| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/11/2012 | CN102409318A 热化学气相沉积反应器以及提高反应器中热辐射率的方法 The method of thermal chemical vapor deposition reactor and increase reactor thermal emissivity |
| 04/11/2012 | CN102409317A 具有可拆卸式进出气结构的成膜装置 Removable film forming apparatus having the structure out of gas |
| 04/11/2012 | CN102409315A 输送机构及具有该输送机构的镀膜设备 Coating equipment transport mechanism and has the transport mechanism |
| 04/11/2012 | CN102407352A 硬质包覆层具备优异韧性、耐崩刀性的表面包覆切削工具 The hard coating layer has excellent toughness and resistance to chipping of the surface-coated cutting tool |
| 04/11/2012 | CN101685791B 基片支承装置及其静电释放方法 Substrate support apparatus and method for electrostatic discharge |
| 04/11/2012 | CN101684550B 设计为用于气相沉积系统中的阱 Designed for a vapor deposition system well |
| 04/11/2012 | CN101476114B 等离子体设备腔室维护前预处理的方法 The method of plasma equipment before maintenance pretreatment chamber |
| 04/11/2012 | CN101298665B 用于平面显示器的化学气相沉积装置 Chemical vapor deposition apparatus for flat panel displays |
| 04/11/2012 | CN101268212B 原料供给装置以及成膜装置 Raw material supply device and the film-forming apparatus |
| 04/11/2012 | CN101128083B 等离子体生成装置、等离子体控制方法和基板制造方法 The plasma generating apparatus, the plasma control method and substrate manufacturing method |
| 04/10/2012 | US8153833 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride |
| 04/10/2012 | US8153831 Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| 04/10/2012 | US8153281 Metalorganic chemical vapor deposition (MOCVD) process and apparatus to produce multi-layer high-temperature superconducting (HTS) coated tape |
| 04/10/2012 | US8153280 Composition comprising silicon carbide |
| 04/10/2012 | US8152971 Cutting tool |
| 04/10/2012 | US8152927 CVD coating device |
| 04/10/2012 | US8152926 Vacuum processing apparatus |
| 04/10/2012 | US8152925 Baffle plate and substrate processing apparatus |
| 04/10/2012 | US8152924 CVD reactor comprising a gas inlet member |
| 04/10/2012 | US8152923 Gas treatment systems |
| 04/10/2012 | US8152922 Gas mixer and manifold assembly for ALD reactor |
| 04/10/2012 | US8151814 Method for controlling flow and concentration of liquid precursor |
| 04/10/2012 | US8151729 Mask assembly and method of fabricating the same |
| 04/05/2012 | WO2012044658A1 System for and method of fast pulse gas delivery |
| 04/05/2012 | WO2012044580A1 Heater with liquid heating element |
| 04/05/2012 | WO2012044284A1 Directionally recrystallized graphene growth substrates |
| 04/05/2012 | WO2012044251A1 Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system |
| 04/05/2012 | WO2012043474A1 POLYCRYSTALLINE ALUMINUM NITRIDE SUBSTRATE FOR GROWING GaN-BASED SEMICONDUCTOR CRYSTAL, AND GaN-BASED-SEMICONDUCTOR MANUFACTURING METHOD USING SAME |
| 04/05/2012 | WO2012043441A1 Ceramic member |
| 04/05/2012 | WO2012043250A1 Method and device for forming insulation film |
| 04/05/2012 | WO2012043154A1 METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM |
| 04/05/2012 | WO2012042772A1 Thin film manufacturing method and thin film manufacturing apparatus |
| 04/05/2012 | WO2012042035A1 Thermalizing gas injectors, material deposition systems, and related methods |
| 04/05/2012 | WO2012008789A9 Method for producing graphene at a low temperature, method for direct transfer of graphene using same, and graphene sheet |
| 04/05/2012 | WO2011156749A3 Graphene deposition |
| 04/05/2012 | WO2011146913A3 Germanium antimony telluride materials and devices incorporating same |
| 04/05/2012 | WO2011133562A3 Methods and apparatus for an induction coil arrangement in a plasma processing system |
| 04/05/2012 | WO2011127207A3 Simple method for producing superhydrophobic carbon nanotube array |
| 04/05/2012 | US20120083105 Method for boron doping silicon wafers |
| 04/05/2012 | US20120083101 Systems and methods for forming semiconductor materials by atomic layer deposition |
| 04/05/2012 | US20120083100 Thermalizing gas injectors for generating increased precursor gas, material deposition systems including such injectors, and related methods |
| 04/05/2012 | US20120083060 Integration of cluster mocvd and hvpe reactors with other process chambers |
| 04/05/2012 | US20120082802 Power loading substrates to reduce particle contamination |
| 04/05/2012 | US20120082787 Method for producing graphene film, method for manufacturing electronic element, and method for transferring graphene film to substrate |
| 04/05/2012 | US20120082778 Vacuum deposition system and vacuum deposition method |
| 04/05/2012 | US20120080407 Multi-Source Plasma Focused Ion Beam System |
| 04/05/2012 | US20120079985 Method for processing substrate and substrate processing apparatus |
| 04/05/2012 | US20120079984 Gas mixer and manifold assembly for ald reactor |
| 04/05/2012 | DE102010030608B4 Vorrichtung zur plasmagestützten Bearbeitung von Substraten Apparatus for plasma-assisted processing of substrates |
| 04/05/2012 | DE102010017354A9 Verfahren zum Herstellen eines warmgeformten und gehärteten, mit einer metallischen Korrosionsschutzbeschichtung überzogenen Stahlbauteils aus einem Stahlflachprodukt A method for producing a thermoformed and cured, coated with a metallic anti-corrosion coating the steel member from a steel flat product |
| 04/05/2012 | CA2812616A1 Method of producing white colour monocrystalline diamonds |
| 04/04/2012 | EP2436802A1 Structure of substrate supporting table, and plasma processing apparatus |
| 04/04/2012 | EP2436801A1 Systems and methods for forming semiconductor materials by atomic layer deposition |
| 04/04/2012 | EP2436800A1 High-throughput deposition system for oxide thin film growth by reactive coevaporation |
| 04/04/2012 | EP2436798A1 Masking material, masking device, method for masking a substrate and method for coating a substrate |
| 04/04/2012 | EP2435598A1 Method for forming an organic material layer on a substrate |
| 04/04/2012 | EP2435597A1 Arrangement for processing substrate and substrate carrier |
| 04/04/2012 | EP2106461B1 Container having improved ease of discharge product residue, and method for the production thereof |
| 04/04/2012 | EP1401013B1 Plasma processing device |
| 04/04/2012 | CN202181352U 连续沉积系统 Continuous deposition system |
| 04/04/2012 | CN202181351U Air filtering rotary shaft |
| 04/04/2012 | CN202181350U 一种热丝化学气相沉积设备 A thermal filament chemical vapor deposition equipment |
| 04/04/2012 | CN102405518A Method for forming ge-sb-te film, and storage medium |
| 04/04/2012 | CN102405305A Method for forming metal oxide film, metal oxide film, and apparatus for forming metal oxide film |
| 04/04/2012 | CN102405304A Ni膜的成膜方法 Ni film forming method |
| 04/04/2012 | CN102400113A 远程脉冲射频电感耦合放电等离子体增强原子层沉积装置 Remote pulsed RF inductively coupled discharge plasma enhanced atomic layer deposition apparatus |
| 04/04/2012 | CN102400112A 一种控制工艺腔体内温度的系统 A process chamber temperature control system |
| 04/04/2012 | CN102400111A 一种lpcvd工艺腔加热系统 One kind lpcvd process chamber heating system |
| 04/04/2012 | CN102400110A Diversion dustproof gas control tray for vapor deposition and clean production method in vapor deposition furnace |
| 04/04/2012 | CN102400109A 一种用聚苯乙烯固态碳源低温化学气相沉积生长大面积层数可控石墨烯的方法 A controlled growth of large-area graphene layers deposited by low-temperature chemical vapor polystyrene solid-state carbon |
| 04/04/2012 | CN102398051A 硬质包覆层发挥优异的耐崩刀性的表面包覆切削工具 The hard coating layer exhibits excellent chipping resistance of the surface-coated cutting tool |
| 04/04/2012 | CN102398049A 耐崩刀的表面包覆切削工具 Resistance to chipping of the surface coating of the cutting tool |
| 04/04/2012 | CN101807585B Tft-lcd阵列基板及其制造方法 Tft-lcd array substrate and a method of manufacturing |
| 04/04/2012 | CN101647104B 成膜装置和成膜方法 Film forming apparatus and film forming method |
| 04/04/2012 | CN101622376B 使用超临界溶剂在半导体基片上形成金属膜的组合物和方法 Using supercritical solvent compositions and methods for forming a metal film on a semiconductor substrate |
| 04/04/2012 | CN101597754B 形成高质量的低温氮化硅膜的方法和设备 Methods and apparatus for forming a high quality low temperature silicon nitride film |
| 04/04/2012 | CN100999811B 掩模、成膜方法、发光装置以及电子设备 Mask film forming method, a light emitting device and an electronic device |
| 04/03/2012 | US8148012 Active material containing metal with oxygen, nitrogen, carbon and current collector ; irradiating with x-rays |
| 04/03/2012 | US8147992 AL2O3 ceramic tools with diffusion bonding enhanced layer |
| 04/03/2012 | US8147969 Substrate with a stack having thermal properties |
| 04/03/2012 | US8147953 Laminate and process for producing the same |
| 04/03/2012 | US8147927 Methods of making multilayered structures |
| 04/03/2012 | US8147909 Method of making and using alloy susceptor with improved properties for film deposition |
| 04/03/2012 | US8147786 Gas exhaust system of film-forming apparatus, film-forming apparatus, and method for processing exhaust gas |
| 04/03/2012 | US8147648 Composite showerhead electrode assembly for a plasma processing apparatus |
| 04/03/2012 | US8147614 Multi-gas flow diffuser |
| 04/03/2012 | CA2577304C Atmospheric pressure chemical vapor deposition |
| 03/29/2012 | WO2012040482A2 Adapter ring for silicon electrode |
| 03/29/2012 | WO2012039885A2 System and method for current-based plasma excursion detection |
| 03/29/2012 | WO2012039867A1 System and method for voltage-based plasma excursion detection |
| 03/29/2012 | WO2012039833A2 Low temperature silicon carbide deposition process |
| 03/29/2012 | WO2012039533A1 Graphene structure, method of forming the graphene structure, and transparent electrode including the graphene structure |
| 03/29/2012 | WO2012039107A1 Thin film production process and thin film production device |
| 03/29/2012 | WO2012038592A1 Thin film photovoltaic module and process for its production |
| 03/29/2012 | WO2012038369A1 Unit for the treatment of an object, in particular the surface of a polymer object |
| 03/29/2012 | WO2012038118A1 Use of diamond-like carbon layers for the application of semiconductor inks free of metal ions |
| 03/29/2012 | WO2012037729A1 METHOD FOR MANUFACTURING P-TYPE ZnO-BASED MATERIAL |
| 03/29/2012 | US20120076946 Amorphous Metal Formulations and Structured Coatings for Corrosion and Wear Resistance |
| 03/29/2012 | US20120076937 Film deposition device and film deposition method |
| 03/29/2012 | US20120076936 Substrate processing apparatus, gas nozzle and method of processing substrate |