| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/30/2011 | WO2011077153A2 Deposition process |
| 06/30/2011 | WO2011076643A1 Synthetic cvd diamond |
| 06/30/2011 | WO2011044325A3 Methods of nucleation control in film deposition |
| 06/30/2011 | WO2011026069A3 Loaded film cassette for gaseous vapor deposition |
| 06/30/2011 | US20110159702 Film deposition apparatus and film deposition method |
| 06/30/2011 | US20110159604 Isotope-doped nano-material, method for making the same, and labeling method using the same |
| 06/30/2011 | US20110159286 Method of manufacturing silica nanowires |
| 06/30/2011 | US20110159214 Gold-coated polysilicon reactor system and method |
| 06/30/2011 | US20110159213 Chemical vapor deposition improvements through radical-component modification |
| 06/30/2011 | US20110159212 Insulating film material, method for forming film by using the insulating film material, and insulating film |
| 06/30/2011 | US20110159211 Shadow ring for modifying wafer edge and bevel deposition |
| 06/30/2011 | US20110159210 Metal halide reactor deposition method |
| 06/30/2011 | US20110159204 Oxygen radical generation for radical-enhanced thin film deposition |
| 06/30/2011 | US20110159199 Large area combustion deposition line, and associated methods |
| 06/30/2011 | US20110159198 Flame guard and exhaust system for large area combustion deposition line, and associated methods |
| 06/30/2011 | US20110159188 Film deposition apparatus, film deposition method, and computer-readable storage medium |
| 06/30/2011 | US20110159187 Film deposition apparatus and film deposition method |
| 06/30/2011 | US20110159186 Film forming apparatus and film forming method |
| 06/30/2011 | US20110159184 Method of fluoridation, the unit of fluoridation, and the directions for use of the unit of fluoridation |
| 06/30/2011 | US20110159183 Chemical vapor deposition apparatus and a control method thereof |
| 06/30/2011 | US20110159177 Coated Translucent Substrate For A Greenhouse And A Freezer Door |
| 06/30/2011 | US20110155977 System and method for coating a fire-resistant material on a substrate |
| 06/30/2011 | US20110155685 Reflective coatings for glass articles, methods of deposition, and articles made thereby |
| 06/30/2011 | US20110155591 Production Method for a Nanopatterned Epoxy Substrate |
| 06/30/2011 | US20110155355 Heat-dissipation unit coated with oxidation-resistant nano thin film and method of depositing the oxidation-resistant nano thin film thereof |
| 06/30/2011 | US20110155063 Conveyor Assembly with Removable Rollers for a Vapor Deposition System |
| 06/30/2011 | US20110155062 Film deposition apparatus |
| 06/30/2011 | US20110155060 Method And Apparatus To Apply Surface Release Coating For Imprint Mold |
| 06/30/2011 | US20110155059 Thin film forming apparatus, thin film forming method, and shield component |
| 06/30/2011 | US20110155058 Substrate processing apparatus having a radiant cavity |
| 06/30/2011 | US20110155057 Plasma process apparatus |
| 06/30/2011 | US20110155056 Film deposition apparatus |
| 06/30/2011 | US20110155055 Cvd device |
| 06/30/2011 | DE102009060547A1 Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid A method of coating a substrate with zinc oxide aluminiumdotiertem |
| 06/30/2011 | DE10130590B4 Verbundwerkstoff und Verfahren zu dessen Herstellung Composite material and process for its preparation |
| 06/30/2011 | CA2782159A1 Synthetic cvd diamond |
| 06/29/2011 | EP2339049A1 Precursors for providing materials with low dielectric constant and superior integration attributes |
| 06/29/2011 | EP2339048A1 Organometallic compounds |
| 06/29/2011 | EP2339047A1 Assembly for tempering tape-shaped substrates |
| 06/29/2011 | EP2338164A2 Wafer carrier with varying thermal resistance |
| 06/29/2011 | EP1654752B1 Holder for supporting wafers during semiconductor manufacture |
| 06/29/2011 | CN201887051U Solar battery |
| 06/29/2011 | CN201883178U Directional solidification furnace provided with improved crucible covering part |
| 06/29/2011 | CN201883145U Continuous modular design PECVD (plasma enhanced chemical vapor deposition) cavity |
| 06/29/2011 | CN201883144U Convenient-maintenance film coating equipment |
| 06/29/2011 | CN1831192B Film formation method and apparatus for semiconductor process |
| 06/29/2011 | CN102113140A Method for manufacturing iii nitride semiconductor light emitting element, iii nitride semiconductor light emitting element and lamp |
| 06/29/2011 | CN102113120A Hybrid dielectric material for thin film transistors |
| 06/29/2011 | CN102112659A Apparatus and method for high-throughput atomic layer deposition |
| 06/29/2011 | CN102112658A Apparatus and method for high-throughput atomic layer deposition |
| 06/29/2011 | CN102112657A Process and installation for depositing films onto a substrate |
| 06/29/2011 | CN102112656A Method for depositing a thin-film polymer in a low-pressure gas phase |
| 06/29/2011 | CN102112655A Atomic layer deposition apparatus and loading methods |
| 06/29/2011 | CN102112654A Method of forming a tantalum-containing layer on a substrate |
| 06/29/2011 | CN102112653A Raw material recovery method and trapping mechanism for recovering raw material |
| 06/29/2011 | CN102112652A Device for plasma-assisted coating of the inner side of tubular components |
| 06/29/2011 | CN102112651A Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film, method for manufacturing semiconductor device, and storage medium in which control program is stored |
| 06/29/2011 | CN102112650A Diamond-like carbon film forming apparatus and method for forming diamond-like carbon film |
| 06/29/2011 | CN102112649A Placing table structure |
| 06/29/2011 | CN102112648A Method of coating inner and outer surfaces of pipes for thermal solar and other applications |
| 06/29/2011 | CN102112416A Stone agglomerate slab or flagstone with tio2 or zno coating |
| 06/29/2011 | CN102112206A Metal recovery method, metal recovery apparatus, exhaust system, and film forming device using same |
| 06/29/2011 | CN102110639A Method for preparing diffusion impervious layer |
| 06/29/2011 | CN102109535A Controllable method for preparing atomic force microscope needlepoint with carbon nano tube |
| 06/29/2011 | CN102108504A Method for removing film contaminants generated in the technological process and PECVD system |
| 06/29/2011 | CN102108503A Grounding/supporting device and plasma treatment equipment employing same |
| 06/29/2011 | CN102108502A Film deposition apparatus and film deposition method |
| 06/29/2011 | CN102108501A Apparatus and process for continuous vapor deposition of a thin film layer on a sublimated source material |
| 06/29/2011 | CN102108500A Vapor deposition apparatus and method of manufacturing an organic light emitting display apparatus by using the vapor deposition apparatus |
| 06/29/2011 | CN102108499A Chemical vapor deposition apparatus and a control method thereof |
| 06/29/2011 | CN102108498A Chemical vapor deposition (CVD) equipment |
| 06/29/2011 | CN102108497A Method of depositing SiO2 membrane |
| 06/29/2011 | CN102108496A Film deposition apparatus and film deposition method |
| 06/29/2011 | CN102108495A Method for cleaning reaction cavity for growing films of compounds of group III elements and group V elements |
| 06/29/2011 | CN102108494A Deposition method for microcrystalline silicon thin films and device for monitoring plasma assisted deposition |
| 06/29/2011 | CN102108493A Soft board coating device |
| 06/29/2011 | CN101660136B Container for packing solid high-purity metal organic compounds and application thereof |
| 06/29/2011 | CN101629280B Cyclic delivery system of continuous coating equipment |
| 06/29/2011 | CN101310042B Improved bubbler for the transportation of substances by a carrier gas |
| 06/29/2011 | CN101096755B Film forming device and method for using same |
| 06/28/2011 | US7968471 Porous insulating film, method for producing the same, and semiconductor device using the same |
| 06/28/2011 | US7968218 Metal carbonitride layer and method for the production thereof |
| 06/28/2011 | US7968201 Light transmittance optimizing coated glass article for solar cell and method for making |
| 06/28/2011 | US7968192 Oxidation inhibition of carbon-carbon composites |
| 06/28/2011 | US7968154 Atomisation of a precursor into an excitation medium for coating a remote substrate |
| 06/28/2011 | US7968147 Method of forming a diffusion bonding enhanced layer on Al2O3 ceramic tools |
| 06/28/2011 | US7968146 Hybrid layers for use in coatings on electronic devices or other articles |
| 06/28/2011 | US7968145 System and method for depositing a material on a substrate |
| 06/28/2011 | US7967945 RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma |
| 06/28/2011 | US7967930 Plasma reactor for processing a workpiece and having a tunable cathode |
| 06/28/2011 | US7967912 Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device |
| 06/28/2011 | US7967911 Apparatus and methods for chemical vapor deposition |
| 06/28/2011 | US7966969 Deposition of TiN films in a batch reactor |
| 06/23/2011 | WO2011075726A1 Chemical vapor deposition for an interior of a hollow article with high aspect ratio |
| 06/23/2011 | WO2011075437A2 Multifunctional heater/chiller pedestal for wide range wafer temperature control |
| 06/23/2011 | WO2011074604A1 Semiconductor device manufacturing method, substrate treatment apparatus, and semiconductor device |
| 06/23/2011 | WO2011074599A1 Method for producing mosaic diamond |
| 06/23/2011 | WO2011074453A1 SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SAME |
| 06/23/2011 | WO2011074436A1 Substrate and method for manufacturing same |
| 06/23/2011 | WO2011074381A1 Conveyance device for film substrate |