| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/22/2011 | WO2011114989A1 Thin film formation method |
| 09/22/2011 | WO2011114960A1 Film forming method and film forming apparatus |
| 09/22/2011 | WO2011114940A1 Deposition device |
| 09/22/2011 | WO2011114858A1 Semiconductor thin-film manufacturing method, seminconductor thin-film manufacturing apparatus, susceptor, and susceptor holding tool |
| 09/22/2011 | WO2011114840A1 Plasma processing device, plasma processing method, and method for manufacturing a semiconductor element |
| 09/22/2011 | WO2011114793A1 Plasma processing apparatus |
| 09/22/2011 | WO2011114734A1 Thin-film forming device |
| 09/22/2011 | WO2011114581A1 Deposition method |
| 09/22/2011 | WO2011114223A1 A palette system for thin film deposition facilities for collecting and recovering deposited materials |
| 09/22/2011 | WO2011113177A1 Method and apparatus for remote plasma source assisted silicon-containing film deposition |
| 09/22/2011 | WO2011090737A3 Oxygen radical generation for radical-enhanced thin film deposition |
| 09/22/2011 | US20110230057 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus |
| 09/22/2011 | US20110230055 Film forming apparatus and film-forming method |
| 09/22/2011 | US20110230010 System and method for fabricating photovoltaic cells |
| 09/22/2011 | US20110230006 Large Scale MOCVD System for Thin Film Photovoltaic Devices |
| 09/22/2011 | US20110229660 Ion beam assisted deposition of ophthalmic lens coatings |
| 09/22/2011 | US20110229659 Ion beam assisted deposition of ophthalmic lens coatings |
| 09/22/2011 | US20110229658 Graphite electrode |
| 09/22/2011 | US20110229639 Non-polar gallium nitride thin films grown by metalorganic chemical vapor deposition |
| 09/22/2011 | US20110229638 System and method for polycrystalline silicon deposition |
| 09/22/2011 | US20110229637 Substrate processing method and substrate processing apparatus |
| 09/22/2011 | US20110229379 Stable Catalyst Layers for Hydrogen Permeable Composite Membranes |
| 09/22/2011 | US20110228266 substrate for surface enhanced raman scattering (sers) |
| 09/22/2011 | US20110227037 Enhancement of led light extraction with in-situ surface roughening |
| 09/22/2011 | US20110226739 Process chamber liner with apertures for particle containment |
| 09/22/2011 | US20110226728 Device for generating a plasma discharge for patterning the surface of a substrate |
| 09/22/2011 | US20110226421 Plasma processing apparatus |
| 09/22/2011 | US20110226420 Electrode and plasma processing apparatus |
| 09/22/2011 | US20110226418 Method of manufacturing semiconductor device |
| 09/22/2011 | US20110226181 Film forming apparatus |
| 09/22/2011 | US20110226180 Film formation apparatus |
| 09/22/2011 | DE102010003069A1 Kegelförmige Graphitelektrode mit hochgezogenem Rand Cone-shaped graphite electrode with raised edge |
| 09/22/2011 | CA2781663A1 Semiconductor thin-film manufacturing method, semiconductor thin-film manufacturing apparatus, susceptor, and susceptor holder |
| 09/21/2011 | EP2366039A2 Improved substrate temperature control by using liquid controlled multizone substrate support |
| 09/21/2011 | EP1485515B1 Evaluation of chamber components having textured coatings |
| 09/21/2011 | CN102197713A Plasma processing device |
| 09/21/2011 | CN102197460A Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor |
| 09/21/2011 | CN102197162A A coated tool and a method of making thereof |
| 09/21/2011 | CN102197159A Take-up vacuum processing device |
| 09/21/2011 | CN102197158A Plasma CVD apparatus, method for producing semiconductor film, method for manufacturing thin film solar cell, and method for cleaning plasma CVD apparatus |
| 09/21/2011 | CN102197157A Apparatus and method for atomic layer deposition |
| 09/21/2011 | CN102197156A Improved substrate temperature control by using liquid controlled multizone substrate support |
| 09/21/2011 | CN102194669A Method of manufacturing silicon carbide semiconductor device |
| 09/21/2011 | CN102191502A Gas shower structure and substrate processing apparatus |
| 09/21/2011 | CN102191488A Film formation apparatus |
| 09/21/2011 | CN102191487A Suede-structured ZnO film with flexible substrate by gradient temperature growth technology and its application |
| 09/21/2011 | CN102191486A Laser processing device |
| 09/21/2011 | CN102191485A Manufacturing method for growing graphene through laser heating |
| 09/21/2011 | CN102191484A Reaction gas source injection pipe, furnace tube and semiconductor manufacturing device |
| 09/21/2011 | CN102191483A Transient enhanced atomic layer deposition |
| 09/21/2011 | CN102191482A Gas distributing means and substrate processing apparatus including the same |
| 09/21/2011 | CN102191481A Medical magnesium alloy with surface carrying Hf-Si-N gradient coating and preparation method thereof |
| 09/21/2011 | CN102191480A Vacuum processing apparatus and vacuum processing method |
| 09/21/2011 | CN102191479A Methods to prepare silicon-containing films |
| 09/21/2011 | CN102191478A Gas barrier film, film deposition method, and film deposition device |
| 09/21/2011 | CN102191477A Gas barrier film, film deposition method and film deposition device |
| 09/21/2011 | CN102191476A Method for preparing sulfur-doped graphene films |
| 09/21/2011 | CN102191474A Vertical heat treatment apparatus and assembly of pressure detection system and temperature sensor |
| 09/21/2011 | CN102191473A Vertical heat treatment apparatus and method for cooling the apparatus |
| 09/21/2011 | CN102189279A Diamond-coated cutting tool |
| 09/21/2011 | CN101847578B Method for growing semi-polar GaN based on Al2O3 substrate with m sides |
| 09/21/2011 | CN101765902B Apparatus for generating dielectric barrier discharge gas |
| 09/21/2011 | CN101671817B Plasma enhanced chemical vapor deposition treatment method |
| 09/21/2011 | CN101660144B Plasma torch for chemical vapor deposition |
| 09/21/2011 | CN101236892B Ion beam apparatus having plasma sheath controller |
| 09/21/2011 | CN101190779B Magnetic field auxiliary chemical vapor deposition method |
| 09/21/2011 | CN101135033B Conductive, plasma-resistant member |
| 09/20/2011 | US8023609 Dielectric coating for surfaces exposed to high temperature water |
| 09/20/2011 | US8023247 Electrostatic chuck with compliant coat |
| 09/20/2011 | US8022012 Device and method for fabricating thin films by reactive evaporation |
| 09/20/2011 | US8021757 Tool for machining |
| 09/20/2011 | US8021723 Method of plasma treatment using amplitude-modulated RF power |
| 09/20/2011 | US8021718 Heat treatment method |
| 09/20/2011 | US8021717 Film formation method, cleaning method and film formation apparatus |
| 09/20/2011 | US8021515 Inductively coupled plasma processing apparatus |
| 09/20/2011 | US8021488 Sealing structure of vacuum device |
| 09/20/2011 | US8021487 Wafer carrier with hub |
| 09/20/2011 | US8021485 Positioning apparatus |
| 09/20/2011 | US8021474 Oxidation inhibition of carbon-carbon composites |
| 09/20/2011 | US8020514 Batch-type remote plasma processing apparatus |
| 09/20/2011 | US8020513 Cooled device for plasma depositing a barrier layer onto a container |
| 09/20/2011 | US8020511 Film coating holder |
| 09/15/2011 | WO2011112617A2 Atomic layer deposition chamber with multi inject |
| 09/15/2011 | WO2011112565A1 Compositions and processes for deposition of metal ions onto surfaces of conductive substrates |
| 09/15/2011 | WO2011112413A1 Delivery assemblies and related methods |
| 09/15/2011 | WO2011112335A2 Coated pcbn cutting insert, coated pcbn cutting tool using such coated pcbn cutting insert, and method for making the same |
| 09/15/2011 | WO2011112334A2 Coated ceramic cutting insert and method of making the same |
| 09/15/2011 | WO2011111659A1 Heating apparatus and annealing apparatus |
| 09/15/2011 | WO2011111647A1 Method for producing nitride compound semiconductor substrate, nitride compound semiconductor substrate and self-supporting nitride compound semiconductor substrate |
| 09/15/2011 | WO2011111586A1 Laminate and process for production thereof |
| 09/15/2011 | WO2011111498A1 Method for producing semiconductor device and substrate treatment device |
| 09/15/2011 | WO2011111403A1 Exhaust-gas treatment system |
| 09/15/2011 | WO2011110411A2 Method for coating at least the inner face of a piston ring and piston ring |
| 09/15/2011 | WO2011110162A1 Method and device for plasma-treating workpieces |
| 09/15/2011 | US20110224632 Radio opaque, reduced-pressure manifolds, systems, and methods |
| 09/15/2011 | US20110224368 Method for producing sprayable mixture containing protected crosslinkable groups |
| 09/15/2011 | US20110223766 Method and apparatus for manufacturing semiconductor device |
| 09/15/2011 | US20110223755 Method for removing oxides |
| 09/15/2011 | US20110223750 Method for manufacturing semiconductor device and semiconductor manufacturing apparatus |
| 09/15/2011 | US20110223444 Crystalline surface structures and methods for their fabrication |