| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/04/2011 | US8029873 Film deposition method and film deposition apparatus of metal film |
| 10/04/2011 | US8029864 Heat treatable coated article with diamond-like carbon (DLC) and/or zirconium in coating |
| 10/04/2011 | US8029863 Method for fabricating a microfluidic component comprising at least one microchannel filled with nanostructures |
| 10/04/2011 | US8029859 Method of depositing Ge-Sb-Te thin film |
| 10/04/2011 | US8029858 First species monolayer is chemisorbed onto a substrate within a chamber from a gaseous first precursor, exposing the substrate having the discontinuous first species monolayer to a gaseous second precursor, exposing the substrate having the second species monolayer and the reaction product to gas |
| 10/04/2011 | US8029621 Raw material feeding device, film formation system and method for feeding gaseous raw material |
| 10/04/2011 | US8028655 Plasma processing system with locally-efficient inductive plasma coupling |
| 10/04/2011 | US8028654 Planar controlled zone microwave plasma system |
| 10/04/2011 | US8028653 System, method and apparatus for filament and support used in plasma-enhanced chemical vapor deposition for reducing carbon voids on media disks in disk drives |
| 10/04/2011 | US8028652 Batch-type remote plasma processing apparatus |
| 09/29/2011 | WO2011119175A1 Germanium antimony telluride materials and devices incorporating same |
| 09/29/2011 | WO2011119041A1 Proton, or mixed proton and electronic conducting thin films |
| 09/29/2011 | WO2011118742A1 Surface treatment apparatus |
| 09/29/2011 | WO2011118408A1 Plasma treatment device |
| 09/29/2011 | WO2011117234A2 Method for the supply of fluorine |
| 09/29/2011 | WO2011117064A1 Process and apparatus for deposition of multicomponent semiconductor layers |
| 09/29/2011 | WO2011116990A1 Electrode arrangement |
| 09/29/2011 | WO2011116510A1 Method for depositing thin film |
| 09/29/2011 | WO2011080659A4 Inline coating installation |
| 09/29/2011 | WO2011001394A3 Method of removing residual fluorine from deposition chamber |
| 09/29/2011 | WO2010114386A8 Thin films containing molybdenum oxide |
| 09/29/2011 | US20110237085 Methods of modifying interlayer adhesion |
| 09/29/2011 | US20110237076 Film-forming method and film-forming apparatus |
| 09/29/2011 | US20110237023 Method of fabricating solar cell using microwave and apparatus for the same |
| 09/29/2011 | US20110236654 Method of surface treatment and surface treated article provied by the same |
| 09/29/2011 | US20110236599 Plasma processing including asymmetrically grounding a susceptor |
| 09/29/2011 | US20110236598 Film deposition apparatus, film deposition method, and computer readable storage medium |
| 09/29/2011 | US20110236594 In-Situ Deposition of Film Stacks |
| 09/29/2011 | US20110236576 Housing and surface treating method for making the same |
| 09/29/2011 | US20110236575 Semi-Continuous Vapor Deposition Process for the Manufacture of Coated Particles |
| 09/29/2011 | US20110233170 Plasma processing apparatus and plasma processing method |
| 09/29/2011 | US20110232846 Magnetic field generator for magnetron plasma |
| 09/29/2011 | US20110232573 Catalytic Chemical Vapor Deposition Apparatus |
| 09/29/2011 | US20110232572 Plasma film-coating apparatus |
| 09/29/2011 | US20110232571 Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device |
| 09/29/2011 | US20110232570 System and method for depositing a material on a substrate |
| 09/29/2011 | US20110232569 Segmented substrate loading for multiple substrate processing |
| 09/29/2011 | US20110232568 Hybrid gas injector |
| 09/29/2011 | US20110232567 Method of cleaning the filament and reactor's interior in facvd |
| 09/29/2011 | DE19956472B4 Flüssigkeits-Abgabesystem und Verfahren zur Dampfabscheidung Liquid dispensing system and method for vapor deposition |
| 09/29/2011 | DE112008004012T5 Verfahren zur Erzeugung eines Metalloxidfilmes und Anlage zur Erzeugung eines Metalloxidfilmes A method for producing a metal oxide film and installation for the production of a metal oxide film |
| 09/29/2011 | DE102010013043A1 Elektrodenanordnung Electrode assembly |
| 09/28/2011 | EP2369039A1 Film formation apparatus |
| 09/28/2011 | EP2369038A2 A system for depositing a coating on a surface of an article and a tyre coated mould. |
| 09/28/2011 | EP2368860A1 Method and device for substrate processing |
| 09/28/2011 | EP2368846A1 Method for producing crack-free polycrystalline silicon rods |
| 09/28/2011 | EP2368824A1 Flexible substrate processing device |
| 09/28/2011 | EP2368263A2 Electrostatic chuck |
| 09/28/2011 | EP2367964A1 Reaction chamber of an epitaxial reactor |
| 09/28/2011 | EP2247769B1 Solid precursor sublimator |
| 09/28/2011 | EP2118332B1 Method for the production of a coating |
| 09/28/2011 | EP1794346B1 Apparatus and method for depositing a material on a substrate |
| 09/28/2011 | EP1789604B1 Adhesion layer for thin film transistors |
| 09/28/2011 | EP1443130B1 Natural superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
| 09/28/2011 | EP1409763B1 Method and device for depositing thin films |
| 09/28/2011 | EP1292970B1 Thin film forming method |
| 09/28/2011 | CN201994322U 太阳能电池沉积用放电电极板阵列 Solar panel array discharge electrode deposition |
| 09/28/2011 | CN201990728U 低压化学气相沉积反应设备 Low pressure chemical vapor deposition reactor equipment |
| 09/28/2011 | CN201990727U 用于硅片镀膜的承载装置 Carrying device for wafer coating |
| 09/28/2011 | CN201990726U 一种用于防止pecvd镀膜边缘发红的装置 A method for preventing red edge coating apparatus pecvd |
| 09/28/2011 | CN201990725U Pecvd设备用气源柜及pecvd设备 Pecvd equipment cabinets and pecvd gas source equipment |
| 09/28/2011 | CN201990724U 用于化学气相沉积设备的射频电源连接机构 RF power supply connecting means for the chemical vapor deposition apparatus |
| 09/28/2011 | CN1769518B Endpoint detector and particle monitor |
| 09/28/2011 | CN102203909A Plasma processing apparatus |
| 09/28/2011 | CN102203317A Electrode circuit, film formation device, electrode unit, and film formation method |
| 09/28/2011 | CN102203316A Gas delivery device |
| 09/28/2011 | CN102201550A Unit mask, mask assembly and method for manufacturing display device |
| 09/28/2011 | CN102199762A Method for increasing hardness and abrasion resistance of surface of iron and steel material |
| 09/28/2011 | CN102199761A Thin film deposition apparatus |
| 09/28/2011 | CN102199760A Preparation method for double-layer silicon nitride anti-reflection film |
| 09/28/2011 | CN102199757A Sample rotary supporting apparatus used for vapor deposition equipment |
| 09/28/2011 | CN102198523A Diamond coating and cutting element |
| 09/28/2011 | CN101956162B Heating platform |
| 09/28/2011 | CN101921993B Polymer film nano doping device and method |
| 09/28/2011 | CN101565829B Method for forming noble metal layer using ozone reaction gas |
| 09/28/2011 | CN101522941B Method and device for plasma-assisted chemical vapour deposition on the inner wall of a hollow body |
| 09/28/2011 | CN101423937B Multi-gas concentric injection showerhead |
| 09/28/2011 | CN101321893B Gas head and thin-film manufacturing device |
| 09/27/2011 | US8027746 Atomic layer deposition apparatus |
| 09/27/2011 | US8027554 Thermo-optic phase shifter and method for manufacturing same |
| 09/27/2011 | US8026159 Method of manufacturing semiconductor device and substrate processing apparatus |
| 09/27/2011 | US8025931 Film formation apparatus for semiconductor process and method for using the same |
| 09/27/2011 | US8025925 Heating apparatus, coating and development apparatus, and heating method |
| 09/27/2011 | US8025922 Enhanced deposition of noble metals |
| 09/27/2011 | US8025917 Liquid material drawing method, color filter manufacturing method, and organic EL element manufacturing method |
| 09/27/2011 | US8025735 Multiple vacuum evaporation coating device and method for controlling the same |
| 09/27/2011 | US8025734 Method for controlling the volume of a molecular beam |
| 09/27/2011 | US8025733 Heating crucible and deposition apparatus using the same |
| 09/27/2011 | US8025731 Gas injection system for plasma processing |
| 09/27/2011 | US8025730 Apparatus and method for coating internal surfaces of a turbine engine component |
| 09/22/2011 | WO2011116273A2 System and method for polycrystalline silicon deposition |
| 09/22/2011 | WO2011116013A1 Wafer carrier track |
| 09/22/2011 | WO2011116009A2 Vapor deposition reactor system |
| 09/22/2011 | WO2011115889A2 Bromine-sensitized solar photolysis of carbon dioxide |
| 09/22/2011 | WO2011115878A1 Methods for preparing thin fillms by atomic layer deposition using hydrazines |
| 09/22/2011 | WO2011115834A1 Process chamber liner with apertures for particle containment |
| 09/22/2011 | WO2011115250A1 Film forming device, film forming method, rotational frequency optimisation method, and storage medium |
| 09/22/2011 | WO2011115197A1 Manufacturing method for transparent conductive carbon film, and transparent conductive carbon film |
| 09/22/2011 | WO2011115188A1 Variable resistance element, semiconductor device including same, and method for manufacturing the element and the device |
| 09/22/2011 | WO2011114999A1 Method for producing gan semiconductor |