Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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08/31/2011 | CN102166513A Antimony, ytterbium and indium based composite magnetic particle photocatalyst with core-shell structure, preparation and application |
08/31/2011 | CN101872719B Epitaxial growth method for improving In component uniformity of InGaN quantum well |
08/31/2011 | CN101812674B Gas distribution device for metal organic chemical vapor deposition equipment |
08/31/2011 | CN101665903B Mask assembly and film coating equipment |
08/31/2011 | CN101407902B Electrical contact strengthening apparatus and method for improving binding force of coating and workpiece |
08/31/2011 | CN101261952B Substrate carrying bench and substrate treatment device |
08/30/2011 | US8009387 Forming an aluminum alloy oxynitride underlayer and a diamond-like carbon overcoat to protect a magnetic recording head and/or media |
08/30/2011 | US8008743 Vapor deposition of silicon dioxide nanolaminates |
08/30/2011 | US8008602 Electrostatic chuck heater |
08/30/2011 | US8008174 Continuous feed chemical vapor deposition |
08/30/2011 | US8007909 Carbon film |
08/30/2011 | US8007871 Electrospray deposition: devices and methods thereof |
08/30/2011 | US8007865 Atomic layer deposition (ALD) method and reactor for producing a high quality layer |
08/30/2011 | US8007644 Inclined carrier transferring apparatus |
08/30/2011 | US8007633 Surface processing apparatus |
08/30/2011 | US8007632 Semiconductor manufacturing apparatus and manufacturing method of semiconductor device |
08/30/2011 | US8007591 Substrate holder having a fluid gap and method of fabricating the substrate holder |
08/30/2011 | US8007590 Electronic device including a guest material within a layer and a process for forming the same |
08/30/2011 | US8007589 Apparatus and method for compounding carbon nanotubes |
08/30/2011 | US8006641 Installation for depositing, by means of a microwave plasma, an internal barrier coating in thermoplastic containers |
08/30/2011 | US8006640 Plasma processing apparatus and plasma processing method |
08/30/2011 | US8006639 Catalytic enhanced chemical vapor deposition apparatus having efficient filament arrangement structure |
08/26/2011 | DE202009018248U1 Neuartige, stoßgedämpfte Räder oder Rollen Novel, shock-absorbing wheels or rollers |
08/26/2011 | CA2732542A1 Precompression effect in pump body |
08/25/2011 | WO2011103589A2 Fluidized bed pyrocarbon coating |
08/25/2011 | WO2011103282A2 VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS |
08/25/2011 | WO2011102718A1 Continuous patterned layer deposition |
08/25/2011 | WO2011102584A1 Novel metal dialkyl glycine compound and manufacturing method thereof |
08/25/2011 | WO2011102474A1 Single crystal diamond movable structure and manufacturing method thereof |
08/25/2011 | WO2011102274A1 Thin film manufacturing apparatus, thin film manufacturing method, and method for maintaining thin film manufacturing apparatus |
08/25/2011 | WO2011102263A1 Vacuum processing device |
08/25/2011 | WO2011102083A1 Plasma processing device and plasma processing method |
08/25/2011 | WO2011102045A1 Epitaxial substrate and method for producing same |
08/25/2011 | WO2011102044A1 Epitaxial substrate and method for producing same |
08/25/2011 | WO2011101934A1 Mixture gas supply device |
08/25/2011 | WO2011101929A1 Semiconductor light-emitting device and method for manufacturing the same |
08/25/2011 | WO2011101361A1 Gas mixer for vapor deposition |
08/25/2011 | WO2011101326A1 Constant volume closure valve for vapor phase deposition source |
08/25/2011 | WO2011101325A1 Heating system for a vapor-phase deposition source |
08/25/2011 | WO2011101273A1 Coating device, and method for operating a coating device with a shielding plate |
08/25/2011 | WO2011060021A3 Coated cutting insert and method for making the same |
08/25/2011 | WO2011057780A3 Process for preparing ruthenium(0)-olefin complexes |
08/25/2011 | US20110207332 Thin film coated process kits for semiconductor manufacturing tools |
08/25/2011 | US20110207299 Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor |
08/25/2011 | US20110207283 High temperature atomic layer deposition of dielectric oxides |
08/25/2011 | US20110207256 In-situ acceptor activation with nitrogen and/or oxygen plasma treatment |
08/25/2011 | US20110206937 Composite article having a ceramic nanocomposite layer |
08/25/2011 | US20110206921 Porous Organosilicate Layers, and Vapor Deposition Systems and Methods for Preparing Same |
08/25/2011 | US20110206909 Coatings for suppressing metallic whiskers |
08/25/2011 | US20110206900 Manufacturing method of functional film and functional film |
08/25/2011 | US20110206868 Donor substrate and method of manufacturing display |
08/25/2011 | US20110206866 Deposition apparatus and method |
08/25/2011 | US20110206865 Method of and apparatus utilizing carbon cord for evaporation of metals |
08/25/2011 | US20110206864 Organometallic compounds, processes for the preparation thereof and methods of use thereof |
08/25/2011 | US20110206863 Organometallic compounds having sterically hindered amides |
08/25/2011 | US20110206862 Titanium Nitride Film Deposition by Vapor Deposition Using Cyclopentadienyl Alkylamino Titanium Precursors |
08/25/2011 | US20110206846 Method for depositing transparent conducting oxides |
08/25/2011 | US20110206845 Organometallic compounds and processes for preparation thereof |
08/25/2011 | US20110206844 Chromium-free passivation of vapor deposited aluminum surfaces |
08/25/2011 | US20110206843 Processing methods and apparatus with temperature distribution control |
08/25/2011 | US20110206842 CVD-Siemens Reactor Process Hydrogen Recycle System |
08/25/2011 | US20110206841 Method and device for conditioning paper |
08/25/2011 | US20110206829 Composition for stripping and stripping method |
08/25/2011 | US20110206754 Implant device |
08/25/2011 | US20110206590 Silicon oxide film, method for forming silicon oxide film, and plasma cvd apparatus |
08/25/2011 | US20110205643 Extending the stability of uv curable adhesives in 193nm laser systems |
08/25/2011 | US20110205615 Mems devices with multi-component sacrificial layers |
08/25/2011 | US20110204466 Photoelectric conversion device manufacturing method, photoelectric conversion device, and photoelectric conversion device manufacturing system |
08/25/2011 | US20110204408 High thermal performance packaging for optoelectronics devices |
08/25/2011 | US20110204385 Vapor Deposition of a Layer |
08/25/2011 | US20110204329 NON-POLAR (Al,B,In,Ga)N QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES |
08/25/2011 | US20110204247 Scintillator panel, radiation detector, and method for manufacturing the same |
08/25/2011 | US20110204029 Processing system and method for chemically treating a substrate |
08/25/2011 | US20110203831 Metal/cnt and/or fullerene composite coating on strip materials |
08/25/2011 | US20110203714 Nano-laminate-based ignitors |
08/25/2011 | US20110203524 Ald film-forming apparatus and method of fabricating semiconductor device |
08/25/2011 | US20110203523 Method and apparatus for atomic layer deposition |
08/25/2011 | US20110203101 Chuck and bridge connection points for tube filaments in a chemical vapor deposition reactor |
08/25/2011 | DE102010002342A1 Verwendung der spezifischen Widerstandsmessung zur indirekten Bestimmung der Reinheit von Silanen und Germanen und ein entsprechendes Verfahren Use of the resistivity measurement for the indirect determination of the purity of silanes and Germans and method |
08/25/2011 | DE102010000480A1 Device for producing an aerosol, comprises an injector for introducing small material particles into a carrier gas stream, a thinner, which is line-connected with the injector, and an evaporator, which is line-connected with the thinner |
08/25/2011 | DE102010000479A1 Vorrichtung zur Homogenisierung eines verdampften Aerosols sowie Vorrichtung zum Abscheiden einer organischen Schicht auf einem Substrat mit einer derartigen Homogenisierungseinrichtung An apparatus for homogenizing a vaporized aerosol and apparatus for depositing an organic layer on a substrate having such a homogenizing device |
08/25/2011 | DE102007051447B4 Gasdiffusionsverfahren und Diffusionsofen zur Durchführung des Verfahrens Gas diffusion method and the diffusion furnace for performing the method |
08/25/2011 | CA2786273A1 Constant volume closure valve for vapor phase deposition source |
08/25/2011 | CA2786249A1 Heating system for a vapor-phase deposition source |
08/24/2011 | EP2360761A1 Sealing structure and fuel cell comprising the sealing structure |
08/24/2011 | EP2360719A1 Epitaxial substrate for electronic devices and manufacturing method therefor |
08/24/2011 | EP2360716A1 Plasma processing apparatus |
08/24/2011 | EP2360297A2 Vapor deposition system, method of manufacturing light emitting device and light emitting device |
08/24/2011 | EP2360293A1 Method and apparatus for depositing atomic layers on a substrate |
08/24/2011 | EP2360292A1 Parallel plate reactor for uniform thin film deposition with reduced tool foot-print |
08/24/2011 | EP2360291A1 Method and device for quick heating and cooling of a substrate and immediately coating same in a vacuum |
08/24/2011 | EP2360289A1 Device and method for deposing a layer composed of at least two components on a substrate |
08/24/2011 | EP2359923A1 Method of preparing organometallic compounds |
08/24/2011 | EP2359922A1 Method of preparing organometallic compounds |
08/24/2011 | EP2359388A1 Device and method for coating a substrate using cvd |
08/24/2011 | EP2358483A1 Cleaning method for coating systems |
08/24/2011 | EP1620577B1 Control or modeling of a method for chemical infiltration in a vapor phase for the densification of porous substrates by carbon |
08/24/2011 | EP1612856B1 Device for cleaning cvd device and method of cleaning cvd device |
08/24/2011 | EP1592053B1 Wiring fabricating method |
08/24/2011 | EP1590826B1 Plasma reactor including helical electrodes |