| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/17/2011 | CN102154629A Device and method for adjusting mixed gas inflow and outflow of polycrystalline silicon CVD (Chemical Vapor Deposition) furnace |
| 08/17/2011 | CN102154628A Multi-gas distribution injector for chemical vapor deposition reactors |
| 08/17/2011 | CN102154627A Method for preparing independent self-supporting transparent aluminium nitride nanocrystalline film |
| 08/17/2011 | CN102154626A Surface treatment method for measuring diffusion length of silicon wafer |
| 08/17/2011 | CN102154625A Preparation method for anti-carbon deposition layer on the surface of steel material part of engine |
| 08/17/2011 | CN102154624A Reactor, chemical vapor deposition reactor and metal organic chemical vapor deposition reactor |
| 08/17/2011 | CN102154623A An active viewport detection assembly for substrate detection in a vapor deposition system |
| 08/17/2011 | CN102153569A Method of preparing organometallic compounds |
| 08/17/2011 | CN101805894B Preparation method for hydrogenated crystalline state nanometer carborundum films under low temperature |
| 08/17/2011 | CN101781755B Method for preparing aluminum-based alloy with Al-Si-O-N wearproof anticorrosive layer |
| 08/17/2011 | CN101770933B Plasma process equipment and gas distribution device thereof |
| 08/17/2011 | CN101688306B Apparatus and method for depositing multiple coating materials in a common plasma coating zone |
| 08/17/2011 | CN101681870B Dynamic temperature backside gas control for improved within-substrate processing uniformity |
| 08/17/2011 | CN101665918B Film forming method and film forming apparatus |
| 08/17/2011 | CN101660143B Flat heater and plasma processing equipment |
| 08/17/2011 | CN101553900B Plasma confinement rings including RF absorbing material for reducing polymer deposition |
| 08/17/2011 | CN101452706B Protection film forming method |
| 08/17/2011 | CN101371958B Exhaust gas collection device |
| 08/17/2011 | CN101370962B Methods and arrangement for a highly efficient gas distribution arrangement |
| 08/17/2011 | CN101310040B Manufacturing method of ti system film |
| 08/17/2011 | CN101256935B Method and apparatus for controlling gas flow to a processing chamber |
| 08/17/2011 | CN101175868B Bonding an adherent to a substrate via a primer |
| 08/16/2011 | US7998883 Process for producing zirconium oxide thin films |
| 08/16/2011 | US7998600 Dry composition, its use, layer system and coating process |
| 08/16/2011 | US7998538 Electromagnetic control of chemical catalysis |
| 08/16/2011 | US7998537 High density thin films; ion bombardment surfaces; crosslinking |
| 08/16/2011 | US7998536 Silicon precursors to make ultra low-K films of K<2.2 with high mechanical properties by plasma enhanced chemical vapor deposition |
| 08/16/2011 | US7998527 Composite material and process for preparing a composite material |
| 08/16/2011 | US7998526 Method and system for dynamic in-situ phosphor mixing and jetting |
| 08/16/2011 | US7998426 Plasma-based gas treatment system integrated in a vacuum pump |
| 08/16/2011 | US7998307 Electron beam enhanced surface wave plasma source |
| 08/16/2011 | US7998263 Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film |
| 08/16/2011 | US7997227 Vacuum coater device and mechanism for supporting and manipulating workpieces in same |
| 08/11/2011 | WO2011097012A1 An isolation chamber and method of using the isolation chamber to make solar cell material |
| 08/11/2011 | WO2011095849A1 Chalcogenide-containing precursors, methods of making, and methods of using the same for thin film deposition |
| 08/11/2011 | WO2011095846A1 Parallel plate reactor for uniform thin film deposition with reduced tool foot-print |
| 08/11/2011 | WO2011095681A1 Strengthened structural module and method of fabrication |
| 08/11/2011 | WO2011064392A3 Method and apparatus for depositing nanostructured thin layers with controlled morphology and nanostructure |
| 08/11/2011 | WO2011045186A4 Method and device for separating argon from a gaseous mixture |
| 08/11/2011 | WO2011020028A3 Silane blend for thin film vapor deposition |
| 08/11/2011 | US20110195580 Method for forming laminated structure including amorphous carbon film |
| 08/11/2011 | US20110195207 Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same |
| 08/11/2011 | US20110195202 Oxygen pump purge to prevent reactive powder explosion |
| 08/11/2011 | US20110195199 Process and device for soldering in the vapor phase |
| 08/11/2011 | US20110195196 Method for manufacturing transparent oxide electrode using electron beam post-treatment |
| 08/11/2011 | US20110195188 Chemical vapor deposition of high conductivity, adherent thin films of ruthenium |
| 08/11/2011 | US20110195187 Direct liquid vaporization for oleophobic coatings |
| 08/11/2011 | US20110195186 Plane-type film continuous evaporation source and the manufacturing method and system using the same |
| 08/11/2011 | US20110195185 SiGe Matrix Nanocomposite Materials with an Improved Thermoelectric Figure of Merit |
| 08/11/2011 | US20110195184 Substrate protection device and method |
| 08/11/2011 | US20110195182 Cvi followed by coal tar pitch densification by vpi |
| 08/11/2011 | US20110192779 Thin layer chromatography plates and related methods |
| 08/11/2011 | US20110192546 WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS |
| 08/11/2011 | US20110192540 Table for plasma processing apparatus and plasma processing apparatus |
| 08/11/2011 | US20110192349 Phase-Modulated RF Power for Plasma Chamber Electrode |
| 08/11/2011 | US20110192348 RF Hollow Cathode Plasma Generator |
| 08/11/2011 | US20110192347 Substrate processing apparatus and semiconductor devices manufacturing method |
| 08/11/2011 | US20110192344 Film forming apparatus |
| 08/11/2011 | US20110192320 Black metallic effect pigments |
| 08/11/2011 | DE102010007516A1 Large-scale cathode for magnetron sputtering within vacuum chamber, comprises target, and device for producing a magnetic field, which is enclosed itself on the surface of the target in circular manner and is formed in tunnel-shaped manner |
| 08/11/2011 | DE102010000388A1 Gaseinlassorgan mit Prallplattenanordnung Gas inlet element with baffle arrangement |
| 08/10/2011 | EP2354272A1 Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same |
| 08/10/2011 | EP2354271A1 Substrate protection device and method |
| 08/10/2011 | EP2353176A2 Reaction chamber |
| 08/10/2011 | EP2160759B1 Device for coating a plurality of closest-packed substrates arranged on a susceptor |
| 08/10/2011 | EP1893786B1 A method of producing metal cutting tools |
| 08/10/2011 | EP1828430B1 Method for deposition of metal layers from metal carbonyl precursors |
| 08/10/2011 | EP1770187B1 Thin film-forming material and method for producing thin film |
| 08/10/2011 | EP1631986B1 A method of preparation of an epitaxial substrate |
| 08/10/2011 | EP1618225B1 Porous materials functionalized by vacuum deposition |
| 08/10/2011 | EP1547131B1 Large-diameter sic wafer and manufacturing method thereof |
| 08/10/2011 | EP1411031B1 Ceramic and semiconductor |
| 08/10/2011 | CN201924077U 化学气相沉积设备及其气体扩散器 Chemical vapor deposition apparatus and the gas diffuser |
| 08/10/2011 | CN201924070U 一种真空镀膜靶条气体供气分布装置 A vacuum coating target strip gas supply distribution unit |
| 08/10/2011 | CN1944714B Process for the metallic coating of fibres by liquid means |
| 08/10/2011 | CN1749430B Pecvd susceptor support construction |
| 08/10/2011 | CN1598048B Holder for multiple substrates and chamber with the same |
| 08/10/2011 | CN102150245A Film forming apparatus |
| 08/10/2011 | CN102149850A Sanitary object |
| 08/10/2011 | CN102149845A SiGe matrix nanocomposite materials with an improved thermoelectric figure of merit |
| 08/10/2011 | CN102148153A Substrate cleaning method and substrate cleaning apparatus |
| 08/10/2011 | CN102148134A Method for isolated and discretized process sequence integration |
| 08/10/2011 | CN102146553A Method of depositing a metal film on a substrate with patterned features |
| 08/10/2011 | CN101775590B Graphite base with protective coating layer and preparation method thereof |
| 08/10/2011 | CN101736326B Capacitively coupled plasma processing reactor |
| 08/10/2011 | CN101724826B Surface treatment method for C-C heating element |
| 08/10/2011 | CN101238095B Metal-containing compound, method for producing the compound, metal-containing thin film and method for forming the thin film |
| 08/09/2011 | US7993705 Film formation apparatus and method for using the same |
| 08/09/2011 | US7993704 Protective coating systems for gas turbine engine applications and methods for fabricating the same |
| 08/09/2011 | US7993703 Method for making nanostructures |
| 08/09/2011 | US7993698 Techniques for temperature controlled ion implantation |
| 08/09/2011 | US7993497 Magnetic disk and magnetic disk manufacturing method |
| 08/09/2011 | US7993489 Capacitive coupling plasma processing apparatus and method for using the same |
| 08/09/2011 | US7993488 Microwave plasma processing device and gate valve for microwave plasma processing device |
| 08/09/2011 | US7993487 Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma |
| 08/09/2011 | US7993486 Treatment unit for the wet-chemical or electrolytic treatment of flat workpieces |
| 08/09/2011 | US7993462 Substrate-supporting device having continuous concavity |
| 08/09/2011 | US7993460 Substrate support having dynamic temperature control |
| 08/09/2011 | US7993459 Delivering particulate material to a vaporization zone |
| 08/09/2011 | US7993458 Vacuum processing apparatus and method |