| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 03/17/2011 | US20110064890 Film deposition method |
| 03/17/2011 | US20110064885 Apparatus and method for film deposition |
| 03/17/2011 | US20110064879 Organometallic compounds |
| 03/17/2011 | US20110064878 Apparatus and method for film deposition |
| 03/17/2011 | US20110064877 Gas supply device, vacuum processing apparatus and method of producing electronic device |
| 03/17/2011 | US20110064645 Carbon nanotube and method for producing the same |
| 03/17/2011 | US20110064530 Coated ceramic cutting insert and method for making the same |
| 03/17/2011 | US20110063601 Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame |
| 03/17/2011 | US20110062460 Organic el light emitting element, manufacturing method thereof, and display device |
| 03/17/2011 | US20110062113 Substrate processing apparatus and method |
| 03/17/2011 | US20110061595 High temperature gas heating device for a vapor deposition system |
| 03/16/2011 | EP2294608A2 Modular and readily configurable reactor enclosures and associated function modules |
| 03/16/2011 | EP2294247A1 Apparatus and method for high-throughput atomic layer deposition |
| 03/16/2011 | EP2294246A1 Method for depositing a thin-film polymer in a low-pressure gas phase |
| 03/16/2011 | EP2294245A1 Arrangement in connection with ald reactor |
| 03/16/2011 | EP2294244A1 Thermal gradient enhanced chemical vapour deposition (tge-cvd) |
| 03/16/2011 | EP2294243A1 Deposition method |
| 03/16/2011 | EP2294242A1 Combustion deposition burner and/or related methods |
| 03/16/2011 | EP2294239A1 Coating method and device using a plasma-enhanced chemical reaction |
| 03/16/2011 | EP2294026A1 Composite coatings comprising hollow and/or shell-like metal oxide particles deposited via combustion deposition |
| 03/16/2011 | EP2293861A2 Machine for processing vessels made of thermoplastic material |
| 03/16/2011 | EP2089560B1 Sliding mating part in lubricated regime, coated by a thin film |
| 03/16/2011 | EP1809792B1 Common rack for electroplating and pvd coating operations |
| 03/16/2011 | EP1711643B1 Method for the production of an ultra barrier layer system |
| 03/16/2011 | EP1300380B1 Adhesive composite coating for diamond and diamond-containing materials and method for producing said coating. |
| 03/16/2011 | CN201762441U Plasma enhanced chemical vapor deposition furnace |
| 03/16/2011 | CN201762440U Epicyclic loading vehicle of graphite frame |
| 03/16/2011 | CN101985747A Substrate processing apparatus |
| 03/16/2011 | CN101985746A Chemical vapor deposition apparatus capable of controlling discharging fluid flow path in reaction chamber |
| 03/16/2011 | CN101985745A Chemical vapor deposition (CVD) apparatus and substrate processing apparatus |
| 03/16/2011 | CN101985744A Method for preparing monocrystalline cubic carbon nitride thin film |
| 03/16/2011 | CN101985743A Method for preparing silicon carbide film by adopting plasma enhanced chemical vapor deposition (PECVD) |
| 03/16/2011 | CN101985742A Gas ejection unit for chemical vapor deposition device |
| 03/16/2011 | CN101657888B Method of cleaning powdery source supply system, substrate treating system and method of substrate treatment |
| 03/16/2011 | CN101591774B Chemical vapor deposition apparatus |
| 03/16/2011 | CN101591771B Device for positioning and supporting base of vacuum equipment |
| 03/16/2011 | CN101321427B DC magnetic filtering cathode vacuum arc plasma source |
| 03/16/2011 | CN101319313B Power transport mechanism and plasma auxiliary chemical vapor deposition apparatus using the same |
| 03/15/2011 | US7906668 Imide complex, method for producing the same, metal-containing thin film and method for producing the same |
| 03/15/2011 | US7906411 Deposition technique for producing high quality compound semiconductor materials |
| 03/15/2011 | US7906409 Device manufacturing method |
| 03/15/2011 | US7906175 Methods for forming a ruthenium-based film on a substrate |
| 03/15/2011 | US7906174 PECVD methods for producing ultra low-k dielectric films using UV treatment |
| 03/15/2011 | US7906032 Method for conditioning a process chamber |
| 03/15/2011 | US7905982 Antenna for plasma processor apparatus |
| 03/15/2011 | US7905961 Linear type deposition source |
| 03/15/2011 | US7905960 Apparatus for manufacturing substrate |
| 03/15/2011 | US7905959 Lid assembly for a processing system to facilitate sequential deposition techniques |
| 03/15/2011 | CA2316652C Moisture insensitive electroluminescent phosphor |
| 03/10/2011 | WO2011029096A2 Plasma enhanced chemical vapor deposition apparatus |
| 03/10/2011 | WO2011028119A1 Coating method and coating apparatus |
| 03/10/2011 | WO2011027835A1 METHOD FOR FORMING Co FILM |
| 03/10/2011 | WO2011027834A1 METHOD FOR FORMING Co FILM AND METHOD FOR FORMING Cu WIRING FILM |
| 03/10/2011 | WO2011027565A1 Gas supply system |
| 03/10/2011 | WO2011027481A1 Semiconductor device and method for manufacturing same |
| 03/10/2011 | WO2011027321A1 Dihalide germanium(ii) precursors for germanium-containing film depositions |
| 03/10/2011 | WO2011027035A1 Process and apparatus for controlling coating deposition |
| 03/10/2011 | WO2011026565A1 Method for applying layers |
| 03/10/2011 | US20110060165 Metal aminotroponiminates, bis-oxazolinates and guanidinates |
| 03/10/2011 | US20110059307 Method to prepare superhydrophobic surfaces on solid bodies by rapid expansion solutions |
| 03/10/2011 | US20110059240 Process for the manufacturing of dense silicon carbide |
| 03/10/2011 | US20110059231 Methods and devices for processing a precursor layer in a group via environment |
| 03/10/2011 | US20110059230 Method for metalizing solar cells, hot-melt aerosol ink, and aerosol jet printing system |
| 03/10/2011 | US20110059003 Methods of growing a silicon carbide epitaxial layer on a substrate to increase and control carrier lifetime |
| 03/10/2011 | US20110058952 High-temperature anti-corrosive layer and method for the production thereof |
| 03/10/2011 | US20110056912 Plasma processing apparatus and plasma processing method |
| 03/10/2011 | US20110056729 Insulated conductive element having a substantially continuous barrier layer formed through continuous vapor deposition |
| 03/10/2011 | US20110056625 Electron beam etching device and method |
| 03/10/2011 | US20110056436 A device for layered deposition of various materials on a semiconductor substrate, as well as a lift pin for use in such a device |
| 03/10/2011 | US20110056435 Plasma cvd apparatus, method for manufacturing microcrystalline semiconductor layer, and method for manufacturing thin film transistor |
| 03/10/2011 | US20110056434 Heat treatment apparatus |
| 03/10/2011 | US20110056433 Device for forming diamond film |
| 03/10/2011 | US20110056273 condensation apparatus |
| 03/10/2011 | DE4412541B4 Gaseinlassanlage und -verfahren Gas inlet system and method |
| 03/10/2011 | DE102010029496A1 Method for energy supply of a load in a deposition process, comprises providing first and second electrical variables by a first and second controllable electric ignition means, where the electrical variables differ itself in its amounts |
| 03/10/2011 | DE102009043960A1 CVD-Reaktor CVD reactor |
| 03/10/2011 | DE102009038603A1 Producing fiber composite body, useful e.g. in aeronautical equipment, comprises providing fiber filaments bundle, introducing solid, powdery substance, producing fiber preform, infiltrating it, and carrying out chemical vapor infiltration |
| 03/10/2011 | DE102005020666B4 Schichtbildungsquelle, vakuumunterstützte Vorrichtung zur Schichtbildung, Verfahren zur Herstellung eines organischen elektrolumineszierenden Bauelements Film forming source, vacuum-assisted apparatus for film formation, method of manufacturing an organic electroluminescent device |
| 03/10/2011 | CA2773520A1 Coating method and coating apparatus |
| 03/09/2011 | EP2293343A1 Apparatus for manufacturing thin film solar cell |
| 03/09/2011 | EP2293342A1 Apparatus for manufacturing thin film solar cell |
| 03/09/2011 | EP2293322A1 Method for forming a metal nitride layer |
| 03/09/2011 | EP2292339A1 Coating method and coating apparatus |
| 03/09/2011 | EP2291548A1 Methods of forming ruthenium-containing films by atomic layer deposition |
| 03/09/2011 | EP1651802B1 Support system for treatment apparatuses |
| 03/09/2011 | CN201758113U Film deposition device |
| 03/09/2011 | CN201756586U Solar battery deposition box |
| 03/09/2011 | CN201756585U Solar battery deposition fixture |
| 03/09/2011 | CN201756584U Discharge electrode member for deposition of solar battery |
| 03/09/2011 | CN201756583U Large size diamond like carbon (DLC) film depositing apparatus at low temperatures |
| 03/09/2011 | CN101587156B Plasma monitoring method and apparatus |
| 03/09/2011 | CN101171350B High performance alloys with improved metal dusting corrosion resistance |
| 03/09/2011 | CN101158032B Film forming device and method thereof |
| 03/08/2011 | US7902549 Deposition method of insulating layers having low dielectric constant of semiconductor device, a thin film transistor substrate using the same and a method of manufacturing the same |
| 03/08/2011 | US7902104 Divided solid composition composed of grains provided with continuous metal deposition, method for the production and use thereof in the form of a catalyst |
| 03/08/2011 | US7902099 Dielectric layers and memory cells including metal-doped alumina |
| 03/08/2011 | US7902049 Method for depositing high-quality microcrystalline semiconductor materials |
| 03/08/2011 | US7901869 Double patterning with a double layer cap on carbonaceous hardmask |
| 03/08/2011 | US7901788 Forming an aluminum intermetallic coatings by concurrently gas flowing at least two different halide precursor in an inert carrier gas, dehydrochlorination, vapor deposition, alloying |
| 03/08/2011 | US7901786 Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |