| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/08/2010 | CN101910456A A substrate coated with amorphous hydrogenated carbon |
| 12/08/2010 | CN101910453A Film formation device and film formation method |
| 12/08/2010 | CN101910448A Film-forming apparatus |
| 12/08/2010 | CN101909819A Method for manufacturing an extremely hydrophobic surface |
| 12/08/2010 | CN101908575A Method for manufacturing solar battery |
| 12/08/2010 | CN101908496A Substrate transmitting device and semiconductor processing equipment |
| 12/08/2010 | CN101908481A Batch processing method for forming structure including amorphous carbon film |
| 12/08/2010 | CN101906622A Device and method for controlling temperature and uniformity of epitaxial wafers in MOCVD system |
| 12/08/2010 | CN101906621A Asymmetric grounding of rectangular susceptor |
| 12/08/2010 | CN101906620A Heating chamber and plasma reinforced chemical vapor deposition device |
| 12/08/2010 | CN101906619A Chemical vapor deposition apparatus |
| 12/08/2010 | CN101906618A Method for repairing surface of carbon fiber cable |
| 12/08/2010 | CN101906617A Method for improving uniformity of high-temperature oxide layers of wafers |
| 12/08/2010 | CN101906616A Coating process for silicon solar cells |
| 12/08/2010 | CN101906608A Deposition apparatus and method of controlling the same |
| 12/08/2010 | CN101905709A Graphite frame transport loading vehicle |
| 12/08/2010 | CN101905126A Method and apparatus to help promote contact of gas with vaporized material |
| 12/08/2010 | CN101597755B Method for preparing high-silicon coating on silicon iron surface by adopting laser |
| 12/08/2010 | CN101591775B Thin film deposition system device suitable for diamond heat-sink membrane |
| 12/08/2010 | CN101567400B Thin film silicon solar cell and manufacturing method thereof |
| 12/08/2010 | CN101562230B Organic solar cell adopting weak epitaxial growth film as donor |
| 12/08/2010 | CN101538062B Nano ZnO semiconductor junction array and preparation method thereof |
| 12/08/2010 | CN101515538B Sealing structure for processing reaction chamber by semiconductor |
| 12/08/2010 | CN101488468B Wafer retaining system and semiconductor processing apparatus applying the system |
| 12/08/2010 | CN101481792B Preparation of boron doped diamond superconduction material |
| 12/08/2010 | CN101359589B Composite material and wafer supporting member and manufacturing method thereof |
| 12/08/2010 | CN101328592B Conductive diamond electrode structure and method for electrolytic synthesis of fluorine-containing material |
| 12/08/2010 | CN101317136B Intermediate transfer member, process for producing the same and image forming apparatus |
| 12/08/2010 | CN101297065B Cooled device for plasma depositing a barrier layer onto a container |
| 12/08/2010 | CN101270127B Succinimide silver complex with steady organo-phosphines, synthesizing method and application thereof |
| 12/08/2010 | CN101268213B Device and method for continuous chemical vapour deposition under atmospheric pressure and use thereof |
| 12/08/2010 | CN101230452B Thin film deposition method, thin film deposition apparatus and thin film deposition process monitoring methode |
| 12/08/2010 | CN101213321B Nanostructure production methods and apparatus |
| 12/08/2010 | CN101163815B Source, an arrangement for installing a source, and a method for installing and removing a source |
| 12/08/2010 | CN101119011B Semiconductor device and method for fabrication of the same |
| 12/07/2010 | US7847218 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 12/07/2010 | US7847209 Method of forming a metal oxide film and microwave power source device used for the above method |
| 12/07/2010 | US7846840 Method for forming tungsten materials during vapor deposition processes |
| 12/07/2010 | US7846820 Nitride semiconductor device and process for producing the same |
| 12/07/2010 | US7846562 tin oxide, conductive thin film having surface with concavities and convexities of increased height; light emitting diodes, solid state lasers |
| 12/07/2010 | US7846506 Metal coatings for reduced friction in composites |
| 12/07/2010 | US7846499 vaporizing a precursor from a source material container maintained at a vaporising temperature, repeatedly feeding pulses of the vaporized precursor via a feed line into the reaction chamber at a first pressure, purging reaction chamber with pulses of inactive gas fed via the feed line at a 2nd pressure |
| 12/07/2010 | US7846498 a resin base material (polycabonate, polystyrene); an inorganic undercoating of an inorganic compound (SiO2, TiO2 ) deposited on the resin base, Cr or In metal film by physical vapor deposition over oxide film; sheen and discontinuous structrue; high productivity and low cost |
| 12/07/2010 | US7846497 Method and apparatus for controlling gas flow to a processing chamber |
| 12/07/2010 | US7846293 Plasma processing apparatus and method |
| 12/07/2010 | US7846292 Gas injector and apparatus including the same |
| 12/07/2010 | US7846291 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 12/07/2010 | US7846264 Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate |
| 12/07/2010 | US7846256 Ampule tray for and method of precursor surface area |
| 12/07/2010 | US7846255 Processing equipment for object to be processed |
| 12/07/2010 | US7846254 Heat transfer assembly |
| 12/07/2010 | US7846243 Metal alloy compositions and articles comprising the same |
| 12/07/2010 | US7845310 Wide area radio frequency plasma apparatus for processing multiple substrates |
| 12/07/2010 | US7845309 Ultra high speed uniform plasma processing system |
| 12/07/2010 | US7845306 Method and apparatus of forming alignment film |
| 12/07/2010 | CA2486664C Vapor-phase growth apparatus and vapor-phase growth method |
| 12/02/2010 | WO2010137553A1 Structure of substrate supporting table, and plasma processing apparatus |
| 12/02/2010 | WO2010137397A1 Plasma processing apparatus and method for cleaning same |
| 12/02/2010 | WO2010136644A1 Arrangement for processing substrate and substrate carrier |
| 12/02/2010 | WO2010136082A1 Method for forming an organic material layer on a substrate |
| 12/02/2010 | WO2010091397A3 Protective carbon coatings |
| 12/02/2010 | US20100304571 Film adhesive for semiconductor vacuum processing apparatus |
| 12/02/2010 | US20100304171 Metal-clad polymer article |
| 12/02/2010 | US20100304155 Film deposition method, film deposition apparatus, and gas barrier film |
| 12/02/2010 | US20100304143 PRODUCTION OF Si02-COATED TITANIUM DIOXIDE PARTICLES WITH AN ADJUSTABLE COATING |
| 12/02/2010 | US20100304132 Controlled vapor deposition of multilayered coatings adhered by an oxide layer |
| 12/02/2010 | US20100304106 Gas barrier laminate film and method of producing gas barrier laminate film |
| 12/02/2010 | US20100304084 Protective coatings which provide erosion resistance, and related articles and methods |
| 12/02/2010 | US20100304065 Metal-clad polymer article |
| 12/02/2010 | US20100304046 Plasma generator, plasma control method and method of producing substrate |
| 12/02/2010 | US20100304045 Method of and apparatus for treating or coating a surface |
| 12/02/2010 | US20100304027 Substrate processing system and methods thereof |
| 12/02/2010 | US20100304026 Method and Apparatus for Manufacturing a Nanowire |
| 12/02/2010 | US20100304025 Deposition apparatus and method of controlling the same |
| 12/02/2010 | US20100304022 Methods of Making Wafer Supports |
| 12/02/2010 | US20100304018 Controlling Top of the Line Corrosion in Hydrocarbon Pipelines |
| 12/02/2010 | US20100304014 Method of aftertreatment of amorphous hydrocarbon film and method for manufacturing electronic device by using the aftertreatment method |
| 12/02/2010 | US20100304012 Electrode passivation |
| 12/02/2010 | US20100304011 Methods and apparatuses for depositing nanometric filamentary structures |
| 12/02/2010 | US20100304010 Powder feed rate sensor |
| 12/02/2010 | US20100304009 Device and method for painting curved outer surfaces of an aircraft |
| 12/02/2010 | US20100303735 Method and arrangement for forming variable color pharmaceutical products |
| 12/02/2010 | US20100303565 High hardness nanocomposite coatings on cemented carbide |
| 12/02/2010 | US20100301012 Device and method for producing microwave plasma with a high plasma density |
| 12/02/2010 | US20100301011 Apparatus and method for downstream pressure control and sub-atmospheric reactive gas abatement |
| 12/02/2010 | US20100300361 Delivery device |
| 12/02/2010 | US20100300360 Organic/inorganic thin film deposition device and deposition method |
| 12/02/2010 | US20100300359 Multi-gas distribution injector for chemical vapor deposition reactors |
| 12/02/2010 | US20100300358 Apparatus for producing single-wall carbon nanotubes |
| 12/02/2010 | US20100300357 Substrate processing apparatus |
| 12/02/2010 | DE112008003330T5 Epitaktisches Wachstumsverfahren Epitaxial growth process |
| 12/02/2010 | DE102009023381A1 Manufacturing tungsten, chromium and molybdenum layers and their carbide, nitride and silicide, multi-layer structure and connection structure on solid substrate, comprises impacting substrate by tungsten, chromium and molybdenum carbonyl |
| 12/01/2010 | EP2256786A1 Process for producing monocrystal thin film and monocrystal thin film device |
| 12/01/2010 | EP2256233A1 An apparatus for deposition of coating films |
| 12/01/2010 | EP2256230A1 Method for manufacturing W, Cr MO layers, carbides, nitrides, silicides thereof, multi-layer structures and connection structures on solid substrates and manufacturing device |
| 12/01/2010 | EP2256123A2 Cyclic siloxane compound, a material for forming Si-containing film, and its use |
| 12/01/2010 | EP2256121A1 Volatile group 2 metal precursors |
| 12/01/2010 | EP2176445B1 Method and device for the infiltration of a structure of a porous material by chemical vapour deposition |
| 12/01/2010 | EP2024428B1 Photochromatic effect for polycarbonate glazing applications |
| 12/01/2010 | EP1896629B1 Method for forming a dielectric film and novel precursors for implementing said method |