| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 11/17/2010 | CN101886253A Flexible material vacuum coating machine utilizing Penning discharge source |
| 11/17/2010 | CN101886252A Method for depositing DLC film on PC resin lens |
| 11/17/2010 | CN101886251A Electromagnetic-field-aided metal-organic chemical vapor deposition equipment |
| 11/17/2010 | CN101399169B Film-forming method, film-forming apparatus, storage medium, and semiconductor device |
| 11/17/2010 | CN101314844B MOCVD reaction chamber with horizontal tangential inlet, and center vertical outlet |
| 11/17/2010 | CN101312126B Method for forming amorphous carbon film and method for manufacturing semiconductor device using the method |
| 11/17/2010 | CN101240416B Chemical palladium-plating method on silicon used for surface enhancement infrared spectrum |
| 11/17/2010 | CN101237039B Method for synthesizing LiFePO4/C material based on chemical gas phase sediment auxiliary solid phase method |
| 11/17/2010 | CN101170060B Making method for silicon germanium extension layer |
| 11/17/2010 | CN101117220B Method for the production of tungsten carbide powder |
| 11/17/2010 | CN101012547B Method and equipment for plating wolfram, chromium and molybdenum on diamond and cubic boron nitride particle surface |
| 11/16/2010 | US7835816 Heat processing apparatus, heat processing method, computer program and storage medium |
| 11/16/2010 | US7833587 in which discharge electrode and substrate are disposed opposite each other in vacuum film formation chamber into which gas for forming film containing substance has been introduced, and high-frequency electric power generated by feeding circuit through adjustable external cables |
| 11/16/2010 | US7833581 Method for making a highly stable diamond film on a substrate |
| 11/16/2010 | US7833580 Chemisorption; chemical vaopor deposition; removal impurities; cyclic process |
| 11/16/2010 | US7833579 Method for in-situ polycrystalline thin film growth |
| 11/16/2010 | US7833574 Forming a protective film of zinc oxide over the DLC on a glass substrate to prevent burnoff of the DLC layer during heat treatment; allows scratch resistant DLC coating on heat treated transparent shower doors or window units |
| 11/16/2010 | US7833567 Method for forming electrical circuit by jetting molten metal |
| 11/16/2010 | US7833429 Plasma processing method |
| 11/16/2010 | US7833401 Electroplating an yttrium-containing coating on a chamber component |
| 11/16/2010 | US7833382 Vacuum processing apparatus |
| 11/16/2010 | US7833355 Carbon nanotube (CNT) extrusion methods and CNT wire and composites |
| 11/16/2010 | US7833354 Multiple nozzle evaporator for vacuum thermal evaporation |
| 11/16/2010 | US7833353 Liquid material vaporization apparatus for semiconductor processing apparatus |
| 11/16/2010 | US7833352 Apparatus for fabrication of thin films |
| 11/16/2010 | US7833350 Apparatus for treating thin film and method of treating thin film |
| 11/16/2010 | US7833348 Temperature control method of epitaxial growth apparatus |
| 11/16/2010 | US7832550 Reactive gases with concentrations of increased stability and processes for manufacturing same |
| 11/16/2010 | US7832354 Cathode liner with wafer edge gas injection in a plasma reactor chamber |
| 11/16/2010 | CA2501085C Composite material |
| 11/16/2010 | CA2401975C Fluid handling devices with diamond-like films |
| 11/11/2010 | WO2010129783A1 Apparatus and method for plasma treatment of containers |
| 11/11/2010 | WO2010129753A1 Medicinal inhalation device |
| 11/11/2010 | WO2010129431A2 Thermocouple |
| 11/11/2010 | WO2010129149A1 Coating method |
| 11/11/2010 | WO2010128968A1 Apparatus and methods for forming modified metal coatings |
| 11/11/2010 | WO2008113571A9 Gas distribution system |
| 11/11/2010 | US20100286423 Nickel-containing film-forming material and process for producing nickel-containing film |
| 11/11/2010 | US20100285663 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride |
| 11/11/2010 | US20100285415 Burner Element and Burner Having Aluminum Oxide Coating and Method for Coating a Burner Element |
| 11/11/2010 | US20100285330 Vapor Deposition of Dissimilar Materials |
| 11/11/2010 | US20100285290 Undercoating layers providing improved topcoat functionality |
| 11/11/2010 | US20100285241 Laser deposition of nanocomposite films |
| 11/11/2010 | US20100285238 Methods of forming glass on a substrate |
| 11/11/2010 | US20100285235 Process for the preparation of photo luminescent nanostructured silicon thin films |
| 11/11/2010 | US20100285218 Linear Deposition Source |
| 11/11/2010 | US20100285217 Process for producing oxide films |
| 11/11/2010 | US20100285206 Method and apparatus |
| 11/11/2010 | US20100285205 Coating method |
| 11/11/2010 | US20100282980 Stable Calibration Means for Apparatus for Photo Reduction of Contaminants in Blood |
| 11/11/2010 | US20100282711 Process monitoring apparatus and method |
| 11/11/2010 | US20100282603 Heated substrate support for chemical vapor deposition |
| 11/11/2010 | US20100282413 Multichamber processing with simultaneaous workpiece transport and gas delivery |
| 11/11/2010 | US20100282170 Vapor phase growth susceptor and vapor phase growth apparatus |
| 11/11/2010 | US20100282169 Substrate-supporting device, and a substrate-processing device having the same |
| 11/11/2010 | US20100282168 Plasma processing apparatus, heating device for plasma processing apparatus, and plasma processing method |
| 11/11/2010 | US20100282167 Linear Deposition Source |
| 11/11/2010 | US20100282166 Heat treatment apparatus and method of heat treatment |
| 11/11/2010 | US20100282165 Production of adjustment structures for a structured layer deposition on a microsystem technology wafer |
| 11/11/2010 | US20100282164 Methods and systems for controlling temperature during microfeature workpiece processing, e.g., cvd deposition |
| 11/11/2010 | US20100282163 Thermocouple assembly with guarded thermocouple junction |
| 11/11/2010 | DE102009037290A1 Transporteinrichtung mit einem auslenkbaren Dichtrahmen Transport means having a deflectable sealing frame |
| 11/11/2010 | DE102009002780A1 Metallsubstrate mit kratzfester und dehnbarer Korrosionsschutzschicht und Verfahren zu deren Herstellung Metal substrates having scratch-resistant and ductile corrosion protection layer and processes for their preparation |
| 11/11/2010 | CA2760801A1 Medicinal inhalation device |
| 11/11/2010 | CA2759031A1 Apparatus and methods for forming modified metal coatings |
| 11/10/2010 | EP2249413A2 Support and organic electroluminescence element comprising the support |
| 11/10/2010 | EP2249379A2 Batch-type atomic layer vapour-deposition device |
| 11/10/2010 | EP2248931A2 Free-standing and parting method for forming same |
| 11/10/2010 | EP2248153A2 Ion source cleaning in semiconductor processing systems |
| 11/10/2010 | EP2247769A2 Solid precursor sublimator |
| 11/10/2010 | EP2247768A2 Thermalization of gaseous precursors in cvd reactors |
| 11/10/2010 | EP2247767A1 A substrate coated with amorphous hydrogenated carbon |
| 11/10/2010 | EP1937870B1 Plasma reactor |
| 11/10/2010 | EP1796442B1 Plasma processing system |
| 11/10/2010 | EP1452626B1 Mixer, and device and method for manufacturing thin film |
| 11/10/2010 | EP1443543B1 Thermal treating apparatus |
| 11/10/2010 | EP1333475B1 Method for forming an insulation film and substrate processing apparatus therefore |
| 11/10/2010 | CN201626981U Gas inlet device of chemical vapor phase deposition epitaxy equipment |
| 11/10/2010 | CN101883881A Method for producing group iii nitride-based compound semiconductor, wafer including group iii nitride-based compound semiconductor, and group iii nitride-based compound semiconductor device |
| 11/10/2010 | CN101883877A Atomic layer deposition process |
| 11/10/2010 | CN101883652A A new product and method for its manufacture within material processing |
| 11/10/2010 | CN101882647A Movable holder for silicon-based film solar cells |
| 11/10/2010 | CN101882646A Deposition clamp of film solar cell |
| 11/10/2010 | CN101882582A Production method of semiconductor device |
| 11/10/2010 | CN101882571A III nitride semiconductor crystal and manufacturing method thereof, III nitride semiconductor device and manufacturing method thereof, and light emitting device |
| 11/10/2010 | CN101880869A Film forming method and plasma film forming apparatus |
| 11/10/2010 | CN101880868A Deposition box for silicon-based film solar cells |
| 11/10/2010 | CN101880867A Plasma enhanced chemical vapor deposition device |
| 11/10/2010 | CN101880866A Method for preparing diamond-silicon carbide-cobalt disilicide composite interlayer of diamond coating on hard alloy |
| 11/10/2010 | CN101880864A Film coating device |
| 11/10/2010 | CN101879612A Hard alloy coated blade for steel product turning |
| 11/10/2010 | CN101879611A Hard alloy coated blade for stainless steel turning |
| 11/10/2010 | CN101560649B Multipurpose industrial equipment for mass production of CVD diamond film |
| 11/10/2010 | CN101553902B Apparatus and method for manufacturing semiconductor element and semiconductor element manufactured by the method |
| 11/10/2010 | CN101529563B Shower plate sintered integrally with gas release hole member and method for manufacturing the same |
| 11/10/2010 | CN101392369B Door closure device and vacuum device with door closure device |
| 11/10/2010 | CN101305112B Method for producing a coated substrate body, substrate body comprising a coating and use of the coated substrate body |
| 11/10/2010 | CN101298669B Process chamber, inline coating installation and method for treating a substrate |
| 11/10/2010 | CN101153384B Method for manufacturing unit doublet carbide codeposition fibre-reinforced composite |
| 11/10/2010 | CN101106075B Film formation apparatus for semiconductor process and method for using the same |