Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/2011
05/26/2011US20110122552 Method for selective deposition and devices
05/26/2011US20110122486 Plasma-Deposited Electrically Insulating, Diffusion-Resistant and Elastic Layer System
05/26/2011US20110122406 Processes for rapid microfabrication using thermoplastics and devices thereof
05/26/2011US20110121927 Magnetic field generating apparatus and plasma processing apparatus
05/26/2011US20110121376 Dielectric Layers and Memory Cells Including Metal-Doped Alumina
05/26/2011US20110121283 Method for selective deposition and devices
05/26/2011US20110120757 Method for selective deposition and devices
05/26/2011US20110120651 Showerhead assembly with improved impact protection
05/26/2011US20110120544 Deposition inhibitor composition and method of use
05/26/2011US20110120542 Method for selective deposition and devices
05/26/2011US20110120376 Epitaxial growth systems
05/26/2011US20110120375 Apparatus for processing substrate
05/26/2011US20110120372 Plasma deposition apparatus and deposition method utilizing same
05/26/2011US20110120370 Thin-film solar cell manufacturing apparatus
05/26/2011DE102009054189A1 Neuartige, Stoß- gedämpfte Räder oder Rollen sowie Verfahren zu deren Herstellung Novel, impact damped wheels or rollers as well as processes for their preparation
05/26/2011DE102009053889A1 Verfahren zur Beschichtung einer metallischen Substratoberfläche mit einer durch einen ALD-Prozess aufgebrachten Materialschicht A process for coating a metallic substrate surface with an applied by an ALD process material layer
05/26/2011DE102009046947A1 Substrat mit stickstoffhaltiger plasmapolymerer Beschichtung Substrate with nitrogen-containing plasma polymer coating
05/26/2011CA2780317A1 Encoded consumable materials and sensor assemblies for use in additive manufacturing systems
05/25/2011EP2325351A1 Method and device for coating a metallic substrate surface of a workpiece with a material coating attached by means of an ALD process
05/25/2011EP2325152A1 Stone agglomerate slab or flag with tio2 or zno coating
05/25/2011EP2324513A2 Solar cells fabricated by using cvd epitaxial si films on metallurgical-grade si wafers
05/25/2011EP2324141A2 Wear and corrosion resistant layered composite
05/25/2011EP2323932A1 Conveyor assembly and method for conveying a substrate carrier
05/25/2011EP1786950B1 Device for introducing precursors into an enclosure, in a pulsed mode with measurement and control of the flow rate
05/25/2011EP1229990B1 Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
05/25/2011EP1060285B1 Apparatus and method for depositing a semiconductor material
05/25/2011CN201842888U Adjustor
05/25/2011CN201840964U Tail gas absorbing device for atomic layer deposition reaction
05/25/2011CN1920262B Variable-throat exhaust turbocharger and method for manufacturing constituent members of variable throat mechanism
05/25/2011CN102077325A Film forming method and processing system
05/25/2011CN102077319A Film deposition method
05/25/2011CN102076885A Component for rotary machine
05/25/2011CN102076882A Synthesis and use of precursors for ALD of tellurium and selenium thin films
05/25/2011CN102076881A Plant for forming electronic circuits on substrates
05/25/2011CN102076571A Polyester container and process for producing the same
05/25/2011CN102076495A Layered coating and method for forming the same
05/25/2011CN102071408A Plasma processing equipment
05/25/2011CN102071407A Method for forming anti-reflecting film on PN junction silicon chip
05/25/2011CN102071406A Method for preparing thin film from ternary compound semiconductor material Si1-X-YCXNY
05/25/2011CN102071405A Polysilicon film preparation method
05/25/2011CN102070952A Group 3a ink and methods of making and using same
05/25/2011CN101528978B Method for forming thin film
05/25/2011CN101425474B Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing
05/25/2011CN101317247B Epitaxial growth of nitride compound semiconductors structures
05/25/2011CN101260517B Treatment system and treatment method
05/25/2011CN101084326B Substrate-to-mask alignment and securing system
05/25/2011CN101065512B High resolution substrate holder leveling device and method
05/24/2011US7949237 Heating configuration for use in thermal processing chambers
05/24/2011US7947976 Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process
05/24/2011US7947577 Method and apparatus for producing group III nitride
05/24/2011US7947338 Method of forming an interlayer insulating film having a siloxane skeleton
05/24/2011US7947329 Methods of applying a nanocrystalline diamond film to a cutting tool
05/24/2011US7947326 Methods of forming a fluidized bed of circulating particles
05/24/2011US7947243 Boron nitride thin-film emitter and production method thereof, and electron emitting method using boron nitride thin-film emitter
05/19/2011WO2011060032A1 Phase change memory device suitable for high temperature operation
05/19/2011WO2011059036A1 Semiconductor device manufacturing method
05/19/2011WO2011058968A1 Method for producing laminate
05/19/2011WO2011058921A1 Plasma processing apparatus and microwave transmitter
05/19/2011WO2011058637A1 Tool coated with hard coating
05/19/2011WO2011058608A1 Plasma processing apparatus
05/19/2011WO2011058132A1 Coated bodies made of metal, hard metal, cermet or ceramic material and method for coating such bodies
05/19/2011WO2011057780A2 Process for preparing ruthenium(0)-olefin complexes
05/19/2011US20110117729 Fluid bed reactor
05/19/2011US20110117702 Apparatus and method for processing a substrate
05/19/2011US20110117682 Apparatus and method for plasma processing
05/19/2011US20110117454 Electrode for electrochemical cells
05/19/2011US20110117377 Coating process and corrosion protection coating for turbine components
05/19/2011US20110117347 Barrier coatings for polymeric substrates
05/19/2011US20110117289 Deposition Apparatus and Deposition Method
05/19/2011US20110117276 Multilayer nitride-containing coatings
05/19/2011US20110117273 Evaporation source, process for producing optical member, and optical member
05/19/2011US20110117268 Consumable materials having encoded markings for use with direct digital manufacturing systems
05/19/2011US20110117236 Die and method for manufacturing die
05/19/2011US20110116912 Zoned discontinuous coating for high pressure turbine component
05/19/2011US20110114601 Plasma source design
05/19/2011US20110114600 Plasma processing apparatus and plasma processing method
05/19/2011US20110114022 Wafer carrier with hub
05/19/2011US20110114021 Planar antenna member and plasma processing apparatus including the same
05/19/2011US20110114020 Lid assembly for a processing system to facilitate sequential deposition techniques
05/19/2011US20110114017 Epitaxial growth apparatus and epitaxial growth method
05/19/2011US20110114013 Film deposition apparatus and method
05/19/2011DE102009046680A1 Hausgerät mit Wärmetauscher aus thermoplastischem Kunststoff enthaltendem Werkstoff, sowie solcher Wärmetauscher House system with heat exchanger made of thermoplastic containing material, and such heat exchangers
05/19/2011DE102009046667A1 Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper Coated metal body, hard metal, ceramic and cermet or method of coating such bodies
05/19/2011CA2777711A1 Coated cutting insert and method for making the same
05/18/2011EP2323172A1 Photoelectric conversion device manufacturing method, photoelectric conversion device, and photoelectric conversion device manufacturing system
05/18/2011EP2322708A2 Domestic appliance with heat exchanger composed of material comprising thermoplastic and such a heat exchanger
05/18/2011EP2322690A2 Methods for deposition of group 4 metal containing films
05/18/2011EP2322530A2 Group 4 metal precursors for metal-containing films
05/18/2011EP2321446A2 Chuck and bridge connection points for tube filaments in a chemical vapor deposition reactor
05/18/2011EP2321445A1 Improvement of electrical and optical properties of silicon solar cells
05/18/2011EP1951422B1 Plasma abatement device
05/18/2011EP1863950B1 Multi-tray film precursor evaporation system and thin film deposition system incorporating same
05/18/2011EP1774056B1 Method for the deposition of layers containing silicon and germanium
05/18/2011CN201834967U Graphite frame for silicon solar battery plates
05/18/2011CN201834966U Water-cooling sandwich of metal organic chemical vapor deposition equipment
05/18/2011CN201834965U Chemical vapor deposition system used for producing film solar cells
05/18/2011CN201833114U Preparation device of surface-structured composite coating
05/18/2011CN1693540B Method for depositing thin film and thin film deposition system having separate jet orifices for spraying purge gas
05/18/2011CN1598061B Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates
05/18/2011CN102067347A Method for fabricating InGaN-based multi-quantum well layers