| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/23/2012 | US20120043222 Coating method for forming pattern on workpiece |
| 02/23/2012 | US20120043198 Film formation apparatus and film formation method |
| 02/23/2012 | US20120043024 Substrate processing apparatus and temperature adjustment method |
| 02/23/2012 | US20120043022 Plasma chamber top piece assembly |
| 02/23/2012 | DE102011109909A1 Flow field plate for fuel cell applications comprises metal plate having first surface and second surface; activated carbon coating disposed adjacent to portion of the plate; and interface layer between the plate and the carbon coating |
| 02/23/2012 | DE102008025108B4 Verfahren zur Herstellung von nanoskaligen elektrisch leitfähigen Mehrschichtsystemen A process for preparing nanoscale electrically conductive multi-layer systems |
| 02/22/2012 | EP2420599A1 Substrate, substrate provided with thin film, semiconductor device, and method for manufacturing semiconductor device |
| 02/22/2012 | EP2420592A1 Method for manufacturing gas barrier thin film-coated plastic container |
| 02/22/2012 | EP2420591A1 Apparatus and methodology for hot wire chemical vapour deposition |
| 02/22/2012 | EP2420588A1 Thermal management of film deposition processes |
| 02/22/2012 | EP2419552A1 Reaction chamber of an epitaxial reactor and reactor that uses said chamber |
| 02/22/2012 | EP2419457A1 Material having a low dielectric konstant and method of making the same |
| 02/22/2012 | EP2419306A1 High efficiency epitaxial chemical vapor deposition (cvd) reactor |
| 02/22/2012 | EP2310554B1 Process and installation for depositing films onto a substrate |
| 02/22/2012 | EP2268847B1 Atmospheric pressure chemical vapour deposition method for producing a n-semiconductive metal sulphide thin layer |
| 02/22/2012 | EP1774562B1 System for low-energy plasma-enhanced chemical vapor deposition |
| 02/22/2012 | EP1516941B1 Rotary type mass-producing cvd film forming device and metod of forming cvd film on surface in plastic conteiner |
| 02/22/2012 | EP1451858B1 Interconnects with improved barrier layer adhesion |
| 02/22/2012 | CN202148350U 自动喷涂线夹具 Automatic spraying line fixtures |
| 02/22/2012 | CN102362557A Microwave plasma processing apparatus |
| 02/22/2012 | CN102362332A Mounting table structure and treatment device |
| 02/22/2012 | CN102362018A Method for manufacturing sapphire substrate, and semiconductor device |
| 02/22/2012 | CN102362008A Method and apparatus for coating |
| 02/22/2012 | CN102362007A Recovery of monobutyltin trichloride |
| 02/22/2012 | CN102361037A Four-layer antireflection film of crystalline silicon solar battery and preparation method thereof |
| 02/22/2012 | CN102358940A Method for depositing anti-corrosion diamond-like film on object substrate |
| 02/22/2012 | CN102358939A Method for preparing oxide/carbon tube composite nanomaterial |
| 02/22/2012 | CN102358938A New method for synthesizing patterned single-crystal tungsten oxide nanowire arrays with catalyst localization technology |
| 02/22/2012 | CN101688311B 经涂覆的切削刀具、切削部件或耐磨件 The coated cutting tool, cutting parts or wear parts |
| 02/22/2012 | CN101560646B 丁基胶镀膜生产工艺 Butyl rubber coating production process |
| 02/22/2012 | CN101504915B 等离子体蚀刻方法和等离子体蚀刻装置 The plasma etching method and a plasma etching apparatus |
| 02/22/2012 | CN101405433B 用于减少沉积系统中粒子污染的方法和设备 Method and apparatus for reducing particle contamination in the deposition system |
| 02/22/2012 | CN101164773B 涂层切削刀具 Coated cutting tool |
| 02/21/2012 | US8120124 Ultra thin TCS (SiCl4) cell nitride for DRAM capacitor with DCS (SiH2Cl2) interface seeding layer |
| 02/21/2012 | US8119545 Forming a silicon nitride film by plasma CVD |
| 02/21/2012 | US8119518 Noble metal barrier for fluorine-doped carbon films |
| 02/21/2012 | US8119240 Metal-free diamond-like-carbon coatings |
| 02/21/2012 | US8119210 Formation of a silicon oxynitride layer on a high-k dielectric material |
| 02/21/2012 | US8119198 Three-dimensional carbon fibers and method and apparatus for their production |
| 02/21/2012 | US8119197 Metal mold for use in imprinting processes |
| 02/21/2012 | US8119194 Infrared reflecting layer system for transparent substrate |
| 02/21/2012 | US8119189 Method of manufacturing a display device |
| 02/21/2012 | US8119187 Chemical vapor deposition process using novel precursors |
| 02/21/2012 | US8119032 Gas-phase functionalization of surfaces including carbon-based surfaces |
| 02/21/2012 | US8118989 Methods of bonding pure rhenium to a substrate |
| 02/21/2012 | US8118981 Sputtering apparatus and method for controlling the same |
| 02/21/2012 | US8118940 Clamping mechanism for semiconductor device |
| 02/21/2012 | US8118939 Temperature control unit for bubblers |
| 02/21/2012 | US8118938 Lower liner with integrated flow equalizer and improved conductance |
| 02/21/2012 | US8118936 Method and apparatus for an improved baffle plate in a plasma processing system |
| 02/21/2012 | US8118935 Mixing box, and apparatus and method for producing films |
| 02/21/2012 | US8117986 Apparatus for an improved deposition shield in a plasma processing system |
| 02/16/2012 | WO2012021325A2 Plasma deposition of amorphous semiconductors at microwave frequencies |
| 02/16/2012 | WO2012020771A1 Laminate, and laminate production method |
| 02/16/2012 | WO2012020295A1 Optical elements having long-lasting hydrophilic and anti-fog properties and method for their preparation |
| 02/16/2012 | WO2012019658A1 Sliding ring with improved run-in properties |
| 02/16/2012 | WO2011126757A3 Hip implant |
| 02/16/2012 | US20120040515 Semiconductor Light-Emitting Device, Surface-Emission Laser Diode, and Production Apparatus Thereof, Production Method, Optical Module and Optical Telecommunication System |
| 02/16/2012 | US20120040514 Chemical vapor deposition with elevated temperature gas injection |
| 02/16/2012 | US20120040233 Barrier for thin film lithium batteries made on flexible substrates and related methods |
| 02/16/2012 | US20120040145 Method of manufacturing a structure comprising a graphene sheet provided with metal pins, structure thus obtained and use thereof |
| 02/16/2012 | US20120040140 Multi-layered article and method of fabricating the same |
| 02/16/2012 | US20120040102 Surface Treatment Process for Implantable Medical Device |
| 02/16/2012 | US20120040098 Carburetor, carburetor for mocvd using same, center rod for use in the carburetor or carburetor for mocvd, method for dispersing carrier gas, and method for vaporizing carrier gas |
| 02/16/2012 | US20120040097 Enhanced wafer carrier |
| 02/16/2012 | US20120040096 Coating method for forming pattern on workpiece |
| 02/16/2012 | US20120040095 Vapor Deposition of Anti-Stiction Layer for Micromechanical Devices |
| 02/16/2012 | US20120040085 METHOD FOR FORMING Cu FILM AND STORAGE MEDIUM |
| 02/16/2012 | US20120040084 Apparatus and methods for forming modified metal coatings |
| 02/16/2012 | US20120040083 Method for forming metal oxide film, metal oxide film, and apparatus for forming metal oxide film |
| 02/16/2012 | US20120037597 Plasma processing apparatus and plasma control method |
| 02/16/2012 | US20120037596 Gas supply member, plasma treatment method, and method of forming yttria-containing film |
| 02/16/2012 | US20120037407 Electronic Apparatus and Method of Manufacturing the Same |
| 02/16/2012 | US20120037182 Particle removal apparatus and method and plasma processing apparatus |
| 02/16/2012 | US20120037077 Large area deposition in high vacuum with high thickness uniformity |
| 02/16/2012 | DE102011052540A1 Mehrschichtiger Gegenstand und Verfahren zu seiner Herstellung The multilayer article and process for its preparation |
| 02/16/2012 | DE102011007632B3 Device useful for depositing material layer derived from process gas on substrate disc, comprises reactor chamber, which is bound by upper cover, lower cover and side wall, susceptor, preheat ring, chuck, and spacer |
| 02/16/2012 | DE102010002688B4 Schraubendruckfeder für einen Ölabstreifring eines Kolbens in einem Verbrennungsmotor und Verfahren zur Beschichtung einer Schraubendruckfeder Helical compression spring for an oil scraper ring of a piston in an internal combustion engine and method for coating a helical compression spring |
| 02/16/2012 | DE102010002687B4 Verfahren zur Beschichtung zumindest der Innenfläche eines Kolbenrings sowie Kolbenring A method of coating at least the inner surface of a piston ring and piston ring |
| 02/16/2012 | DE102009028577B4 Beschichtete Körper aus Metall, Hartmetall, Cermet, Keramik oder Halbleiterwerkstoff sowie Verfahren zur Beschichtung derartiger Körper Coated body made of metal, hard metal, cermet, ceramic or semiconductor material, and methods for coating such body |
| 02/16/2012 | DE102007058571B4 Substrat mit einer Kupfer enthaltenden Beschichtung und Verfahren zu deren Herstellung mittels Atomic Layer Deposition und Verwendung des Verfahrens Substrate having a copper-containing coating, and process for their preparation by means of atomic layer deposition and use of the method |
| 02/15/2012 | EP2418545A1 Mask carrier, mask handling module and method for adjusting a mask |
| 02/15/2012 | EP2418300A2 Delivery device and method of use thereof |
| 02/15/2012 | EP2418081A1 Gas-barrier multilayer film |
| 02/15/2012 | EP2417626A2 Multifrequency capacitively coupled plasma etch chamber |
| 02/15/2012 | EP2417480A1 Structure comprising at least one reflecting thin film on a surface of a macroscopic object, method for fabricating a structure, and uses for the same |
| 02/15/2012 | EP2417281A2 Strontium ruthenium oxide interface |
| 02/15/2012 | EP1802784B1 Gas turbine engine components with aluminide coatings and method of forming such aluminide coatings on gas turbine engine components |
| 02/15/2012 | CN202144514U 加热器定位调整装置 Heater positioning adjustment device |
| 02/15/2012 | CN102356452A Vacuum processing apparatus |
| 02/15/2012 | CN102356451A Treatment device |
| 02/15/2012 | CN102355968A Surface-coated cutting tool |
| 02/15/2012 | CN102354712A Wide spectrum high reflectivity irregularly shaped distributed Brag reflector (IDBR) and manufacturing method thereof |
| 02/15/2012 | CN102354664A Intermetallic dielectric layer forming method and semiconductor device |
| 02/15/2012 | CN102353696A Method for manufacture and coating of nanostructured components |
| 02/15/2012 | CN102352512A Method for preparing high-adhesion diamond coating with pulse laser |
| 02/15/2012 | CN102352510A Method for preparing high-performance silicon-doped type diamond film layer on magnesium alloy at low temperature |
| 02/15/2012 | CN102352493A Device for realizing spray uniformity of MOCVD (Metal-Organic Chemical Vapor Deposition) and application of device |
| 02/15/2012 | CN102352492A Gas injection device with cooling system |
| 02/15/2012 | CN102352491A Gas intake method for atomic layer deposition device |