| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 01/31/2012 | US8105078 Heat treatment jig for semiconductor silicon substrates and method for manufacturing the same |
| 01/31/2012 | US8104428 Plasma processing apparatus |
| 01/31/2012 | US8104421 Vacuum chamber on a frame basis for coating installations |
| 01/26/2012 | WO2012012744A2 Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition |
| 01/26/2012 | WO2012012457A2 Polycrystalline silicon production |
| 01/26/2012 | WO2012012394A1 In-line deposition system |
| 01/26/2012 | WO2012012026A2 Metal film deposition |
| 01/26/2012 | WO2012011488A1 Placing table structure and processing apparatus |
| 01/26/2012 | WO2012011480A1 Interlayer insulating layer formation method and semiconductor device |
| 01/26/2012 | WO2012011423A1 Device for treating substrate and method for producing semiconductor device |
| 01/26/2012 | WO2012011280A1 Film forming apparatus |
| 01/26/2012 | WO2012010867A1 Method for manufacturing a barrier coating |
| 01/26/2012 | WO2012010866A1 Method for manufacturing a barrier layer |
| 01/26/2012 | WO2012010747A1 Method for manufacturing an electrode for medical use, and electrode obtained |
| 01/26/2012 | WO2012010420A1 Improved adhesion of protective layers of imager microlens structures |
| 01/26/2012 | WO2011156484A3 Low-temperature synthesis of silica |
| 01/26/2012 | US20120021610 Methods of Forming Material on a Substrate, and a Method of Forming a Field Effect Transistor Gate Oxide on a Substrate |
| 01/26/2012 | US20120021587 Systems and Methods for Forming Metal Oxide Layers |
| 01/26/2012 | US20120021561 Plasma processing apparatus and method for manufacturing solar cell using same |
| 01/26/2012 | US20120021556 Deposition system |
| 01/26/2012 | US20120021548 Apparatus For Forming A Film And An Electroluminescence Device |
| 01/26/2012 | US20120021502 Sensor for fast detection of e-coli |
| 01/26/2012 | US20120021289 Lithium secondary battery |
| 01/26/2012 | US20120021253 Lubricant composition and use thereof |
| 01/26/2012 | US20120021252 Treating Surface of Substrate Using Inert Gas Plasma in Atomic Layer Deposition |
| 01/26/2012 | US20120021201 Anti-static wrapper for electronic component wrapping, coated with nano film and manufacturing method thereof |
| 01/26/2012 | US20120021199 Surface-coated cutting tool |
| 01/26/2012 | US20120021195 Optical member and process for producing same |
| 01/26/2012 | US20120021137 Cutting tool |
| 01/26/2012 | US20120021136 System and method for controlling plasma deposition uniformity |
| 01/26/2012 | US20120021132 Method of Fabricating Thin Film by Microplasma Processing and Apparatus for Same |
| 01/26/2012 | US20120021128 Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition |
| 01/26/2012 | US20120021127 Material for chemical vapor deposition and process for forming silicon-containing thin film using same |
| 01/26/2012 | US20120021126 Vacuum Vapor Coating Device for Coating a Substrate |
| 01/26/2012 | US20120021121 Method of producing an ombré finish for materials |
| 01/26/2012 | US20120019913 Lens Manufacturing Method and Lens |
| 01/26/2012 | US20120019122 Device having aligned carbon nanotube |
| 01/26/2012 | US20120018095 Esc high voltage control and methods thereof |
| 01/26/2012 | US20120017983 Buffer layer formation |
| 01/26/2012 | US20120017973 In-line deposition system |
| 01/26/2012 | US20120017833 Conveyor device and substrate treatment installation |
| 01/26/2012 | US20120017832 Vapor deposition apparatus and susceptor |
| 01/26/2012 | US20120017831 Chemical vapor deposition method and system for semiconductor devices |
| 01/26/2012 | US20120017742 Saw Band and Method for the Production of a Saw Band |
| 01/26/2012 | DE102011108632A1 Substratstage, Substrat-Prozessierungs-Vorichtung und Substrat-Prozessierungs-System Substrate days, substrate Prozessierungs-Vorichtung and substrate Prozessierungs system |
| 01/26/2012 | DE102010032591A1 Vorrichtung und Verfahren zur Vakuumbeschichtung Apparatus and method for vacuum coating |
| 01/25/2012 | EP2410076A1 Pulsed mass flow delivery system and method |
| 01/25/2012 | EP2409798A1 Surface-coated cutting tool |
| 01/25/2012 | EP2409321A2 Reactor lid assembly for vapor deposition |
| 01/25/2012 | EP2409320A2 Showerhead for vapor deposition |
| 01/25/2012 | EP2409319A2 Heating lamp system and methods thereof |
| 01/25/2012 | EP2409313A1 Substrate processing system and substrate processing method |
| 01/25/2012 | EP2408952A1 Mocvd reactor having a ceiling panel coupled locally differently to a heat dissipation member |
| 01/25/2012 | EP2408947A1 Apparatus and method for deposition of functional coatings |
| 01/25/2012 | EP2408946A1 Filament arrangement for hot wire chemical vapour deposition |
| 01/25/2012 | EP2293861B1 Machine for processing vessels made of thermoplastic material |
| 01/25/2012 | EP2193218B1 Process for selective area deposition of inorganic materials |
| 01/25/2012 | EP1999296B1 Apparatus for atomic layer deposition |
| 01/25/2012 | EP1907354B1 Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same |
| 01/25/2012 | EP1440179B1 Chemical vapor deposition system |
| 01/25/2012 | EP1415332B1 Method and device for the production of epitaxial thin semiconductor layers |
| 01/25/2012 | EP1268879B1 Supplying and exhausting system in plasma polymerizing apparatus |
| 01/25/2012 | CN202127541U Static electricity attaching system device |
| 01/25/2012 | CN1956776B Micro-channel reactor or separator, and method for reaction or separation |
| 01/25/2012 | CN1632160B Arc evaporator, method for driving arc evaporator, and ion plating apparatus |
| 01/25/2012 | CN102333906A Low temperature cnt growth using gas-preheat method |
| 01/25/2012 | CN102332517A GaN-based LED epitaxial wafer and growing method thereof |
| 01/25/2012 | CN102332504A Method for improving interface performance of P-type layer and I-type layer in amorphous silicon solar cell |
| 01/25/2012 | CN102330074A Plating film supplementing process of double-layer film |
| 01/25/2012 | CN102330073A Lower polar plate for film processing devices and plasma processing device adopting same |
| 01/25/2012 | CN102330072A Chemical vapor deposition apparatus and method of forming semiconductor epitaxial thin film using the same |
| 01/25/2012 | CN102330071A Improving method of service efficiency of solid-state source in serial connection |
| 01/25/2012 | CN102330070A Preheating device for chemical vapor deposition furnace |
| 01/25/2012 | CN102330069A Preparation method of carbon nano tube |
| 01/25/2012 | CN102330068A Pyrolysis boron nitride plate preparing method and vapor phase deposition furnace used in same |
| 01/25/2012 | CN102330067A Quick and uniform preparation method of microcrystalline silicon thin film of flexible substrate |
| 01/25/2012 | CN102330065A Multifunctional substrate frame for vacuum coating equipment |
| 01/25/2012 | CN102328473A Cubic boron nitride cutting tool and manufacturing method thereof |
| 01/25/2012 | CN102328118A Hard alloy drill |
| 01/25/2012 | CN101949007B Gas distributor for uniform gas emission |
| 01/25/2012 | CN101882647B Movable holder for silicon-based film solar cells |
| 01/25/2012 | CN101882646B Deposition clamp of film solar cell |
| 01/25/2012 | CN101855385B Process for depositing boron compounds by CVD or PVD |
| 01/25/2012 | CN101796216B Production equipment and method of thin-film laminate |
| 01/25/2012 | CN101585857B Organic phosphine stabilized N-hydroxysuccinimide silver complex, synthesis method and application thereof |
| 01/25/2012 | CN101407910B Film forming device for processing semiconductor |
| 01/24/2012 | US8101510 Plasma processing apparatus |
| 01/24/2012 | US8101273 Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers |
| 01/24/2012 | US8101246 Device for carrying out a plasma-assisted process |
| 01/24/2012 | US8101245 Plasma deposition of amorphous semiconductors at microwave frequencies |
| 01/24/2012 | US8101237 Tellurium precursors for film deposition |
| 01/24/2012 | US8101236 Method of fabricating a SiCOH dielectric material with improved toughness and improved Si-C bonding |
| 01/24/2012 | US8101235 Vaporization apparatus with precise powder metering |
| 01/24/2012 | US8101150 Control of carbon nanotube diameter using CVD or PECVD growth |
| 01/24/2012 | US8101055 Sputtering apparatus and method for forming coating film by sputtering |
| 01/24/2012 | US8101023 Preparation of membranes using solvent-less vapor deposition followed by in-situ polymerization |
| 01/24/2012 | US8100083 Process and apparatus for depositing a ceramic coating |
| 01/24/2012 | US8100082 Method and system for introducing process fluid through a chamber component |
| 01/24/2012 | US8100081 Edge removal of films using externally generated plasma species |
| 01/24/2012 | CA2438048C Process for mask-free localized organic grafting onto conductive or semiconductive portions of composite surfaces |