| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 05/20/2010 | US20100124825 Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus |
| 05/20/2010 | US20100124822 Apparatuses for adjusting electrode gap in capacitively-coupled rf plasma reactor |
| 05/20/2010 | US20100124655 Method for fabricating carbon nanotube, wafer for growing carbon nanotube, and carbon nanotube device |
| 05/20/2010 | US20100124643 Undercoating layers providing improved photoactive topcoat functionality |
| 05/20/2010 | US20100124642 Undercoating layers providing improved conductive topcoat functionality |
| 05/20/2010 | US20100124622 Method for making nanowire structure |
| 05/20/2010 | US20100124621 Method of Forming Insulation Film by Modified PEALD |
| 05/20/2010 | US20100124613 Heater integrated thermocouple |
| 05/20/2010 | US20100124610 Substrate position detection apparatus, substrate position detection method, film deposition apparatus, film deposition method, and a computer readable storage medium |
| 05/20/2010 | US20100124609 Methods Of Forming Metal-Containing Structures, And Methods Of Forming Germanium-Containing Structures |
| 05/20/2010 | US20100124600 Method and apparatus for detecting and passivating defects in thin film solar cells |
| 05/20/2010 | US20100124529 Method of manufacturing carbon cylindrical structures and biopolymer detection device |
| 05/20/2010 | US20100123368 Film formation method, film formation device, piezoelectric film, piezoelectric device, liquid discharge device and piezoelectric ultrasonic transducer |
| 05/20/2010 | US20100122798 Heat transport device, electronic apparatus, and heat transport device manufacturing method |
| 05/20/2010 | US20100122710 Film deposition apparatus, cleaning method for the same, and computer storage medium storing program |
| 05/20/2010 | US20100122659 Metering and vaporizing particulate material |
| 05/20/2010 | US20100122657 Electrode, Chemical Vapor Deposition Apparatus Including the Electrode and Method of Making |
| 05/20/2010 | DE102008056968A1 Verfahren zum Abscheiden einer Nanokomposit-Schicht auf einem Substrat mittels chemischer Dampfabscheidung A method for depositing a nano-layer on a substrate by chemical vapor deposition |
| 05/20/2010 | CA2743474A1 Hydrophobic surface coating systems and methods for metals |
| 05/19/2010 | EP2187446A2 Microcrystalline silicon alloys for thin film and wafer based solar applications |
| 05/19/2010 | EP2186923A1 Gas supply system, pumping system, coating system, gas supply method, and pumping method |
| 05/19/2010 | EP2186922A1 Method for separating a nanocomposite layer on a substrate using chemical vapor deposition |
| 05/19/2010 | EP2186921A1 Filament arrangement for hot wire chemical vapour deposition |
| 05/19/2010 | EP2186920A1 Arrangement and method for regulating a gas stream or the like |
| 05/19/2010 | EP2186130A1 Tungsten digitlines and methods of forming and operating the same |
| 05/19/2010 | EP2186115A2 Combinatorial process system |
| 05/19/2010 | EP2185044A2 Part for a hydraulic circuit of a machine for preparing drinks that comprises a coating |
| 05/19/2010 | EP1439240B1 Method for hot-press forming a plated steel product |
| 05/19/2010 | EP1108267B1 Methods of forming roughened layers of platinum and methods of forming capacitors containing said roughened layers of platinum |
| 05/19/2010 | CN201473588U Hook of silicon wafer carrier for PECVD |
| 05/19/2010 | CN201473587U Silicon wafer carrier refitting device for PECVD |
| 05/19/2010 | CN1932075B Substrate processing device, chemical oxide removing processing module and substrate lifting device |
| 05/19/2010 | CN101711288A Method for the application of a high-strength coating to workpieces and/or materials |
| 05/19/2010 | CN101709457A Device of chemical vapor deposition diamond or other substances |
| 05/19/2010 | CN101333653B Plasma chemical vapor deposition process for preventing generation of bag type defects |
| 05/19/2010 | CN101333652B Method for preparing SixOyFz coatings on organic precoated metal plate |
| 05/19/2010 | CN101208783B Method to increase silicon nitride film tensile stress using post PECVD deposition and UV processing |
| 05/19/2010 | CN101206999B Inner lining and reaction chamber containing the same |
| 05/19/2010 | CN101171365B Multiple inlet atomic layer deposition reactor |
| 05/19/2010 | CN101130859B Resistor external-heating type thermal gradient vapor phase carbon depositing device for airplane carbon brake disc densification technique |
| 05/19/2010 | CN101091005B Method for forming tantalum nitride film |
| 05/19/2010 | CN101091000B Method for forming tantalum nitride film |
| 05/19/2010 | CN101012549B Chip carrier in silicon chip production |
| 05/19/2010 | CN101008081B Graphite boat for silicon wafer production |
| 05/19/2010 | CN101003033B Gas separation type showerhead |
| 05/18/2010 | US7719648 Manufacturing apparatus for liquid crystal device, manufacturing method for liquid crystal device, liquid crystal device and electronic device |
| 05/18/2010 | US7718930 Loading table and heat treating apparatus having the loading table |
| 05/18/2010 | US7718226 chemical vapor deposition; titanium carbides, nitrides |
| 05/18/2010 | US7718225 Method to control semiconductor film deposition characteristics |
| 05/18/2010 | US7718224 A modified chemical-vapor-deposition reaction chamber reduces turbulence of hydrocarbon gas flow during growth phase to promote environment for ultra-long nanotube formation; freely suspended from the substrate to form electrical contacts by bridging the gap between catalyst pads |
| 05/18/2010 | US7718223 Control of carbon nanotube density and tower height in an array |
| 05/18/2010 | US7718222 Apparatus and method for high rate uniform coating, including non-line of sight |
| 05/18/2010 | US7718215 Apparatus for forming alignment layer and auto-calibration method thereof |
| 05/18/2010 | US7718044 Method for controlling shaft coating taper |
| 05/18/2010 | US7718030 Method and system for controlling radical distribution |
| 05/18/2010 | US7718007 Substrate supporting member and substrate processing apparatus |
| 05/18/2010 | US7718006 Mask holding structure, film forming method, electro-optic device manufacturing method, and electronic apparatus |
| 05/18/2010 | US7718005 Film forming equipment and film forming method |
| 05/18/2010 | US7718004 Gas-introducing system and plasma CVD apparatus |
| 05/18/2010 | US7717061 Gas switching mechanism for plasma processing apparatus |
| 05/18/2010 | US7717001 Apparatus for and method of sampling and collecting powders flowing in a gas stream |
| 05/14/2010 | WO2010053878A2 Laminar flow in a precursor source canister |
| 05/14/2010 | WO2010053094A1 Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor |
| 05/14/2010 | WO2010052846A1 Take-up vacuum processing device |
| 05/14/2010 | WO2010052672A2 Allyl-containing precursors for the deposition of metal-containing films |
| 05/14/2010 | WO2010052191A2 Coated solid pliant materials |
| 05/14/2010 | WO2010008957A3 Bead pack brazing with energetics |
| 05/13/2010 | US20100120311 Method for providing textiles with desensitized silver components |
| 05/13/2010 | US20100120259 Method and apparatus to enhance process gas temperature in a cvd reactor |
| 05/13/2010 | US20100120238 Semiconductor manufacturing apparatus and method |
| 05/13/2010 | US20100119866 Low-temperature synthesis of integrated coatings for corrosion resistance |
| 05/13/2010 | US20100119825 Crystalline nanostructures |
| 05/13/2010 | US20100119734 Laminar flow in a precursor source canister |
| 05/13/2010 | US20100119733 Method of immobilizing active material on surface of substrate |
| 05/13/2010 | US20100119727 Film forming apparatus, film forming method and storage medium |
| 05/13/2010 | US20100119708 Filling structures of high aspect ratio elements for growth amplification and device fabrication |
| 05/13/2010 | US20100119698 Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof |
| 05/13/2010 | US20100119640 Die for molding honeycomb structure and manufacturing method thereof |
| 05/13/2010 | US20100118436 Protective coatings for data storage devices |
| 05/13/2010 | US20100117764 Assisted selective growth of highly dense and vertically aligned carbon nanotubes |
| 05/13/2010 | US20100117227 Method of preparing detectors for oxide bonding to readout integrated chips |
| 05/13/2010 | US20100117035 Electroconductive tin oxide having high mobility and low electron concentration |
| 05/13/2010 | US20100116791 Novel plasma system for improved process capability |
| 05/13/2010 | US20100116790 Device and method for locally producing microwave plasma |
| 05/13/2010 | US20100116789 Substrate processing apparatus |
| 05/13/2010 | US20100116788 Substrate temperature control by using liquid controlled multizone substrate support |
| 05/13/2010 | US20100116644 Device for carrying out a plasma-assisted process |
| 05/13/2010 | US20100116436 Ring-shaped member and method for manufacturing same |
| 05/13/2010 | US20100116210 Gas injector and film deposition apparatus |
| 05/13/2010 | US20100116209 Film deposition apparatus |
| 05/13/2010 | US20100116208 Ampoule and delivery system for solid precursors |
| 05/13/2010 | US20100116207 Reaction chamber |
| 05/13/2010 | US20100116206 Gas delivery system having reduced pressure variation |
| 05/12/2010 | EP2184287A1 Group 2 metal precursors for deposition of group 2 metal oxide films |
| 05/12/2010 | EP2183407A1 Atmospheric pressure plasma enhanced chemical vapor deposition process |
| 05/12/2010 | EP2183406A1 Method for preparation of a nanocomposite material by vapour phase chemical deposition |
| 05/12/2010 | EP2183405A1 Method for producing diamond-like carbon coatings using diamondoid precursors on internal surfaces |
| 05/12/2010 | EP1619266B1 Method and apparatus for chemical plasma processing of plastic containers |
| 05/12/2010 | EP1608793B1 Titania coatings |
| 05/12/2010 | DE102009014414A1 VHF-Elektrodenanordnung, Vorrichtung und Verfahren VHF electrode assembly, device and method |