| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/09/2011 | US7993457 Deposition sub-chamber with variable flow |
| 08/09/2011 | US7993456 Device for carrying out a surface treatment of substrates under vacuum |
| 08/09/2011 | US7992518 Silicon carbide gas distribution plate and RF electrode for plasma etch chamber |
| 08/09/2011 | CA2538897C Metallization of substrate(s) by a liquid/vapor deposition process |
| 08/05/2011 | CA2727509A1 Method of preparing organometallic compounds |
| 08/04/2011 | WO2011094311A2 Balancing rf bridge assembly |
| 08/04/2011 | WO2011094142A2 Apparatus for controlling temperature uniformity of a substrate |
| 08/04/2011 | WO2011093709A1 Dynamic fluid valve and method for establishing the same |
| 08/04/2011 | WO2011093481A1 Method for producing nitride compound semiconductor substrate, and nitride compound semiconductor free-standing substrate |
| 08/04/2011 | WO2011093235A1 Method for producing an optical component |
| 08/04/2011 | WO2011092778A1 Plasma film-forming apparatus |
| 08/04/2011 | WO2011057105A3 Materials and methods for thermal and electrical conductivity |
| 08/04/2011 | WO2011030305A3 An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings |
| 08/04/2011 | WO2010144730A8 Method for manufacturing multi-component oxide heterostructures |
| 08/04/2011 | US20110189862 Silicon oxynitride film and process for production thereof, computer-readable storage medium, and plasma cvd device |
| 08/04/2011 | US20110189861 Deposition Method for Passivation of Silicon Wafers |
| 08/04/2011 | US20110189841 Fabrication of large grain polycrystalline silicon film by nano aluminum-induced crystallization of amorphous silicon |
| 08/04/2011 | US20110189815 Formation of cigs absorber layer materials using atomic layer deposition and high throughput surface treatment on coiled flexible substrates |
| 08/04/2011 | US20110189593 Defect repair apparatus and method for EUV mask |
| 08/04/2011 | US20110189407 Process for the internal coating of hollow bodies using a plasma beam at atmospheric pressure |
| 08/04/2011 | US20110189394 Method for forming carbon nanotube |
| 08/04/2011 | US20110189380 Device and method for fabricating display device |
| 08/04/2011 | US20110188206 Thermal interface |
| 08/04/2011 | US20110186984 Substrate processing apparatus and method of manufacturing semiconductor device |
| 08/04/2011 | US20110186545 Feedforward temperature control for plasma processing apparatus |
| 08/04/2011 | US20110186537 Systems, Apparatus and Methods for Coating the Interior of a Container Using a Photolysis and/or Thermal Chemical Vapor Deposition Process |
| 08/04/2011 | US20110186229 Gas shower structure and substrate processing apparatus |
| 08/04/2011 | US20110185973 Chemical vapor deposition reactor for depositing layers made of a reaction gas mixture onto workpieces |
| 08/04/2011 | US20110185972 Balancing rf bridge assembly |
| 08/04/2011 | US20110185971 Laser doping |
| 08/04/2011 | US20110185970 Semiconductor processing |
| 08/04/2011 | DE102010006735A1 Method for producing an object coated in a path of a plasma coating process, comprises cleaning the object in a frame preparing process steps and temporally coating the following plasma coating process into the frame |
| 08/04/2011 | DE102010000270A1 Elektrode für einen Reaktor zur Herstellung von polykristallinem Silizium An electrode for a reactor for preparing polycrystalline silicon |
| 08/03/2011 | EP2351071A2 Methods for forming a conductive material, methods for selectively forming a conductive material, methods for forming platinum, and methods for forming conductive structures |
| 08/03/2011 | EP2351070A2 Method and apparatus for controlling ion energy distribution |
| 08/03/2011 | EP2351069A2 Continuous feed chemical vapor deposition |
| 08/03/2011 | EP2350342A1 Reagent dispensing apparatuses and delivery methods |
| 08/03/2011 | EP2350341A1 Device for the synthesis of nanoparticles by fluidized-bed chemical vapour deposition |
| 08/03/2011 | EP2350340A1 Systems, apparatus and methods for coating the interior of a container using a photolysis and/or thermal chemical vapor deposition process |
| 08/03/2011 | EP1948842B1 Titanium carbonitride layer and method for the production of a titanium carbonitride layer |
| 08/03/2011 | CN201915144U 化学气相沉积装置 Chemical vapor deposition apparatus |
| 08/03/2011 | CN201915143U 用于化学气相沉积设备的喷头 Nozzles for the chemical vapor deposition apparatus |
| 08/03/2011 | CN201915142U 用于高温炉的排气管道和高温炉 Exhaust pipes and high-temperature furnace for high temperature furnace |
| 08/03/2011 | CN1930099B Method for depositing gallium oxide coatings on flat glass |
| 08/03/2011 | CN1906026B Yttria-coated ceramic components of semiconductor material processing apparatuses and methods of manufacturing the components |
| 08/03/2011 | CN102142475A Graded alloy telluride layer in cadmium telluride thin film photovoltaic devices and methods of manufacturing the same |
| 08/03/2011 | CN102142469A P type microcrystalline silicon carbon film material for PI flexible substrate solar cell and preparation |
| 08/03/2011 | CN102140630A Coating device |
| 08/03/2011 | CN102140629A Chemical vapor deposition device and sprayer thereof |
| 08/03/2011 | CN102140628A Method for removing contamination from reactor |
| 08/03/2011 | CN102140627A Preparation method of planarized coating layer for diamond with ultra-large-aperture inner holes |
| 08/03/2011 | CN102140626A Tensile spring structure for preparing diamond film |
| 08/03/2011 | CN102140625A Method for preparing plasma-oriented tungsten coating used in fusion reactor by using tungsten carbonyl as precursor |
| 08/03/2011 | CN102140619A Deposition mask and mask assembly having the same |
| 08/03/2011 | CN101770922B Capacitance coupling type radiofrequency plasma source |
| 08/03/2011 | CN101646802B Deposition source unit, deposition apparatus and temperature control apparatus for deposition source unit |
| 08/03/2011 | CN101617276B Intermediate transfer member and image formation apparatus |
| 08/03/2011 | CN101583737B Film deposition of amorphous films by electron cyclotron resonance |
| 08/03/2011 | CN101573470B Plasma deposited microporous carbon material |
| 08/03/2011 | CN101553598B Sliding mating part in lubricated regime, coated by a thin film |
| 08/03/2011 | CN101314846B Substrate carrying mechanism and substrate treating device having the same |
| 08/03/2011 | CN101253603B Method of film formation |
| 08/02/2011 | US7989272 Composition of carbon nitride, thin film transistor with the composition of carbon nitride, display device with the thin film transistor, and manufacturing method thereof |
| 08/02/2011 | US7989034 Method for continuous atmospheric pressure plasma treatment of workpieces |
| 08/02/2011 | US7989033 Silicon precursors to make ultra low-K films with high mechanical properties by plasma enhanced chemical vapor deposition |
| 08/02/2011 | US7989024 Atmospheric pressure chemical vapor deposition of gas containing compounds of zinc, oxygen, fluorine and boron, aluminum, gallium and/or indium onto hot substrate; durability; high visible light transmittance, low emissivity and/or solar control properties |
| 08/02/2011 | US7989023 Method of improving mixing of axial injection in thermal spray guns |
| 08/02/2011 | US7989022 Methods of processing substrates, electrostatic carriers for retaining substrates for processing, and assemblies comprising electrostatic carriers having substrates electrostatically bonded thereto |
| 08/02/2011 | US7989021 Vaporizing material at a uniform rate |
| 08/02/2011 | US7988836 Method of making window unit including diamond-like carbon (DLC) coating |
| 08/02/2011 | US7988835 Silicon dot forming method and silicon dot forming apparatus |
| 08/02/2011 | US7988832 Work piece with a hard film of AlCr-containing material, and process for its production |
| 08/02/2011 | US7988817 Lift pin driving device and a flat panel display manufacturing apparatus having same |
| 08/02/2011 | US7988816 Plasma processing apparatus and method |
| 08/02/2011 | US7988815 Plasma reactor with reduced electrical skew using electrical bypass elements |
| 08/02/2011 | US7988814 Plasma processing apparatus, plasma processing method, focus ring, and focus ring component |
| 08/02/2011 | US7988812 Substrate treatment apparatus |
| 08/02/2011 | US7988787 Workpiece support system and method |
| 08/02/2011 | US7988785 Printing head for nano patterning |
| 08/02/2011 | US7987814 Lower liner with integrated flow equalizer and improved conductance |
| 08/02/2011 | CA2583940C Hydrophilic dlc on substrate with flame pyrolysis treatment |
| 07/28/2011 | WO2011090825A1 Control for and method of pulsed gas delivery |
| 07/28/2011 | WO2011090737A2 Oxygen radical generation for radical-enhanced thin film deposition |
| 07/28/2011 | WO2011090717A1 Coating methods, systems, and related articles |
| 07/28/2011 | WO2011090076A1 Plasma processing apparatus and method for processing substrate using the apparatus |
| 07/28/2011 | WO2011090040A1 Method for manufacturing epitaxial crystal substrate |
| 07/28/2011 | WO2011088884A1 Cleaning method for coating systems |
| 07/28/2011 | WO2011057114A3 Methods of making and deposition methods using hafnium- or zirconium-containing compounds |
| 07/28/2011 | US20110184156 Precursors for deposition of metal oxide layers or films |
| 07/28/2011 | US20110183528 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride |
| 07/28/2011 | US20110183519 Method of manufacturing semiconductor device and substrate processing apparatus |
| 07/28/2011 | US20110183461 Process device for processing in particular stacked proessed goods |
| 07/28/2011 | US20110183074 Ozone applicator and method for polymer oxidation |
| 07/28/2011 | US20110183069 Deposition apparatus, deposition method, and storage medium having program stored therein |
| 07/28/2011 | US20110183067 Carbon nano tube coating apparatus and method thereof |
| 07/28/2011 | US20110182804 Protected Alloy Surfaces In Microchannel Apparatus and Catalysts, Alumina Supported Catalysts, Catalyst Intermediates, and Methods of Forming Catalysts and Microchannel Apparatus |
| 07/28/2011 | US20110182761 Stator for use in helicoidal motor |
| 07/28/2011 | US20110180513 Hallow carbon spheres |
| 07/28/2011 | US20110180402 Vacuum Processing Apparatus |
| 07/28/2011 | US20110180213 Plasma processing apparatus and plasma processing method |