| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/16/2011 | WO2011070667A1 Vacuum processing apparatus and processing method using vacuum processing apparatus |
| 06/16/2011 | WO2011069687A1 Substrate support |
| 06/16/2011 | WO2011026078A3 Apparatus for gaseous vapor deposition |
| 06/16/2011 | WO2011026073A3 Apparatus and method for unloading a film cassette for gaseous vapor deposition |
| 06/16/2011 | WO2011026072A3 Apparatus and method for loading a film cassette for gaseous vapor deposition |
| 06/16/2011 | WO2011026066A3 Film cassette for gaseous vapor deposition |
| 06/16/2011 | US20110143930 Tunable size of nano-active material on nano-support |
| 06/16/2011 | US20110143910 Inorganic phosphate compositions and methods |
| 06/16/2011 | US20110143551 Device and process for chemical vapor phase treatment |
| 06/16/2011 | US20110143525 Nitride semiconductor substrate and manufacturing method thereof |
| 06/16/2011 | US20110143491 Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate |
| 06/16/2011 | US20110143481 Modular system and process for continuous deposition of a thin film layer on a substrate |
| 06/16/2011 | US20110143463 Vapor deposition method and vapor deposition apparatus |
| 06/16/2011 | US20110143163 Method for the production of an optimized bonding agent layer by means of partial evaporation of the bonding agent layer, and a layer system |
| 06/16/2011 | US20110143127 Methods for coating implants |
| 06/16/2011 | US20110143053 Method of forming zinc oxide film (zno) or magnesium zinc oxide film (znmgo) and apparatus for forming zinc oxide film or magnesium zinc oxide film |
| 06/16/2011 | US20110143050 Method for producing a three-dimensionally controlled surface coating in a cavity |
| 06/16/2011 | US20110143035 Thin Film Deposition System and Method for Depositing Thin Film |
| 06/16/2011 | US20110143034 Method for depositing graphene film |
| 06/16/2011 | US20110143033 Vacuum processing apparatus and vacuum processing method |
| 06/16/2011 | US20110143032 Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films With Low Dielectric Constants |
| 06/16/2011 | US20110143019 Apparatus for Deposition on Two Sides of the Web |
| 06/16/2011 | US20110143017 Method for generating and applying instrument profiles |
| 06/16/2011 | US20110143016 Temperature control method for chemical vapor deposition apparatus |
| 06/16/2011 | US20110142746 SYSTEM AND PROCESS FOR CADMIUM TELLURIDE (CdTe) RECLAMATION IN A VAPOR DEPOSITION CONVEYOR ASSEMBLY |
| 06/16/2011 | US20110142384 Sliding element having a multiple layer |
| 06/16/2011 | US20110141556 Systems having optical absorption layer for mid and long wave infrared and methods for making the same |
| 06/16/2011 | US20110140309 Method for making carbon nanotube structure |
| 06/16/2011 | US20110140246 Delta-doping at wafer level for high throughput, high yield fabrication of silicon imaging arrays |
| 06/16/2011 | US20110139958 Wear resistant coatings for tool dies |
| 06/16/2011 | US20110139751 Plasma-based chemical source device and method of use thereof |
| 06/16/2011 | US20110139749 Substrate processing apparatus, substrate processing method, and program for implementing the method |
| 06/16/2011 | US20110139611 Apparatus for Fabricating Thin Film Transistor |
| 06/16/2011 | US20110139372 Showerhead assembly for vacuum processing apparatus |
| 06/16/2011 | US20110139370 Plasma processing apparatus |
| 06/16/2011 | US20110139361 Method for making carbon nanotube film |
| 06/16/2011 | US20110139209 Method of growing a thin film, a method of forming a structure and a device |
| 06/16/2011 | US20110139074 Film deposition apparatus |
| 06/16/2011 | US20110139072 Continuous deposition apparatus |
| 06/16/2011 | US20110139070 Substrate processing apparatus and method of manufacturing semiconductor device |
| 06/16/2011 | DE102009058038A1 Anordnung zum Temperieren von bandförmigen Substraten Arrangement for controlling the temperature of the band-shaped substrates |
| 06/16/2011 | DE102009057903A1 Evaporation device for coating systems for high-temperature gas evaporation of a material, comprises a section for the gas flow and a heat source, which heats in the section of the gas-material mixture |
| 06/16/2011 | DE102009052873A1 Device for continuously movable infiltration of a flexible band substrate in high vacuum without touching the front side of the band substrate, comprises a sequence of prechambers to which the band substrate passes through |
| 06/15/2011 | EP2333819A1 Method for fabricating p-type gallium nitride-based semiconductor, method for fabricating nitride-based semiconductor element, and method for fabricating epitaxial wafer |
| 06/15/2011 | EP2333136A1 Diamond electrode and method for manufacturing diamond electrode |
| 06/15/2011 | EP2332167A2 Vapor phase epitaxy system |
| 06/15/2011 | EP2331729A1 Sanitary object |
| 06/15/2011 | EP2331726A1 Method for electron beam induced deposition of conductive material |
| 06/15/2011 | EP2331725A1 Epitaxial reactor for silicon deposition |
| 06/15/2011 | CN201868459U Semiconductor solar coating process chamber |
| 06/15/2011 | CN201864776U Hanging hook of flat plate PECVD (plasma-enhanced chemical vapor deposition) device |
| 06/15/2011 | CN201864775U Instrument for preparing nano materials with gas phase method |
| 06/15/2011 | CN201864774U Swing bin for vacuum continuous coating film production line |
| 06/15/2011 | CN201864773U Slewing mechanism for vacuum continuous film-coating production line |
| 06/15/2011 | CN201864772U Work rest for vacuum coating |
| 06/15/2011 | CN201864771U Workpiece bracket for vacuum coater |
| 06/15/2011 | CN1721569B Coat base with curved surface and method for manufacturing such coat base |
| 06/15/2011 | CN102099506A Metal/cnt and/or fullerene composite coating on strip materials |
| 06/15/2011 | CN102099505A Deposition film forming apparatus and deposition film forming method |
| 06/15/2011 | CN102098863A Electrode board for plasma processing equipment and method for removing process sediments |
| 06/15/2011 | CN102097595A Organic lighting device and producing method thereof |
| 06/15/2011 | CN102097548A Method for preparing self-supported GaN-based light emitting diode |
| 06/15/2011 | CN102097541A Method for enhancing efficiency of industrial single-chamber deposited amorphous silicon-based solar cell |
| 06/15/2011 | CN102097534A Method for simultaneously forming crystal silicon solar cell PN junction and silicon nitride antireflection film |
| 06/15/2011 | CN102097528A Solar cell and method for manufacturing the same |
| 06/15/2011 | CN102097302A Film formation method and apparatus |
| 06/15/2011 | CN102097297A Method for depositing high k gate dielectrics on atomic layer on graphene surface by adopting electric field induction |
| 06/15/2011 | CN102097295A Cleaning method of process chamber |
| 06/15/2011 | CN102094190A Preparation method of lanthanum-based high-dielectric constant film |
| 06/15/2011 | CN102094189A Chemical vapor deposition reaction equipment |
| 06/15/2011 | CN102094188A A showerhead assembly for vacuum processing apparatus |
| 06/15/2011 | CN102094187A Film deposition apparatus |
| 06/15/2011 | CN102094186A Gas supply equipment |
| 06/15/2011 | CN102094185A Barrel-shaped metal organic chemical vapor deposition reaction tube |
| 06/15/2011 | CN102094184A PECVD up-and-down simultaneous coating method |
| 06/15/2011 | CN102094183A Cold-wall batch reactor |
| 06/15/2011 | CN102094168A 掩膜组件 Mask assembly |
| 06/15/2011 | CN102094158A Dumping machine prepared from new composite |
| 06/15/2011 | CN102093430A Organic phosphine-stabilized alkyl silver disulfonate complex, and synthetic method and application thereof |
| 06/15/2011 | CN101724827B Method for reducing ethylene cracking furnace tube coking and improving ethylene selectivity |
| 06/15/2011 | CN101582468B Method of high-mobility textured structure IMO/ZnO composite film of solar battery |
| 06/15/2011 | CN101565821B Method for coating film on surface of drill point and drill point coated with film |
| 06/15/2011 | CN101525743B Method for depositing semi-conductor film on substrate by using close-space sublimation technology and device thereof |
| 06/15/2011 | CN101525740B Method for growing high-quality indium nitride single crystal epitaxial film |
| 06/15/2011 | CN101378031B Substrate carrier plateform and substrate processing device |
| 06/15/2011 | CN101356298B Film-forming apparatus, exhaust system structure thereof, and method for processing exhaust gas |
| 06/15/2011 | CN101336470B Plasma etching method |
| 06/15/2011 | CN101333654B Plasma discharge processing unit |
| 06/15/2011 | CN101325174B Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program |
| 06/15/2011 | CN101171367B High efficiency UV cleaning of a process chamber |
| 06/15/2011 | CN101111502B Tantalum compound, method for producing same, tantalum-containing thin film and method for forming same |
| 06/15/2011 | CN101040059B Heat transfer system for improved semiconductor processing uniformity |
| 06/14/2011 | US7962016 Heating crucible for organic thin film forming apparatus |
| 06/14/2011 | US7960901 Piezoelectric device having a ferroelectric film including a ferroelectric material |
| 06/14/2011 | US7960294 Method of modifying interlayer adhesion |
| 06/14/2011 | US7960254 Manufacturing method for epitaxial wafer |
| 06/14/2011 | US7960043 Photo-induced hydrophilic article and method of making same |
| 06/14/2011 | US7959987 Fuel cell conditioning layer |
| 06/14/2011 | US7959985 Method of integrating PEALD Ta-containing films into Cu metallization |
| 06/14/2011 | US7959973 Pressure swing CVI/CVD |