| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/01/2010 | CA2486662C Vapor-phase growth apparatus |
| 06/01/2010 | CA2471266C Method for monitoring the course of a process using a reactive gas containing one or several hydrocarbons |
| 06/01/2010 | CA2440063C Chemical vapour infiltration method for densifying porous substrates having a central passage |
| 05/27/2010 | WO2010058813A1 Substrate processing method and substrate processing apparatus |
| 05/27/2010 | WO2010058812A1 Substrate processing apparatus |
| 05/27/2010 | WO2010058642A1 Plasma processing device and plasma processing method |
| 05/27/2010 | WO2010058560A1 Plasma processing apparatus |
| 05/27/2010 | WO2010058530A1 Sliding member and process for producing same |
| 05/27/2010 | WO2010058269A1 Reaction chamber of an epitaxial reactor |
| 05/27/2010 | WO2010057970A1 Coating method and coating device |
| 05/27/2010 | WO2010057837A1 Device and method for coating a substrate using cvd |
| 05/27/2010 | WO2010057836A1 Device and method for coating a substrate using cvd |
| 05/27/2010 | WO2010057323A1 Cleaning method for coating systems |
| 05/27/2010 | WO2009060766A9 Heating apparatus |
| 05/27/2010 | US20100131093 Fabrication system and fabrication method |
| 05/27/2010 | US20100130009 Substrate processing apparatus and method of manufacturing semiconductor device |
| 05/27/2010 | US20100130006 Method and structure of a thick metal layer using multiple deposition chambers |
| 05/27/2010 | US20100129994 Method for forming a film on a substrate |
| 05/27/2010 | US20100129672 Easy-to-clean article with stainless steel surface and method of making the same |
| 05/27/2010 | US20100129626 Multilayer Coatings |
| 05/27/2010 | US20100129549 Material for growth of carbon nanotubes |
| 05/27/2010 | US20100129548 Ald apparatus and method |
| 05/27/2010 | US20100129524 Methods of dispensing powder coating compositions and articles coated therewith |
| 05/27/2010 | US20100128203 Lamp, method for manufacturing the same and liquid crystal display apparatus having the same |
| 05/27/2010 | US20100126851 Electrode for electrochemical processes and method for producing the same |
| 05/27/2010 | US20100126669 Vacuum treatment apparatus |
| 05/27/2010 | US20100126667 Capacitive cvd reactor and methods for plasma cvd process |
| 05/27/2010 | US20100126605 Apparatus for conveying a waste stream |
| 05/27/2010 | US20100126419 Susceptor for cvd apparatus and cvd apparatus including the same |
| 05/27/2010 | US20100126418 Gas shower module |
| 05/27/2010 | US20100126417 Deposition source unit, deposition apparatus and temperature controller of deposition source unit |
| 05/27/2010 | US20100126411 METHODS FOR PRODUCING GaN NUTRIENT FOR AMMONOTHERMAL GROWTH |
| 05/27/2010 | US20100126351 Method for producing a material for chemical vapor deposition |
| 05/27/2010 | DE202009015521U1 Ultraschallwandler Ultrasonic transducer |
| 05/27/2010 | DE102009000903A1 Gasduschenmodul Gas shower module |
| 05/27/2010 | DE102008058783A1 Verfahren zur atmosphärischen Beschichtung von Nanooberflächen A method for atmospheric coating of nano surfaces |
| 05/27/2010 | DE102008044024A1 Beschichtungsverfahren sowie Beschichtungsvorrichtung Coating method and coating apparatus |
| 05/27/2010 | DE102008008320B4 Transporteinrichtung für horizontale Vakuumbeschichtungsanlagen Transport means for horizontal vacuum coating systems |
| 05/27/2010 | CA2744032A1 Cleaning method for coating systems |
| 05/26/2010 | EP2190013A2 Connection wire and method for manufacturing the same |
| 05/26/2010 | EP2189552A2 Substrate with multilayer coatings |
| 05/26/2010 | EP2188413A2 Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma |
| 05/26/2010 | EP2188412A1 Corrosion-resistant pressure vessel steel product, a process for the production thereof and a gas turbine component |
| 05/26/2010 | EP2188405A1 Method for producing a metal-oxide-coated workpiece surface with predeterminable hydrophobic behaviour |
| 05/26/2010 | EP2188404A1 Coatings to resist and protect against aquatic biofouling |
| 05/26/2010 | EP2188224A1 Method for the transparent coating of a substrate with plasma at atmospheric pressure |
| 05/26/2010 | CN201485502U Housing device for protecting idler wheel |
| 05/26/2010 | CN201485501U Equipment used for surface processing of substrate under vacuum |
| 05/26/2010 | CN1953259B Fuel cell component having a durable conductive and hydrophilic coating |
| 05/26/2010 | CN1894192B Copper(I) formate complexes |
| 05/26/2010 | CN1833047B Carbon-coated aluminum and method for producing same |
| 05/26/2010 | CN1807681B Evaporating device and method utilizing same |
| 05/26/2010 | CN1676477B Manufacturing method of die for optical element molding |
| 05/26/2010 | CN1644756B Apparatus for atomic layer deposition |
| 05/26/2010 | CN1643179B ALD device and method |
| 05/26/2010 | CN1630925B Device for applying electromagnetic microwave radiation in a plasma cavity |
| 05/26/2010 | CN1519925B Semiconductor device and its manufacture method |
| 05/26/2010 | CN1518075B Organic insulating film, its manufacturing method, semiconductor device using the organic insulating film and its manufacturing method |
| 05/26/2010 | CN1456703B Reinforced alumina layer produced by chemical gas-phase precipitation |
| 05/26/2010 | CN101715605A Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings |
| 05/26/2010 | CN101715602A Film forming method and film forming apparatus |
| 05/26/2010 | CN101715466A Transparent barrier film and method for producing the same |
| 05/26/2010 | CN101714603A Method for growing GaN-based quantum well red-light LED structure |
| 05/26/2010 | CN101714518A Method for fabricating semiconductor device |
| 05/26/2010 | CN101714506A Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same |
| 05/26/2010 | CN101713067A Film formation method and film formation apparatus |
| 05/26/2010 | CN101713066A Method for depositing film and film deposition apparatus |
| 05/26/2010 | CN101336467B Plasma processing apparatus and plasma processing method |
| 05/26/2010 | CN101198718B Method for treating plasma and/or covering plasma of workpieces under continuous atmospheric pressure, in particular material plates or strips |
| 05/26/2010 | CN101103137B Method and apparatus for monolayer deposition |
| 05/26/2010 | CN101065515B Solid precursor transmission system incorporating displaceable and stacked disc |
| 05/26/2010 | CN101051606B Vertical plasma processing apparatus and method for semiconductor processing |
| 05/25/2010 | US7725012 Movable radiant heat sources |
| 05/25/2010 | US7724609 Sonic cup gun |
| 05/25/2010 | US7723685 Monitoring system comprising infrared thermopile detector |
| 05/25/2010 | US7723649 Vacuum thermal annealer |
| 05/25/2010 | US7723535 Organometallic precursor compounds |
| 05/25/2010 | US7723493 vapor deposition; atomic layer deposition; heat resistance |
| 05/25/2010 | US7723218 Plasma CVD apparatus |
| 05/25/2010 | US7723217 Method for manufacturing gallium nitride single crystalline substrate using self-split |
| 05/25/2010 | US7722927 Organic vapor phase deposition (OVPD) uses carrier gas to transport organic vapors into deposition chamber, where molecules diffuse across a boundary layer and physisorb on the substrate, patterned deposition without shadow mask; controlled separation; sharp-edged pixels with a resolution of 1 mu m |
| 05/25/2010 | US7722926 Organometallic compounds and methods of forming thin films including the use of the same |
| 05/25/2010 | US7722925 Showerhead mounting to accommodate thermal expansion |
| 05/25/2010 | US7722916 Methods for controlling plasma spray coating porosity on an article and articles manufactured therefrom |
| 05/25/2010 | US7722738 Semiconductor device manufacturing unit and semiconductor device manufacturing method |
| 05/25/2010 | US7722737 Gas distribution system for improved transient phase deposition |
| 05/25/2010 | US7722720 Delivery device |
| 05/25/2010 | US7722719 Gas baffle and distributor for semiconductor processing chamber |
| 05/25/2010 | US7721673 Hollow cathode discharging apparatus |
| 05/25/2010 | CA2462934C Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| 05/25/2010 | CA2453365C Optical member having antireflection film |
| 05/20/2010 | WO2010056954A2 Sealing apparatus for a process chamber |
| 05/20/2010 | WO2010056933A2 Hydrophobic surface coating systems and methods for metals |
| 05/20/2010 | WO2010056576A1 Reagent dispensing apparatuses and delivery methods |
| 05/20/2010 | WO2010055926A1 Film forming apparatus |
| 05/20/2010 | WO2010055669A1 Electrode circuit, film formation device, electrode unit, and film formation method |
| 05/20/2010 | WO2010055635A1 Nitride semiconductor device |
| 05/20/2010 | WO2010055441A2 Improved substrate temperature control by using liquid controlled multizone substrate support |
| 05/20/2010 | WO2010055423A2 Tellurium precursors for film deposition |
| 05/20/2010 | WO2010054772A1 Filament arrangement for hot wire chemical vapour deposition |