| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/07/2012 | US8110075 Coated cutting tool for general turning in heat resistant super alloys (HRSA) |
| 02/07/2012 | US8110068 Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes |
| 02/07/2012 | US8110045 Processing equipment for object to be processed |
| 02/02/2012 | WO2012016248A2 High barrier heat sealable film with linear tear properties |
| 02/02/2012 | WO2012016075A2 Heat sealable film with linear tear properties |
| 02/02/2012 | WO2012015744A1 Rotating reactor assembly for depositing film on substrate |
| 02/02/2012 | WO2012015578A1 Showerhead support structure for improved gas flow |
| 02/02/2012 | WO2012015267A2 Method for preparing graphene, graphene sheet, and device using same |
| 02/02/2012 | WO2012014992A1 Non-volatile semiconductor memory device, production method for same, and charge storage film |
| 02/02/2012 | WO2012014883A1 Epitaxial substrate for semiconductor element, semiconductor element, pn junction diode, and production method for epitaxial substrate for semiconductor element |
| 02/02/2012 | WO2012014775A1 Semiconductor device and method for manufacturing same |
| 02/02/2012 | WO2012014565A1 Plasma cleaning method for parallel plate electrodes |
| 02/02/2012 | WO2012014507A1 Titanium metal wear-resistant member |
| 02/02/2012 | WO2012013869A1 Improved chemical gas deposition reactor |
| 02/02/2012 | WO2012013824A1 Method for synthesizing a material, in particular diamonds, by chemical vapor deposition, as well as device for applying the method |
| 02/02/2012 | WO2012013740A1 Optical article including an antireflecting coating having antifog properties and process for making same |
| 02/02/2012 | WO2012013739A1 Process for preparing articles having anti-fog layer by layer coating and coated articles having enhanced anti-fog and durability properties |
| 02/02/2012 | WO2011149615A3 Hybrid hotwire chemical vapor deposition and plasma enhanced chemical vapor deposition method and apparatus |
| 02/02/2012 | WO2011126519A3 Cnt-tailored composite sea-based structures |
| 02/02/2012 | WO2011103282A3 VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS |
| 02/02/2012 | US20120029819 Microfabricated flexible ground reaction sensor cluster for navigation in gps-denied environments |
| 02/02/2012 | US20120028798 Porous substrates filled with nanomaterials |
| 02/02/2012 | US20120028478 Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide |
| 02/02/2012 | US20120028454 Plasma activated conformal dielectric film deposition |
| 02/02/2012 | US20120028437 Trench-filling method and film-forming system |
| 02/02/2012 | US20120028408 Distributor heater |
| 02/02/2012 | US20120028398 Systems and methods for charging solar cell layers |
| 02/02/2012 | US20120028390 Thin film deposition apparatus and method of manufacturing organic light-emitting display device with the same |
| 02/02/2012 | US20120028075 Thin film manufacturing method and thin-film element |
| 02/02/2012 | US20120028014 Heat sealable film with linear tear properties |
| 02/02/2012 | US20120027955 Reactor and method for production of nanostructures |
| 02/02/2012 | US20120027953 Rotating Reactor Assembly for Depositing Film on Substrate |
| 02/02/2012 | US20120027952 Transport device having a deflectable sealing frame |
| 02/02/2012 | US20120027936 Exhaust for cvd reactor |
| 02/02/2012 | US20120027928 Electronic device |
| 02/02/2012 | US20120027925 Method and device for producing serially connected solar cells |
| 02/02/2012 | US20120027922 TEMPORALLY VARIABLE DEPOSITION RATE OF CdTe IN APPARATUS AND PROCESS FOR CONTINUOUS DEPOSITION |
| 02/02/2012 | US20120027918 Showerhead support structure for improved gas flow |
| 02/02/2012 | US20120027916 Arrangement and method for measurement of the temperature and of the thickness growth of silicon rods in a silicon deposition reactor |
| 02/02/2012 | US20120027681 Low-Aspect Ratio Carbon Nanostructures |
| 02/02/2012 | US20120026574 Thermochromic smart window and method of manufacturing the same |
| 02/02/2012 | US20120025542 Fluid Movement Systems Including a Continuously Variable Transmission |
| 02/02/2012 | US20120025102 Radiation image conversion panel and method for producing same |
| 02/02/2012 | US20120024819 Plasma processing apparatus and plasma processing method |
| 02/02/2012 | US20120024479 Apparatus for controlling the flow of a gas in a process chamber |
| 02/02/2012 | US20120024449 Parasitic plasma prevention in plasma processing chambers |
| 02/02/2012 | US20120024233 Conveyor Assembly with Releasable Drive Coupling |
| 02/02/2012 | US20120024232 Evaporation source for organic material and vapor depositing apparatus including the same |
| 02/02/2012 | US20120024231 Semiconductor growing apparatus |
| 02/02/2012 | US20120024230 Apparatuses and systems for fabricating three dimensional integrated circuits |
| 02/02/2012 | US20120024229 Control of plasma profile using magnetic null arrangement by auxiliary magnets |
| 02/02/2012 | US20120024228 Apparatus for forming thin film |
| 02/02/2012 | US20120024227 Vapor-phase process apparatus, vapor-phase process method, and substrate |
| 02/02/2012 | US20120023684 Dyeing method and dye deposition apparatus |
| 02/02/2012 | DE102011108634A1 Substrat-Bearbeitungs-Vorrichtung Substrate processing apparatus |
| 02/02/2012 | DE10055431B4 Verfahren zum Herstellen von Kondensatoren eines Halbleiterbauelements A process for producing capacitors of a semiconductor device |
| 02/02/2012 | CA2806935A1 Method for synthesising a material, in particular diamond, by chemical vapour deposition, and a device for applying the method |
| 02/01/2012 | EP2412011A1 Chemical vapor deposition method |
| 02/01/2012 | EP2411557A1 Method and apparatus for coating |
| 02/01/2012 | CN202134519U 工序基座以及包括其的成膜装置 Step dock and film forming apparatus including the same |
| 02/01/2012 | CN202131369U 一种pecvd用基板架自动识别装置 One kind pecvd substrate holder automatic-discriminating apparatus |
| 02/01/2012 | CN202131368U 石墨舟自动装卸片设备上料用片盒架 Material with cassette holder piece on the graphite boat automatic handling equipment |
| 02/01/2012 | CN202131367U 多反应室mocvd反应器 Multi-chamber reactor mocvd |
| 02/01/2012 | CN202131363U 电阻镀膜机的门机构 Door mechanism resistance coating machine |
| 02/01/2012 | CN102341902A Placing table structure, film forming apparatus, and raw material recovery method |
| 02/01/2012 | CN102341891A Film forming method and film forming apparatus |
| 02/01/2012 | CN102341760A Fluid control apparatus fluid control apparatus |
| 02/01/2012 | CN102341525A Method for forming cu film and storage medium |
| 02/01/2012 | CN102339872A Multilayer silicon nitride antireflection film of crystalline silicon solar cell and preparation method of multilayer silicon nitride antireflection film |
| 02/01/2012 | CN102339745A Gas supply device, processing apparatus and processing method |
| 02/01/2012 | CN102339731A Method of cleaning a thin film forming apparatus, thin film forming method, and thin film forming apparatus |
| 02/01/2012 | CN102337587A Method of growing SiC single crystal and SiC single crystal grown by same |
| 02/01/2012 | CN102337538A Wearing protection system provided with gradual hardness distribution |
| 02/01/2012 | CN102337524A Preparation method of Bi-based chalcogenide thermoelectric thin film |
| 02/01/2012 | CN102337523A Selective atomic layer deposition film formation method |
| 02/01/2012 | CN102337522A Method for judging etching ending point through pressure variation |
| 02/01/2012 | CN102337521A Rotating substrate support and methods of use |
| 02/01/2012 | CN102337520A Method for plating thin film on inner wall of slender pipeline |
| 02/01/2012 | CN102337519A Device and method for preventing gas return of reaction chamber |
| 02/01/2012 | CN102337518A Support plate recovery control method, system and film deposition device and method |
| 02/01/2012 | CN102337517A Metallorganic chemical vapor deposition reaction chamber used for growth of oxide film |
| 02/01/2012 | CN102337516A Deposition method for buffer layer of cadmium-free copper-indium-gallium-selenium thin film solar cell |
| 02/01/2012 | CN102337515A Preparation method for high-temperature high-differential pressure valve of diamond coating |
| 02/01/2012 | CN102337514A Method for growing strong-adhesiveness diamond thin film on copper substrate through diamond embedding method |
| 02/01/2012 | CN102337513A Preparation method for transparent graphene conductive film |
| 02/01/2012 | CN102337512A Method for preparing silicon film by using tantalum carbide covered tantalum wire as catalyst |
| 02/01/2012 | CN102337511A Shield member, components thereof and substrate mounting table comprising shield member |
| 02/01/2012 | CN102337509A Vacuum moving device and method |
| 02/01/2012 | CN102336588A Hexagonal boron nitride substrate provided with single atomic layer step and preparation method and application thereof |
| 02/01/2012 | CN102336036A Carbide blade |
| 02/01/2012 | CN101661839B 金属纤维-纳米碳纤维-碳气凝胶复合材料和制备方法及用途 Metal fibers - carbon nano fibers - carbon airgel composites and preparation method and uses |
| 02/01/2012 | CN101369527B 真空加工器 Vacuum processing unit |
| 02/01/2012 | CN101298670B 矩形基座的不对称接地 Asymmetric ground rectangular base |
| 01/31/2012 | US8105921 Gallium nitride materials and methods |
| 01/31/2012 | US8105860 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 01/31/2012 | US8105649 Fabrication of silicon carbide shell |
| 01/31/2012 | US8105648 Method for operating a chemical deposition chamber |
| 01/31/2012 | US8105647 Method of forming oxide film and oxide deposition apparatus |
| 01/31/2012 | US8105440 Method of cleaning a CVD device |
| 01/31/2012 | US8105437 Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration |