| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 01/12/2011 | CN101441983B Plasma confinement apparatus and semiconductor processing equipment applying the same |
| 01/12/2011 | CN101330044B Method of manufacturing thin film |
| 01/12/2011 | CN101290902B Manufacturing method of support pin, support pin, heat treatment device and base board sintering furnace |
| 01/12/2011 | CN101270470B Method for synthesizing non-metal catalyst self-organizing growth carbon nano-tube with chemical vapor deposition |
| 01/12/2011 | CN101188207B Electrostatic sucking electrode, substrate processing apparatus and manufacturing method for electrostatic sucking electrode |
| 01/11/2011 | US7868458 Semiconductor device with epitaxial C49-titanium silicide (TiSi2) layer and method for fabricating the same |
| 01/11/2011 | US7868290 Material processing system and method |
| 01/11/2011 | US7867896 Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor |
| 01/11/2011 | US7867881 Method of manufacturing nitride semiconductor substrate |
| 01/11/2011 | US7867638 magnetic heads comprising nonmagnetic substrate for controlling the polarity of magnetic layers and protective coatings, having enhanced thermal fluctuation, a sufficient read/write property for high density recording and a high signal/noise ratio during the reproduction |
| 01/11/2011 | US7867577 hydrolyzed, concentrated, and heated polysulfides, alkenyl silanes such as vinyltrimethoxysilane; for formation of lenses |
| 01/11/2011 | US7867560 Depositing ruthenium-, rhenium-, or rhodium-carbonyl thin film on substrate using solid-phase or liquid-phase precursor |
| 01/11/2011 | US7867558 Apparatus and method for lining large diameter pipes with an environmentally compatible impervious membrane |
| 01/11/2011 | US7867554 Boron nitride coated fibers and composite articles containing same |
| 01/11/2011 | US7867409 Control of ion angular distribution function at wafer surface |
| 01/11/2011 | US7867356 Apparatus for reducing polymer deposition on a substrate and substrate support |
| 01/11/2011 | US7867355 Adjustable height PIF probe |
| 01/11/2011 | US7867312 Trap device |
| 01/11/2011 | US7866341 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same |
| 01/11/2011 | US7866278 Thin-film deposition system |
| 01/11/2011 | US7866188 PCVD apparatus with a choke defined within a microwave applicator |
| 01/11/2011 | CA2493988C Installation for the vacuum treatment notably of substrates |
| 01/11/2011 | CA2430666C Separator of a fuel cell and a manufacturing method thereof |
| 01/06/2011 | WO2011002920A2 LITHIUM PRECURSORS FOR LixMyOz MATERIALS FOR BATTERIES |
| 01/06/2011 | WO2011001782A1 Group iii nitride crystal and production method thereof |
| 01/06/2011 | WO2011001770A1 Epitaxial silicon wafer and method for manufacturing same |
| 01/06/2011 | WO2011001747A1 Production method and production device for solar battery |
| 01/06/2011 | WO2011001394A2 Method of removing residual fluorine from deposition chamber |
| 01/06/2011 | WO2010118051A3 Semiconductor processing reactor and components thereof |
| 01/06/2011 | WO2010110551A3 Chemical vapor deposition reactor for preparation of polysilicon |
| 01/06/2011 | US20110003088 Plasma cvd apparatus, plasma cvd method, and agitating device |
| 01/06/2011 | US20110003087 Method and apparatus for generating plasma |
| 01/06/2011 | US20110003083 Method for making functional ceramic films on ceramic materials |
| 01/06/2011 | US20110003075 Process and apparatus for depositing a ceramic coating |
| 01/06/2011 | US20110001143 Composition Comprising Silicon Carbide |
| 01/06/2011 | US20110001097 Silicon composite, making method, and non-aqueous electrolyte secondary cell negative electrode material |
| 01/06/2011 | US20110000852 Thin layer chromatography plates and related methods |
| 01/06/2011 | US20110000785 Electrical patterns for biosensor and method of making |
| 01/06/2011 | US20110000434 Method of manufacturing silicon carbide semiconductor device |
| 01/06/2011 | US20110000433 Plasma, uv and ion/neutral assisted ald or cvd in a batch tool |
| 01/06/2011 | US20110000431 Industrial vapour generator for the deposition of an alloy coating onto a metal strip |
| 01/06/2011 | US20110000430 Vacuum vapor deposition apparatus |
| 01/05/2011 | EP2268849A1 In situ nano-particle matrix loading of metal oxide coatings via combustion deposition |
| 01/05/2011 | EP2268848A1 Method for developing thin film from oxide or silicate of hafnium nitride, coordination compound used in said method, and method for producing integrated electronic circuit |
| 01/05/2011 | EP2268847A1 Atmospheric pressure chemical vapour deposition method for producing a n-semiconductive metal sulphide thin layer |
| 01/05/2011 | EP2268846A1 A method for stable hydrophilicity enhancement of a substrate by atmospheric pressure plasma deposition |
| 01/05/2011 | EP2268452A2 Fixed abrasive articles utilizing coated abrasive particles |
| 01/05/2011 | EP2004660B1 Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereof |
| 01/05/2011 | EP1356132B1 Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films |
| 01/05/2011 | EP1043763B1 Vapor growth apparatus for semiconductor wafers with dopant gas feed assembly |
| 01/05/2011 | DE112008003659T5 Nanostrukturen und Verfahren zum Herstellen derselben Nanostructures and methods for manufacturing the same |
| 01/05/2011 | DE112008003277T5 Suszeptor für das Dampfphasenwachstum und Dampfphasenwachstumsvorrichtung Susceptor for vapor-phase growth, and vapor phase growth apparatus |
| 01/05/2011 | DE102009031483A1 Method for the production of electrically conductive transparent layers on flexible substrate, comprises thermally evaporating two metals such as aluminum, zinc, tin, indium, gallium and/or antimony from locally separated containers |
| 01/05/2011 | DE102009031305A1 Katalysatorbeschichteter Träger, Verfahren zu dessen Herstellung, ein damit ausgestatteter Reaktor und dessen Verwendung Catalyst-coated carrier, method for its production, a so-equipped reactor and its use |
| 01/05/2011 | DE102009030876A1 Verfahren zum Beschichten eines Substrats A method for coating a substrate |
| 01/05/2011 | DE102008056968B4 Verfahren zum Abscheiden einer Nanoverbund-Schicht auf einem Substrat mittels chemischer Dampfabscheidung A method for depositing a nano-composite layer on a substrate by chemical vapor deposition |
| 01/05/2011 | CN201695087U Hot wire tensioning mechanism |
| 01/05/2011 | CN201695086U Chemical gaseous densification furnace hearth |
| 01/05/2011 | CN201695085U Horizontal high-temperature vacuum coating production line |
| 01/05/2011 | CN201695082U Transmission friction wheel regulator of vacuum film coating machine |
| 01/05/2011 | CN201695078U Non-target door turnover mechanism of horizontal vacuum coating machine |
| 01/05/2011 | CN101939827A Liquid material carburetor, and filming device using the carburetor |
| 01/05/2011 | CN101939820A Substrate for epitaxial growth, process for producing gan-base semiconductor film, gan-base semiconductor film, process for producing gan-base semiconductor luminescent element, and gan-base semiconductor luminescent element |
| 01/05/2011 | CN101939466A Plasma CVD apparatus, plasma CVD method, and agitating device |
| 01/05/2011 | CN101939465A Material for chemical vapor deposition, silicon-containing insulating film and process for production thereof |
| 01/05/2011 | CN101939464A Lock device for adding and removing containers to and from a vacuum treatment chamber |
| 01/05/2011 | CN101939463A Vaporization apparatus with precise powder metering |
| 01/05/2011 | CN101937954A Epitaxial growth method for improving inner quantum efficiency of GaN-based LED |
| 01/05/2011 | CN101935837A Copper-based mosaic structure interface diamond coating and preparation method and application thereof |
| 01/05/2011 | CN101935827A Device and method for precipitating film layer of thin-film solar cell |
| 01/05/2011 | CN101935826A Plasma-enhanced chemical gas-phase deposition furnace |
| 01/05/2011 | CN101935825A Process for flattening diamond film by utilizing compound diamond-like carbon (DLC) film |
| 01/05/2011 | CN101560650B Multiple spray header chemical vapor deposition reaction chamber structure |
| 01/05/2011 | CN101502835B Method for cleaning graphite base in MOCVD equipment |
| 01/05/2011 | CN101348901B Preparation and apparatus of high quality and high yield carbon nano-tube array |
| 01/05/2011 | CN101163819B Film-forming apparatus, matching unit, and impedance control method |
| 01/05/2011 | CN101158031B Rotary pressure distributor and roulette type hollow composing machine with the same |
| 01/04/2011 | US7863582 Ion-beam source |
| 01/04/2011 | US7863547 Microwave chamber |
| 01/04/2011 | US7863178 Method for manufacturing a GaN based optical device |
| 01/04/2011 | US7862859 exposing test substrate through stencil to source of directional deposition or etching, comparing stencil pattern to pattern on substrate at a plurality of points along at least one direction to determine pattern run out at said points, fitting measured pattern run out, adjusting |
| 01/04/2011 | US7862857 using solution/suspension of precursors: lead bis(2,2,6,6-tetramethyl-3,5-heptanedionate) N,N',N''-pentamethyl diethylenetriamine, zirconium bis(isopropoxide)bis(2,2,6,6-tetramethyl-3,5-heptanedionate, and titanium bis(isopropoxide)bis(2,2,6,6-tetramethyl-3,5-heptanedionate) in octane, decane, polyamine |
| 01/04/2011 | US7862856 Method for making high temperature polymer dielectric compositions incorporating diamond-like hydrocarbon units for capactive energy storage applications |
| 01/04/2011 | US7862855 Controlling effusion cell of deposition system |
| 01/04/2011 | US7862850 Painting method |
| 01/04/2011 | US7862694 Composite coating device and method of forming overcoat on magnetic head using the same |
| 01/04/2011 | US7862683 Chamber dry cleaning |
| 01/04/2011 | US7862659 Semiconductor manufacturing device |
| 01/04/2011 | US7862658 Etching and cleaning methods and etching and cleaning apparatuses used therefor |
| 01/04/2011 | US7862657 Crystal growth method and apparatus |
| 01/04/2011 | US7862652 Directional self-assembly of biological electrical interconnects |
| 01/04/2011 | US7861668 Batch-type remote plasma processing apparatus |
| 01/04/2011 | US7861667 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode |
| 01/04/2011 | CA2481111C Process of masking cooling holes of a gas turbine component |
| 01/04/2011 | CA2466077C Apparatus and method for diamond production |
| 12/30/2010 | US20100330800 Methods of forming layers of alpha-tantalum |
| 12/30/2010 | US20100330781 Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate |
| 12/30/2010 | US20100330382 Biaxially oriented polylactic acid film with improved moisture barrier |
| 12/30/2010 | US20100330363 Resin substrate |
| 12/30/2010 | US20100330301 Apparatus and method for processing substrate |