| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/12/2011 | US7977243 Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus |
| 07/12/2011 | US7976909 Method for deposition of titanium oxide by a plasma source |
| 07/12/2011 | US7976908 High throughput processes and systems for barrier film deposition and/or encapsulation of optoelectronic devices |
| 07/12/2011 | US7976898 reactor has a shaped ceiling of the reaction space to provide a nonuniform gap over the substrate; rapid depositing a thin film on substrate having a larger actual area; gas flow space above the substrate is not uniform in height across a direction perpendicular to the gas flow direction |
| 07/12/2011 | US7976897 Thermal chemical vapor deposition methods, and thermal chemical vapor deposition systems |
| 07/12/2011 | US7976893 Superconductivity in boron-doped diamond thin film |
| 07/12/2011 | US7976716 Semiconductor device manufacturing method |
| 07/12/2011 | US7976674 Embedded multi-inductive large area plasma source |
| 07/12/2011 | US7976672 Plasma generation apparatus and work processing apparatus |
| 07/12/2011 | US7976671 Mask etch plasma reactor with variable process gas distribution |
| 07/12/2011 | US7976636 Multiple nozzle evaporator for vacuum thermal evaporation |
| 07/12/2011 | US7976635 Dual substrate loadlock process equipment |
| 07/12/2011 | US7976634 Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems |
| 07/12/2011 | US7976633 Device and method of forming film |
| 07/12/2011 | US7976632 Vacuum processing apparatus |
| 07/12/2011 | US7976631 Multi-gas straight channel showerhead |
| 07/12/2011 | US7975646 Device for depositing a coating on an internal surface of a container |
| 07/12/2011 | US7975558 Method and apparatus for gas flow measurement |
| 07/12/2011 | CA2544625C One piece shim |
| 07/08/2011 | CA2726386A1 Process and apparatus for continuous coating of fibrous materials |
| 07/07/2011 | WO2011081210A1 Tantalum carbide-coated carbon material and manufacturing method for same |
| 07/07/2011 | WO2011080978A1 Ruthenium complex mixture, method for producing same, composition for forming film, ruthenium-containing film and method for producing same |
| 07/07/2011 | WO2011080661A1 Method for depositing multi-layered layers and/or gradient layers |
| 07/07/2011 | WO2011080659A1 Inline coating installation |
| 07/07/2011 | WO2011079699A1 Method and plasma enhanced chemical vapor deposition system for removing film contamination produced during working process |
| 07/07/2011 | WO2011047210A3 Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system |
| 07/07/2011 | WO2011034751A3 Hot wire chemical vapor deposition (cvd) inline coating tool |
| 07/07/2011 | US20110165435 Sanitary object |
| 07/07/2011 | US20110165394 Weather-resistant article, weather-resistant film and optical member |
| 07/07/2011 | US20110165346 Precursors for CVD Silicon Carbo-Nitride Films |
| 07/07/2011 | US20110165333 Plasma arc coating system and method |
| 07/07/2011 | US20110165328 Method of forming mixed rare earth oxide and aluminate films by atomic layer deposition |
| 07/07/2011 | US20110165327 Thin film deposition apparatus |
| 07/07/2011 | US20110165326 Automatic feed system and related process for introducing source material to a thin film vapor deposition system |
| 07/07/2011 | US20110165325 Cool-down system and method for a vapor deposition system |
| 07/07/2011 | US20110165320 Deposition source, thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus |
| 07/07/2011 | US20110165317 Coating device and coating method |
| 07/07/2011 | US20110165315 Flux Monitor |
| 07/07/2011 | US20110165057 Plasma cvd device, dlc film, and method for depositing thin film |
| 07/07/2011 | US20110164842 Wear and corrosion resistant layered composite |
| 07/07/2011 | US20110164253 Method of modifying a substrate for deposition of charged particles thereon |
| 07/07/2011 | US20110163452 Semiconductor device, method of manufacturing semiconductor device, and substrate processing apparatus |
| 07/07/2011 | US20110163181 Film formation method, film formation device, piezoelectric film, piezoelectric device and liquid discharge device |
| 07/07/2011 | US20110163065 System for batch processing of magnetic media |
| 07/07/2011 | US20110162971 Sputtering Target and Process for Producing Same |
| 07/07/2011 | US20110162802 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 07/07/2011 | US20110162582 Deposition of active films |
| 07/07/2011 | US20110162581 Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same |
| 07/07/2011 | US20110162580 High temperature ald inlet manifold |
| 07/07/2011 | DE112009002204T5 Neuartiges Hartmetall für eine Verwendung bei Erdöl- und Gasbohrungen New type of carbide for use in oil and gas wells |
| 07/07/2011 | DE10351467B4 Gegenstand mit leicht reinigbarer Oberfläche und Verfahren zu seiner Herstellung Subject to easily cleanable surface and method for its manufacture |
| 07/07/2011 | DE102010061585A1 Transportvorrichtungsbaugruppe mit entnehmbaren Rollen für ein Dampfabscheidungssystem Transport device assembly with removable wheels for a vapor deposition system |
| 07/07/2011 | DE102010000002A1 Verfahren zur Abscheidung von Mehrlagenschichten und/oder Gradientenschichten A process for the deposition of multilayer coatings and / or gradient |
| 07/07/2011 | DE102010000001A1 Inline-Beschichtungsanlage Inline coating machine |
| 07/07/2011 | DE102005045081B4 Suszeptor Susceptor |
| 07/06/2011 | EP2341163A1 Method of forming a film |
| 07/06/2011 | EP2013378B1 Exhaust system |
| 07/06/2011 | EP1917674B1 Optical emission interferometry for pecvd using a gas injection hole |
| 07/06/2011 | EP1564794B1 Method and device for generating uniform high- frequency plasma over large surface area |
| 07/06/2011 | CN201890929U Carrying disc structure for vapor phase deposition equipment |
| 07/06/2011 | CN201890928U Vapor phase deposition furnace |
| 07/06/2011 | CN1989587B Blocker plate bypass to distribute gases in a chemical vapor deposition system |
| 07/06/2011 | CN1989080B Nanostructured coatings and related methods |
| 07/06/2011 | CN1782119B Method of coating a component inside an apparatus |
| 07/06/2011 | CN1673410B Showerhead mounting to accommodate thermal expansion |
| 07/06/2011 | CN102119238A Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing films |
| 07/06/2011 | CN102115879A Substrate processing apparatus |
| 07/06/2011 | CN102115878A Preparation method of single crystal cubic carbon nitride thin film |
| 07/06/2011 | CN102115877A Equipment for preparing boron-doped isotropic pyrolytic carbon materials |
| 07/06/2011 | CN102115876A Chemical vapor deposition device and method for forming poly-p-xylylene film |
| 07/06/2011 | CN102115875A Conveyor assembly with removable rollers for a vapor deposition system |
| 07/06/2011 | CN101736313B Method for preparing diamond-like film on germanium substrate |
| 07/06/2011 | CN101443478B Gas supply pipe for plasma treatment |
| 07/06/2011 | CN101388359B Adhesion improvement for low k dielectrics to conductive materials |
| 07/06/2011 | CN101329982B Apparatus for heat treatment of wafer |
| 07/06/2011 | CN101304630B Internal balanced coil for inductively coupled high density plasma processing chamber |
| 07/06/2011 | CN101040061B An elongated gas ditribution system |
| 07/06/2011 | CN101010782B Method of vapor-phase growing and vapor-phase growing apparatus for AlGaN |
| 07/05/2011 | US7974524 Heat treatment apparatus and heat treatment method |
| 07/05/2011 | US7973189 Nucleation, adhesion to copper wires; chemical vapor deposition of cobalt amidate ; diffusion barrier for copper; microelectronics |
| 07/05/2011 | US7973188 Processes for the production of organometallic compounds |
| 07/05/2011 | US7972974 Gallium lanthanide oxide films |
| 07/05/2011 | US7972961 Purge step-controlled sequence of processing semiconductor wafers |
| 07/05/2011 | US7972663 Method and apparatus for forming a high quality low temperature silicon nitride layer |
| 07/05/2011 | US7972649 Thin film forming method and thin film forming apparatus |
| 07/05/2011 | US7972471 Inductively coupled dual zone processing chamber with single planar antenna |
| 07/05/2011 | US7972470 Asymmetric grounding of rectangular susceptor |
| 07/05/2011 | US7972468 Semiconductor device fabricating system |
| 07/05/2011 | US7972467 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 07/05/2011 | US7972444 Workpiece support with fluid zones for temperature control |
| 07/05/2011 | US7972443 Metering of particulate material and vaporization thereof |
| 07/05/2011 | US7972442 Photoplate for OLED deposition screen |
| 07/05/2011 | US7972441 Thermal oxidation of silicon using ozone |
| 07/05/2011 | US7971861 Safe liquid source containers |
| 06/30/2011 | WO2011078626A2 Strip passing apparatus, apparatus for treating surface of strip with the same, and method for treating surface of strip |
| 06/30/2011 | WO2011078270A1 Method for operating vacuum processing apparatus |
| 06/30/2011 | WO2011077892A1 Method for manufacturing optical component, and optical component |
| 06/30/2011 | WO2011077746A1 Amorphous carbon orientation film and formation method therefor |
| 06/30/2011 | WO2011077641A1 Epitaxial growing apparatus and method for manufacturing epitaxial growing apparatus |
| 06/30/2011 | WO2011077157A1 Coated substrate |