| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/08/2011 | US7883746 Insulating film formation method which exhibits improved thickness uniformity and improved composition uniformity |
| 02/08/2011 | US7883745 introducing a solvent into the vaporizer; vaporizing the introduced solvent to produce vapor phase and liquid phase, refluxing introduced solvent between liquid and vapor phases in the vaporizer for a period of time; removing contaminants, condensing vaporized solvent contacting the vaporizer; cleaning |
| 02/08/2011 | US7883744 Use of a titanium-copper-nickel-based alloy |
| 02/08/2011 | US7883743 Sacrificial coating for fluoride ion cleaning |
| 02/08/2011 | US7883639 stabilized cyclic alkene composition comprising cyclic alkenes and antioxidant compound to reduce or eliminate residue formation upon evaporation of such compositions; used to form dielectric films |
| 02/08/2011 | US7883601 Apparatus and method for controlling relative particle speeds in a plasma |
| 02/08/2011 | US7883600 RF supply system and plasma processing apparatus |
| 02/08/2011 | US7883583 Vaporization apparatus with precise powder metering |
| 02/08/2011 | US7883581 Substrate processing apparatus and method of manufacturing semiconductor device |
| 02/08/2011 | US7883580 System and method for nanotube growth via Ion implantation using a catalytic transmembrane |
| 02/08/2011 | US7883579 Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus |
| 02/08/2011 | US7882800 Ring mechanism, and plasma processing device using the ring mechanism |
| 02/03/2011 | WO2011014762A1 Apparatus for atomic layer deposition |
| 02/03/2011 | WO2011014110A1 Coated cutting tool insert for turning of steels |
| 02/03/2011 | WO2011014070A1 Apparatus and method for atomic layer deposition |
| 02/03/2011 | WO2011013812A1 Semiconductor device production apparatus and semiconductor device production method |
| 02/03/2011 | WO2011013811A1 Semiconductor device production apparatus and semiconductor device production method |
| 02/03/2011 | WO2011013810A1 Semiconductor device production method and semiconductor device production apparatus |
| 02/03/2011 | WO2011013775A1 Transparent conductive substrate for solar cells, and solar cell |
| 02/03/2011 | WO2011013746A1 Film-forming apparatus |
| 02/03/2011 | WO2011013719A1 Transparent conductive substrate for solar cell, and solar cell |
| 02/03/2011 | WO2011013702A1 Plasma processing device and plasma processing method |
| 02/03/2011 | WO2011013697A1 Film-forming apparatus |
| 02/03/2011 | WO2011013633A1 Planar antenna member and plasma processing device equipped with same |
| 02/03/2011 | WO2011013461A1 Plasma processing apparatus |
| 02/03/2011 | WO2011013460A1 Plasma processing apparatus |
| 02/03/2011 | WO2011013459A1 Plasma processing apparatus |
| 02/03/2011 | WO2011013458A1 Plasma processing apparatus, method for using plasma processing apparatus, and method for cleaning plasma processing apparatus |
| 02/03/2011 | WO2011012636A1 Process for the preparation of a coated substrate, coated substrate, and use thereof |
| 02/03/2011 | WO2011012185A1 Cleaning of a process chamber |
| 02/03/2011 | WO2010144730A3 Method for manufacturing multi-component oxide heterostructures |
| 02/03/2011 | WO2010132611A3 Textured metal nanopetals |
| 02/03/2011 | WO2010046373A3 Atomic layer deposition powder coating |
| 02/03/2011 | WO2009118457A8 A coating and a method for producing a coating |
| 02/03/2011 | US20110027979 Dielectric film, method of manufacutring semiconductor device using dielectric film, and semiconductor manufacturing apparatus |
| 02/03/2011 | US20110027608 Object having a ductile and corrosion resistant surface layer |
| 02/03/2011 | US20110027506 Functional composite material |
| 02/03/2011 | US20110027482 Layered composite including cubic boron nitride |
| 02/03/2011 | US20110027481 Device and method for organic vapor jet deposition |
| 02/03/2011 | US20110027480 Chemical vapor deposition apparatus capable of controlling discharging fluid flow path in reaction chamber |
| 02/03/2011 | US20110027465 Method for forming dielectric film and method for forming capacitor in semiconductor device using the same |
| 02/03/2011 | US20110027457 Vapour delivery system |
| 02/03/2011 | US20110026891 Single mode optical fibers and modular method of making same |
| 02/03/2011 | US20110026187 Conductive Seal Ring Electrostatic Chuck |
| 02/03/2011 | US20110024048 Plasma processing apparatus |
| 02/03/2011 | US20110024047 Substrate support having fluid channel |
| 02/03/2011 | US20110024022 Metrological scale |
| 02/03/2011 | US20110023783 Multiple nozzle evaporator for vacuum thermal evaporation |
| 02/03/2011 | US20110023782 Gas injection unit for chemical vapor desposition apparatus |
| 02/03/2011 | US20110023781 Device for the plasma treatment of workpieces |
| 02/03/2011 | US20110023541 Process For Manufacturing Cross-Corrugated Packings |
| 02/03/2011 | DE102010028734A1 Gas separation arrangement comprises vacuum coating system designed as longitudinally extended flow through system |
| 02/03/2011 | DE102009026249A1 Plasma unterstütztes Abscheideverfahren, Halbleitervorrichtung und Abscheidevorrichtung Plasma assisted deposition, semiconductor device and separator |
| 02/03/2011 | DE10123554B4 Verfahren zur Erhöhung der Druckspannung oder zur Erniedrigung der Zugeigenspannung einer CVD-, PCVD- oder PVD-Schicht und Schneideinsatz zum Zerspanen A process for increasing the compressive stress or tensile stress to lower the a CVD, PCVD, or PVD-layer and cutting insert for chip removal |
| 02/03/2011 | CA2767472A1 Process for the preparation of a coated substrate, coated substrate, and use thereof |
| 02/02/2011 | EP2280091A1 METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER |
| 02/02/2011 | EP2279801A1 Coating methods using plasma jet, substrates coated thereby and plasma coating apparatus |
| 02/02/2011 | EP2279518A2 Combinatorial plasma enhanced deposition techniques |
| 02/02/2011 | EP2279285A2 Synthesis and use of precursors for ald of tellurium and selenium thin films |
| 02/02/2011 | EP2279284A1 Metalorganic chemical vapor deposition of zinc oxide |
| 02/02/2011 | EP1521297B1 Plasma processing equipment |
| 02/02/2011 | CN201732776U Chemical vapor deposition process chamber wafer transfer device |
| 02/02/2011 | CN201729880U Pin for fore-vacuum chamber tray |
| 02/02/2011 | CN201729879U Support device |
| 02/02/2011 | CN201729878U Exhaust line |
| 02/02/2011 | CN201729877U Fastening assembly for chemical vapor deposition reaction chamber |
| 02/02/2011 | CN101964378A Method for realizing graded laminated passivation film on back surface of solar cell |
| 02/02/2011 | CN101964368A Laminated solar battery and manufacturing method thereof |
| 02/02/2011 | CN101962769A Method for preparing hydrophobic film on surface of material |
| 02/02/2011 | CN101962759A PECVD system with internal heater |
| 02/02/2011 | CN101962758A Method for forming Hf-based gate medium film on germanium substrate by atomic layer deposition at low temperature |
| 02/02/2011 | CN101962757A Method and device for forming film on substrate |
| 02/02/2011 | CN101962756A Batch cvd method and apparatus for semiconductor process |
| 02/02/2011 | CN101962754A Film coating device |
| 02/02/2011 | CN101962753A Film coating device |
| 02/02/2011 | CN101718652B Method for producing ultrahard pressure head |
| 02/02/2011 | CN101519774B Plasma processing apparatus |
| 02/02/2011 | CN101416284B Processing apparatus and processing method |
| 02/01/2011 | US7881573 Optical imaging probe connector |
| 02/01/2011 | US7880392 Plasma producing method and apparatus as well as plasma processing apparatus |
| 02/01/2011 | US7880122 Wafer having thermal circuit and power supplier therefor |
| 02/01/2011 | US7879412 Diamond thin film coating method and diamond-coated cemented carbide member |
| 02/01/2011 | US7879401 Organic vapor jet deposition using an exhaust |
| 02/01/2011 | US7879400 Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface |
| 02/01/2011 | US7879399 CV method using metal carbonyl gas |
| 02/01/2011 | US7879398 Chemical vapor deposition growth perpendicular to substrate then second group grown on sidewalls of first group; simple; high resolution, low voltage, uniform emission |
| 02/01/2011 | US7879397 Method for processing polysilazane film |
| 02/01/2011 | US7879396 High aspect ratio performance coatings for biological microfluidics |
| 02/01/2011 | US7879203 Hollow cathode of coating material; subject cathode, anode and substrate to a vacuum; cool the hollow cathode; connect a power source to cathode; apply a current to form an arc to remove coating material from the outer circumference; form a cloud of coating in the vacuum, deposit on substrate |
| 02/01/2011 | US7879201 Method and apparatus for surface processing of a substrate |
| 02/01/2011 | US7879187 Plasma etching apparatus |
| 02/01/2011 | US7879186 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 02/01/2011 | US7879185 Dual frequency RF match |
| 02/01/2011 | US7879183 Apparatus and method for front side protection during backside cleaning |
| 02/01/2011 | US7879182 Shower plate, plasma processing apparatus, and product manufacturing method |
| 02/01/2011 | US7879181 Apparatus for manufacturing flat-panel display |
| 02/01/2011 | US7879179 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 02/01/2011 | US7879151 Mask etch processing apparatus |
| 02/01/2011 | US7879150 Silicon carbide manufacturing device and method of manufacturing silicon carbide |
| 02/01/2011 | US7879149 Vacuum processing apparatus |