C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes

Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/2011
05/18/2011	CN102067286A Crystal growth process for nitride semiconductor, and method for manufacturing semiconductor device
05/18/2011	CN102067279A Method and system for supplying a cleaning gas into a process chamber
05/18/2011	CN102066608A High-k dielectric films and methods of producing using titanium-based Beta-diketonate precursors
05/18/2011	CN102066607A High volume manufacture of electrochecmicals cells using physical vapor deposition
05/18/2011	CN102066606A Machine for processing vessels made of thermoplastic material
05/18/2011	CN102066313A Titanium complex, method for production of the complex, titanium-containing thin film, and method for production of the thin film
05/18/2011	CN102064237A Double-layer passivating method for crystalline silicon solar battery
05/18/2011	CN102064236A Manufacture method of thin-film solar cell
05/18/2011	CN102064082A Diffusion plate structure and manufacturing method thereof
05/18/2011	CN102061459A Deposition process of p-i-n (PIN) film in production of solar energy battery
05/18/2011	CN102061458A Gas distribution system and method for substrate coating device
05/18/2011	CN102061457A Gas phase reaction device
05/18/2011	CN102061456A Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device
05/18/2011	CN102061455A Enhanced plasma chemical vapor deposition (CVD) method for solar cell
05/18/2011	CN102061454A Method for preparing coating on cutter
05/18/2011	CN102061453A Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool
05/18/2011	CN101540345B Nanometer silica film three-layer stacked solar cell and preparation method thereof
05/18/2011	CN101479402B Vaporizer/supplier of material and automatic pressure regulator for use therein
05/18/2011	CN101469417B Deposition apparatus and deposition method
05/18/2011	CN101252186B Chromium phosphide cathode material for lithium ion battery and manufacturing method thereof
05/18/2011	CN101248210B High colour diamond
05/18/2011	CN101164772B Coated cutting tool
05/18/2011	CN101008072B Apparatus and method to confine plasma and to enhance flow conductance
05/17/2011	US7943501 Systems and methods of forming tantalum silicide layers
05/17/2011	US7943205 Diffusion barrier coatings having graded compositions and devices incorporating the same
05/17/2011	US7943204 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
05/17/2011	US7943196 Depositing a catalyst particle on a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate; removing a portion of the conduit material to expose the catalyst particle; and removing catalyst particle and nanostructure to define a nanoconduit
05/17/2011	US7943195 Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
05/17/2011	US7943194 Process for preparing flake-form pigments based on aluminum and on Sioz(Z=0.7-2.0) comprising forming a layer of separating agent
05/17/2011	US7943193 Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof
05/17/2011	US7943006 Method and apparatus for preventing arcing at ports exposed to a plasma in plasma processing chambers
05/17/2011	US7942971 Method of manufacturing plasma display panels
05/17/2011	US7942970 Apparatus for making crystalline composition
05/17/2011	US7942969 Substrate cleaning chamber and components
05/17/2011	US7942968 Catalyst enhanced chemical vapor deposition apparatus
05/17/2011	US7942623 Substrate supporting means having wire and apparatus using the same
05/17/2011	US7942343 Coatings for use in fuel injector components
05/17/2011	US7942112 Method and apparatus for preventing the formation of a plasma-inhibiting substance
05/17/2011	US7942111 Method and device for vacuum-coating a substrate
05/17/2011	CA2620551C Synthetic resin containers with high barrier property
05/17/2011	CA2600715C Coated article with anti-reflective coating and method of making same
05/12/2011	WO2011057114A2 Methods of making and deposition methods using hafnium- or zirconium-containing compounds
05/12/2011	WO2011057105A2 Materials and methods for thermal and electrical conductivity
05/12/2011	WO2011056550A1 Chemical vapor deposition coating, article, and method
05/12/2011	WO2011056521A1 Fluid distribution manifold including bonded plates
05/12/2011	WO2011056438A2 Conveyance system including opposed fluid distribution manifolds
05/12/2011	WO2011056405A1 Fluid distribution manifold including compliant plates
05/12/2011	WO2011056404A1 Fluid distribution manifold including plate comprising a mirror - finished surface
05/12/2011	WO2011056359A1 Fluid conveyance system
05/12/2011	WO2011056290A2 Methods and systems for making battery electrodes and devices arising therefrom
05/12/2011	WO2011055813A1 Coated tool
05/12/2011	WO2011055774A1 Epitaxial substrate for semiconductor element, semiconductor element, and method for producing epitaxial substrate for semiconductor element
05/12/2011	WO2011055671A1 Film forming method and method for forming capacitor
05/12/2011	WO2011055644A1 Method for manufacturing semiconductor device
05/12/2011	WO2011055012A1 Method for forming a decorative coating, a decorative coating, and uses of the same
05/12/2011	WO2011055011A1 A method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same
05/12/2011	WO2011054713A1 Stabilization of bicycloheptadiene
05/12/2011	WO2011018917A9 Diamond-coated tool
05/12/2011	US20110111963 Apparatus For Fabricating High Temperature Superconducting Film And High Temperature Superconducting Film Fabricated Through Auxiliary Cluster Beam Spraying
05/12/2011	US20110111603 Atomic layer deposition apparatus
05/12/2011	US20110111227 Method for production of germanium nanowires encapsulated within multi-walled carbon nanotubes
05/12/2011	US20110111190 Method For Applying A Diffusion Barrier Interlayer For High Temperature Components
05/12/2011	US20110111171 Seed crystal for silicon carbide single crystal growth, method for producing the seed crystal, silicon carbide single crystal, and method for producing the single crystal
05/12/2011	US20110111137 Curing non-carbon flowable cvd films
05/12/2011	US20110111135 Thin film manufacturing method and silicon material that can be used with said method
05/12/2011	US20110111131 Method for producing a multicomponent, polymer- and metal-containing layer system, device and coated article
05/12/2011	US20110111128 Diffuser structure and manufacturing method thereof
05/12/2011	US20110111124 Method and device for lubricating rollers and a rolled strip of a rolling stand
05/12/2011	US20110111123 Increased area weight segments with pitch densification to produce lower cost and higher density aircraft friction materials
05/12/2011	US20110110544 Method of coating a hearing aid component and a hearing aid comprising a coated component
05/12/2011	US20110108929 Enhanced atomic layer deposition
05/12/2011	US20110108609 Methods of fabricating graphene using alloy catalyst
05/12/2011	US20110108195 Temperature adjusting mechanism and semiconductor manufacturing Appratus using temperature adjusting mechanism
05/12/2011	US20110108194 Plasma processing apparatus
05/12/2011	US20110108058 Method and apparatus for cleaning residue from an ion source component
05/12/2011	US20110107970 Heating unit and substrate processing apparatus having the same
05/12/2011	US20110107968 Semiconductor manufacturing apparatus
05/12/2011	US20110107942 Large scale production of carbon nanotubes in portland cement
05/12/2011	DE102010004181A1 New metal carboxylate complex with alkyne ligand that is present in alkyne or vinylidene form, useful as vaporizable precursor for metal- or metal oxide deposition, preferably chemical vapor deposition or atomic layer deposition
05/12/2011	DE102009051347A1 Verfahren zur Herstellung von Halbleiterschichten Process for preparing semiconductor layers
05/12/2011	DE102009044496A1 Vorrichtung zur Erzeugung von Plasma mittels Mikrowellen A device for generating plasma by means of microwaves
05/12/2011	DE102009023467B4 Beschichtungsanlage und -verfahren Coating system and method
05/12/2011	CA2780140A1 Materials and methods for thermal and electrical conductivity
05/12/2011	CA2773029A1 Methods and systems for making battery electrodes and devices arising therefrom
05/11/2011	EP2319955A1 Remote combustion deposition burner and/or related methods
05/11/2011	EP2319821A1 Stabilization of bicycloheptadiene
05/11/2011	EP2318563A1 Trap
05/11/2011	EP2318060A2 Biocompatibility layer, and coated objects
05/11/2011	EP1907600B1 Atomic layer deposition using alkaline earth metal beta-diketiminate precursors
05/11/2011	EP1651794B1 Method of manufacturing vacuum plasma treated workpieces
05/11/2011	EP1057206B1 Low pressure inductively coupled high density plasma reactor
05/11/2011	CN201826013U Gas wall structure used in chemical vapor deposition equipment
05/11/2011	CN201826012U Gas distributor for uniformly discharging gas
05/11/2011	CN201826011U Water vapor expanding device for growth of oxide semiconductor thin film
05/11/2011	CN1914131B Method for cleaning a substrate
05/11/2011	CN102057762A Plasma processing apparatus and plasma processing method
05/11/2011	CN102057465A Plasma processing device and plasma processing method
05/11/2011	CN102057079A Arrangement in connection with ald reactor
05/11/2011	CN102057078A Method of reducing memory effects in semiconductor epitaxy
05/11/2011	CN102057077A Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films

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