Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
07/2010
07/29/2010WO2010084535A1 Semiconductor device and method for manufacturing same
07/29/2010WO2010063907A3 Methods for preparing and depositing nanoparticles on media
07/29/2010WO2010056933A3 Hydrophobic surface coating systems and methods for metals
07/29/2010WO2010012836A3 Biocompatibility layer, and coated objects
07/29/2010WO2009033067A3 Combinatorial process system
07/29/2010US20100190353 Nanolayer deposition process
07/29/2010US20100190331 System for Depositing a Film Onto a Substrate Using a Low Vapor Pressure Gas Precursor
07/29/2010US20100190036 Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc
07/29/2010US20100190034 Surface treatment, surface-treated head slider or magnetic recording medium, and magnetic recording-reproducing device
07/29/2010US20100189928 Method for Manufacturing an Optical Fiber Preform
07/29/2010US20100189927 Film formation apparatus and method for using same
07/29/2010US20100189926 Plasma deposition apparatus and method for making high purity silicon
07/29/2010US20100189925 Insulator coating and method for forming same
07/29/2010US20100189924 Apparatus and method for diamond film growth
07/29/2010US20100189922 Permeable nanoparticle reflector
07/29/2010US20100189900 Atomic layer deposition system and method utilizing multiple precursor zones for coating flexible substrates
07/29/2010US20100189899 Method and device for the infiltration of a structure of a porous material by chemical vapour deposition
07/29/2010US20100189898 MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXES
07/29/2010US20100189897 High temperature evaporator cell having parallel-connected heating zones
07/29/2010US20100189883 Continuous process for preparing and collecting nanotube films that are supported by a substrate
07/29/2010US20100189559 Fixture for use in a coating operation
07/29/2010US20100189555 Method and assembly for gas turbine engine airfoils with protective coating
07/29/2010US20100187201 Vacuum processing device and vacuum processing method
07/29/2010US20100187104 Film formation apparatus
07/29/2010US20100186898 Plasma processing apparatus
07/29/2010US20100186672 Plasma processing apparatus
07/29/2010US20100186671 Arrangement for working substrates by means of plasma
07/29/2010US20100186670 Plasma formation region control apparatus and plasma processing apparatus
07/29/2010US20100186669 Atomic layer deposition apparatus
07/29/2010US20100186668 Atomic layer deposition systems and methods including metal beta-diketiminate compounds
07/29/2010US20100186667 Vertical heat processing apparatus and component for same, for forming high dielectric constant film
07/28/2010EP2210692A1 Composite material and coated cutting tool
07/28/2010EP2209930A1 Vapour delivery system
07/28/2010EP2209929A1 Coated article
07/28/2010EP2209928A1 Method of producing a hydrogenated amorphous carbon coating
07/28/2010EP2209927A2 Corrosion-resistant coating and method for producing same
07/28/2010CN101790596A Method for producing a metal-oxide-coated workpiece surface with predeterminable hydrophobic behaviour
07/28/2010CN101788516A Method for manufacturing alternating current electrophoresis directionally assembled carbon nanotube array sensing device
07/28/2010CN101787522A Method for preparing ordered magnetic nanoparticle composite film with super-high density
07/28/2010CN101787521A Method for preparing metal sulfide diamond-like carbon composite film
07/28/2010CN101787520A Tungsten-titanium co-doped diamond coating material and preparation technique thereof
07/28/2010CN101499407B Gas dispensing device and semiconductor process plant employing the same
07/28/2010CN101335192B Substrate processing apparatus and shower head
07/28/2010CN101210317B Gas integrated unit
07/28/2010CN101128620B Method of forming film and apparatus for film formation
07/28/2010CN101092691B Elimination of first wafer effect for PEVCD films
07/27/2010US7764872 Cooling device, and apparatus and method for manufacturing image display panel using cooling device
07/27/2010US7763979 Organic insulating film, manufacturing method thereof, semiconductor device using such organic insulating film and manufacturing method thereof
07/27/2010US7763831 Heating device
07/27/2010US7763550 Method of forming a layer on a wafer
07/27/2010US7763371 Solid oxide fuel cell electrolyte and method
07/27/2010US7763328 Method of depositing a thermal barrier by plasma torch
07/27/2010US7763318 chemical vapor deposition; mixing an amino-(2.2)-paracyclophane compound is mixed in a (2.2)-paracyclophane compound
07/27/2010US7763317 Exposing an indium antimonide semiconductor surface to a triflating or trifluoroacetylating agent to terminate the surface with triflate or trifluoroacetate groups; reacting the triflate or trifluoroacetate protecting groups with water; forming aluminum oxide by atomic layer deposition
07/27/2010US7763147 Arc suppression plate for a plasma processing chamber
07/27/2010US7763115 Vacuum film-forming apparatus
07/27/2010US7763114 Rotatable aperture mask assembly and deposition system
07/27/2010US7762208 Loading and unloading apparatus for a coating device
07/27/2010CA2598717C Method and system for coating sections of internal surfaces
07/27/2010CA2366500C Tungsten carbide coatings and process for producing them
07/22/2010WO2010083510A1 Composition and method for low temperature deposition of ruthenium
07/22/2010WO2010082581A1 Heat insulating article, method for producing heat insulating article, and building member
07/22/2010WO2010082561A1 Apparatus and method for producing plasma
07/22/2010WO2010082467A1 Plasma cvd apparatus
07/22/2010WO2010082345A1 Silicon-dot forming method, and silicon-dot forming apparatus
07/22/2010WO2010082267A1 Inside reforming substrate for epitaxial growth; crystal film forming element, device, and bulk substrate produced using the same; and method for producing the same
07/22/2010WO2010082120A1 Amorphous carbon, method of manufacturing the same, and solar cell including the same
07/22/2010WO2010081959A2 Metal complexes for chemical vapour deposition of platinum
07/22/2010WO2010026092A3 Wear and corrosion resistant layered composite
07/22/2010WO2009108221A3 Thermalization of gaseous precursors in cvd reactors
07/22/2010US20100184592 Particles or coating for splitting water
07/22/2010US20100184251 Plasma inside vapor deposition apparatus and method for making multi-junction silicon thin film solar cell modules and panels
07/22/2010US20100184249 Continuous deposition process and apparatus for manufacturing cadmium telluride photovoltaic devices
07/22/2010US20100184243 Mask applied to a workpiece
07/22/2010US20100183879 Plasma deposition apparatus
07/22/2010US20100183827 Plasma processing apparatus and plasma processing method
07/22/2010US20100183825 Plasma atomic layer deposition system and method
07/22/2010US20100183807 Substrate processing apparatus and substrate processing method
07/22/2010US20100182375 Ink jet printing head
07/22/2010US20100181648 Localized synthesis and self-assembly of nanostructures
07/22/2010US20100181545 Non-volatile memory cell and fabrication method thereof
07/22/2010US20100181024 Diffuser support
07/22/2010US20100180820 Apparatus for treating powder
07/22/2010US20100180819 Film-forming apparatus
07/22/2010US20100180818 Dynamic Film Thickness Control System/Method and its Utilization
07/22/2010DE102010005262A1 Method for the production of a tool having hard material coating, comprises carrying out an edge layer hardening in a tool ready processed in a smooth and/or prehardened condition and austenitizing the accompanying material
07/22/2010DE102009005053A1 Vorrichtung und Verfahren zur Oberflächenbehandlung partikulärer und pulverförmiger Substrate im Fließbett Apparatus and method for surface treatment of particulate and pulverulent substrates in the fluidized bed
07/22/2010DE102009000259A1 Verfahren zur Modifizierung der Oberfläche von Partikeln und hierzu geeignete Vorrichtung A method for modifying the surface of particles and for this purpose suitable means
07/22/2010DE102004010688B4 Bearbeitungseinrichtung, Bearbeitungsverfahren, Drucksteuerverfahren, Transportverfahren, und Transporteinrichtung Processing equipment, processing technique, printing control method, method of transport, and transport equipment
07/21/2010EP2208806A1 Heating element CVD system
07/21/2010EP2208805A1 Strain tolerant thermal barrier coating system
07/21/2010EP2208561A1 Edge replacement-type cutting chip
07/21/2010EP2208222A1 Methods for forming a silicon oxide layer over a substrate
07/21/2010EP2207912A2 Vapour delivery system
07/21/2010EP2207911A1 Apparatus and method for producing epitaxial layers
07/21/2010EP2207910A1 Method for the production of semiconductor ribbons from a gaseous feedstock
07/21/2010EP1634314B1 Vuv-excited device with blue-emitting phosphor
07/21/2010EP1507895B1 Rotary machine for cvd coatings
07/21/2010CN201530864U Chemical gas-phase deposition equipment
07/21/2010CN201530863U Deposit furnace tube