Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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07/20/2011 | CN102127807A Method for preparing ternary-component AlxGaI-xN nanocone |
07/20/2011 | CN102127757A Metal organic chemical vapor deposition (MOCVD) reaction system |
07/20/2011 | CN102127756A Device and method for enhancing atomic layer deposition by pulse-modulation radio frequency plasma |
07/20/2011 | CN102127755A Direct current glow plasma device and preparation method of diamond chip |
07/20/2011 | CN102127754A Plasma film forming apparatus |
07/20/2011 | CN102127753A Device for preparing silicon carbide fiber by direct current heating CVD method and preparation method of silicon carbide fiber |
07/20/2011 | CN102127752A Gas treatment systems |
07/20/2011 | CN102127751A Boron-doped diamond micro-nano material with columnar array structure and preparation method thereof |
07/20/2011 | CN102127750A Method for preparing graphene material based on chemical deposition |
07/20/2011 | CN102127749A MOCVD (metal-organic chemical vapour deposition) reactor |
07/20/2011 | CN102127748A Thin film deposition apparatus |
07/20/2011 | CN101770923B Method for loading plasma enhanced chemical vapor deposition equipment and glass panel |
07/20/2011 | CN101704110B Method for preparing flaky metal carbonyl powder |
07/20/2011 | CN101693991B Plasma-enhanced chemical vapor deposition PECVD equipment |
07/20/2011 | CN101580932B Device for realizing temperature equalization of matrix in preparation process of diamond film spherical crown |
07/20/2011 | CN101577211B Reaction chamber component resisting plasma corrosion, preparation method thereof and plasma reaction chamber comprising same |
07/20/2011 | CN101555593B Method and system for preparing functional films in asynchronous pulse mode |
07/20/2011 | CN101389785B Methods for preparation of high-purity polysilicon rods using a metallic core means |
07/20/2011 | CN101353786B Foundation and manufacture method and chemical vapor deposition device having the foundation |
07/20/2011 | CN101294276B Process for producing mix laminated shield membrane with high-selection ratio |
07/20/2011 | CN101220463B Process for chemical vapor deposition and semiconductor structure |
07/20/2011 | CN101078110B Semiconductor manufacturing device |
07/20/2011 | CN101042992B Vertical plasma processing apparatus for semiconductor process |
07/19/2011 | US7982208 Non-polar (Al,B,In,Ga)N quantum well and heterostructure materials and devices |
07/19/2011 | US7981791 Thin films |
07/19/2011 | US7981776 Method for depositing silicon |
07/19/2011 | US7981473 Uniform film deposition; exposing wafer alternately to two different chemically reactive precursors under starved saturation conditions; rapid deposition rate, high throughput |
07/19/2011 | US7981472 Methods of providing uniform gas delivery to a reactor |
07/19/2011 | US7981471 Forming a plastic lens, with no discoloration and a good antistatic property and water repellency; perfluoroalkyl water repellent, mixture of a modified silicone oil, a silane coupling agent, and a perfluoroether compound, and as conductive substance fullerenes, carbon nanotubes or graphite |
07/19/2011 | US7981462 Method for applying paints and varnishes |
07/19/2011 | US7981262 Process kit for substrate processing chamber |
07/19/2011 | US7981219 System for plasma treating a plastic component |
07/19/2011 | US7981218 Substrate supporting mechanism and substrate processing apparatus |
07/19/2011 | US7981217 Vertical heat treatment apparatus and method of transferring substrates to be processed |
07/19/2011 | US7981216 Vacuum processing apparatus |
07/19/2011 | US7980198 Doping apparatus, doping method, and method for fabricating thin film transistor |
07/19/2011 | CA2442575C Process and device for the deposition of an at least partially crystalline silicium layer on a substrate |
07/14/2011 | WO2011085109A1 Method for the co-evaporation and deposition of materials with differing vapor pressures |
07/14/2011 | WO2011084427A2 Methods and systems for producing silicon, e.g., polysilicon, including recycling byproducts |
07/14/2011 | WO2011084171A1 Molecular precursors for optoelectronics |
07/14/2011 | WO2011083869A1 Cubic boron nitride coating method and material produced by the method |
07/14/2011 | WO2011083820A1 Metal alkoxide compound and process for production of metal-containing thih film using the compound |
07/14/2011 | WO2011083552A1 Epitaxial wafer and semiconductor element |
07/14/2011 | WO2011049811A3 Point-of-use silylamine generation |
07/14/2011 | WO2010130437A3 Method for producing a photovoltaic module |
07/14/2011 | WO2010094376A3 A method and arrangement for vapour phase coating of an internal surface of at least one hollow article |
07/14/2011 | US20110171835 Method and apparatus for forming silicon oxide film |
07/14/2011 | US20110171489 Multi-layer high moisture barrier polylactic acid film |
07/14/2011 | US20110171469 Cnt-infused aramid fiber materials and process therefor |
07/14/2011 | US20110171462 Nitride Semiconductor Crystal Manufacturing Apparatus, Nitride Semiconductor Crystal Manufacturing Method, and Nitride Semiconductor Crystal |
07/14/2011 | US20110171444 Coated Cutting Tool |
07/14/2011 | US20110171426 Hard water-repellent structure and method for making the same |
07/14/2011 | US20110171399 Process and apparatus for continuous coating of fibrous materials |
07/14/2011 | US20110171390 Fixture for coating application |
07/14/2011 | US20110171384 Polymerized film forming method and polymerized film forming apparatus |
07/14/2011 | US20110171383 Method for constant concentration evaporation and a device using the same |
07/14/2011 | US20110171382 Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition |
07/14/2011 | US20110171381 Silicon precursors and method for low temperature cvd of silicon-containing films |
07/14/2011 | US20110171380 Susceptor, coating apparatus and coating method using the susceptor |
07/14/2011 | US20110171028 Boron-based Refractory Coating for a Wind Turbine Component |
07/14/2011 | US20110168954 Carbon nanotube based composite surface enhanced raman scattering (sers) probe |
07/14/2011 | US20110168673 Plasma processing apparatus, plasma processing method, and mechanism for regulating temperature of dielectric window |
07/14/2011 | US20110168669 Method of preparing low resistance metal line, patterned metal line structure, and display device using the same |
07/14/2011 | US20110168440 Broadband electromagnetic wave-absorber and process for producing same |
07/14/2011 | US20110168330 Support structure, load lock apparatus, processing apparatus and transfer mechanism |
07/14/2011 | US20110168094 Plasma film forming apparatus |
07/14/2011 | US20110168093 Methods and apparatus for incorporating nitrogen in oxide films |
07/14/2011 | US20110168051 Chromium (iii) carbonate and process for producing the same |
07/14/2011 | DE112008004011T5 Verfahren zur Bildung von Zinkoxidfilm (ZnO) oder Magnesiumzinkoxidfilm (ZnMgO) und Anlage zur Bildung von Zinkoxidfilm oder Magnesiumzinkoxidfilm A method for forming zinc oxide (ZnO) or Magnesiumzinkoxidfilm (ZnMgO) and investment in the formation of zinc oxide or Magnesiumzinkoxidfilm |
07/14/2011 | DE112008003635T5 Beschichtungsvorrichtung und Beschichtungsverfahren A coating apparatus and coating process |
07/14/2011 | DE102010062937A1 Lineare Verdampfungsquelle und Beschichtungsvorrichtung mit linearer Verdampfungsquelle Linear evaporation source and coating apparatus with linear evaporation source |
07/14/2011 | DE102009030876B4 Verfahren zum Beschichten eines Substrats A method for coating a substrate |
07/14/2011 | DE102007040655B4 Funktionsschichtübertragungsanordnung, Verfahren zu deren Herstellung, Übertragungsverfahren für eine Funktionsschicht und Verwendung einer plasmapolymeren Schicht oder einer Funktionsschichtübertragungsanordnung zum Übertragen einer Funktionsschicht auf ein Substrat Functional layer transfer assembly, to processes for their preparation, transmission method for a functional layer and use of a plasma polymer layer or a functional layer transfer assembly for transferring a functional layer onto a substrate |
07/13/2011 | EP2343398A1 Process and apparatus for continuous coating of fibrous materials |
07/13/2011 | EP2342367A1 A coated tool and a method of making thereof |
07/13/2011 | EP2342366A2 Metal/cnt and/or fullerene composite coating on strip materials |
07/13/2011 | EP2250298B1 Method and system for depositing a metal or metalloid on carbon nanotubes |
07/13/2011 | EP1994197B1 Methods of using halogen-containing organic compounds to remove deposits from internal surfaces of turbine engine components |
07/13/2011 | EP1831425B1 Method of disposing metal bearing gases |
07/13/2011 | EP1698614B1 Metal compound, material for forming thin film and method for preparing thin film |
07/13/2011 | EP1630859B1 Vaporizer and semiconductor processing apparatus |
07/13/2011 | EP1618227B1 Method and device for depositing semiconductor layers using two process gases, of which one is preconditioned |
07/13/2011 | CN201896195U Novel glass coating equipment |
07/13/2011 | CN201896194U Novel solar battery coating equipment |
07/13/2011 | CN201896193U Delivering-taking device for glass coating equipment |
07/13/2011 | CN1711369B Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates |
07/13/2011 | CN102124291A Process device for processing in particular stacked processed goods |
07/13/2011 | CN102124140A Trap |
07/13/2011 | CN102124139A Improvement of electrical and optical properties of silicon solar cells |
07/13/2011 | CN102121099A Method for depositing film by using LPCVD process |
07/13/2011 | CN102121098A Reaction chamber with external heating mode for metal organic chemical vapor deposition system |
07/13/2011 | CN102121097A Multi-gas spiral channel showerhead |
07/13/2011 | CN102121096A Chemical vapor deposition method and equipment integrated with atomic layer deposition process |
07/13/2011 | CN102121091A Cool-down system and method for a vapor deposition system |
07/13/2011 | CN101460656B Controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement |
07/13/2011 | CN101256936B Method and apparatus for controlling gas flow to a processing chamber |
07/13/2011 | CN101191198B Method for forming alignment layers for liquid crystal displays |
07/12/2011 | US7978963 Thermal processing apparatus |
07/12/2011 | US7977673 Semiconductor layer with a Ga2O3 system |
07/12/2011 | US7977611 Systems and methods for providing localized heat treatment of metal components |