| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/12/2012 | US20120009764 Method of manufacturing a semiconductor device and substrate processing apparatus |
| 01/12/2012 | US20120009697 Chemical vapor deposition apparatus and method of forming semiconductor epitaxial thin film using the same |
| 01/12/2012 | US20120009368 Gas barrier film, electronic device including the same, gas barrier bag, and method for producing gas barrier film |
| 01/12/2012 | US20120009356 Contamination reducing liner for inductively coupled chamber |
| 01/12/2012 | US20120009355 Method and apparatus for stabilizing a coating |
| 01/12/2012 | US20120009347 Precise temperature control for teos application by heat transfer fluid |
| 01/12/2012 | US20120009344 Process and apparatus for producing composite material |
| 01/12/2012 | US20120009343 Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport |
| 01/12/2012 | US20120009340 Method for producing deformable corrosion protection layers on metal surfaces |
| 01/12/2012 | US20120009329 Control function and display for controlling spray gun |
| 01/12/2012 | US20120009328 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
| 01/12/2012 | US20120009231 Apparatus and method for deposition of functional coatings |
| 01/12/2012 | US20120006785 Wear Resistant Vapor Deposited Coating, Method of Coating Deposition and Applications Therefor |
| 01/12/2012 | US20120006489 Plasma processing apparatus and plasma processing method |
| 01/12/2012 | US20120006488 Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member |
| 01/12/2012 | US20120006268 Substrate processing apparatus and method for manufacturing a semiconductor device |
| 01/12/2012 | US20120006267 Apparatus for processing coating material and evaporation deposition device having same |
| 01/12/2012 | US20120006266 Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same |
| 01/12/2012 | US20120006265 Atomic layer deposition apparatus |
| 01/12/2012 | US20120006263 Film deposition apparatus |
| 01/12/2012 | DE102005035904B4 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates |
| 01/12/2012 | DE102005035247B9 Fluidverteiler mit binärer Struktur Fluid distribution with binary structure |
| 01/11/2012 | EP2405030A2 Selectively deposited thin film devices and methods for forming selectively deposited thin films |
| 01/11/2012 | EP2403976A1 Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport |
| 01/11/2012 | EP2403975A1 Gas injectors for cvd systems with the same |
| 01/11/2012 | EP2403974A1 Self-supporting cvd diamond film and method for producing a self-supporting cvd diamond film |
| 01/11/2012 | EP1269258B1 Organic polymeric antireflective coatings deposited by chemical vapor deposition |
| 01/11/2012 | CN202107764U Fast substrate temperature raising and reducing device in film photovoltaic cell scale manufacture |
| 01/11/2012 | CN202107763U Purging device and plasma enhancing chemical vapor deposition equipment provided with same |
| 01/11/2012 | CN202107762U Tube type PECVD (plasma enhanced chemical vapor deposition) charging wagon |
| 01/11/2012 | CN1906127B Apparatus for manufacturing carbon film by plasma CVD, method for manufacturing the same, and carbon film |
| 01/11/2012 | CN1788112B High purity electrolytic sulfonic acid solutions |
| 01/11/2012 | CN1754008B Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition |
| 01/11/2012 | CN1610765B Improved method for coating a support with a material |
| 01/11/2012 | CN1550568B 制造装置和发光装置 Devices and light-emitting device manufacturing |
| 01/11/2012 | CN102318049A Epitaxial substrate for electronic devices and manufacturing method therefor |
| 01/11/2012 | CN102318039A Method for manufacturing gallium nitride compound semiconductor, and semiconductor light emitting element |
| 01/11/2012 | CN102317502A Gas deposition reactor |
| 01/11/2012 | CN102317501A Heat treatment apparatus, and method for controlling the same |
| 01/11/2012 | CN102317500A A chemical vapour deposition system and process |
| 01/11/2012 | CN102317499A Method for forming cu film and storage medium |
| 01/11/2012 | CN102317496A Process for producing multilayered gas-barrier film |
| 01/11/2012 | CN102315336A Process for depositing photovoltaic absorbing layer during production of amorphous silicon solar cell |
| 01/11/2012 | CN102315327A Method for producing novel single crystal silicon solar cell |
| 01/11/2012 | CN102315283A Antireflective film for solar panel and preparation method thereof |
| 01/11/2012 | CN102315150A Movable ground ring for a plasma processing chamber |
| 01/11/2012 | CN102314078A Photoetching method |
| 01/11/2012 | CN102312226A Method of improving hydrophobic stability of nanometer array film |
| 01/11/2012 | CN102312225A Method for depositing silicon oxide on silicon nitride surface |
| 01/11/2012 | CN102312224A Beam-induced deposition at cryogenic temperatures |
| 01/11/2012 | CN102312223A Coating corrector plate and coating device comprising same |
| 01/11/2012 | CN102312222A Gas transmission device |
| 01/11/2012 | CN102312221A Atomic layer deposition apparatus employing uniform air intake system |
| 01/11/2012 | CN102312220A Method for manufacturing semiconductor device |
| 01/11/2012 | CN102312219A Coating device |
| 01/11/2012 | CN102312218A Canister for deposition apparatus and deposition apparatus using same |
| 01/11/2012 | CN102312217A Method for growing semiconductor film by using composite model, and apparatus thereof |
| 01/11/2012 | CN102312216A Method for forming titanium nitride film on roller surface |
| 01/11/2012 | CN102312215A Production method of diamond film coating of microbit |
| 01/11/2012 | CN102312214A Atomic layer deposition using metal amidinates |
| 01/11/2012 | CN102312213A Method of manufacturing a semiconductor device and substrate processing apparatus |
| 01/11/2012 | CN102312212A Scanning coating device and scan coating assembly |
| 01/11/2012 | CN102312197A Copper, indium, gallium and selenide (CIGS) solar battery processing equipment and method |
| 01/11/2012 | CN101868848B Method for fabricating p-type gallium nitride-based semiconductor, method for fabricating nitride-based semiconductor element, and method for fabricating epitaxial wafer |
| 01/11/2012 | CN101775041B 2-acyl 1,3-indane dione silver compound with stable organic phosphine, preparation method and application thereof |
| 01/11/2012 | CN101748382B Method of growing GaN-based luminescent crystalline membrane for molecular beam epitaxy |
| 01/11/2012 | CN101463472B Deposition apparatus and deposition method |
| 01/11/2012 | CN101440477B Precursor compositions and methods |
| 01/11/2012 | CN101330032B Plasma processing apparatus and transition chamber thereof |
| 01/11/2012 | CN101205605B Apparatus for hot reinforcement and plasma reinforced vapor deposition |
| 01/10/2012 | US8093490 Method for forming thin film, substrate having transparent electroconductive film and photoelectric conversion device using the substrate |
| 01/10/2012 | US8093144 Patterning of nanostructures |
| 01/10/2012 | US8093142 Plasma processing apparatus and plasma processing method |
| 01/10/2012 | US8092931 Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk |
| 01/10/2012 | US8092892 Method for producing a plastic membrane device and the thus obtained device |
| 01/10/2012 | US8092870 Preparation of metal oxide thin film via cyclic CVD or ALD |
| 01/10/2012 | US8092862 Method for forming dielectric film and method for forming capacitor in semiconductor device using the same |
| 01/10/2012 | US8092861 Method of fabricating an ultra dielectric constant (K) dielectric layer |
| 01/10/2012 | US8092721 Deposition of ternary oxide films containing ruthenium and alkali earth metals |
| 01/10/2012 | US8092642 Plasma processing apparatus |
| 01/10/2012 | US8092640 Plasma processing apparatus and semiconductor device manufactured by the same apparatus |
| 01/10/2012 | US8092639 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes |
| 01/10/2012 | US8092607 Transporting means and vacuum coating installation for substrates of different sizes |
| 01/10/2012 | US8092606 Deposition apparatus |
| 01/10/2012 | US8092605 Magnetic confinement of a plasma |
| 01/10/2012 | US8092604 Solid organometallic compound-filled container and filling method thereof |
| 01/10/2012 | US8092603 Substrate processing apparatus |
| 01/10/2012 | US8092602 Thermally zoned substrate holder assembly |
| 01/10/2012 | US8092601 System and process for fabricating photovoltaic cell |
| 01/10/2012 | US8092600 Plasma apparatus and plasma processing method |
| 01/10/2012 | US8092599 Movable injectors in rotating disc gas reactors |
| 01/10/2012 | US8092598 Apparatus and method for thin film deposition |
| 01/10/2012 | US8091506 High velocity method for depositing diamond films from a gaseous phase in SHF discharge plasma and a plasma reactor for carrying out said method |
| 01/10/2012 | US8091505 Active material contaaining metal with oxygen, nitrogen, carbon and current collector; testing by irradiating with x-rays; measuring angle of reflected light |
| 01/10/2012 | CA2654732C Methods for preparation of high-purity polysilicon rods using a metallic core means |
| 01/10/2012 | CA2630792C Diamond electrode, method for producing same, and electrolytic cell |
| 01/05/2012 | WO2012002666A2 Graphene manufacturing apparatus and method |
| 01/05/2012 | WO2012002282A1 Film forming method and processing system |
| 01/05/2012 | WO2012002159A1 Substrate treatment device, and method for cleaning of substrate treatment device |
| 01/05/2012 | WO2012002155A1 Laser lift-off method and laser lift-off apparatus |