| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 05/04/2010 | US7709384 Tantalum amide complexes for depositing tantalum-containing films, and method of making same |
| 05/04/2010 | US7709377 Thin film including multi components and method of forming the same |
| 05/04/2010 | US7709063 Remote plasma apparatus for processing substrate with two types of gases |
| 05/04/2010 | US7709062 Scanning ion beams; filling aperture; process control |
| 05/04/2010 | US7708911 Titanium oxide based hybrid material, respective preparation process and uses |
| 05/04/2010 | US7708860 Plasma processing apparatus |
| 05/04/2010 | US7708859 Gas distribution system having fast gas switching capabilities |
| 05/04/2010 | US7708835 Film precursor tray for use in a film precursor evaporation system and method of using |
| 05/04/2010 | US7708834 Bolt and plasma processing apparatus provided with same |
| 05/04/2010 | US7707965 Processing apparatus and lid opening/closing mechanism |
| 04/29/2010 | WO2010048607A2 Enhanced optical properties of chemical vapor deposited single crystal diamond by low-pressure/high-temperature annealing |
| 04/29/2010 | WO2010047869A1 Cvd precursors |
| 04/29/2010 | WO2010047155A1 Heat treatment apparatus |
| 04/29/2010 | WO2010046373A2 Atomic layer deposition powder coating |
| 04/29/2010 | WO2010046252A1 Gas supply system, pumping system, coating system, gas supply method, and pumping method |
| 04/29/2010 | WO2010045904A2 Metal/cnt and/or fullerene composite coating on strip materials |
| 04/29/2010 | US20100105817 Silanes with Embedded Hydrophilicity, Dispersible Particles Derived Therefrom and Related Methods |
| 04/29/2010 | US20100105216 Plasma oxidizing method, storage medium, and plasma processing apparatus |
| 04/29/2010 | US20100105213 Forming method of amorphous carbon film, amorphous carbon film, multilayer resist film, manufacturing method of semiconductor device, and computer-readable storage medium |
| 04/29/2010 | US20100105195 Method and apparatus for forming a film by deposition from a plasma |
| 04/29/2010 | US20100104860 Cemented Tungsten Carbide-Based Material and Method for Making the Same |
| 04/29/2010 | US20100104852 Fabrication of High-Throughput Nano-Imprint Lithography Templates |
| 04/29/2010 | US20100104838 Optical Article and Method for Manufacturing the Same |
| 04/29/2010 | US20100104786 Device housing and method for manufacturing the same |
| 04/29/2010 | US20100104772 Electrode and power coupling scheme for uniform process in a large-area pecvd chamber |
| 04/29/2010 | US20100104771 Electrode and power coupling scheme for uniform process in a large-area pecvd chamber |
| 04/29/2010 | US20100104755 Deposition method of ternary films |
| 04/29/2010 | US20100104754 Multiple gas feed apparatus and method |
| 04/29/2010 | US20100104753 Low pressure vapor phase deposition of organic thin films |
| 04/29/2010 | US20100104752 Method for coating a substrate and metal alloy vacuum deposition facility |
| 04/29/2010 | US20100104751 Evaporating apparatus, evaporating method and manufacturing method of evaporating apparatus |
| 04/29/2010 | US20100104737 Method for inscribing or marking surfaces |
| 04/29/2010 | US20100104736 Method and apparatus for automated application of hardfacing material to drill bits |
| 04/29/2010 | US20100103518 Grid polarizer |
| 04/29/2010 | US20100102450 Zinc oxide based composites and methods for their fabrication |
| 04/29/2010 | US20100102417 Vapor deposition method for ternary compounds |
| 04/29/2010 | US20100101696 Tire, metal cord and process for manufacturing a metal cord |
| 04/29/2010 | US20100101497 Substrate treatment apparatus |
| 04/29/2010 | US20100101496 Wafer carrier and epitaxy machine using the same |
| 04/29/2010 | US20100101495 Restricted Radiated Heating Assembly for High Temperature Processing |
| 04/29/2010 | US20100101494 Electrode and chemical vapor deposition apparatus employing the electrode |
| 04/29/2010 | DE112008001482T5 Vorrichtung und Verfahren zur Verbesserung der Behandlungsgleichmäßigkeit in einem Plasmaprozess Apparatus and method for improving the uniformity of treatment in a plasma process |
| 04/29/2010 | DE102008053394A1 Vorrichtung zum partiellen Abdecken einer Bauteilzone Apparatus for partial covering a component zone |
| 04/29/2010 | DE102008053030A1 Metall/CNT-und/oder Fulleren-Komposit-Beschichtung auf Bandwerkstoffen Metal / CNT and / or fullerene composite coating on tape materials |
| 04/29/2010 | CA2731922A1 Metal/cnt and/or fullerene composite coating on strip materials |
| 04/28/2010 | EP2179842A1 Biodegradable resin container having deposited film, and method for formation of deposited film |
| 04/28/2010 | EP2178895A1 Methods of forming thin metal-containing films by cvd or ald using iron, ruthenium or osmium cyclopentadiene carbon monoxide complexes |
| 04/28/2010 | EP2178894A1 Organometallic precursors for use in chemical phase deposition processes |
| 04/28/2010 | EP1664379B1 Metallization of substrate (s) by a liquid/vapor deposition process |
| 04/28/2010 | CN201442977U Clamping mechanical device for back plate placed in PECVD cavity |
| 04/28/2010 | CN1957116B Nanocrystal diamond film, process for producing the same and apparatus using nanocrystal diamond film |
| 04/28/2010 | CN1853003B Metallization of substrate(s) by a liquid/vapor deposition process |
| 04/28/2010 | CN1816645B Method for deposition of titanium oxide by a plasma source |
| 04/28/2010 | CN1732283B Method for preparing coated wire |
| 04/28/2010 | CN1694849B Burner for chemical vapour deposition of glass |
| 04/28/2010 | CN1662448B Process for manufacturing a gallium rich gallium nitride film |
| 04/28/2010 | CN1590583B Trimethyl indium filling container and filling method thereof |
| 04/27/2010 | US7705382 Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material |
| 04/27/2010 | US7705330 Electron beam irradiation device |
| 04/27/2010 | US7704593 Cutting tool and method of producing the same |
| 04/27/2010 | US7704556 Silicon nitride film forming method |
| 04/27/2010 | US7704555 Flowing nitrogen gas adjacent a substrate to react with a mobile species (lithium fluoride) diffusing into a metal oxide film (electrode layer) to form the electrochromic layer on which an ion transfer layer is formed; depositing a second transparent electrode; releasing vacuum; vacuum/vapor deposit |
| 04/27/2010 | US7704554 Cooling solid organic material in an evaporization apparatus below the vaporization temperature, heating a second region of the vaporization apparatus above the vaporization temperature of the material so that there is a steep thermal gradient, vaporizing thin cross section of solid organic material |
| 04/27/2010 | US7704551 Hot melt adhesive system and method using machine readable information |
| 04/27/2010 | US7704547 Carbon nanotube growth density control |
| 04/27/2010 | US7704546 Strengthening the ceramic ball of a hip prosthesis by ion beam implantation to induce controlled bilateral compressive stress on the load-bearing surface and not make the ceramic amorphous; coating with a diamond-like-coating of bonding, amorphous, crosslinked carbon network; durability; noncracking |
| 04/27/2010 | US7704327 High temperature anneal with improved substrate support |
| 04/27/2010 | US7704326 Deposition mask and manufacturing method thereof |
| 04/27/2010 | US7703413 Expanded thermal plasma apparatus |
| 04/22/2010 | WO2010043716A2 Method for the controlled growth of a graphene film |
| 04/22/2010 | WO2010043615A1 Gravimetric sensor having a sensitive layer containing a diamond nanopowder |
| 04/22/2010 | WO2010043215A1 Method for producing photocatalytically active titanium dioxide layers |
| 04/22/2010 | US20100099319 Systems and Methods for Synthesis of Extended Length Nanostructures |
| 04/22/2010 | US20100099272 Systems and methods for forming metal oxides using metal diketonates and/or ketoimines |
| 04/22/2010 | US20100099271 Method for improving process control and film conformality of pecvd film |
| 04/22/2010 | US20100099270 Atomic layer deposition apparatus |
| 04/22/2010 | US20100099267 System and method of vapor deposition |
| 04/22/2010 | US20100098971 Coating for gas turbine components, and method and device for providing a coating |
| 04/22/2010 | US20100098964 Method for the production of a coating |
| 04/22/2010 | US20100098941 Polymer microstructure with tilted micropillar array and method of fabricating the same |
| 04/22/2010 | US20100098911 Surface Coated Member and Cutting Tool |
| 04/22/2010 | US20100098904 Single-walled carbon nanotubes and methods of preparation thereof |
| 04/22/2010 | US20100098884 Boron film interface engineering |
| 04/22/2010 | US20100098883 Method and apparatus for producing one-dimensional nanostructure |
| 04/22/2010 | US20100098882 Plasma source for chamber cleaning and process |
| 04/22/2010 | US20100098881 System and Method for Chemical Vapor Deposition Process Control |
| 04/22/2010 | US20100098862 Method and apparatus for precision surface modification in nano-imprint lithography |
| 04/22/2010 | US20100098856 Method for fabricating i -iii-vi2 compound thin film using single metal-organic chemical vapor deposition process |
| 04/22/2010 | US20100098855 Furnace temperature control method for thermal budget balance |
| 04/22/2010 | US20100098854 Pressure controlled droplet spraying (pcds) method for forming particles of compound materials from melts |
| 04/22/2010 | US20100098853 Arrangement for vaporizing materials and method for coating substrates |
| 04/22/2010 | US20100098852 Arrangement and method for regulating a gas stream or the like |
| 04/22/2010 | US20100098851 Techniques for atomic layer deposition |
| 04/22/2010 | US20100098837 Plasma doping method and apparatus |
| 04/22/2010 | US20100098836 Method and system for monitoring silane deposition |
| 04/22/2010 | US20100098835 Compensation of Actinic Radiation Intensity Profiles for Three-Dimensional Modelers |
| 04/22/2010 | US20100098550 Method for coating of a base body and also a workpiece |
| 04/22/2010 | US20100096393 Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container |
| 04/22/2010 | US20100096362 Plasma processing apparatus, power supply apparatus and method for operating plasma processing apparatus |
| 04/22/2010 | US20100096085 Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements |