| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/24/2011 | EP1509634B1 Surface treatment system, surface treatment method and product produced by surface treatment method |
| 08/24/2011 | EP1181095B1 The surface modification of solid supports through the thermal decomposition and functionalization of silanes |
| 08/24/2011 | CN201942749U 一种气相沉积设备用的载盘结构 A vapor-phase deposition apparatus with a carrier disc structure |
| 08/24/2011 | CN201942748U 适用于大型化学气相沉积炉的进气管系统 For large chemical vapor deposition furnace intake pipe system |
| 08/24/2011 | CN201942747U 一种金属有机化学气相沉积反应器喷淋装置 Metal organic chemical vapor deposition reactor sprinkler |
| 08/24/2011 | CN1949458B Reaction chamber with opposing pockets for gas injection and exhaust |
| 08/24/2011 | CN1752281B RF grounding of cathode in process chamber |
| 08/24/2011 | CN1726303B Atomic layer deposition using metal amidinates |
| 08/24/2011 | CN102165100A Film formation device and substrate processing apparatus |
| 08/24/2011 | CN102165099A Chemical vapor deposition reactor for depositing layers made of a reaction gas mixture onto workpieces |
| 08/24/2011 | CN102165098A Surface treatment nozzle device |
| 08/24/2011 | CN102165097A Method for production of zinc oxide (ZnO) film or magnesium zinc oxide (ZnMgO) film, and apparatus for production of zinc oxide film or magnesium zinc oxide film |
| 08/24/2011 | CN102165096A Method for production of metal oxide film, and apparatus for production of metal oxide film |
| 08/24/2011 | CN102165095A Shadow mask held magnetically on a substrate support |
| 08/24/2011 | CN102163530A Plasma processing apparatus |
| 08/24/2011 | CN102162115A Color regulation and control method based on porous alumina and single atom deposition technology |
| 08/24/2011 | CN102162098A Preparation method of silicon film/titanium dioxide nanotube array composite structure |
| 08/24/2011 | CN102162092A Method for constant concentration evaporation and a device using the same |
| 08/24/2011 | CN102162091A Low k precursors providing superior integration attributes |
| 08/24/2011 | CN102162090A Alumina coating, coated product and method of making the same |
| 08/24/2011 | CN102162089A Film formation method, film formation apparatus, and method for using film formation apparatus |
| 08/24/2011 | CN102161107A Diamond coating tool with excellent anti-chipping property |
| 08/24/2011 | CN101802257B Substrate placing mechanism and substrate processing apparatus |
| 08/24/2011 | CN101714518B Method for fabricating semiconductor device |
| 08/24/2011 | CN101565822B Release method of residual compression stress in nanocrystalline cubic boron nitride pellicle |
| 08/24/2011 | CN101542016B Method of forming film and film forming apparatus |
| 08/24/2011 | CN101333651B Diffuser support |
| 08/24/2011 | CN101180135B Chemical vapor deposition of chalcogenide materials |
| 08/24/2011 | CN101135048B Plasma film coating device and method |
| 08/24/2011 | CN101115860B Production method for vacuum component, resin coating forming device and vacuum film forming system |
| 08/24/2011 | CN101113514B Substrate processing apparatus |
| 08/23/2011 | US8005351 Irradiance pulse heat-treating methods and apparatus |
| 08/23/2011 | US8003814 Metal alkoxide compound, material for forming thin film, and method for producing thin film |
| 08/23/2011 | US8003535 Semiconductor device manufacturing method and target substrate processing system |
| 08/23/2011 | US8003225 Decorative article having a white coating |
| 08/23/2011 | US8003167 Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film |
| 08/23/2011 | US8003164 Method of making a scratch-and etch-resistant coated glass article |
| 08/23/2011 | US8003162 Metal organic chemical vapor deposition; atomic layer deposition |
| 08/23/2011 | US8002947 Plasma treatment system and cleaning method of the same |
| 08/23/2011 | US8002946 Mask etch plasma reactor with cathode providing a uniform distribution of etch rate |
| 08/23/2011 | US8002930 Decorative tire cover and transfer pattern and method for use therewith |
| 08/23/2011 | US8002896 Shadow frame with cross beam for semiconductor equipment |
| 08/23/2011 | US8002895 Heat processing apparatus for semiconductor process |
| 08/23/2011 | US8002894 Processing apparatus and processing method |
| 08/23/2011 | US8001927 Plasma spraying device and a method for introducing a liquid precursor into a plasma gas stream |
| 08/23/2011 | US8001808 Disassemblable burner for a vapor deposition process |
| 08/18/2011 | WO2011100527A1 Method for texturing ceramic components |
| 08/18/2011 | WO2011100200A2 Anti-arc zero field plate |
| 08/18/2011 | WO2011099858A1 Method and apparatus for depositing atomic layers on a substrate |
| 08/18/2011 | WO2011099676A1 Thin-film deposition apparatus |
| 08/18/2011 | WO2011099467A1 Material for forming ruthenium film and method for forming ruthenium film |
| 08/18/2011 | WO2011099227A1 Flexible substrate position control device |
| 08/18/2011 | WO2011099205A1 Film formation device |
| 08/18/2011 | WO2011098665A1 Process for coating cobalt nonoparticles with copper and copper oxide |
| 08/18/2011 | WO2011098420A1 Gas inlet member with baffle plate arrangement |
| 08/18/2011 | WO2011097745A1 Method for manufacturing a solar panel |
| 08/18/2011 | WO2011072932A9 Hot-trap assembly |
| 08/18/2011 | US20110201145 Process for producing photovoltaic device and deposition apparatus |
| 08/18/2011 | US20110200822 Atomic layer deposition powder coating |
| 08/18/2011 | US20110200820 Polyfluoroether based polymers |
| 08/18/2011 | US20110200763 Process and installation for depositing films simultaneously onto both sides of a substrate |
| 08/18/2011 | US20110200749 Film deposition apparatus and method |
| 08/18/2011 | US20110200748 Method for producing parts made of a thermostructural composite material |
| 08/18/2011 | US20110200741 Organic thin film deposition device, organic el element manufacturing device, and organic thin film deposition method |
| 08/18/2011 | US20110200739 Method for Testing the Quality of a Metallic Coating |
| 08/18/2011 | US20110200481 WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS |
| 08/18/2011 | US20110198736 Reactive site deactivation against vapor deposition |
| 08/18/2011 | US20110198034 Gas distribution showerhead with coating material for semiconductor processing |
| 08/18/2011 | US20110197816 Method for vaporizing liquid material capable of vaporizing liquid material at low temperature and vaporizer using the same |
| 08/18/2011 | US20110197815 Method of manufacturing semiconductor device, film deposition method, and film deposition apparatus |
| 08/18/2011 | US20110197813 Film forming apparatus |
| 08/18/2011 | US20110197659 Method for determining an overall leakage rate of a vacuum system and vacuum system |
| 08/18/2011 | DE102010000447A1 Beschichtungsvorrichtung sowie Verfahren zum Betrieb einer Beschichtungsvorrichtung mit einer Schirmplatte Coating apparatus and method for operating a coating device comprising a faceplate |
| 08/18/2011 | DE102005059706B4 Verfahren zum Herstellen einer Trennschicht sowie Substratoberfläche mit Trennschicht A method for producing a separating layer and the substrate surface with separating layer |
| 08/18/2011 | DE102005035247B4 Fluidverteiler mit binärer Struktur Fluid distribution with binary structure |
| 08/17/2011 | EP2357675A1 Method for manufacturing solar cell, etching device, and cvd device |
| 08/17/2011 | EP2356673A2 System and method for recycling a gas used to deposit a semiconductor layer |
| 08/17/2011 | EP2356672A2 Chemical vapor deposition flow inlet elements and methods |
| 08/17/2011 | EP2356671A2 Chemical vapor deposition with elevated temperature gas injection |
| 08/17/2011 | EP2356065A2 Hydrophobic surface coating systems and methods for metals |
| 08/17/2011 | EP1371751B1 Film forming device |
| 08/17/2011 | CN201933154U 直流电弧等离子体硼掺杂金刚石膜沉积装置 Diamond film deposition apparatus DC arc plasma boron doping |
| 08/17/2011 | CN201933153U 用于金属有机化学气相沉积反应器的气体分布装置及反应器 Gas used in metal organic chemical vapor deposition reactor and reactor distribution unit |
| 08/17/2011 | CN201933152U 一种适用于大型化学气相沉积炉的沉积气路系统 One for large-scale chemical vapor deposition furnace deposition gas system |
| 08/17/2011 | CN201933151U 大型真空化学气相沉积石墨化处理多功能炉 Large vacuum chemical vapor deposition graphitizing furnace multifunction |
| 08/17/2011 | CN1972879B Selective doping of a material |
| 08/17/2011 | CN1956151B Manufacturing method for semiconductor and accessorial device |
| 08/17/2011 | CN1936068B Article having patterned decorative coating |
| 08/17/2011 | CN1702024B Vacuum treating device |
| 08/17/2011 | CN102160183A Semiconductor device |
| 08/17/2011 | CN102160141A Device and method for producing dielectric layers in microwave plasma |
| 08/17/2011 | CN102159750A Diamond electrode and method for manufacturing diamond electrode |
| 08/17/2011 | CN102157617A Preparation method of silicon-based nano-wire solar cell |
| 08/17/2011 | CN102157577A Nanometer silicon/monocrystalline silicon heterojunction radial nanowire solar cell and preparation method thereof |
| 08/17/2011 | CN102157570A Composite passivated anti-reflection film used for crystalline silicon solar battery and preparation method thereof |
| 08/17/2011 | CN102157425A Ring assembly for substrate processing chamber |
| 08/17/2011 | CN102157423A Substrate mounting table and method for manufacturing the same, and substrate processing apparatus |
| 08/17/2011 | CN102154672A Non-metallic film with high heat conduction efficiency and anti-fouling capability and preparation method thereof |
| 08/17/2011 | CN102154631A Gas gate for isolating regions of differing gaseous pressure |
| 08/17/2011 | CN102154630A Method for manufacturing plasma reaction chamber, method for manufacturing and equipment and parts of same and method for treating substrate |