| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 03/24/2011 | WO2011033927A1 Film formation apparatus |
| 03/24/2011 | WO2011033918A1 Film forming device, film forming method and storage medium |
| 03/24/2011 | WO2011033917A1 Film forming method and storage medium |
| 03/24/2011 | WO2011033903A1 Method for formation of metal silicide film |
| 03/24/2011 | WO2011033849A1 Plasma generation device |
| 03/24/2011 | WO2011033752A1 Production method and production device for epitaxial wafer |
| 03/24/2011 | WO2011033208A1 Method and device for chemical vapor deposition of polymer film onto a substrate |
| 03/24/2011 | WO2011006035A3 Bis-ketoiminate copper precursors for deposition of copper-containing films |
| 03/24/2011 | WO2010135250A3 Methods for determining the quantity of precursor in an ampoule |
| 03/24/2011 | WO2010132581A9 Vessel coating and inspection |
| 03/24/2011 | US20110071633 Coating a Shape-Memory Prosthesis |
| 03/24/2011 | US20110071014 Hybred polymer cvi composites |
| 03/24/2011 | US20110071013 Ceramic matrix composite system and method of manufacture |
| 03/24/2011 | US20110070740 Clamped monolithic showerhead electrode |
| 03/24/2011 | US20110070730 Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor |
| 03/24/2011 | US20110070381 Use of nitrogen-based reducing compounds in beam-induced processing |
| 03/24/2011 | US20110070380 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
| 03/24/2011 | US20110070371 Fluorine compounds for doping conductive oxide thin films |
| 03/24/2011 | US20110070370 Thermal gradient enhanced chemical vapour deposition (tge-cvd) |
| 03/24/2011 | US20110070369 Covering device and method for coating components |
| 03/24/2011 | US20110070360 Source gas supply unit, and deposition apparatus and method using the same |
| 03/24/2011 | US20110070359 Film formation method and film formation apparatus |
| 03/24/2011 | US20110070141 Deposition method and apparatus |
| 03/24/2011 | US20110068087 Plasma processing apparatus and method |
| 03/24/2011 | US20110068084 Substrate holder and substrate temperature control method |
| 03/24/2011 | US20110068004 Plasma generating apparatus and plasma processing apparatus |
| 03/24/2011 | US20110067814 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode |
| 03/24/2011 | US20110067632 Stackable multi-port gas nozzles |
| 03/24/2011 | US20110067630 Mask assembly, deposition apparatus for flat panel displays including the same, and associated methods |
| 03/24/2011 | US20110067629 Method and device to vary growth rate of thin films over semiconductor structures |
| 03/24/2011 | DE102010034108A1 Nanographenschichten und -partikel und Schmierstoffe, die diese enthalten Nano graphene layers and particles and lubricants containing these |
| 03/24/2011 | DE102009042502A1 Schrumpffutter Shrink fit chucks |
| 03/24/2011 | DE102009042103A1 Method for treating a surface, comprises producing a plasma beam from a process gas or flame beam from burning gas, by which the surface is coated with plastic, glass, metal, ceramics, glass ceramics, wood or textile |
| 03/23/2011 | EP2299789A1 Plasma generating apparatus and plasma processing apparatus |
| 03/23/2011 | EP2299498A1 Apparatus for manufacturing thin film solar cell |
| 03/23/2011 | EP2299479A1 Plasma processing apparatus, and film forming method and etching method using plasma processing apparatus |
| 03/23/2011 | EP2299477A1 Thin film solar cell manufacturing equipment |
| 03/23/2011 | EP2298959A1 Film formation apparatus |
| 03/23/2011 | EP2298958A1 Plasma discharge treatment apparatus, and method of manufacturing gas barrier film |
| 03/23/2011 | EP2298957A2 Method and apparatus of using solution based precursors for atomic layer deposition |
| 03/23/2011 | EP2298956A1 Film deposition method |
| 03/23/2011 | EP2298955A1 Additives to silane for thin film silicon photovoltaic devices |
| 03/23/2011 | EP2298472A2 Article prepared by depositing an alloying element on powder particles, and making the article from the particles |
| 03/23/2011 | EP2297768A1 Arrangement for coating tape-shaped film substrates |
| 03/23/2011 | EP2297379A1 HIGH-K DIELECTRIC FILMS AND METHODS OF PRODUCING USING CERIUM-BASED ß-DIKETONATE PRECURSORS |
| 03/23/2011 | EP2297378A1 Coating process and corrosion protection coating for turbine components |
| 03/23/2011 | EP2297377A1 Plasma-based chemical source device and method of use thereof |
| 03/23/2011 | EP2191035B1 Deposition system for thin film formation |
| 03/23/2011 | EP2021532B1 Source container of a vpe reactor |
| 03/23/2011 | CN201772040U Ceramic combined gear |
| 03/23/2011 | CN201771971U 复合陶瓷轴承 Composite ceramic bearings |
| 03/23/2011 | CN201770774U Conductive coat template preparation device |
| 03/23/2011 | CN201770773U Gas distributing device for film coating of large-size substrate |
| 03/23/2011 | CN101990707A Method for detecting abnormal placement state of substrate, substrate processing method, computer-readable storage medium and substrate processing apparatus |
| 03/23/2011 | CN101990585A Film formation apparatus |
| 03/23/2011 | CN101989561A Transfer device and processing system having the same |
| 03/23/2011 | CN101988192A Compound electrode plate and PECVD deposition box and PECVD system |
| 03/23/2011 | CN101988183A Substrate heating/loading device and method for controlling substrate heating/loading |
| 03/23/2011 | CN101643895B Plasma reaction chamber pretreatment method |
| 03/23/2011 | CN101620993B Substrate processing method and substrate processing apparatus |
| 03/23/2011 | CN101593667B Method for improving consistency of thickness of dielectric layers deposited on different substrates |
| 03/23/2011 | CN101492812B Nozzle system capable of continuously evening chemical vapour deposition of large area |
| 03/23/2011 | CN101466867B Catalyst body chemical vapor depositing apparatus |
| 03/23/2011 | CN101276991B Method of manufacturing nitride semiconductor light-emitting device |
| 03/23/2011 | CN101237040B A Se indium copper anode material for lithium ion battery and its making method |
| 03/23/2011 | CN101205061B Preparation of nano-carbon tube array |
| 03/23/2011 | CN101008080B Film-forming device |
| 03/22/2011 | US7910865 Method and arrangement for supplying power to several induction coils in an induction apparatus |
| 03/22/2011 | US7910765 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride |
| 03/22/2011 | US7910416 Laser irradiation apparatus |
| 03/22/2011 | US7910210 Method of producing a layer arrangement, method of producing an electrical component, layer arrangement, and electrical component |
| 03/22/2011 | US7910177 Sequential pulse deposition |
| 03/22/2011 | US7910176 Electrode for discharge surface treatment, manufacturing method and evaluation method for electrode for discharge surface treatment, discharge surface treatment apparatus, and discharge surface treatment method |
| 03/22/2011 | US7910166 System and method for depositing a material on a substrate |
| 03/22/2011 | US7910165 Ruthenium layer formation for copper film deposition |
| 03/22/2011 | US7910155 Method for manufacturing high temperature superconducting conductor |
| 03/22/2011 | US7910083 Coloured diamond |
| 03/22/2011 | US7909961 Method and apparatus for photomask plasma etching |
| 03/22/2011 | US7909932 Mask, mask manufacturing method, film forming method, electro-optic device manufacturing method, and electronic apparatus |
| 03/22/2011 | US7909928 Reactive coatings for regioselective surface modification |
| 03/22/2011 | CA2471672C A method and an installation for densifying porous substrates by chemical vapour infiltration |
| 03/22/2011 | CA2469789C Coloured diamond |
| 03/17/2011 | WO2011031598A1 Improved polyurethane foaming processes and foam properties using halogenated olefin blowing agent |
| 03/17/2011 | WO2011031591A1 Pulsed chemical vapor deposition of metal-silicon-containing films |
| 03/17/2011 | WO2011031571A1 Stable surface wave plasma source |
| 03/17/2011 | WO2011031407A1 Apparatus and methods to form a patterned coating on an oled substrate |
| 03/17/2011 | WO2011031288A1 Metal containing composites |
| 03/17/2011 | WO2011030926A1 Protective film and method for producing same |
| 03/17/2011 | WO2011030305A2 An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings |
| 03/17/2011 | WO2011030004A1 Multilayer coating, method for fabricating a multilayer coating, and uses for the same |
| 03/17/2011 | WO2011029787A1 Layered element for encapsulating a sensitive element |
| 03/17/2011 | WO2011029786A1 Protective substrate for a device that collects or emits radiation |
| 03/17/2011 | WO2011029739A1 Cvd reactor |
| 03/17/2011 | WO2011011299A4 Compositions and methods of use for forming titanium- containing thin films |
| 03/17/2011 | WO2011007124A3 Sample holder |
| 03/17/2011 | US20110066253 Ceramic coated orthopaedic implants and method of making such implants |
| 03/17/2011 | US20110065289 Method of manufacturing semiconductor device and substrate processing apparatus |
| 03/17/2011 | US20110065282 Apparatus and methods to form a patterned coating on an oled substrate |
| 03/17/2011 | US20110065224 Methods and devices for processing a precursor layer in a group via environment |
| 03/17/2011 | US20110064891 Methods of rapidly densifying complex-shaped, asymmetrical porous structures |