| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 03/06/2012 | US8129271 Film forming method, film forming apparatus and storage medium |
| 03/06/2012 | US8128783 Plasma generator and work processing apparatus provided with the same |
| 03/06/2012 | US8128751 Film-forming apparatus |
| 03/06/2012 | US8128750 Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components |
| 03/06/2012 | US8128073 Method and apparatus to help promote contact of gas with vaporized material |
| 03/01/2012 | WO2012027575A1 Molybdenum (iv) amide precursors and use thereof in atomic layer deposition |
| 03/01/2012 | WO2012027357A2 Thermally stable volatile precursors |
| 03/01/2012 | WO2012026464A1 Sealing film material, sealing film and use thereof |
| 03/01/2012 | WO2012026349A1 Water-reactive al composite material, water-reactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber |
| 03/01/2012 | WO2012026098A1 Method of producing cutting tool |
| 03/01/2012 | WO2012025627A1 Method for depositing a coating on a substrate by chemical vapour deposition |
| 03/01/2012 | WO2012025513A1 Thermal shield for silicon production reactors |
| 03/01/2012 | WO2012025249A1 Method and control device for cleaning a plasma treatment device and/or a substrate accommodated in a plasma treatment device |
| 03/01/2012 | WO2011162400A3 Coating liquid, method for manufacturing optical component, and photographic optical system |
| 03/01/2012 | WO2011153484A3 Silicon dioxide layer deposited with bdeas |
| 03/01/2012 | WO2011149705A3 Hydrophilic marking film having plasma chemical vapor deposition treated protective layer |
| 03/01/2012 | US20120052660 Directed reagents to improve material uniformity |
| 03/01/2012 | US20120052659 Manufacturing method and apparatus for semiconductor device |
| 03/01/2012 | US20120052657 Method of forming film and substrate processing apparatus |
| 03/01/2012 | US20120052617 Vapor deposition apparatus and process for continuous deposition of a doped thin film layer on a substrate |
| 03/01/2012 | US20120052321 Sanitary objects |
| 03/01/2012 | US20120052279 Diamond insulated circuits and associated methods |
| 03/01/2012 | US20120052242 Substrate Structure Grown By Plasma Deposition |
| 03/01/2012 | US20120052216 Gas distribution showerhead with high emissivity surface |
| 03/01/2012 | US20120052204 Workpiece wetting and cleaning |
| 03/01/2012 | US20120052203 Substrate processing apparatus and method of processing substrate |
| 03/01/2012 | US20120052202 Method for metering granular source material in a thin film vapor deposition apparatus |
| 03/01/2012 | US20120052200 Minimizing blockage of holes in turbine engine components |
| 03/01/2012 | US20120052189 Vapor deposition system |
| 03/01/2012 | US20120052188 Systems and methods for assembling a lipid bilayer on a substantially planar solid surface |
| 03/01/2012 | US20120051192 Method for coating micromechanical parts with high tribological performances for application in mechanical systems |
| 03/01/2012 | US20120048829 Methods for discretized processing and process sequence integration of regions of a substrate |
| 03/01/2012 | US20120048467 Component temperature control by coolant flow control and heater duty cycle control |
| 03/01/2012 | US20120048199 Crucible and evaporation deposition device having same |
| 03/01/2012 | US20120048198 Vapor phase growth apparatus |
| 03/01/2012 | US20120048197 Film deposition device |
| 03/01/2012 | US20120048195 Method for mass production of graphene and carbon tubes by deposition of carbon atoms, on flat surfaces and inside walls of tubes, generated from dissociation of a carbon-containing gas stimulated by a tunable high power pulsed laser |
| 03/01/2012 | US20120048192 Apparatus for metering granular source material in a thin film vapor deposition apparatus |
| 03/01/2012 | US20120048180 Film-forming manufacturing apparatus and method |
| 03/01/2012 | US20120048178 Process for production of polycrystalline silicon |
| 02/29/2012 | EP2423353A1 Film deposition device |
| 02/29/2012 | EP2423352A1 Thermal shield for silicon production reactors |
| 02/29/2012 | EP2423351A1 Apparatus for forming thin film and method for forming thin film |
| 02/29/2012 | EP2423159A1 Methods of forming alpha and beta tantalum films with controlled and new microstructures |
| 02/29/2012 | EP2423158A1 Methods of forming alpha and beta tantalum films with controlled and new microstructures |
| 02/29/2012 | EP2422359A2 Enhanced scavenging of residual fluorine radicals using silicon coating on process chamber walls |
| 02/29/2012 | EP2300633B1 Process and installation for despositing films simultaneously onto both sides of a substrate. |
| 02/29/2012 | EP2144744B1 Edge healing and field repair of plasma coating |
| 02/29/2012 | CN102365715A Method for formation of metal silicide film |
| 02/29/2012 | CN102365389A Semiconductor processing reactor and components thereof |
| 02/29/2012 | CN102365388A Liquid raw material vaporizer |
| 02/29/2012 | CN102365387A Gas barrier film, electronic device including same, gas barrier bag, and method for manufacturing gas barrier film |
| 02/29/2012 | CN102365386A Method for forming metal nitride film, and storage medium |
| 02/29/2012 | CN102363878A Preheating device for chemical vapor deposition furnace |
| 02/29/2012 | CN101939463B Vaporization apparatus with precise powder metering |
| 02/29/2012 | CN101933140B Nanostructures and methods of making the same |
| 02/29/2012 | CN101842880B Gas feeding device, treating device, treating method |
| 02/29/2012 | CN101689500B Film forming apparatus and film forming method |
| 02/29/2012 | CN101627459B Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 02/29/2012 | CN101491961B Method of forming bonded body and bonded body |
| 02/29/2012 | CN101483136B Methods of selective deposition of heavily doped epitaxial siGe |
| 02/29/2012 | CN101071763B Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same |
| 02/29/2012 | CN101021005B Deposition apparatus and method for depositing film |
| 02/28/2012 | US8125038 Nanolaminates of hafnium oxide and zirconium oxide |
| 02/28/2012 | US8124275 Method of manufacturing catalyst carrier, catalyst carrier, and electrode of fuel cell battery |
| 02/28/2012 | US8124181 Oxidation method providing parallel gas flow over substrates in a semiconductor process |
| 02/28/2012 | US8124180 Thin layer substrate coating and method of forming same |
| 02/28/2012 | US8124179 Thin films prepared with gas phase deposition technique |
| 02/28/2012 | US8124178 Method and apparatus application of metallic alloy coatings |
| 02/28/2012 | US8124177 Tailored and uniform coatings in microchannel apparatus |
| 02/28/2012 | US8124168 Substrate processing method and substrate processing apparatus |
| 02/28/2012 | US8123903 Plasma reactor having multiple antenna structure |
| 02/28/2012 | US8123902 Gas flow diffuser |
| 02/28/2012 | US8123863 Evaporation apparatus |
| 02/28/2012 | US8123862 Deposition apparatus and manufacturing apparatus |
| 02/28/2012 | US8123861 Apparatus for making interconnect seed layers and products |
| 02/28/2012 | US8123860 Apparatus for cyclical depositing of thin films |
| 02/28/2012 | US8122850 Method and apparatus for processing polysilazane film |
| 02/28/2012 | US8122849 Apparatus and method for producing a pharmaceutical product |
| 02/23/2012 | WO2012023760A2 Apparatus for forming gas blocking layer and method thereof |
| 02/23/2012 | WO2012023557A1 Apparatus for manufacturing compound semiconductor, method for manufacturing compound semiconductor, and compound semiconductor |
| 02/23/2012 | WO2012022111A1 Epitaxial wafer tray and supportive and rotational connection apparatus matching same |
| 02/23/2012 | WO2011133207A3 A coating method for gas delivery system |
| 02/23/2012 | WO2011125704A9 Plasma processing device and plasma processing method |
| 02/23/2012 | US20120045905 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus |
| 02/23/2012 | US20120045903 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus |
| 02/23/2012 | US20120045864 Multilayer film formation method and film deposition apparatus used with the method |
| 02/23/2012 | US20120045863 Microplasma generator and methods therefor |
| 02/23/2012 | US20120045700 Atomic layer deposition method for applying boron-containing films |
| 02/23/2012 | US20120045631 Index modified coating on polymer substrate |
| 02/23/2012 | US20120045627 Coatings with small particles that effect bulk properties |
| 02/23/2012 | US20120045593 Plasma cvd apparatus |
| 02/23/2012 | US20120045592 Process to Deposit Diamond Like Carbon as Surface of a Shaped Object |
| 02/23/2012 | US20120045591 Plasma processing apparatus, deposition method, method of manufacturing metal plate having dlc film, method of manufacturing separator, and method of manufacturing article |
| 02/23/2012 | US20120045590 Apparatus and method for plasma treatment of containers |
| 02/23/2012 | US20120045589 Amidate Precursors For Depositing Metal Containing Films |
| 02/23/2012 | US20120045581 Substrate processing method and substrate processing apparatus |
| 02/23/2012 | US20120045572 Carbon nanotube production process and carbon nanotube production apparatus |
| 02/23/2012 | US20120045567 Flexible substrates having a thin-film barrier |
| 02/23/2012 | US20120043298 Methods for discretized processing and process sequence integration of regions of a substrate |