implanting apparatus and ion implanting method |
| 02/04/2010 | US20100025370 Reactive gas distributor, reactive gas treatment system, and reactive gas treatment method |
| 02/04/2010 | US20100025091 Printed Circuit Boards |
| 02/04/2010 | US20100024733 Film formation apparatus and film formation method using the same |
| 02/04/2010 | US20100024732 Systems for Flash Heating in Atomic Layer Deposition |
| 02/04/2010 | US20100024731 Processing tool with combined sputter and evaporation deposition sources |
| 02/04/2010 | US20100024730 Processing system |
| 02/04/2010 | US20100024729 Methods and apparatuses for uniform plasma generation and uniform thin film deposition |
| 02/04/2010 | US20100024728 Substrate processing apparatus |
| 02/04/2010 | US20100024727 Showerhead and chemical vapor deposition apparatus including the same |
| 02/04/2010 | US20100024726 Fastening apparatus |
| 02/04/2010 | DE102008033977A1 Method for surface coating of a base material with layer materials, comprises providing the base material with a protective material, wearing out upper most part of the protective layer and providing the protective layer with a cover layer |
| 02/04/2010 | CA2732584A1 Biocompatibility layer and coated articles |
| 02/04/2010 | CA2731327A1 Item in slab form made from stone agglomerate coated with thin transparent films of tio2 or zno by means of dry deposition techniques with high resistance to solar degradation |
| 02/03/2010 | EP2148940A2 Coated cutting tool |
| 02/03/2010 | EP2148939A1 Vacuum treatment unit and vacuum treatment process |
| 02/03/2010 | EP2148938A1 Apparatuses and methods for cryogenic cooling in thermal surface treatment processes |
| 02/03/2010 | EP2148899A1 Transparent barrier film and method for producing the same |
| 02/03/2010 | EP1397830B1 Method of manufacturing copper vias in low-k technology |
| 02/03/2010 | EP1345703B1 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
| 02/03/2010 | CN201397806Y Heater regulating device |
| 02/03/2010 | CN101641459A Vaporizer, vaporization module, and film forming device |
| 02/03/2010 | CN101638776A Pretreatment method in chemical vapor deposition |
| 02/03/2010 | CN101638765A Resistive heaters and uses thereof |
| 02/03/2010 | CN100587109C Method and apparatus for applying coating on substrate |
| 02/03/2010 | CN100587108C Substrate processing method and substrate processing apparatus |
| 02/02/2010 | US7655491 P-type Group III nitride semiconductor and production method thereof |
| 02/02/2010 | US7655299 Surface-coated cutting tool made of hard metal and manufacturing method for same |
| 02/02/2010 | US7655274 Aqueous based precursor system for the deposition of titanium oxide coatings via combustion chemical vapor deposition includes titanium (IV) bis(ammonium lactate)dihydroxide, oxalic acid salts of titanium (potassium titanyl oxalate), water-soluble salts of titanium acetate and citrate; low cost |
| 02/02/2010 | US7655111 Plasma processing apparatus and plasma processing method |
| 02/02/2010 | US7655093 Wafer support system |
| 02/02/2010 | US7655092 Tandem process chamber |
| 02/02/2010 | US7655091 Formation of single-crystal silicon carbide |
| 02/02/2010 | US7654224 Method and apparatus for cleaning a CVD chamber |
| 02/02/2010 | CA2356042C A tool of a surface-coated boron nitride sintered compact |
| 01/28/2010 | WO2010010956A1 Apparatus and method for manufacturing thin film solar cell, and thin film solar cell |
| 01/28/2010 | WO2010010668A1 Semiconductor device and manufacturing method therefor |
| 01/28/2010 | WO2010010538A2 Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing films |
| 01/28/2010 | WO2010010176A1 Process for microstructuring a diamond film |
| 01/28/2010 | WO2010010088A1 Chemical vapor deposition reactor for depositing layers made of a reaction gas mixture onto workpieces |
| 01/28/2010 | WO2010009724A1 Device for plasma-assisted coating of the inner side of tubular components |
| 01/28/2010 | WO2009148913A3 Method for treating substrates |
| 01/28/2010 | WO2009120862A3 Systems and methods for distributing gas in a chemical vapor deposition reactor |
| 01/28/2010 | WO2009017962A3 Low-volatility compounds for use in forming deposited layers |
| 01/28/2010 | WO2006026018A3 Atomic layer deposition of high quality high-k transition metal and rare earth oxides |
| 01/28/2010 | US20100023154 Compensation techniques for substrate heating processes |
| 01/28/2010 | US20100021757 Bright coatings for aluminum or steel motor vehicle wheels and their production |
| 01/28/2010 | US20100021747 Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing films |
| 01/28/2010 | US20100021727 Method of forming continuous thin film and linear glass substrate with thin film |
| 01/28/2010 | US20100021655 plasma electrode |
| 01/28/2010 | US20100021650 Method of manufacturing micro structure, and method of manufacturing mold material |
| 01/28/2010 | US20100021632 Method and devices for the application of transparent silicon dioxide layers from the gas phase |
| 01/28/2010 | US20100021631 Coating apparatus and coating method |
| 01/28/2010 | US20100021565 Pearlescent Pigments |
| 01/28/2010 | US20100018851 Carbon nanotubes for fuel cells, method for manufacturing the same, and fuel cell using the same |
| 01/28/2010 | US20100018815 C-c composite brakes with improved wear rates |
| 01/28/2010 | US20100018649 Plasma Processing Apparatus And Method |
| 01/28/2010 | US20100018617 Aluminum alloy for anodizing having durability, contamination resistance and productivity, method for producing the same, aluminum alloy member having anodic oxide coating, and plasma processing apparatus |
| 01/28/2010 | US20100018464 Dlc coating system and process and apparatus for making coating system |
| 01/28/2010 | US20100018463 Plural Gas Distribution System |
| 01/28/2010 | DE112008000752T5 Großflächiger transparenter elektisch leitfähiger Film und Verfahren zu seiner Herstellung Large-area transparent conductive film are electrical and process for its production |
| 01/28/2010 | DE102008034991A1 Verfahren zur Herstellung eines Schichtsystems auf einem Substrat, sowie Schichtsystem A method for producing a layer system on a substrate, as well as layer system |
| 01/28/2010 | DE102008034330A1 CVD-Reaktor zur Abscheidung von Schichten aus einem Reaktionsgasgemisch auf Werkstücken CVD reactor for depositing layers of a reaction gas mixture on workpieces |
| 01/28/2010 | DE102008033941A1 Verfahren zum Beschichten A method of coating |
| 01/28/2010 | DE102008033938A1 Verfahren zur Abscheidung von Schichten auf einem Substrat A process for the deposition of layers on a substrate |
| 01/27/2010 | EP2147988A1 Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container |
| 01/27/2010 | EP2147987A1 Vapor growth apparatus, vapor growth method, and method for manufacturing semiconductor device |
| 01/27/2010 | EP2147452A2 Treatment system for flat substrates |
| 01/27/2010 | EP2146806A2 Silicon nitride passivation for a solar cell |
| 01/27/2010 | EP1885658B1 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) |
| 01/27/2010 | EP1313134B1 Semiconductor polysilicon component and method of manufacture thereof |
| 01/27/2010 | CN101636523A Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container |
| 01/27/2010 | CN101634017A Hook of silicon wafer loading device for PECVD |
| 01/27/2010 | CN101634016A Modifying device of silicon wafer loading devices for PECVD |
| 01/27/2010 | CN101634015A Converting device of silicon wafer loading devices for PECVD |
| 01/27/2010 | CN101634014A Method for depositing a layer on a semiconductor wafer by means of CVD and chamber for carrying out the method |
| 01/27/2010 | CN101634013A Plural gas distribution system |
| 01/27/2010 | CN100585828C Substrate carrying platform, substrate processing device and temperature control method |
| 01/27/2010 | CN100585814C Method of processing plasma |
| 01/27/2010 | CN100585795C Chamber isolation valve RF grounding |
| 01/27/2010 | CN100585704C Magnetic recording media and production method therefor |
| 01/27/2010 | CN100584999C Chemical vapor depositing method of low dielectric constant silicon oxide membrane |
| 01/27/2010 | CN100584998C Method for preparing carboxyl apatite coating by single-chamber sacrificial anode hydrothermal synthesis |
| 01/27/2010 | CN100584997C Method and device for realizing matrix temperature equalization in preparation process of diamond film spherical cap |
| 01/27/2010 | CN100584996C Thin diamond film coating method and cemented carbide member coated with diamond thin film |
| 01/27/2010 | CN100584992C Foodware with multilayer stick resistant ceramic coating and method of making |
| 01/27/2010 | CN100584387C Device for sterilizing objects |
| 01/26/2010 | US7652774 Interferometric endpoint determination in a substrate etching process |
| 01/26/2010 | US7652341 Semiconductor apparatus having a semicondutor element with a high dielectric constant film |