| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 03/25/2010 | DE102007049363B4 Verfahren zur Herstellung von Silicium mittels Silanthermolyse A process for the production of silicon by means of Silanthermolyse |
| 03/24/2010 | EP2166562A2 Method for forming a capacitor having a strontium/barium titanium oxide dielectric layer by means of ALD and memory device comprising such a capacitor |
| 03/24/2010 | EP2166131A1 Thin film manufacturing apparatus and thin film manufacturing method |
| 03/24/2010 | EP2166130A1 Plastic film with good barrier effect after a sterilisation treatment |
| 03/24/2010 | EP2166129A1 Thin-film producing apparatus and method of producing thin film |
| 03/24/2010 | EP2165006A1 Device for coating substrates disposed on a susceptor |
| 03/24/2010 | EP2165005A1 Plasma-deposited barrier coating including at least three layers, method for obtaining one such coating and container coated with same |
| 03/24/2010 | EP2165004A1 A continuous process for preparing and collecting nanotube films that are supported by a substrate |
| 03/24/2010 | EP2164622A1 Surface modified aerosol particles, a method and apparatus for production thereof and powders and dispersions containing said particles |
| 03/24/2010 | CN201430158Y Solar cell glass substrate fixing device |
| 03/24/2010 | CN201427992Y PECVD system with inner heater |
| 03/24/2010 | CN101681871A Device for coating a plurality of closest-packed substrates arranged on a susceptor |
| 03/24/2010 | CN101681870A Dynamic temperature backside gas control for improved within-substrate processing uniformity |
| 03/24/2010 | CN101681817A Compound-type thin film, method for compound-type thin film formation, and electronic apparatus using the thin film |
| 03/24/2010 | CN101681785A Apparatus and methods for improving treatment uniformity in a plasma process |
| 03/24/2010 | CN101680561A Fluid control apparatus |
| 03/24/2010 | CN101680092A Device for the temperature control of the surface temperatures of substrates in a CVD reactor |
| 03/24/2010 | CN101680091A Reactive flow deposition and synthesis of inorganic foils |
| 03/24/2010 | CN101680090A Vacuum processing apparatus |
| 03/24/2010 | CN101680089A Low temperature SACVD processes for pattern loading applications |
| 03/24/2010 | CN101680088A Method and apparatus for production of metal oxide thin film |
| 03/24/2010 | CN101680087A Technique for atomic layer deposition |
| 03/24/2010 | CN101680086A New metal precursors for semiconductor applications |
| 03/24/2010 | CN101680085A New cobalt precursors for semiconductor applications |
| 03/24/2010 | CN101680084A Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory |
| 03/24/2010 | CN101679655A Coated object |
| 03/24/2010 | CN101678920A Biodegradable resin bottle and process for producing the same |
| 03/24/2010 | CN101678642A Molded plastic with vapor-deposited film and process for producing the same |
| 03/24/2010 | CN101678618A Edge healing and field repair of plasma coating |
| 03/24/2010 | CN101678497A Gas distributor comprising a plurality of diffusion-welded panes and a method for the production of such a gas distributor |
| 03/24/2010 | CN101677056A Carrying device and method for monitoring deposition machine |
| 03/24/2010 | CN101677014A Alloy electrode material for resistor type random access memory and preparation technology thereof |
| 03/24/2010 | CN101676433A Film deposition apparatus and film deposition method |
| 03/24/2010 | CN101676432A Film deposition apparatus and film deposition method |
| 03/24/2010 | CN100595910C Carburetor, various types of devices using carburetor, and method of vaporization |
| 03/24/2010 | CN100595901C Static chuck plate |
| 03/24/2010 | CN100595885C Plasma processing apparatus |
| 03/24/2010 | CN100595883C Plasma processing device and medium window thereof |
| 03/24/2010 | CN100595321C Method for preparing nano silicon-base porous luminescent material by normal pressure plasma gas phase deposition |
| 03/24/2010 | CN100595187C Alkoxide compound, thin film-forming material and method for forming thin film |
| 03/23/2010 | US7683293 depositing a silicon oxide film on the metal surface by plasma enhanced chemical vapor deposition, the precursor being a hexamethyldisiloxane or hexamethyldisilane; protects the metallic surface from scratching, staining and thermal yellowing |
| 03/23/2010 | US7683291 Substrate processing method and manufacturing method of semiconductor device |
| 03/23/2010 | US7683289 Apparatus and method for controlling plasma density profile |
| 03/23/2010 | US7683195 Silver β-ketocarboxylate, material comprising the same for forming silver metal, and use thereof |
| 03/23/2010 | US7683001 Yttrium metal-doped aluminum oxide consisting of yttrium, aluminum, and oxygen; semiconductor substrate; formed by chemical vapor deposition or atomic layer deposition |
| 03/23/2010 | US7682982 Plasma processing apparatus and control method thereof |
| 03/23/2010 | US7682710 consists of titanium oxide, ytterbium oxide, and gadolinium oxide and/or dysprosium oxide; for eyeglasses, lenses, cameras |
| 03/23/2010 | US7682660 Organic vapor phase deposition (OVPD) uses carrier gas to transport organic vapors into deposition chamber, where molecules diffuse across a boundary layer and physisorb on the substrate.patterned deposition owithout shadow mask; controlled separation; sharp-edged pixels with a resolution of 1 mu m |
| 03/23/2010 | US7682659 Post-suspended carbon structures using a negative photoresist exposed to ultraviolet light, and a two-step pyrolysis process. Electron beam photolithography is define the suspended structures; carbon micro- and nanoelectromechanical systems; electronics, sensors, batteries (lithium), microfluidics |
| 03/23/2010 | US7682658 In a quartz boat, positioning a second catalyst adjacent to a substrate having a film of first catalyst; directing acetylene and argon carrier toward the second catalyst to the substrate to produce a carbonaeous product for promoting catalytic activity of the first catalyst to grow the tubes |
| 03/23/2010 | US7682657 Sequential chemical vapor deposition |
| 03/23/2010 | US7682496 Apparatus for depositing seed layers |
| 03/23/2010 | US7682482 Plasma generation apparatus and work processing apparatus |
| 03/23/2010 | US7682481 Vacuum processing apparatus |
| 03/23/2010 | US7682479 Fin structure formation |
| 03/23/2010 | US7682455 Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components |
| 03/23/2010 | US7682454 Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems |
| 03/23/2010 | CA2451726C Article having a plasma polymer coating and a method for the preparation thereof |
| 03/18/2010 | WO2010031010A1 Solar photovoltaic devices and methods of making them |
| 03/18/2010 | WO2010030419A1 Films containing an infused oxygenated gas and methods for their preparation |
| 03/18/2010 | WO2010028808A1 Method for the production of carbon-modified titanium dioxide layers |
| 03/18/2010 | WO2010028778A1 Sanitary object |
| 03/18/2010 | WO2010010538A3 Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing films |
| 03/18/2010 | WO2010009048A3 Tube diffuser for load lock chamber |
| 03/18/2010 | WO2009148799A8 Method for making oriented tantalum pentoxide films |
| 03/18/2010 | WO2008057616A8 Antimony and germanium complexes useful for cvd/ald of metal thin films |
| 03/18/2010 | US20100068894 forming semiconductors from silicon-containing precursors and forming silicon-containing films, e.g., films including silicon carbonitride and silicon oxycarbonitride, on a substrate using low temperature (T<550 degrees C.) chemical vapor deposition (CVD) processes |
| 03/18/2010 | US20100068893 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 03/18/2010 | US20100068561 Permeation protection for pressurized hydrogen storage tank |
| 03/18/2010 | US20100068542 vaporizing a metal alkoxide, condensing the metal alkoxide to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure; rapid, low cost; use as ophthalmic lens, security device |
| 03/18/2010 | US20100068509 Media having improved surface smoothness and methods for making the same |
| 03/18/2010 | US20100068503 Method for producing nanocrystalline diamond coatings on gemstones and other substrates |
| 03/18/2010 | US20100068449 Perfluoroamidated and hydrolyzed maleic anhydride copolymers |
| 03/18/2010 | US20100068415 Deposition of amorphous silicon films by electron cyclotron resonance |
| 03/18/2010 | US20100068414 Substrate processing apparatus and substrate processing method |
| 03/18/2010 | US20100068413 Vapor deposition reactor using plasma and method for forming thin film using the same |
| 03/18/2010 | US20100068412 Process for coating a substrate, plant for implementing the process and feeder for feeding such a plant with metal |
| 03/18/2010 | US20100068411 Vacuum treatment method and vacuum treatment apparatus |
| 03/18/2010 | US20100068408 Methods for electron-beam induced deposition of material inside energetic-beam microscopes |
| 03/18/2010 | US20100068384 High-Throughput CVD System |
| 03/18/2010 | US20100068383 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 03/18/2010 | US20100068382 Method of curing metal alkoxide-containing films |
| 03/18/2010 | US20100068381 Chemical vapor deposition reactor having multiple inlets |
| 03/18/2010 | US20100068375 Evaporating apparatus and method for operating the same |
| 03/18/2010 | US20100068374 Method for marking an item based on colour centres |
| 03/18/2010 | US20100068118 High-pressure vessel for growing group III nitride crystals and method of growing group III nitride crystals using high-pressure vessel and group III nitride crystal |
| 03/18/2010 | US20100067847 Tunable optofluidic device and method of its fabrication |
| 03/18/2010 | US20100065216 Ring assembly for substrate processing chamber |
| 03/18/2010 | US20100065215 Plasma generating apparatus |
| 03/18/2010 | US20100065214 Showerhead electrode assembly for plasma processing apparatuses |
| 03/18/2010 | US20100064973 Apparatus and method for making carbon nanotube array |
| 03/18/2010 | US20100064972 Cvd film forming apparatus |
| 03/18/2010 | US20100064971 Electrode for Generating Plasma and Plasma Generator |
| 03/17/2010 | EP2163664A1 Method for depositing si-containing film, insulator film, and semiconductor device |
| 03/17/2010 | EP2162564A2 Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries |
| 03/17/2010 | EP2162389A1 Recycle and reuse of silane |
| 03/17/2010 | CN101675514A Tungsten digitlines and methods of forming and operating the same |
| 03/17/2010 | CN101675180A Method for forming a film on a substrate |
| 03/17/2010 | CN101673706A Materials for adhesion enhancement of copper film on diffusion barriers |
| 03/17/2010 | CN101673655A Microwave plasma resonant cavity used for depositing diamond film |